FRAUNHOFER INSTITUTE FOR PHOTONIC MICROSYSTEMS IPMS. Application Area. Quality of Life

Similar documents
End-of-line Standard Substrates For the Characterization of organic

USER MANUAL VarioS-Microscanner-Demonstrators

Out-of-plane translatory MEMS actuator with extraordinary large stroke for optical path length modulation in miniaturized FTIR spectrometers

MEMS Spectroscopy Overview

BMC s heritage deformable mirror technology that uses hysteresis free electrostatic

Integrated electro-optical waveguide based devices with liquid crystals on a silicon backplane

Spatially Resolved Backscatter Ceilometer

RF MEMS Simulation High Isolation CPW Shunt Switches

Open Innovation to Manage Risks in Technology The Business of Breakthroughs

A MEMS Based Visible-NIR Fourier Transform Microspectrometer

Deformable MEMS Micromirror Array for Wavelength and Angle Insensitive Retro-Reflecting Modulators Trevor K. Chan & Joseph E. Ford

MEMS REPORT 3 / 2014 FRAUNHOFER INSTITUTE FOR PHOTONIC MICROSYSTEMS IPMS

Tunable wideband infrared detector array for global space awareness

Chemistry Instrumental Analysis Lecture 10. Chem 4631

sensors & systems Imagine future imaging... Leti, technology research institute Contact:

Hermetic Packaging Solutions using Borosilicate Glass Thin Films. Lithoglas Hermetic Packaging Solutions using Borosilicate Glass Thin Films

MEMS for RF, Micro Optics and Scanning Probe Nanotechnology Applications

Exam 4. Name: Class: Date: Multiple Choice Identify the choice that best completes the statement or answers the question.

Vixar High Power Array Technology

Recent Developments in Multifunctional Integration. Stephan Guttowski, Head of Technology Park»Heterointegration«, Fraunhofer FMD

Triple i - The key to your success

MICROMACHINED INTERFEROMETER FOR MEMS METROLOGY

MAPPER: High throughput Maskless Lithography

Applications of Steady-state Multichannel Spectroscopy in the Visible and NIR Spectral Region

Multispectral Image Capturing System Based on a Micro Mirror Device with a Diffraction Grating

Nanotechnology, the infrastructure, and IBM s research projects

CONTENTS. Foreword S. D. Senturia. M. E. Motamedi Acknowledgments

Supplementary Materials

Applications of Maskless Lithography for the Production of Large Area Substrates Using the SF-100 ELITE. Jay Sasserath, PhD

Design & Simulation of Multi Gate Piezoelectric FET Devices for Sensing Applications

BIONIC CONTACT LENS I. INTRODUCTION

Feature-level Compensation & Control

MEMS in ECE at CMU. Gary K. Fedder

Faculty Development Program on Micro-Electro-Mechanical Systems (MEMS Sensor)

Thermography. White Paper: Understanding Infrared Camera Thermal Image Quality

brief history of photography foveon X3 imager technology description

Tailor-made R&D Services: Our Areas of Application

research in the fields of nanoelectronics

CONFIGURING. Your Spectroscopy System For PEAK PERFORMANCE. A guide to selecting the best Spectrometers, Sources, and Detectors for your application

THIS IS INNOVATION Compound Semiconductors

Understanding Infrared Camera Thermal Image Quality

GPI INSTRUMENT PAGES

Chapter 36: diffraction

Micro-sensors - what happens when you make "classical" devices "small": MEMS devices and integrated bolometric IR detectors

Introduction of New Products

Chapter 25. Optical Instruments

Nanonics Systems are the Only SPMs that Allow for On-line Integration with Standard MicroRaman Geometries

Development and Applications of a Sample Compartment FTIR Microscope

Silicon Light Machines Patents

One-Stop-Shop for. Research Fab Microelectronics Germany

Microscopic Structures

IST IP NOBEL "Next generation Optical network for Broadband European Leadership"

A novel microspectrometer technology for IR spectral imaging applications

SWS SWS62221 Spectral Sensor. General Description. Block Diagram

Photonics West Contact us for a Stock or Custom Quote Today! Edmund Optics BROCHURE

NanoFabrication Kingston. Seminar and Webinar January 31, 2017 Rob Knobel Associate Professor, Dept. of Physics Queen s University

Sensitivity Enhancement of Bimaterial MOEMS Thermal Imaging Sensor Array using 2-λ readout

