NanoZEIT. The Nanoelectronics Center of the Faculty of Electrical and Computer Engineering at Technische Universitaet Dresden

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Faculty of Electrical and Computer Engineering NanoZEIT The Nanoelectronics Center of the Faculty of Electrical and Computer Engineering at Technische Universitaet Dresden Dresden, October 20 th, 2010

Outline Motivation Goals Participants and Scientific Scope Offers and Plans for the Future Summary TU Dresden, 20.10.2010 NanoZeit Folie 2 von 19

Outline Motivation Goals Participants and Scientific Scope Offers and Plans for the Future Summary TU Dresden, 20.10.2010 NanoZeit Folie 3 von 19

Motivation Dresden is one of the top Micro-/Nanoelectronic sites in Europe This is true for Industry, Research as well as Academia At Technische Universitaet Dresden a significant portion of research is dedicated to novel Micro- and Nanoelectronic Systems It is important to align these activities, especially for those that deal with technology and technology related subjects The experimental infrastructure is becoming more and more expensive Synergies have to be used The topics are becoming more and more complex Requires close cooperation of different fields TU Dresden, 20.10.2010 NanoZeit Folie 4 von 19

Outline Motivation Goals Participants and Scientific Scope Offers and Plans for the Future Summary TU Dresden, 20.10.2010 NanoZeit Folie 5 von 19

Goals in the short to medium timeframe the nanoelectronic center plans Connect the existing research Start a demonstration project Enable the partners to attack more complex research topics by using an interdisciplinary approach Provide a common contact point within the university and for external contacts Increase public awareness of Material/Technology/Device and Circuit oriented Nanoelectronic research at the Faculty of Electrical and Computer Engineering at Technische Universitaet Dresden. TU Dresden, 20.10.2010 NanoZeit Folie 6 von 19

Goals As a long term goal the center envisions to setup a common infrastructure to make most efficient use of the limited resources Coordinated project offers to industry Setup a formal structure to each the above mentioned goals TU Dresden, 20.10.2010 NanoZeit Folie 7 von 19

How to reach the Goals? Start with a core team based on material, technology and device expertise (see participants) to enable an effective setup of the structures Postpone formal aspect to a later stage in order to focus on scientific topics Broaden and connect already existing activities rather than to start completely new activities Complement and strengthen other existing and starting activities like DRESDEN concept especially SAC-II TU Dresden, 18.07.2011 Präsentationsname XYZ Folie 8 von XYZ

Outline Motivation Goals Participants and Scientific Scope Offers and Plans for the Future Summary

Participants Prof. J. Bartha Prof. F. Ellinger Prof. W.J. Fischer Prof. G. Gerlach Prof. H. Lakner Prof. T. Mikolajick Prof. A. Richter Prof. R. Schüffny Chair of semiconductor technology / IHM Chair of Circuit Design and Network Theory Chair of Microsystem Technology / IHM Chair of Solid State Electronics Chair of Optoelectronics /IHM Chair of Nanoelectronic Materials /IHM / NaMLab Chair of Polymer Microsystems / IHM Chair of highly parallel VLSI Systems and Neuromicroelectronics Prof. K. Wolter Chair of electronics packaging TU Dresden, 20.10.2010 NanoZeit Folie 10 von 19

Scientific Scope of Participants Devices Materials and Technology Microsystems NanoZEIT The Nanoelectronics Center of the Faculty of Electrical and Computer Engineering at Technische Universitaet Dresden Circuit Design TU Dresden, 20.10.2010 NanoZeit Folie 11 von 19

Location and Interaction Thin Film Technolkogy: Materials Unit processes Moduls/ Devices Electronics packaging Special technologies The Nanoelectronics Center of the Faculty of Electrical and Computer Engineering at Technische Universitaet Dresden Dresden SAC II Planned technology bui uilding NaMLab Cleanroom IHM Mierdel Bau Nötnitzer Str. Physik Materialwissen -schaft FZD, IFW, FhG,, etc. Barkhausen Bau TU Dresden, 20.10.2010 NanoZeit Folie 12 von 19

Outline Motivation Goals Participants and Scientific Scope Offers and Plans for the Future Summary TU Dresden, 20.10.2010 NanoZeit Folie 13 von 19

Offers Research, Training and Consulting on: Materials for Semiconductor Devices Semiconductor Technology Semiconductor Devices Semiconductor Circuits Packaging Microsystems Coordinated offers including the interaction of two or more of the above fields with a single contact point TU Dresden, 20.10.2010 NanoZeit Folie 14 von 19

The Future Define first demonstration project Define a common virtual lab environment Establish a common lab infrastructure If first phase is successful: include other activites of TU Dresden Establish a clear communication structure and single contact point for external comntacts TU Dresden, 20.10.2010 NanoZeit Folie 15 von 19

Outline Motivation Goals Participants and Scientific Scope Offers and Plans for the Future Summary TU Dresden, 20.10.2010 NanoZeit Folie 16 von 19

Summary NanoZeit is a new consortium of Professors from TU Dresden working in the field of Materials, Technology, Devices and Circuits for Micro- and Nanoelectronics. The three main goals are better scientific alignment better transparency to the outside world better use of synergies by using common infrastructure TU Dresden, 20.10.2010 NanoZeit Folie 17 von 19

Further Schedule Microsystems Technology (Chair: G. Gerlach) 11:00 Sensors: Feelings made of Silicon 11:30 Silicon based Photonic Microsystems 12:00 PolyMEMS: Plastics in Action 12:30 Lunch break 13:00 Using Ink-Jet Printing and Nanoimprinting for Microsystems Circuit Design (Chair: J. W. Bartha) 13:30 Mixed Signal VLSI-Design: Advanced Digital and Neuromorphic Circuits 14:00 High Speed Integrated Circuit Design 14:30 Break Technology and Packaging (Chair: H. Lakner) 15:00 Packaging for System Integration 15:30 Technology for Nano- and Micro Structures 16:00 Material Research for Electronic Devices 16:30 Termination of the event! G. Gerlach H. Lakner A. Richter R. Kirchner C. Mayr F. Ellinger K. Wolter J. Bartha T.Mikolajick TU Dresden, 20.10.2010 NanoZeit Folie 18 von 19