Improved Radiometry for LED Arrays

Similar documents
The Importance of Total Measured Optic Response in UV LED Measurement. Joe May, Jim Raymont, Mark Lawrence EIT Instrument Markets

Advances in Measuring UV LED Arrays

Measuring the Performance of UV LED Light Sources

GLOSSARY OF TERMS. Terminology Used for Ultraviolet (UV) Curing Process Design and Measurement

The use of ultraviolet (UV) energy

UV-dose indicator formulations as paint-onphotodetectors: way to optimize the UV curing process

Influence of the light spectral distribution used in the radiometers calibration

Silicon Photodiodes - SXUV Series with Platinum Silicide Front Entrance Windows

EIT Instrument Markets Product Overview

Advancements in shorter wavelength LED technology and its impact on UV curing applications.

Advanced Radiachromic Radiometry for UV Curing

Headquaters Dr. Hönle AG

Novel laser power sensor improves process control

variables that must be controlled when

Solving UV Curing Mysteries with Measurement. Jim Raymont

Aspects of Radiometry and Process Verification for 3-D UV Processing

POWER DETECTORS. How they work POWER DETECTORS. Overview

Keysight Technologies Optical Power Meter Head Special Calibrations. Brochure

SPECTRAL IRRADIANCE DATA

\Ç à{x ÇtÅx Éy ALLAH à{x `xüv yâä

Modern UV-curing technology

UV PROCESS SUPPLY, INC. CON-TROL-CURE COMPACT RADIOMETER INSTRUCTION MANUAL PART # M

Multi-Lamp Microwave UV Systems Physics and Technology

Laser Beam Analysis Using Image Processing

Recent Advances in Measuring UV LED Arrays

Ultraviolet Visible Infrared Instrumentation

UV Measurement. Information Sheet. Dipl.-Ing. Andreas Renzel. Basics of UV measurement and solutions for UV curing applications.

Ultraviolet (UV-Index) TOCON Datasheets

SECOND HARMONIC GENERATION AND Q-SWITCHING

Improving the Collection Efficiency of Raman Scattering

The ultraviolet (UV)-light emitting

Thermal Heads for Power and Single-Shot Energy - mw to KW, mj to 300J

UV LED ILLUMINATION STEPPER OFFERS HIGH PERFORMANCE AND LOW COST OF OWNERSHIP

Whodat? Whodunit? Mysteries with Measurement. Solving. Jim Raymont

Pyroelectric, Photodiode and RP Heads for Repetitive Energy Measurements

Compact High Intensity Light Source

Radiometric Methods for UV Process Design and Process Monitoring

New PCA Accessory for the Q Series DSC Modules

Contact person Date Reference Page Stefan Källberg MTt6F (4) Measurement Technology

Validating a Conveyor Light-Curing Process Ensure Your Light-Curing Process Will Perform Accurately Every Time

Oriel Flood Exposure Sources

Lithography. 3 rd. lecture: introduction. Prof. Yosi Shacham-Diamand. Fall 2004

UV-Index Photodiodes Data Sheets

Pulsed Laser Power Measurement Systems

OmniCure Setting the Standard for Precision Assembly UV Curing

Instruction manual and data sheet ipca h

NIST EUVL Metrology Programs

SUCCESSFUL UV CURING & COMMUNICATION FOR PRESSURE SENSITIVE ADHESIVES (PSAS) It s as simple as a Day at the Movies

PowerMax-Pro Sensors. 100 mw to 150W FEATURES

Optical Isolator Tutorial (Page 1 of 2) νlh, where ν, L, and H are as defined below. ν: the Verdet Constant, a property of the

Alternative UV Radiometry and Process Verification for Difficult Configurations

New automated laser facility for detector calibrations

idonus UV-LED exposure system for photolithography

Technical Notes. Integrating Sphere Measurement Part II: Calibration. Introduction. Calibration

