Agilent Technologies Gli analizzatori di reti della serie-x Luigi Fratini 1
Introducing the PNA-X Performance Network Analyzer For Active Device Test 500 GHz & beyond! 325 GHz 110 GHz 67 GHz 50 GHz 43.5 GHz 26.5 GHz 13.5 GHz Page 2
Agilent PNA-X Series Markets and Applications Passive and active devices (filters, duplexers, amplifiers, frequency converters, etc.) Millimeter-wave, up to 1.05 THz Material measurements Signal integrity Multiport VNA 3
PNA-X Offers Premier Network Analysis Performance Agilent s PNA-X Series network analyzers offer the highest performance, plus: 2- and 4-port versions Built-in second source and internal combiner for fast, convenient measurement setups Unrivaled flexibility and configurability Internal modulators and pulse generators for fast, simplified pulse measurements High accuracy noise figure measurements using Agilent s unique source-correction method Many software applications Large touch-screen display with intuitive user interface Page 4
PNA-X 4-Port 43.5/50 GHz +28V Noise source used for calibration only rear panel Mechanical switch Pulse generators RF jumpers J11 J10 J9 J8 J7 J4 J3 J2 J1 Receivers + - R1 Source 1 OUT 1 OUT 2 Pulse modulator Signal combiner Source 2 OUT 1 OUT 2 Pulse modulator LO 1 2 3 4 To receivers Noise receivers 10 MHz - 3 GHz 3 26.5 GHz 60 db A R3 C R4 D R2 B 35 db 35 db 35 db 60 db 60 db 60 db 35 db Test port 1 Test port 3 Test port 4 Test port 2 Impedance tuner for noise figure measurements Page 5
Single Connection, Multiple Measurements Easily switch between measurements: One signal source CW S-parameters Pulsed S-parameters Gain compression AM-to-PM conversion Harmonics Noise figure Two signal sources Intermodulation distortion Hot-S 22 Phase versus drive True-mode stimulus Conversion loss/gain Page 6
Single Connection, Multiple Measurements Example 5 channel setup with full calibration. No need to connect or disconnect between measurements. S-parameters + pulse profile + IMD + gain compression + noise figure. Total time: 5.1s Previous ATE system took >186 s with less accuracy. PNA-X result: more accurate and ~ 37x faster Ch1: Standard S-parameters. 201 pts, 2-port cal, 1 khz IFBW. 500 ms Ch6: Pulse profile (S21), 401 pts, 2-port cal, using internal pulse gens/mods, 5 MHz IFBW. 33ms Ch2: Two-tone IMD using internal broadband combiner and two internal sources. 101 pts, src/rcvr cal, 100 Hz IFBW. 950ms Ch3: Fastest & most accurate amplifier gain compression. 101 pts, src/rcvr/mismatch cal correction. 10 khz IFBW. 450ms. Ch4: Fastest and most accurate amplifier noise figure measurement. 101 pts, sourcecorrected NF cal, 1 khz IFBW. 2700 ms Page 7
Extending Test Suite With Other Instruments Switch between network analyzer and external source/analyzer combination for ACPR testing with digital modulation Spectrum analyzer Signal generator Network analyzer To rear access loops DUT Page 8
Page 9 PNA-X Series Innovative Applications
A GILENT P N A S E R I E S WAgilent IDE R A NPNA-X G E OF ASeries P P L I C A TMarkets I O N O P T Iand O N S Applications Scalar mixer cal Gain compression Gain Compression Point Active load-pull/ phase control NVNA/X-Parameter Pin Frequency Vector mixer cal IMD/spectrum True-mode Single-connection multiple-measurements Mixer with embedded LO Pulsed-RF Noise figure Low-noise receiver for NF Page 10
Dynamic Range (db) Pulsed S-Parameters PNA-X PNA 8510 Ease of Setup Internal pulse modulators (one or two) Internal pulse generators (four) Very fast pulse-profile measurements Wide- or narrow-band detection PW 250 ns with wideband detection PW 33 ns with narrowband detection Dynamic range improvements for narrowband detection Crystal-filter path with increased gain Patented software gating technique (Especially helpful for small duty cycles) 100 80 60 40 20 Duty Cycle (%) 0 100 10.0 1.0 0.1 Narrowband Detection PNA- X 0.01 Page 11
