Characterization of Common Electron Multipliers in Harsh Environments

Similar documents
The Development of Miniature Electron Multipliers for Use In Portable Mass Spectrometers

The Development of a Novel Electron Multiplier with an Onboard Integral High Voltage Power Supply for use in Mass Spectrometers

Performance Characterization Of A Simultaneous Positive and Negative Ion Detector For Mass Spectrometry Applications

Residual Gas Analyzers XT Series

835 Vacuum Quality Monitor (VQM TM ) 2012 Brooks Automation, Inc. Proprietary Information

Transpector 2. Gas Analysis System. NEW-GENERATION RGAs WITH SUPERIOR SENSITIVITY AND PERFORMANCE

Residual Gas Analyzers RGA100/200/ amu, 200 amu and 300 amu RGAs

Residual Gas Analyzers

Then the mass spectrometer should go to the field, in your hand, small as possible, light as possible, and operated with light battery.

Autoresonant Trap Mass Spectrometry

Project by: Dr. Jorge A. Diaz. Physics School, University of Costa Rica, National Center for High Technology (CENAT)

HPR-30 Vacuum Process Gas Analyser A differentially pumped RGA system for vacuum process monitoring

830 Vacuum Quality Monitor

HIQUAD. New high-end mass spectrometer! Fast, flexible and easy to operate.

PRISMAPLUS. The precise solution for mass spectrometry. Modular design. Powerful software. Wide range of applications.

PrismaPlus. The New Mass Spectrometer with the Added Plus! Modular Design. Powerful Software. Wide Range of Applications.

Performance characteristics of a new wide range, fast settling electrometer design for a residual gas analysis mass spectrometer

Improving Signal-to-Noise by Identifying Sources of Noise in Mass Spectrometer Systems

Electron Multipliers. Introduction to ETP Electron Multipliers Selection by Technique: LC-MS 242

Development of a Small Residual Gas Analyzer Utilizing the Quadrupole Array Structure Micropole System ~ QL Series ~

Performance of Microchannel Plates Fabricated Using Atomic Layer Deposition

Introducing the Agilent 7000A Triple Quadrupole GC/MS

Detectors for microscopy - CCDs, APDs and PMTs. Antonia Göhler. Nov 2014

The Extrel MAX Systems are UHV-compatible flange mounted Quadrupole Mass

Ion optics innovations for increased sensitivity in hybrid MS systems

The 5975C Series MSDs: Normalized Instrument Tuning. Technical Overview. Introduction

Sub-mm Linear Ion Trap Mass Spectrometer Made Using Lithographically Patterned Ceramic Plates

Technical Specifications for the procurement of Inductively Coupled Plasma Mass Spectrometer (ICP-MS)

MCPs and MCP based detectors. Raquel Ortega

PRISMAPRO. The latest generation of compact mass spectrometers. Modular design. Powerful software. Low detection limit.

ICP-MS. plasma 3. Multi-Collector ICP-MS.

DN 16 ISO-KF. Dimensional drawings THERMOVAC TM 101 (mm)

CRL MASS SPECTROMETRY FACILITY INSTRUMENT USER MANUAL MALDI MICRO. Operating Instructions. Basement Spec Lab:

Cylindrical Toroidal Ion Trap Mass Spectrometer. Daniel Austin and Nick Taylor Brigham Young University, Provo, Utah

Enable Highly-Stable Plasma Operations at High Pressures with the Right RPS Solution

Evaluation of high power laser diodes for space applications: effects of the gaseous environment

Micro Analytical Instruments - A System Approach. Jörg Müller Institut für Mikrosystemtechnik

New Control Electronics for Helmer Gauges

A New Class of Robust Sub-nanosecond TOF Detectors with High Dynamic Range

Mass spectrometers have evolved into standard

The Perfect Solution for Mass Spectrometry. Modular Design. Powerful Software. Wide Range of Applications.

Mass Spectrometry and the Modern Digitizer

Agilent GC-MS Maintenance:

Collision cell: Fragmentation efficiency > 90 % Duty cycle: Variable between 1 and 50 % (user selectable trapping time/scan time ratio) Transmission:

Physics Requirements for the CXI 0.1 micron Sample Chamber

OPTI510R: Photonics. Khanh Kieu College of Optical Sciences, University of Arizona Meinel building R.626

TRITON Plus Thermal Ionization MS. Another step ahead. in TIMS. Earth and Planetary Sciences Nuclear Sciences

Lecture 12 OPTICAL DETECTORS

The Absolute Detection Efficiency of Vacuum Electron Multipliers, to kev Protons and Ar + Ions.