EYP-DFB BFY02-0x0x

Uniform surface Led series SFL-UV

EYP-DFB BFY02-0x0x

Part 1: New spectral stuff going on at NIST. Part 2: TSI Traceability of TRF to NIST

Mercury Cadmium Telluride Detectors

Novel Beam Diagnostics Improve Laser Additive Manufacturing

Novel Beam Diagnostics Improve Laser Additive Manufacturing

Typical LED Characteristics

White Paper: Modifying Laser Beams No Way Around It, So Here s How

ORION ORION LASER POWER METER USER MANUAL. OPHIR OPTRONICS

Coherent Laser Measurement and Control Beam Diagnostics

Measuring the Output Performance of UV LEDs

Content of this Catalog. General information about the sglux TOCONs. Selection guide p. 2. Product details of all TOCONs p. 5. Useful accessories p.

OmniCure Setting the Standard for Precision Assembly UV Bonding

The ASTRI SST-2M Illuminator

Biological impact of optical radiation from curing lights

UV-Index Photodiodes Data Sheets

First and second order systems. Part 1: First order systems: RC low pass filter and Thermopile. Goals: Department of Physics

Broadbandradiometer specbos 1211

RF and Microwave Power Standards: Extending beyond 110 GHz

SINGLE-MODE LASER DIODES. Chip on Submount, QA-Mount. Laser Diodes

Photo-Documentation of Ultraviolet Radiation Induced Visible Fluorescence on Daguerreotypes

Modern Physics Laboratory MP4 Photoelectric Effect

Pyranometers SP- 100 Series SP -200 Series

Considerations When Transitioning from Lamp-based to LED-based Radiant Flux Sources

BTS2048-UV. Product tags: UV, Spectral Data, LED Binning, Industrial Applications, LED.

New applications are transforming the UV-LED market, and Nikkiso Deep UV-LED devices are applicable to many important applications including:

Laser Diode. Photonic Network By Dr. M H Zaidi

SOLARONIX. Solixon A-1525-V

Solar Cell Parameters and Equivalent Circuit

REPORT OF CALIBRATION of One Standard of Spectral Irradiance ( nm)

Omnicure S1500 UV Spot Curing System. 122, Chemin de la Cavée Orgeval Tèl :

LP PYRA 06. REV Jan. 2007

LP UVA Introduction. 2 Working Principle. TEL r.a. FAX

[MILLIMETERS] INCHES DIMENSIONS ARE IN:

The Study on the Method of Eliminating Errors of PSD

DETECTORS Important characteristics: 1) Wavelength response 2) Quantum response how light is detected 3) Sensitivity 4) Frequency of response

PHYS General Physics II Lab Diffraction Grating

Power Sensors Introduction

BLACKBODY RADIATION PHYSICS 359E

Lecture 5: Introduction to Lasers

Fiber Coupled Semiconductor Laser

CU-LASP Test Facilities! and Instrument Calibration Capabilities"

Ambient Light Sensors General Application Note

Spectroscopy in the UV and Visible: Instrumentation. Spectroscopy in the UV and Visible: Instrumentation

BlueWave MX-150 LED Spot-Curing System High-Intensity Curing System with the Flexibility of Multiple Systems

Transcription:

RadTech Europe 2017 Prague, Czech Republic Oct. 18, 2017 Improved Radiometry for LED Arrays Dr. Robin E. Wright 3M Corporate Research Process Laboratory, retired 3M 2017 All Rights Reserved. 1

Personal Background Studied photochemistry of 1 st row transition metal complexes Used visible monochromatic sources (Ar +, Kr +, and doubled Nd-YAG laser) Post-doctoral in organometallic photochemistry in Regensburg Used filters/monochromator to select narrow spectral bands Joined 3M s Central Research Laboratory in 1979 in St. Paul, MN Used broadband medium-pressure arc and microwave mercury lamps Radiometry was radically different with no established standards Cured using excimer ( 93) and low-pressure Hg lamps ( 96) and LEDs ( 01) Radiometry using a narrowband source is straight forward and more believable Cure gradients based on absorbance can be calculated/evaluated 3M 2017 All Rights Reserved. 2