Laser Speckle Reducer LSR-3000 Series

Comparison of resolution specifications for micro- and nanometer measurement techniques

Heterogeneous Technology Alliance. SOI MEMS Platform

From vision to growth: Role of research in building world-class excellence in future added value electronics

Diffraction, Fourier Optics and Imaging

Development of a new multi-wavelength confocal surface profilometer for in-situ automatic optical inspection (AOI)

Confocal Imaging Through Scattering Media with a Volume Holographic Filter

Waveguide-Mounted RF MEMS for Tunable W-band Analog Type Phase Shifter

Infra Red Interferometers

RESEARCH FAB MICROELECTRONICS GERMANY (FMD) The Virtual Institute for Combined Microelectronic Research and Development

Biometrics and Fingerprint Authentication Technical White Paper

F r a u n h o F e r I n s t I t u t e F o r P h o t o n I c M I c r o s y s t e M s I P M s MEMS report 3 / C o n t E n t S


Photonics and Optical Communication

Emerging MEMS & Sensor Technologies to Watch: Alissa M. Fitzgerald, Ph.D., Founder & CEO Semicon West 2018

More specifically, I would like to talk about Gallium Nitride and related wide bandgap compound semiconductors.

Photonic Signals. and Systems. An Introduction. NabeelA.Riza/Ph.D. Department of Electrical and Electronic Engineering University College Cork

Instructions for the Experiment

MICROCHIP MANUFACTURING by S. Wolf

WHITE PAPER MINIATURIZED HYPERSPECTRAL CAMERA FOR THE INFRARED MOLECULAR FINGERPRINT REGION

The FTNIR Myths... Misinformation or Truth

Unique and sustainable surface refinement of products with innovative thin films: Ara Authentic. R. Domnick, Ara-Authentic GmbH

PRODUCT BROCHURE PRECITEC LR. Optical sensor for ultra-precision surfaces

FRAUNHOFER GROUP FOR MICROELECTRONICS ONE-STOP-SHOP FOR TECHNOLOGIES AND SYSTEMS

September November 2010

Plan Optik AG. Plan Optik AG PRODUCT CATALOGUE

Consortium Capabilities

Lecture 20: Optical Tools for MEMS Imaging

Who we are. was born in 2006 as Spin-Off of Politecnico of Torino. Full time people employed 8. Laboratories and facilities 300 m 2

Digital camera. Sensor. Memory card. Circuit board

Chapter 3 OPTICAL SOURCES AND DETECTORS

- Near Field Scanning Optical Microscopy - Electrostatic Force Microscopy - Magnetic Force Microscopy

1.1 PHILOSOPHY OF MICRO/NANOFABRICATION

Digital Photographic Imaging Using MOEMS

1 Introduction 1.1 HISTORICAL DEVELOPMENT OF MICROELECTRONICS

High Speed Hyperspectral Chemical Imaging

Application of maximum length sequences to photoacoustic chemical analysis

Constructing a Confocal Fabry-Perot Interferometer

Lecture Notes Prepared by Prof. J. Francis Spring Remote Sensing Instruments

Short Wave Infrared (SWIR) Imaging In Machine Vision

Grating Light Valve and Vehicle Displays D. Corbin, D.T. Amm and R. W. Corrigan Silicon Light Machines, Sunnyvale, CA

Major Fabrication Steps in MOS Process Flow

Exp No.(8) Fourier optics Optical filtering

Transcription:

FRAUNHOFER INSTITUTE FOR PHOTONIC MICROSYSTEMS IPMS Application Area Quality of Life