A Sort-of Tissue Equivalent Proportional Counter (STEPC) for Space Radiation Dosimetry Applications

Partial Replication of Storms/Scanlan Glow Discharge Radiation

AccuTOF LC Training Course

Advantages of Multi-Turn-TOF Technology

LC/MS/MS. Page Header. triple quadrupole mass spectrometer.

A Residual Gas Analyzer for Dry Etching Process

High Field Q-Slope in Superconducting RF Cavities

Low-cost sensors and high-end instruments for mapping urban NO x pollution

The Best Way to Get the Right Answers... is in a Flash

NEPTUNE Plus Multicollector ICPMS. Another step ahead. in MC-ICP-MS. Earth and Planetary Sciences Nuclear Sciences

TABLE OF CONTENTS PAGE LIST OF FIGURES 4 PREFACE 5. CHAPTER 1 6 Introduction. CHAPTER 2 9 Fabrication and Operation. CHAPTER 3 19 Applications

Agilent 6400 Series Triple Quadrupole LC/MS System

Laser-Produced Sn-plasma for Highvolume Manufacturing EUV Lithography

Relative Quantum Efficiency Measurements of the ROSS Streak Camera Photocathode. Alex Grammar

Dr. James McFadden, UC Berkeley

Our Company. We are major supplier to:

Herwig Schopper CERN 1211 Geneva 23, Switzerland. Introduction

[NIGHT VISION TECHNOLOGY] SEMINAR REPORT

Historical. McPherson 15 Mount

Quantum frequency standard Priority: Filing: Grant: Publication: Description

MuCool Test Area Experimental Program Summary

Gas scintillation Glass GEM detector for high-resolution X-ray imaging and CT

Progress towards Actinic Patterned Mask Inspection. Oleg Khodykin

Ultraviolet Visible Infrared Instrumentation

PB T/R Two-Channel Portable Frequency Domain Terahertz Spectrometer

A Low-Cost Approach to Teaching Transmission Line Fundamentals and Impedance Matching

Simulations Guided Efforts to Understand MCP Performance

Virtual Laboratory of Nuclear Fission Virtual practicum in the framework of the project Virtual Laboratory of Nuclear Fission

SCANNING ELECTRON MICROSCOPY AND X-RAY MICROANALYSIS

Seapoint Rhodamine Fluorometer

UV GAS LASERS PREPARED BY: STUDENT NO: COURSE NO: EEE 6503 COURSE TITLE: LASER THEORY

Production of HPDs for the LHCb RICH Detectors

Status of the PRad Experiment (E )

Pulse Niru Company. General Catalogue.

PB T/R Two-Channel Portable Frequency Domain Terahertz Spectrometer

Miniature Spectrometer Technical specifications

DEVELOPMENT OF THE SPACE ACTIVE HYDROGEN MASER FOR THE ACES MISSION

Working Towards Large Area, Picosecond-Level Photodetectors

PULSED BREAKDOWN CHARACTERISTICS OF HELIUM IN PARTIAL VACUUM IN KHZ RANGE

Characterizing Single Electron Radiation in an Intense Laser Field. Caleb Coburn

Compact High Intensity Light Source

Scanning electron microscope

SPRAY DROPLET SIZE MEASUREMENT

Applications of Cold Cathode PIG Ion Source in Lithography

Analytical Chemistry II

Electronic Measurements & Instrumentation. 1. Draw the Maxwell s Bridge Circuit and derives the expression for the unknown element at balance?

Study of Resistive Plate Chambers Scintillation detectors and Reconstruction of muon tracks in RPCs

A comparison of two high performance inverse photoemission bandpass detectors. Abstract

ENGINEERING CHANGE ORDER ECO No. COS-057 Center for Astrophysics & Space Astronomy Date 13 February 2001 University of Colorado, Boulder Sheet 1 of 6

Thermal Conductivity Sensor for Leak or Pressure Detection MTCS2601. MTCS2601 silicon sensing die in SMD ceramic package

A Thermal Compensation System for the gravitational wave detector Virgo

Transcription:

ELECTRO-OPTICS Characterization of Common Electron Multipliers in Harsh Environments The Pittsburgh Conference 2005 Poster Paper 1340-20 Bruce Laprade and Raymond Cochran BURLE Electro-Optics INC

Introduction ELECTRO-OPTICS Mass Spectrometers are a valuable tool for use in demanding applications such as drug discovery, semiconductor manufacturing and food processing. The unique capability of a mass spectrometer to identify minute amounts of unknown materials sets this instrument apart from almost all others. The typical Mass Spectrometer has three key components: The ionization source, the mass filter and the detector.

