Characterization of CMOS Image Sensors with Nyquist Rate Pixel Level ADC

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Characterization of CMOS Image Sensors with Nyquist Rate Pixel Level ADC David Yang, Hui Tian, Boyd Fowler, Xinqiao Liu, and Abbas El Gamal Information Systems Laboratory, Stanford University, Stanford, CA EI 99 1

Motivation Characterization techniques for CCDs modified and extended for CMOS APS, PPS (Janesick 87, Fowler 98, ElGamal 98) Pixel level ADC imagers require further modification No analog output Limited output resolution (e.g. 8-bit) Develop characterization techniques for pixel level ADC imagers EI 99 2

Outline Pixel Level ADC Operation QE, Sensitivity, and ADC Transfer Curve FPN EI 99 3

640 512 Image Sensor Characteristics Technology 0.35 µm, 4-layer metal, 1-layer poly, nwell CMOS Sensor size 640 512 pixels Pixel size 10.5 µm 10.5 µm Photodetector n-well/p-sub diode Sensor area 6720 µm 5376 µm Fill factor 29% Transistors per pixel 5.5 (22 per four pixels) Package 180 pin PGA Supply voltage 3.3V ADC resolution 8bit Maximum frame rate 250 frames/s (@ 8-bit resolution) EI 99 4

Pixel Level ADC Operation Multi-channel Bit Serial (MCBS) ADC CICC98, EI99 (invited paper) Nyquist rate bit serial ADC A/D conversion via successive comparison Needs only a 1-bit comparator and a 1-bit latch per pixel block ADC shared among a 2 2 pixel block EI 99 5

Mutiplexed MCBS ADC Pixel Block Circuit Schematic S0 Reset M4 S1 BITX N5 Vdd M5 S2 RAMP Word S3 Bit BLM ADC is electrically testable EI 99 6

Timing Diagram of Multiplexed Operation Reset S0 ADC Charge Collection ADC S1 ADC Charge Collection ADC S2 ADC Charge Collection ADC S3 ADC Charge Collection ADC 1 17F 1 =33ms (nom) F EI 99 7

Signal Transfer Characteristics Signal path, from photon to digital number, consists of: Photonflux QE Current Charge Integration Sensitivity 1 C sensenode Voltage ADC Gain DN Assuming linearity, signal transfer curve can be characterized by a signal path gain G G =QE sensitivity G ADC where G ADC is the ADC gain EI 99 8

Signal Path is Linear 250 Output code (DN) 200 150 100 50 0 0 2 4 8 10 12 14 10 6 Number of incident photons (ph) G =2.09 10 5 DN/ph EI 99 9

ADC Transfer Curve is Linear 250 Output code (DN) 200 150 100 50 0 0.5 1 1.5 2 2.5 Input voltage (V) G ADC = 128 DN/V EI 99 10

Sense Node Capacitance Estimation S0 S0 Cd Reset Cd Reset S1 N5 S1 N5 C S/H C S/H S2 S2 S3 S3 S0 selected. S0,S1 selected. (kc d + C S/H )G k = qqe G ADC, for k =1, 2, 3, 4. EI 99 11

Measured Parameters Sample and hold capacitance 24.6fF Photodetector capacitance 6.8 ff Sensitivity 5.1 µv/e Signal path gain (G) 2.09 10 5 DN/ph ADC gain (G ADC ) 128 DN/V Quantum efficiency 11.3% for exposed area and 42% for detector area @ 610 nm 29% of the pixel is exposed to light while the rest is covered by a metal shield. The photodetector itself occupies only 7.8% of the pixel area. EI 99 12

Measured Average Spectral Response 0.12 0.11 Spectral response (e/ph) 0.1 0.09 0.08 0.07 0.06 0.05 0.04 0.03 400 450 500 550 600 650 700 750 800 Wavelength (nm) EI 99 13

Outline Pixel Level ADC Operation QE, Sensitivity, and ADC Transfer Curve FPN EI 99 14

Fixed Pattern Noise (FPN) Pixel output variation under uniform illumination due to device and interconnect variations across the sensor Measured as the standard deviation of the variations Magnitude depends on input signal level EI 99 15

FPN Modeling For CCD, all pixels share a common amplifier FPN is modeled as a sample from a white noise process For CMOS imagers with pixel level ADC, FPN is due to variations among the photodetectors and among the ADCs FPN is the sum of two components photodetector and ADC Unavoidable quadrant offset due to multiplexing EI 99 16

FPN Model For Pixel Level ADC FPN at pixel i, j F i,j = X i,j + q + Y i 2, j 2 X i,j photodetector FPN white noise process Y i 2, 2 j ADC FPN X i,j and Y i 2, 2 j are uncorrelated q is the quadrant offset, q is the quadrant index EI 99 17

ADC FPN Model Two dimensional first order isotropic autoregressive process: Y i 2, j 2 = a(y i 2 1, j 2 + Y i 2 +1, j 2 +Y i 2, j 2 1 + Y i 2, j 2 +1) +U i 2, j 2 U i 2, 2 j white noise process Two parameters to be estimated correlation parameter a (0 a 1 4 ) variance of U i 2, 2 j σ2 U EI 99 18

Estimated FPN and Autoregressive Parameters Dark 30% full well 78% full well Quadrant offset q (DN) 0.0 0.01-3.89 0.0-0.10 0.42 0.0 0.07 1.61 0.0 0.04 1.86 Photodetector FPN X(DN) 0.0 0.09 2.03 ADC FPN Y (DN) 0.0 0.13 0.06 Total FPN F (DN) 0.0 0.22 2.09 Correlation parameter a 0.02 0.021 0.028 σu 2 0.13 0.126 0.058 EI 99 19

Conclusion Methods for characterizing sensitivity, QE, and ADC transfer curve for CMOS imagers with pixel level ADC Modeling FPN as the sum of photodetector FPN, ADC FPN, and quadrant offset Design guidelines for pixel level ADC Pixel level ADCs must be electrically testable Accurate estimate of the sense node capacitance needed for sensitivity Multiplexing causes offset FPN, but can be corrected digitally. EI 99 20