Specifications for High Resolution Scanning Probe Microscope Item Essential measuring modes with complete hardware and software. All the modes should be demonstrated during installation & training Scanners Specifications required Gentle force up to 50pN regulated high resolution imaging mode for delicate and soft sample in both air and liquid with control hardware and software Force Volume Microscopy AFM Contact mode in both air and liquid XY resolution: tip size(typically 5nm), Z resolution: system noise floor (typically 0.03nm) Non-Contact /Intermittent contact mode/tapping mode in both air and liquid XY resolution: tip size (typically 2-5nm), Z resolution (typically 0.03nm) Lateral Force Microscopy same as contact mode Force Spectroscopy force sensitivity: thermal noise of cantilever, 10pN Phase Imaging XY resolution: tip size (typically 2-5nm), phase sensitivity:1 mili-degree Magnetic Force Microscopy XY resolution: tip size(typically 10-15nm) Piezo Response Force Microscopy XY resolution: tip size(typically 10-15nm) can record inplane PFM and out of plane PFM simultaneously NanoLithography software can control probe movement in XYZ with force feedback Nanoindentation tapping mode brings the probe to sample surface gently, and use contact mode to ramp force curve to obtain better force control. Hardness and Modulus can be obtained. Electrostatic Force Microscopy XY resolution: tip size (typically 10-15nm) Current Sensing Microscopy XY resolution: tip size (typically 10nm). Current sensitivity 1pA or 50fA, depending amplifier used. Point & shoot force mapping user defined locations through graphic interface. Force spectroscopy is the same as above mentioned STM atomic resolution Two separate scanners including Large area and Small area high resolution scanner must be provided. Large Area Scanner with XYZ scan range 90µm x 90µm X 5 µm with Z noise < 0. 3Å RMS Small area scanner should have XYZ scan range 8μm x 8 μm x 2.5 μm with Z noise 0.3Å RMS The small area scanner should demonstrate atomic resolution images on atomic lattice structures [e.g. Mica] Microscope Optics Liquid Cell Sample stage Controller Microscope optics must include 5 Megapixel Camera through which the tip-sample position can be observed. In addition the optics should provide optical imaging specifications as mentioned below for initial optical imaging to identify locations for SPM. If the integrated optics with SPM cannot provide these specifications, it can be quoted as a separate unit. Liquid Cell for contact mode & intermittent/tapping mode imaging in fluids The sample stage must accommodate sample with at least 10 mm X 10 mm and 5mm thickness -Latest high speed controller with 5000 X 5000 pixel resolution, with 8 channels recorded simultaneously, and at least three of more inbuilt lock-in amplifiers -Tuning of cantilever resonance upto 2 MHz -Real time adjustable scan rate, size, offset, bias voltage & current
Light source and detector Computer Low coherence laser light source and scanner compatible with low coherence laser should be provided -Latest computer with windows based operating system and dual monitors -Preferably Intel core i7 quad processor or equivalent processor, -4 GB RAM or higher -Internal hard drive space of 500 GB or higher capacity in two partitions -operating system win xp or higher -USB drive and CD/DVD burner for backup-storage of image data. Monitor Software 30 LCD monitor must be provided, confliction with computer configuration where dual monitors are stated -Windows based software for controlling the SPM, image acquisition and processing. -Image processing software must have the common image processing features like surface roughness analysis, etc. -data export to ascii, bmp, jpg, tiff -Must include free AFM software upgrades for the life of the instrument Antivibration Table and Acoustic isolation Environmental Chamber Cantilever Holder Probes Active air filled anti-vibration table with pneumatic assembly must be provided, hanging dead weight granite will not be accepted Hermetically sealed environmental chamber with purge ports for inlet/outlet of gases must be provided Cantilever holder for scanning in fluid must be provided EFM cantilever holder must be provided Conductive mode cantilever holder must be provided MFM probes- 10 No s Contact mode Probes 50 No s Tapping Probes- 100 No s Conductive mode Probes 20 No s Kelvin Force Probes 20 No s Calibration Samples Warranty PDMS Gel 2.5 MPa, 3.5 MPa mounted on magnetic sample disk 1 No s each Polystytrene 2.7 GPa sample premounted on a magnetic disk 1 No s Fused Silica 72.9 GPa sample premounted on a magnetic disk 1 No s Sapphire premounted on a magnetic sample disk for calibrating deflection sensitivity-1 No s HOPG 1No s Titanium roughness sample premounted on a magnetic disk -1 No s Two-component polymer sample mounted on a steel sample puck -1 No s Calibration Grid 10 µm 1 No s Calibration Grid 1µm 1 No s 12 months full system warranty after installation should be provided. Installation & Training All the imaging modes should be demonstrated by Application Scientist and onsite training
