The Charge-Coupled Device. Many overheads courtesy of Simon Tulloch

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The Charge-Coupled Device Astronomy 1263 Many overheads courtesy of Simon Tulloch smt@ing.iac.es Jan 24, 2013

What does a CCD Look Like? The fine surface electrode structure of a thick CCD is clearly visible as a multi-colored interference pattern. Thinned Backside Illuminated CCDs have a much planer surface appearance. The other notable distinction is the two-fold (at least) price difference. Kodak Kaf1401 Thick CCD MIT/LL CC1D20 Thinned CCD

Structure of a CCD The image area of the CCD is positioned at the focal plane of the telescope. An image then builds up that consists of a pattern of electric charge. At the end of the exposure this pattern is then transferred, pixel at a time, by way of the serial register to the on-chip amplifier. Electrical connections are made to the outside world via a series of bond pads and thin gold wires positioned around the chip periphery. Image area Metal,ceramic or plastic package Connection pins Gold bond wires Bond pads Silicon chip On-chip amplifier Serial register

Why Does a CCD work? Atoms in a silicon crystal have electrons arranged in discrete energy bands. The lower energy band is called the valence band, the upper band is the conduction band. Most of the electrons occupy the Valence band but can be excited into the conduction band by heating or by the absorption of a photon. The energy required for this transition is 1.26 electron volts. Once in this conduction band the electron is free to move about in the lattice of the silicon crystal. It leaves behind a hole in the valence band which acts like a positively charged carrier. In the absence of an external electric field the hole and electron will quickly re-combine and be lost. In a CCD an electric field is introduced to sweep these charge carriers apart and prevent recombination. photon photon Increasing energy Conduction Band Valence Band 1.26eV Hole Electron Thermally generated electrons are indistinguishable from photo-generated electrons. They constitute a noise source known as Dark Current and it is important that CCDs are kept cold to reduce their number. 1.26eV corresponds to the energy of light with a wavelength of 1.1 µm. Beyond this wavelength silicon becomes transparent and CCDs constructed from silicon become insensitive.

How does a CCD work? Charge Coupled Devices (CCDs) were invented in the 1970s and originally found application as memory devices. Their light sensitive properties were quickly exploited for imaging applications and they produced a major revolution in Astronomy. They improved the light gathering power of telescopes by almost two orders of magnitude. CCDs work by converting light into a pattern of electronic charge in a silicon chip. This pattern of charge is converted into a video waveform, digitized and stored as an image file on a computer.

CCD Analogy RAIN (PHOTONS) VERTICAL CONVEYOR BELTS (CCD COLUMNS) BUCKETS (PIXELS) HORIZONTAL CONVEYOR BELT (SERIAL REGISTER) MEASURING CYLINDER (OUTPUT AMPLIFIER)

Exposure finished, buckets now contain samples of rain.

Conveyor belt starts turning and transfers buckets. Rain collected on the vertical conveyor is tipped into buckets on the horizontal conveyor.

Vertical conveyor stops. Horizontal conveyor starts up and tips each bucket in turn into the measuring cylinder.

After each bucket has been measured, the measuring cylinder is emptied, ready for the next bucket load. `

A new set of empty buckets is set up on the horizontal conveyor and the process is repeated.

Structure of a CCD The image area of the CCD is positioned at the focal plane of the telescope. An image then builds up that consists of a pattern of electric charge. At the end of the exposure this pattern is then transferred, pixel at a time, by way of the serial register to the on-chip amplifier. Electrical connections are made to the outside world via a series of bond pads and thin gold wires positioned around the chip periphery. Image area Metal,ceramic or plastic package Connection pins Gold bond wires Bond pads Silicon chip On-chip amplifier Serial register

Structure of a CCD 2. CCDs are are manufactured on silicon wafers using the same photo-lithographic techniques used to manufacture computer chips. Scientific CCDs are very big,only a few can be fitted onto a wafer. This is one reason that they are so costly. The photo below shows a silicon wafer with three large CCDs and assorted smaller devices. A CCD has been produced by Philips that fills an entire 6 inch wafer! It is the worlds largest integrated circuit. Don Groom LBNL

Structure of a CCD 3. The diagram shows a small section (a few pixels) of the image area of a CCD. This pattern is repeated. Channel stops to define the columns of the image Plan View One pixel Transparent horizontal electrodes to define the pixels vertically. Also used to transfer the charge during readout Cross section Electrode Insulating oxide n-type silicon p-type silicon Every third electrode is connected together. Bus wires running down the edge of the chip make the connection. The channel stops are formed from high concentrations of Boron in the silicon.

