LETI S SOLUTIONS FOR TERAHERTZ REAL-TIME IMAGING
OUTLINE What & why Terahertz? THz imaging technologies developed at Leti Examples of real-time imaging applications Leti s offer to industrials Conclusion 2
IMAGING SENSORS & SYSTEMS @LETI: R&D COVERING FROM THZ TO X & -RAYS This talk THz Infrared Visible X-ray -ray 3
WHY TERAHERTZ IMAGING? UNEXPLORED SPECTRUM BETWEEN ELECTRONICS & OPTICS 1 THz = 10 12 Hz = 300 μm = 33 cm -1 = 4 mev = 50 Kelvin 0.3 THz 10 THz Microwave Infrared Electronics Optics frequency wavelength Source: ESA 4
WHY TERAHERTZ IMAGING? UNIQUE COMBINATION OF PROPERTIES Water concentration 2 Proteins-Water dance 3 Goes through paper, clothes, plastics Japan Railway card 1 THz wave Reflected by metallic surfaces DNA THz interaction 4 Absorbed by polar materials (water ) Explosives fingerprints 5 Low-energy non-ionizing radiation harmless Specific spectral fingerprints [1] A. Dobroiu et al., Applied Optics 43, 5637-5646 (2004). [2] B. B. Hu et al., Opt. Lett. 20, 1716-1718 (1995) [3] B. Born et al., J Infrared Milli Terahs Waves, 1245-1254 (2009) [4] M. Nagel et al., Appl. Phys. Lett., Vol. 80, No. 1, 7 (2002) [5] J Chen et al., Optics Express, Vol. 15, Issue 19, 12060-12067 (2007) 5
THZ IMAGING TECHNOLOGIES DEVELOPED AT LETI TWO MAIN APPROACHES TARGETING UNCOOLED VIDEO IMAGING Bolometer Antenna coupled µbolometer array High sensitivity demonstrated in video mode Small pixel, large image format Incoherent detection Highest maturity for industrial needs FET CMOS amplitude detection array Low to middle sensitivity, low power, low cost Incoherent detection Field Effect Transistors CMOS-BiCMOS Heterodyne detection High sensitivity, sub-thz, single pixel or small arrays High power, low cost Coherent detection (phase & amplitude) Simoens F et al., J. Infrared Millim. Terahertz Waves, Vol. 36, pp. 961 985, (2015) 6
PROPRIETARY ANTENNA-COUPLED THZ MICROBOLOMETER FROM CONCEPT TO TERAHERTZ VIDEO CAMERA Innovative THz pixel Processed 2D sensor Camera prototype Antenna & /4 cavity coupled µbolometer Silicon microelectronics compatible Process above CMOS Uncooled operation Optimized for 1 3 THz operation 50µm pitch 320x240 pixels array 200mm diameter 0.18µm CMOS ASIC Real-time video output Ethernet port Synchro input (/source) State-of-the-art sensitivity: <30pW/pixel* in video mode Simoens F. et al., Phil. Trans. R. Soc. A 28 March 2014; doi:10.1098/rsta.2013.0111, *MDP as defined by N. Oda & al., J Infrared Milli Terahz Waves, vol. 35, no. 8, pp. 671 685, Aug. 2014. 7
PROMISING RANGE OF THZ APPLICATIONS See-through real-time imaging on a large Field of view To differentiate materials (Chemical, structure.) Spectro-imaging (to localize AND to identify) f1 =2.5THz Glucose Fructose Maltose Sugar pellet imaging 8
80cm Illumination 1 m EXAMPLES OF REAL-TIME IMAGING APPLICATIONS LARGE FIELD OF VIEW SCANNING DEMONSTRATOR Confocal illumination Folded Newton telescope for collection Uncooled bolometer FPA camera QCLbased THz source 9
EXAMPLES OF REAL-TIME IMAGING APPLICATIONS LARGE FIELD OF VIEW SCANNING DEMONSTRATOR 5 x 5 images in less than 10 seconds 10
EXAMPLES OF REAL-TIME IMAGING APPLICATIONS SPECTRO-IMAGING TO LOCALIZE AND IDENTIFY MATERIALS SPECTRO-IMAGING SYSTEM Sugar identification Glucose Fructose Glucose f1 =2.5THz Maltose f2 =2.7THz Maltose THz spectral signatures THz images Fructose 11
LETI S THZ OFFER FOR INDUSTRIALS: COMMERCIAL CAMERA THZ BOLOMETER ARRAY THZ CAMERA LETI prototype Commercial camera Proprietary antennacoupled pixel architecture 320x240 pixel with world-stateof-the-art sensitivity 12
LETI S THZ OFFER FOR INDUSTRIALS: PROVIDING SOLUTIONS FOR USE-CASE Proof of feasibility Optical characterization of samples Theoretical signal-to-noise assessment Design of a system prototype Dedicated to your application If needed Design & fab. of a customized bolometric array Dedicated to your application specifications (freg, polar., ) Performance assessments & lab validation Tests of samples in lab set-up Prototype fabrication & tests Tests in-situ 13
CONCLUSION THz = very promising technology for industrial applications LETI S OFFER TO INDUSTRIALS: SOLUTIONS FOR TERAHERTZ REAL-TIME IMAGING Unique THz uncooled bolometer technology integrated in a commercial camera Industrial use-case studies, form proof of principle to integrated opto-mechanical system prototyping If needed, development of a customized 2D sensor (frequency, polarization, ) 14
François SIMOENS, PhD Strategic Marketing Manager Imaging Sensors CEA-Leti Grenoble (France) +33 786 353272 Meet LETI at Photonics West: South Hall, Pavillon France booth 1823A Leti, technology research institute Commissariat à l énergie atomique et aux énergies alternatives Minatec Campus 17 rue des Martyrs 38054 Grenoble Cedex France www.leti.fr