Medium-Pressure (MP) Mercury Lamp Spectrum MP mercury lamp UV emission spans from ca. 220 to 400 nm Filters are used to isolate different spectral bands (UVA, UVB, UVC) Transmission curves are not standardized between radiometer manufacturers Calibration using a MP Hg lamp is required but what is a standard MP Hg lamp? Spectrum can vary due to temperature, quartz type, reflector composition, additives, etc. Generic mercury bulb spectrum 3M 2017 All Rights Reserved. 3

Light-Emitting Diodes (LEDs) LEDs emit within a narrow spectral range ( max ±25nm) LED spectra are similar to excimer lamp spectra and can be considered as pseudo-monochromatic sources Filters to isolate LED emission bands are not necessary Arrays of >340 nm can exceed peak irradiances of 50 mw/cm 2 Background lighting can often be neglected XeCl excimer lamp Ensemble of discrete electrical discharges max = 308 nm LED array Ensemble of individual LEDs max = 395 nm 3M 2017 All Rights Reserved. 4

Conventional UV Radiometers UV radiometers use Si photodiodes Advantages Fast response time Good linearity Disadvantages Saturate at high power Sensitivity degrades with UV exposure UV responsivity decreases as temperature increases Spectral responsivity is strongly dependent on wavelength Calibration recommended every 6-12 months 3M 2017 All Rights Reserved. 5

Examples of Two Silicon Photodiode Responsivity Curves Company A Company B 200-400 nm Spectral Region 3M 2017 All Rights Reserved. 6

Problem Statement There are no standard methodologies for measuring radiant power impinging on a surface (irradiance) from LED arrays Results can vary dramatically depending on the distance from the source, the array configuration, and the detector responsivity Use of Hg spectral band definitions (UVA, UVB, UVC, etc.) makes no sense when measuring narrowband LED arrays 2014 NIST study requested by RadTech showed that measuring the same LED source using two radiometers from different suppliers resulted in a 30% difference in the reported peak irradiances 3M 2017 All Rights Reserved. 7

RadTech Global Initiative (2014) National metrology lamps asked to help standardize LED array measurements for industry No progress reported after more than 6 months 3M 2017 All Rights Reserved. 8

Lasers LED spectra are more similar to lasers than MP Hg lamps Lasers are coherent sources; LEDs are incoherent sources Laser power is measured using power meters Power meters use sensors that absorb radiation in combination with a thermopile 3M 2017 All Rights Reserved. 9

Thermopile Technology Thermopiles convert thermal energy into electrical energy Output is proportional to a local temperature difference or gradient Advantages Flat spectral response High saturation threshold Disadvantages Slow response time Sensitive to ambient temperature changes Could thermopile technology be used with LED arrays? 3M 2017 All Rights Reserved. 10

Coherent PowerMax-Pro Laser Power Meter Controller Sensor head Computer Display 3M 2017 All Rights Reserved. 11

Use of PowerMax-Pro with LED Sources Static LED Measurements Reported by Coherent, Inc. Measured performance characteristics of LED s for resin curing Typical rise-time Optical measurements in 10 µsec Measurement insights Improve battery and diode lifetimes Insure ISO (10650-1) or FDA compliance Adjust exposure parameters (power & energy) for optimum resin curing We love it! It is the first time we ve actually been able to see the needed resolutions on our output and will now be able to verify and validate tracing directly back to a NIST traceable meter. This is big for us! Customer comment 3M 2017 All Rights Reserved. 12

3M Measurement of 365 nm LED Array Stabilization Time Total exposure time was 15 minutes (~ 1500 J/cm 2 ) Standard mode (10 Hz) (water cooling required) 3M 2017 All Rights Reserved. 13