Discussion ELECTRO-OPTICS Homeland security requirements are now driving the development of field portable instruments that can provide laboratory grade analysis. In order to reduce the size, weight and power consumption of a portable mass spectrometer, it is often necessary to deviate from the normal operating environment inside the vacuum system.

Objective The objective of this project was to characterize the performance of various electron multipliers under harsh test conditions.

ELECTRO-OPTICS There are 3 main types of Electron Multipliers: - Single Channel Electron Multipliers - Microchannel Plate based Detectors -Discrete Dynode Multipliers

Various Types of Electron Multipliers Microchannel Plates Single Channel Electron Multipliers Discrete Dynode Magnum 6 Channel Multipliers Microchannel Plate Detectors

Vacuum Conditions Typical MALDI Time-of-Flight Mass Spectrometers require an ion flight path length of 1 to 2 meters. Modern quadrupole based instruments typically operate at vacuum pressures in the high 10-6 Torr range because ions need to travel 25 cm. or more before they reach the detector without colliding with residual gas molecules. If it were possible to shrink the flight path length requirement to less than 5cm (approx... 2 ) then it should be possible to operate a system in the milli-torr range. Milli-Torr vacuum levels can be achieved with simple low cost vacuum pumps. Multiplier performance outside of the normal 10-6 Torr operating range has not been well characterized.

The Effects of Poor Operating Pressure on Detector Gain and Noise

Output Current (amps) 1.00E-06 Single Stage MCP Analog Operation in Argon at Various Gain Settings 1.00E-05 Gain 5000 1.00E-07 Gain 1000 Gain 500 1.00E-08 Gain 100 Gain 50 1.00E-09 1.00E-07 1.00E-06 1.00E-05 1.00E-04 1.00E-03 1.00E-02 1.00E-01 System Pressure (torr)

Noise vs. Operating Pressure For Various Electron Multipliers 1000 Back-filled Air Detector Noise (cts./sec.) 100 10 1 1.00E-06 1.00E-05 1.00E-04 1.00E-03 0.1 Operating Pressure (Torr) 5 um MCP Chevron 25 um MCP Chevron Single Channel Multiplier Discrete Dynode Multiplier Spiraltron

Miniature MCP Detector Noise as a Function of Vacuum Pressure ELECTRO-OPTICS Dark Current (amps) 1.00E-12 1.00E-13 1.00E-14 1.00E-15 1.00E-16 1.00E-06 1.00E-05 1.00E-04 1.00E-03 1.00E-02 Pressure (Torr)

The Effects of Poor Operating Pressure on Multiplier Lifetime

Lifetime at High Pressure: 100 MCP Chevron, 5 Micron Pore Assembly Back-filled Air Detector Gain (Millions) 10 1 0 0.5 1 1.5 2 Extracted Charge (Coulombs) 1 X 10-3 Torr 5 X 10-3 Torr

Lifetime at High Pressure 100 MCP Chevron, 5 Micron Pore Assembly Back-filled Argon Detector Gain (Millions) 10 1 0 200 400 600 800 1000 1200 1400 Continuous Hours of Operation at 1uA Output Current 1 X 10-3 Torr Argon

Lifetime at High Pressure 100 MCP Chevron, 5 Micron Pore Assembly Back-filled Argon Detector Gain (Millions) 10 1 0 200 400 600 800 1000 1200 1400 Continuous Hours of Operation at 1uA Output Current 1 X 10-3 Torr Argon

Lifetime at High Pressure: 1000 Single MCP, 5 Micron Pore Assembly Operated at 1.2E-2 Torr In Argon 100 Gain 10 1 0 20 40 60 80 100 120 140 160 Continuous Hours of Operation at 5E-8 amps Output Current

Lifetime at High Pressure: 100 MCP Chevron, 5 Micron Pore Assembly Back-filled Air Detector Gain (Millions) 10 1 0 100 200 300 400 500 600 700 Continuous Hours of Operation at 1uA Output Current 1 X 10-3 Torr 5 X 10-3 Torr