Structure of a CCD 4. Below the image area (the area containing the horizontal electrodes) is the Serial register. This also consists of a group of small surface electrodes. There are three electrodes for every column of the image area Image Area Serial Register On-chip amplifier at end of the serial register Cross section of serial register Once again every third electrode is in the serial register connected together.

Photomicrograph of a corner of an EEV CCD 160µm Image Area Serial Register Bus wires Read Out Amplifier Edge of Silicon The serial register is bent double to move the output amplifier away from the edge of the chip. This is useful if the CCD is to be used as part of a mosaic. The arrows indicate how charge is transferred through the device.

Structure of a CCD 6. Photomicrograph of the on-chip amplifier of a Tektronix CCD and its circuit diagram. 20µm Output Drain (OD) Gate of Output Transistor Output Source (OS) SW R RD OD Output Node Reset Drain (RD) Reset Transistor R Serial Register Electrodes Summing Well Output Node Output Transistor Summing Well (SW) OS Last few electrodes in Serial Register Substrate

Electric Field in a CCD 1. The n-type layer contains an excess of electrons that diffuse into the p-layer. The p-layer contains an excess of holes that diffuse into the n-layer. This structure is identical to that of a diode junction. The diffusion creates a charge imbalance and induces an internal electric field. The electric potential reaches a maximum just inside the n-layer, and it is here that any photo-generated electrons will collect. All science CCDs have this junction structure, known as a Buried Channel. It has the advantage of keeping the photo-electrons confined away from the surface of the CCD where they could become trapped. It also reduces the amount of thermally generated noise (dark current). n p Electric potential Potential along this line shown in graph above. Cross section through the thickness of the CCD

Electric Field in a CCD 2. During integration of the image, one of the electrodes in each pixel is held at a positive potential. This further increases the potential in the silicon below that electrode and it is here that the photoelectrons are accumulated. The neighboring electrodes, with their lower potentials, act as potential barriers that define the vertical boundaries of the pixel. The horizontal boundaries are defined by the channel stops. n p Electric potential Region of maximum potential

Charge Collection in a CCD. Photons entering the CCD create electron-hole pairs. The electrons are then attracted towards the most positive potential in the device where they create charge packets. Each packet corresponds to one pixel incoming photons pixel boundary pixel boundary Charge packet n-type silicon p-type silicon Electrode Structure SiO2 Insulating layer

Charge Transfer in a CCD 1. In the following few slides, the implementation of the conveyor belts as actual electronic structures is explained. The charge is moved along these conveyor belts by modulating the voltages on the electrodes positioned on the surface of the CCD. In the following illustrations, electrodes color coded red are held at a positive potential, those colored black are held at a negative potential. 1 2 3

Charge Transfer in a CCD 2. 2 1 1 2 3 3 Time-slice shown in diagram

Charge Transfer in a CCD 3. 1 2 3 2 1 3

Charge Transfer in a CCD 4. 1 2 3 2 1 3

Charge Transfer in a CCD 5. 1 2 3 2 1 3

Charge Transfer in a CCD 6. 1 2 3 2 1 3

Charge Transfer in a CCD 7. Charge packet from subsequent pixel enters from left as first pixel exits to the right. 1 2 3 2 1 3

Charge Transfer in a CCD 8. 1 2 3 2 1 3

On-Chip Amplifier 1. The on-chip amplifier measures each charge packet as it pops out the end of the serial register. RD and OD are held at constant voltages SW R RD OD SW R +1 Reset Transistor V out --end of serial register Summing Well Output Node Output Transistor (The graphs above show the signal waveforms) OS V out The measurement process begins with a reset of the reset node. This removes the charge remaining from the previous pixel. The reset node is in fact a tiny capacitance (< 0.1pF)

On-Chip Amplifier 2. The charge is then transferred onto the Summing Well. V out is now at the Reference level SW SW R RD OD R +1 Reset Transistor V out --end of serial register Summing Well Output Node Output Transistor OS V out There is now a wait of up to a few tens of microseconds while external circuitry measures this reference level.

On-Chip Amplifier 3. The charge is then transferred onto the output node. V out now steps down to the Signal level SW SW R RD OD R +1 Reset Transistor V out --end of serial register Summing Well Output Node Output Transistor OS V out This action is known as the charge dump The voltage step in V out is as much as several µv for each electron contained in the charge packet.

On-Chip Amplifier 4. V out is now sampled by external circuitry for up to a few tens of microseconds. SW SW R RD OD R +1 Reset Transistor V out --end of serial register Summing Well Output Node Output Transistor OS V out The sample level - reference level will be proportional to the size of the input charge packet. V out =Q/C node Typically a few to ten microvolts per electron.