Coherent PowerMax-Pro vs. Conventional Thermopiles Transverse Thermoelectric Physics conventional Sensor Response Time Atomic layer thermopiles PowerMax-Pro t rise Diameter 2 Conventional Thermopile t rise (Thickness) 2 Coherent Thermopile Could this technology be adapted to be a profiling radiometer? 3M 2017 All Rights Reserved. 14

Attributes of PowerMax-Pro PowerMax-Pro uses an anisotropic thermoelectric sensing element that eliminates the negatives of conventional thermopiles Advantages High sensitivity Fast response time ( 10 µsec) Saturation threshold in excess of 200 W/cm 2 Flat responsivity curve 20 khz sampling rate Option to water cool for continuous exposures Disadvantages New and unproven 3M 2017 All Rights Reserved. 15

Use of PowerMax as a Profiling Radiometer for LED Arrays Coherent demonstrated a static response using LED spot sources Question - could it be used as a profiling radiometer for LED arrays? Discussed concept with NIST and received favorable feedback no obvious pitfalls Negatives of original Coherent device Sensor is tethered to a controller by a 2m cable Sensor is recessed 0.95 cm from top surface Total height of sensor was 33 mm Reflectance from sensor surface was a concern Original Coherent sensor Inquired about use of a black body absorber as a sensing element to minimize dependence 3M 2017 All Rights Reserved. 16

First Generation Black Body Absorber Black Body (BB) Absorber vs Si Photodiode Photoresponsivity Curve Normalized Responsivity at 400 nm Responsivity Curves (340-460 nm) BB Absorber Si Photodiode BB Absorber Si Photodiode Data provided by Coherent, Inc. 3M 2017 All Rights Reserved. 17

Original and Low Profile (LP) Black Body Sensors Evaluated Black Body (BB) absorber in original sensor head BB original and low profile sensor with 1.0 cm 2 aperture Edge view of LP and original heads (height = 13 mm vs. 30 mm) 3M 2017 All Rights Reserved. 18

Profiling Mode Video 3M 2017 All Rights Reserved. 19

Profiling Mode Screenshot high speed mode 3M 2017 All Rights Reserved. 20

Single Pass Video Used LED flashlight as source Setup: Trigger = 10 mw Pre-trigger = 1000 Buffer capacity = 10000 Sampling rate = 20 khz X-axis is time; Y-axis shows irradiance 3M 2017 All Rights Reserved. 21

Comparative Study at 3M Experimental Setup Laser Power Meter Comparative Radiometer 3M 2017 All Rights Reserved. 22

Original and BB absorber data are similar Comparative response at 365 nm is lower Calibration issue? 3M 2017 All Rights Reserved. 23

Original and BB absorber data are the same UVA Comparative is similar 3M 2017 All Rights Reserved. 24

Original and BB absorber data are similar Comparative response is lower UVA filter is calibrated at 365 nm, not 340 nm 3M 2017 All Rights Reserved. 25

Original and BB absorber data are similar UVA, UVV Comparative responses are low due to %T 385 Calibration difference with UVA2? 3M 2017 All Rights Reserved. 26

BB absorber data Comparative filter %T at 395 nm is lower 3M 2017 All Rights Reserved. 27

Original and BB absorber data are similar Comparative UVV %T 455 is zero 3M 2017 All Rights Reserved. 28

PowerMax-Pro Data as a Function of Linespeed 3M 2017 All Rights Reserved. 29

Summary A laser power meter from Coherent has been successfully used as a profiling radiometer for LED arrays with promising results A low-profile version (13 mm height) using a black body absorber has been tested Suggested improvements Eliminate tether from detector to controller Add internal battery Provide onboard data storage and wireless data link Current status Coherent is evaluating production, stability, and business opportunity 3M 2017 All Rights Reserved. 30

Special thanks to Coherent s Sean Bergman and Michael Pease 3M 2017 All Rights Reserved. 31

3M 2017 All Rights Reserved. 32