+28V PNA-X Pulsed rear panel RF jumpers Mechanical switch J11 J10 J9 J8 J7 J4 J3 J2 J1 Pulse generators Receiver + - R1 Source 1 OUT 1 OUT 2 Pulse modulator Signal combiner Source 2 OUT 1 OUT 2 Pulse modulator LO 1 2 3 4 To receivers Noise receivers 10 MHz - 3 GHz 3 13.5/ 26.5 GHz 65 db A R3 C R4 D R2 B 35 db 35 db 35 db 65 db 65 db 65 db 35 db Test port 1 Test port 3 Test port 4 Test port 2 Page 12
Page 13 Pulsed-RF measurements
14 Pulsed-RF measurements
Industry-Leading Accuracy with Advanced Calibration Techniques for Testing Mixers and Converters Conversion loss and match Simple setup with no external signal source Match correction Conversion loss, delay, and match USB Reference mixer DUT Power sensor Calibration mixer/filter DUT Scalar Mixer Calibration (SMC) Highest accuracy conversion-loss measurements with simple setup and cal Removes mismatch errors during calibration and measurements by combining one-port and power-meter calibrations Vector Mixer Calibration (VMC) Most accurate measurements of phase and absolute group delay Removes magnitude and phase errors for transmission and reflection measurements by calibrating with characterized through mixer Page 15
Testing Mixers and Converters Source 1 OUT 1 OUT 2 Source 2 LO OUT 1 OUT 2 To receivers R1 R3 R4 R2 A C D B Test port 1 Test port 3 Test port 4 Test port 2 DUT Page 16
17 PNA Series Innovative Applications Accurate characterization of Mixers and Converters
18 PNA-X Series Innovative Applications Measuring Converters with Embedded LOs
Noise Figure Measurements with Advanced Error Correction Source-corrected noise figure option extends single-connection multiple-measurement capability of the PNA-X Agilent's unique noise-figurecalibration technique uses an ECal module as an impedance tuner to remove the effects of imperfect system source match Achieve the highest measurement accuracy of any solution on the market frequency Typically four to ten times faster than the NFA Page 19
Noise Figure Measurements +28V rear panel RF jumpers Mechanical switch J11 J10 J9 J8 J7 J2 J1 S- parameter receiver + - LO R1 Source 1 OUT 1 OUT 2 Pulse modulator Source 2 OUT 1 OUT 2 Pulse modulator To receivers Noise receivers 10 MHz - 3 GHz 3-26.5 GHz A Pulse generators 1 2 3 4 R2 B Noise source used for calibration only Test port 1 Source 2 Output 1 Source 2 Output 2 Test port 2 DUT Impedance tuner for noise figure measurements Page 20
N5247A 67 GHz PNA-X 4-Port 10 MHz to 110 GHz Single Sweep System Including: Power leveling True differential Frequency converter measurements Broadband and Banded Page 21
Broadband Amplifier Single Sweep Solution 10 MHz to 110 GHz calibrated S-parameters Accurate source power from 10 MHz to 110 GHz Gain compression with 48 db power sweep range at 98 GHz Output spectrum with 77 GHz input signal Page 22
Challenges of On-Wafer Device Tests Requires multiple stations to complete tests Probes contact bonding pads multiple times Probes leave marks with each contact Marks with one contact Marks with four contacts Issues: Degraded test accuracy Damaged devices Page 23
PNA-X Series for On-Wafer Device Tests Single-contact, multiple-measurements concept minimizes damages on devices All tests are completed with one contact per device Achieve the most accurate characterization Results in easy and reliable wire bonding for improved production yields Page 24
World Class Solutions For Terahertz Measurements Banded configuration Page 25
NVNA Nonlinear Vector Network Analyzer X-parameters Agilent EEsof EDA Overview Page 26 July 2009
How do I optimize desired Amplifier Specifications? PAE (accuracy<3%) Ant Vcc Icc Zo=50ohm Matching Network Matching Network 2W max ACPR (accuracy<1db) VSWR=2.5 max PAE= Power Added Efficiency ACPR= Adjacent Channel Power Ratio VSWR= Voltage Standing Wave Ratio Page 27
Nonlinear Component Behavior A 1 A 2 B B 1 2 Page 28
X-parameters A 1 A 2 B F ( DC, A, A,..., A, A,...) 1k 1k 11 12 21 22 B F ( DC, A, A,..., A, A,...) 2k 2k 11 12 21 22 B B 1 2 Port Index Harmonic (or carrier) Index The X-parameters provide a mathematically correct mapping of the A and B waves at ports, input powers, harmonics, DC bias, etc, etc. Page 29