Overlay image of visible spectral range (VIS) and thermal infrared range (LWIR). Quality of Life With extensive experience in the development of photonic microsystems and related technologies including nano-electronics and wireless microsystems, Fraunhofer IPMS has released a variety of applications benefiting both industrial customers as well as society as a whole. Innovative products developed at the institute can be found in all markets relevant to the information and communication technology, consumer electronics, automotive, semiconductor and medical industries. We are proud to present some selected examples here. Recent advances in microelectronics have brought many benefits to the private spheres of individuals around the globe. Affordable and easy to use portable devices have uniquely improved the quality of life and have been particularly profitable. MEMS technology developed at Fraunhofer IPMS makes it possible to configure more products to fulfill societal calls for improved safety, greater comfort in mobility or targeted support when selecting food, goods and medication. Technologies that were previously reserved for experts, can now be used by the general public. Multispectral Imaging Whether in security systems monitoring airports, tunnels or train stations, automotive driver assistance systems, remote sensing and environmental analysis, industrial metrology, quality control or medical technologies, wideband spectrum imaging is applied in many areas of everyday life. In addition to the visible spectral range, the infrared spectral range with wavelengths above a few microns is of particular interest. It offers extremely useful image information which is not provided in the visible range. Fraunhofer IPMS has developed a camera system, which can simultaneously record images in different spectral regions without a parallax error. This is achieved by using just one lens. The system approach is based on a special mirror lens designed specifically for multispectral imaging. In contrast to transmissive lenses, mirrors are not limited by the transparent areas in VIS and IR and can therefore be implemented in several spectral ranges. Moreover, such systems eliminate chromatic aberrations that otherwise reduce image quality. Key Topics Multispectral Imaging Wearable Electronics Laser Projection Food Analysis Security

Shoe-embedded polymer energy harvester optimized for powering a transmitter module. (Photo: istock) Wearable Electronics Laser Projection In recent years, converting kinetic energy from human motion into electrical energy has become an attractive approach to powering wearable electronic devices. The combination of energy production and portable electronic devices worn on the body build a self-sustaining system which can be found, for example, in fitness gadgets for tracking temperature, speed and position data. Fraunhofer IPMS has developed an innovative energy harvesting system based on emergent electro-active polymers, which is small enough to be embedded in wearables. The mechanical-to-electrical converter device is based on thin polymer films with large relative permittivity. As compared with traditional piezoelectric concepts, this device works non-resonantly and can be optimized for harvesting energy from mechanical power sources also in the low frequency range. The harvester system (device and circuit) can be adapted for other applications such as for powering wireless sensors and portable electronic devices. High-quality data visualization is extremely important and plays a central role in both private and business environments in the modern information society. Today, large, high-resolution screens are used to accurately display photo and video content. However, mobile presentation remains problematic for partly different reasons. Laser projection is, in many respects, a suitable solution for overcoming problems in the mobile presentation of information. Therefore, Fraunhofer IPMS has developed a scanning mirror for light deflection in one and two dimensions. The Laser Beam Steering principle for imaging in which a laser beam is quickly guided across the screen is used. With a typical diameter of approximately one millimeter and made of mono-crystalline silicon wafers, scanning mirrors are manufactured in the Fraunhofer IPMS microsystems technology cleanroom according to established microelectronics methods. To facilitate necessary scanning mirror movement, Fraunhofer IPMS implements an electrostatic drive via comb-shaped electrodes. Many fields of application use laser-projected image and video display. By not using an imaging optic, it is possible to generate clear and sharp images on sloping as well as curved surfaces. Head-Up-Displays as well as other driver-support applications in automobiles benefit from these advantages. Laser projection methods can also be used in LIDAR systems which will make partial or fully-autonomous driving possible in the future.

Hyper spectral imaging using the example of an apple. Food Analysis Security Often, it is not easy for consumers to accurately evaluate the quality of food products. To ultimately determine whether the already-paid-for apple is actually fresh, one must take the first bite. In the future, a spectrometer will inform customers as to the quality of their food choices prior to purchase. Fraunhofer IPMS has developed a micro-spectrometer able to be integrated into common smartphones. The application is based on a near-infrared spectrometer which illuminates a sample with broadband light to determine its proportions of water, sugar, starch, fat and protein. The light reflects various wavelengths in the near infrared area at different degrees of strength depending upon composition levels. An essential component of the system is a micro scanner with optical diffraction grating developed at Fraunhofer IPMS. The mechanical movement of the mirror provides a simple and cost-effective detector, resulting in significant cost advantages for the measurement of wavelength ranges (such as NIR above 1100 nm), in which more expensive III-V semiconductor elements rather than cheaper silicon detectors must be used. Applications of the spectrometer are not limited to the food sector. Materials of diverse goods can be examined to confirm high-quality originals or identify low-quality copies. Used cars can be scanned to expose areas which have been painted over and the contents of medications and creams can also be verified. With the increasing use of technology, unauthorized access to user accounts and sensitive infrastructures presents a worrisome challenge. Secure passwords, secret PIN codes and personal identification cards are often not enough to ensure complete protection. Similar to a fingerprint, the blood vessel pattern of the retina is unique to each individual. Therefore, retina scanning can provide the accurate identification of any and every person. To improve personal as well as data security, Fraunhofer IPMS has developed a system for mobile authentication using retina scanning. This micro scanner is meant to be integrated into personal devices such as smartphones and can direct an eye-safe laser beam to systematically scan the retina. The newly developed optic then generates an image of the retinal surface from the reflected laser beams. Through the secured identity of the user, mobile devices can provide key support to numerous everyday actions in which a high level of security is needed. Applications range from conducting mobile banking via electronic mail and entering personal housing, to controlling access to sensitive areas and critical infrastructure. Devices can also be used as mobile virtual displays, projecting information onto the retina to transmit personal data that cannot be seen by others.