Performance After 300 Hours: 100 Gain Measured at 10-3 Torr MCP Chevron, 5 Micron Pore Assembly Back-filled Air Detector Gain (Millions) 10 1 0.1 1.9 2 2.1 2.2 2.3 2.4 2.5 Applied Voltage (kv)

Performance After 300 Hours: Detector Noise (cts./sec) 1.00 0.90 0.80 0.70 0.60 0.50 0.40 0.30 0.20 0.10 Noise Measured at 10-3 Torr Model 3018MA 5 Micron Pore Assembly Back-filled Air 0.00 1.9 2 2.1 2.2 2.3 2.4 2.5 Applied Voltage (kv)

Experimental Apparatus The experimental apparatus consisted of an Inficon XPR-III Residual Gas Analyzer (0-100 AMU) utilizing a microchannel plate/faraday detector mounted to a turbo pumped vacuum chamber. Chamber pressure was modulated using a Granville Philips precision leak valve connected to choice backfill gases. Sensor pressure was monitored using a combination of calibrated Veeco ionization tubes and Granville Philips convectrons.

Miniature Mass Spectrometer and Electron Multiplier Ionization Source and Mass Filter Faraday Cup and Electron Multiplier

Argon and Hydrogen at 5 milli-torr, Utilizing a Microchannel Plate Based Electron Multiplier Faraday Mode EM Mode

Lab Air Collected at 5.5 milli- Torr Faraday Mode EM Mode

Chemical Durability The performance of an electron multiplier will degrade as a result of everyday operation. Ions from the mass filter impinge on cone of the multiplier and produce a cascading of secondary electrons, ultimately resulting in the signal used to produce the mass spectrum. The constant bombardment of ions on the cone can result in the development of a surface coating which will reduce the efficiency of the secondary electron emission process. Equivalent Electron Multipliers from three manufacturers were subjected to an extended life test. The multipliers were loaded in a demountable test stand and bombarded with ions created from residual gas molecules of the species typically encountered in Residual Gas Analysis (RGA) monitored systems

Gain Stability of Various Multipliers for Bench top GCMS Applications 1.00E+08 BURLE MAGNUM 5900 K&M Model 7596M 1.00E+07 Detector Technology Model 2300 Gain at 1800 V 1.00E+06 1.00E+05 1.00E+04 0 2 4 6 8 10 Extracted Charge (Coulombs)

Chemical Durability Multipliers from three manufacturers were tested for chemical durability in an Agilent 5971 GCMS Chemstation. The internal calibrant PFTBA was used to create ions ranging from mass 69 to mass 512. PFTBA is known to be an aggressive material which quickly degrades multiplier performance. The original instrument ion optics frame was used for this test with all multipliers. Each multiplier was subjected to repetitive test cycles consisting of a Maximum Sensitivity Auto tune, Gain and Linearity tests, then begin the cycle again. The instrument was not vented between cycles. The cycles were repeated until the instrument was no longer able to achieve the requirements of auto tune. Before each multiplier sequence began, the ion source was completely disassembled and cleaned.

Electron Multiplier Life Tests with PFTBA 3000 2800 Autotune Multiplier Voltage 2600 2400 2200 2000 1800 1600 1400 1200 Detector Technology Model 2300 K & M Model 7596M BURL MAGNUM 5900 Detector Technology Failed Autotune after 61 Cycles K & M Failed Autotune After 64 Cycles BURLE MAGNUM Continued to Operate beyond 119 Cycles 1000 0 20 40 60 80 100 120 Autotune Cycles with PFTBA

Conclusions Discrete dynode multipliers develop ion feedback at pressures above 10-5 Torr Single Channel Electron Multipliers Operate well at pressures into the mid 10-5 Torr Range. SPIRALTRON and MAGNUM Electron Multipliers operate well into the 10-4 Torr Range

A specially designed Microchannel Plate-based Electron multiplier has been successfully operated for over 1200 continuous hours at elevated pressures in excess of 10 milli-torr with good performance. A Mass Spectrometer (Inficon XPR-III) utilizing a very short (25mm) quadrupole mass filter and this microchannel plate electron multiplier has been commercialized for process monitoring in semiconductor manufacturing applications.

Multiplier lifetime testing, with low mass ions, for models manufactured by three companies highlighted the differences in gain performance. Multiplier lifetime testing in a bench top GCMS using the internal standard PFTBA to create ions indicated that the 6 channel MAGNUM Electron Multiplier utilizing SPIRALTRON Technology operated over 85% longer than the OEM multiplier.