S-parameters: Linear Measurement, Modeling & Simulation Measure with linear VNA: Small amplitude sinusoids Incident S 21 Transmitted Linear Simulation: Matrix Multiplication S-parameters b1 = S11a1 + S12a2 b2 = S21a1 + S22a2 a 1 S b 11 2 Reflected DUT S 22 Port 1 Port 2 Reflected b 1 a 2 Transmitted S 12 Incident Model Parameters: Simple algebra S ij b a i j a k k 0 j Page 30
Scattering Parameters S-Parameters Linear System Description b i S ik a k k b S a S a 1 11 1 12 2 b S a S a 2 21 1 22 2 X-Parameters Linear and Nonlinear System Description X X X b ( A ) P ( A ) P a ( A ) ( F ) j ( S ) j l ( T ) j l * ij ij 11 ij, kl 11 kl ij, kl 11 kl kl, (1,1) P a A 11 Large signal drive to the amplifier input port (port #1) at the fundamental frequency (#1) Definitions i = output port index j = output frequency index k = input port index l = input frequency index For example: T X 21,21 Means: output port = 2 output frequency = 1 (fundamental) input port = 2 input frequency = 1 (fundamental) Page 31
Nonlinear Vector Network Analyzer (NVNA) Vector (amplitude/phase) corrected nonlinear measurements from 10 MHz to 13.5, 26.5 43.5 50 GHz Calibrated absolute amplitude and relative phase (cross-frequency relative phase) of measured spectra traceable to standards lab Up to 50 GHz of vector corrected bandwidth for time domain waveforms of voltages and currents of DUT Multi-Envelope domain measurements for measurement and analysis of memory effects NVNA FW X-parameters: Extension of Scattering parameters into the nonlinear region providing unique insight into nonlinear DUT behavior X-parameter extraction into ADS nonlinear simulation and design NVNA can control external DC instruments (sweep and sense) during RF measurements New phase calibration standard Standard PNA-X with New Nonlinear features and capability Page 32
Measurement-Based Modeling & Design Flow Measure X-parameters with Agilent s NVNA Design and simulate with measured or generated X- parameters in ADS Design with measured X-parameters in ADS Page 33
X-Parameters Does for nonlinear design what S-parameters do for linear design Page 34
Atomic Force Microscopy / Scanning Microwave Microscope -SMM is a near field system. The resolution is determined by the Electric field interaction area with the sample. This is on the order of 5-10 nm -SMM uses a network analyzer to measure the vector reflection coefficient caused by the tip-sample interaction; this gives information about the material properties (dielectric properties) -While an AFM needs contact to make a measurement the SMM can measure without contact. You can be 1-10 nm away from the sample and still have good sensitivity 5400 AFM 5 nm Tip/sample interaction area Nosecone assembly Applying cantilever to substrate holder Cantilever, tip, and sample Page 35
APPLICATIONS OF SMM Agilent EMG Customers Powerful for semiconductor applications Topography Agilent LSCA Customers Generating excitement amongst life scientists Topography 10 x 10 um Dopant conc n Transistor Images Image of virus particles selectively attached to gold pattern Microwav EMG Electronic Test & Measurement LSCA Life Sciences & Chemical Analysis Page 36
SMM: SCANNING MICROWAVE MICROSCOPE Standard AFM New SNMM Scanning nearfield microwave microscope See what s never been seen before! World s most sensitive capacitance measurement with 5nm resolution and 10-20 farad sensitivity; enables depth profiling of subsurface structures: doping, layers etc. by simultaneous depletion voltage application and uw measurement Page 37
Leverage Your Investment to a Wide Range of Applications Amplifier Test Single Connection: Gain compression, IMD, noise figure, harmonics, true differential, PAE, hot S 22 Antenna Test T/R Module Test Pulsed RF and DC Mm-wave Mixer Test NVNA Component characterization X-parameter extraction Pulse envelope domain 750 GHz & beyond! 325 GHz 110 GHz 67 GHz 50 GHz 43.5 GHz 26.5 GHz 13.5 GHz Materials Measurements Signal Integrity Load pull Noise parameters www.agilent.com/find/pna-x Scanning Microscope Page 38
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