Services The Fraunhofer IPMS offers various cooperation possibilities along the entire value chain to its customers. Feasibility studies are the first step if it is unclear at the beginning of a cooperation whether and if so by what means a customer request can be realized. For the basic proof of the functionality of a device or system demonstrators are realized within a development project. Especially in wafer-based processes, new technologies might be required which could be then developed in parallel. In the second step, the demonstrator turns into a prototype that fulfills all customer specifications. Fraunhofer IPMS offers qualified pilot fabrication in its clean room for MEMS and other microsystem devices. Fraunhofer IPMS participates in the high-performance center Functional Integration for Micro-/ Nanoelectronics. Together with multiple other Saxon Fraunhofer institutes, Dresden University of Technology, Chemnitz University of Technology and the University of Applied Sciences Dresden, Fraunhofer IPMS is working on developing application-oriented products based on the results of basic research to strengthen the economy. The whole project is coordinated by the Fraunhofer IPMS. On the basis of roadmaps we jointly identify possible opportunities for cooperation in talks with industrial customers. If the need arises, the center of excellence s topics can be extended accordingly. Research Topics The applications realized in close cooperation with our customers make use of the following results of our R&D activities: SPATIAL LIGHT MODULATORS Arrays of micromirrors on semiconductor chips MEMS SCANNERS Resonant and quasi-static MEMS mirrors for light deflection WIRELESS MICROSYSTEMS Devices and systems for RFID and optical communication ENVIRONMENTAL SENSING Sensor devices and systems for photonic and chemical sensing NANOELECTRONIC TECHNOLOGIES Semiconductor device development and screening of processes and materials on 300 mm wafers MESOSCOPIC ACTUATORS AND SYSTEMS Electrostatic bending actuators with very large stroke CAPACITIVE MICROMACHINED ULTRASOUND TRANSDUCERS Ultrasonic devices manufactured with microelectronic technologies SMART MICRO-OPTICS Liquid crystal wave guides, tunable micro lenses and energy harvesting solutions MEMS SENSORS Product oriented development and pilot fabrication of diverse physical and chemical sensors

Short profile Based in Dresden, Fraunhofer IPMS is your research and service partner in the fields of optical sensors and actuators, integrated circuits, microsystems (MEMS / MOEMS) and nanoelectronics. As one of the currently 67 independent institutes making up the Fraunhofer-Gesellschaft for the Promotion of Applied Research, the leading European organization for near-industrial research, our approximately 280 scientists work together with both private industrial and service companies as well as the public sector in projects to directly benefit business and society. To meet the high standards of our customers, Fraunhofer IPMS is certified by DEKRA in accordance with DIN EN 9001:2008 for the research, development and manufacturing of microsystems, respective semi-conductor and microsystems processes as well as integrated actuators / sensors. Smart Industrial Solutions Regarding micromechanical and photonic microsystems we offer complete solutions: From conception to component right up to complete systems. This includes sample and pilot production in our 1500 m² (15,000 ft²) clean room (ISO 14644-1 class 4) with qualified processes. Additionally, our business unit Center Nanoelectronic Technologies CNT provides services in the field of nano and microelectronics with functional electronic materials, processes and systems, device and integration, maskless lithography and analytics. Another 800 m² of clean room space (ISO 14644-1 class 6) is available for this purpose, along with analysis and metrology processes with atomic resolution and high sensitivity. Quality of Life Medical and Health Fraunhofer Institute for Photonic Microsystems IPMS Maria-Reiche-Str. 2 01109 Dresden Phone: +49 351 88 23-0 Fax: +49 351 88 23-266 info@ipms.fraunhofer.de www.ipms.fraunhofer.de