should be provided to 2 users. Temperature stage It must be possible to upgrade the system with Sample temperature control; covering the range of -35C up to 250C, and including a dedicated tip heater element. 1.0 Item:High magnification Digital Microscope 2.0 Description: TheOpto-Digital microscope will be high resolution upright motorized, compact, highly reliable. All operation of the instrument will be using touch panel or mouse etc. from inspection to measurement to analysis to final report. It will enable observation with higher image quality, enhanced operability, and extremely high reliability with guaranteed measurement precision. 4.0 Detailed Specifications of the Digital Microscope Sr.no. Unit/Part/ Description Specifications Comments 4.1 Total magnification 17X 9000X Including optical & digital zoom 4.2 Total zoom including digital 30X (Maximum) 4.2a. Optical Scheme Telecentric Optics assembly 4.3 Optical zoom 13.5X (Maximum) 4.4 Objective lens 1.25X, 2.5X, 5X, 10X, N.A. 0.3 W.D. 30 mm Minimum two lenses mounted together /turret mounted and quick manual change is possible. High quality optics free from aberrations
40X, N.A. 0.8 W.D. 4.5 mm 50XBDP, N.A. 0.5 W.D. 10.6 mm & flare. 4.5 Working distance 0.35mm (minimum) At highest magnification. * 4.6 NA 0.25-0.8 4.7 FOV 30 15684 µm Depending upon the magnification* Depending upon the magnification* * Values to be provided for each objective lens. 4.8 4.9 Accuracy of magnification Repeatability of magnification Within +3% 3σn-1= +2% Required parametric & environmental conditions to be specified to 4.10 Illumination & light source (Reflection & Transmission mode) Embedded standard or High intensity source Bright field, Dark field LED. Camera 4.11 Image sensor 1/1.8 inch type, 2 MP( 18MP Equivalent in 3CCD mode ), Color CCD. Pixel size<5µm PeltierCooled detector, Other details viz. array size, Image size, sensitivity standard, A/D etc. to be provided. 4.12 Scan mode Progressive
4.13 Frame rate 15fps (min.) /27fps ( binning ) Focusing unit 4.14 Focus Auto 4.15 Stroke 95mm (minimum) 4.16 Resolution 0.01µm 4.17 Sample height 65mm Specimen stage & control unit 4.18 4.19 Stroke Load capacity 100mmX100mm 3 kg Max Motorized. Manual stage operation & detail may be provided as an option. Moving stage should be, stable, vibration free, smooth and error free measurement at higher magnification. Vibration correction feature should be present. 4.20 Instrument controller Modular Image view &Measurement capabilities 4.21 Viewing mode 2D & 3D 3D view with extended focal image. 4.22 Measurement Technique Absolute and non-contact. Data to be derived from screen/sensor. Accuracy of the screen based measurement to be specified at various magnifications. 4.23 Measurement X=100 mm
range Y= 100 mm Z= 95 mm Resolution X= 0.012 micron Y= 0.012 micron Z= 1 micron Accuracy X= within 3% of measured values Y= within 3% of measured values Z= objective dependent Repeatability X=3σn-1=+-2% Y=3σn-1=+-2% Z= objective dependent, around 3% Screen LCD monitor Resolution 23, Touch panel. Full HD color LCD 1920(H)X1080(V)
Operation of the instrument Instrument Running time Image enhancing capabilities Optical Digital Software & tools Examination & measurement tool PC controlled touch panel, mouse, joy stick etc. Suitable for continuous use. -Bright field(bf), -Dark field (DF), -BF+DF (MIX) -Differential interference contrast (DIC) -Polarized -High dynamic range -Wide dynamic range -High contrast region Shall be dedicated and integrated tool/software providing all results and analysis in numerical as well as chart/graph/photo formats. Operations are focusing, Zooming, illumination control, object location, auto focus, auto gain etc. GUI & user friendly control panel. Operation in auto/semi auto mode shall have full functional manual override. Dark field with 4 segment LED Illuminator. Image enhancing capabilities are essential for better visibility, best image selection, easy detection of texture& defects, free from halation & glare and color enhancement and various image correction technique using image processing. 3 Mode GUI Tutorial / standard / operator Software function suitable for entry
level to expert user. Images, Results & Reports Composite Image Calibration & Traceability Measurements & analysis Multiple analysis & comparison Averaging/peak detection Report generation Calibration Traceability Panoramic image from seamless stitching of images desirable in order to acquire area larger than field of view. 2D, 3D measurements & result analysis. Shall be capable of multiple results analysis for online measurements as well as stored data and their comparison. Essential for precise measurement and analysis of coarsely defined element edges. Photographed images, snapshot & video, measured data & analysis, profiles, histograms & user ID information, comments, and point zoom are to be saved as well as printable. Shall be operator friendly and shall be possible on site. Exact procedure to be specified. Obtained result shall comply with standards certified and System is capable of Linear, surface, profile, and uneven surface, and area&volume measurement. Standards set with appropriate traceability detail for line width/height measurement may be quoted as option.
traceable by reputed international organization. Enclosure Suitable environmental enclosure. May be quoted as option.