Quanta Image Sensor (QIS) - an oversampled visible light sensor

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Quanta Image Sensor (QIS) - an oversampled visible light sensor Eric R. Fossum Front End Electronics (FEE 2014) Argonne National Laboratory May 21, 2014-1-

Contributors Core Donald Hondongwa Jiaju Ma Leo Anzagira Song Chen Saleh Masoodian Arun Rao Yue Song Rachel Zizza Prof. Kofi Odame Prof. Eric Fossum Ad hoc Mike Guidash (Rambus) Jay Endsley (Rambus) Prof. Yue Lu (Harvard) Dr. Igor Carron (the net) Prof. Atsushi Hamasaki Rambus Inc. -2-

Motivation for this work Pixel shrink yields smaller full-well capacity which impacts dynamic range and maximum SNR. Photons, or quanta, are digital in nature according to particle view of light and can be represented by binary data. Better images can be obtained by oversampling in time and space. -3-

Quanta Image Sensor Original goal for QIS was to make a very tiny, specialized pixel ( jot ) which could sense a single photoelectron. Jots would be readout by scanning at a high frame rate to avoid likelihood of multiple hits in the same jot and loss of accurate counting. Image pixels could be created by combining jot data over a local spatial and temporal region using image processing. The first proposed algorithm was the digital film sensor using a grain and digital development construct. -4-

Quanta Image Sensor Jot = specialized sub-diffraction limit (SDL) pixel, sensitive to a single photoelectron with binary output, 0 for no photoelectron, 1 for at least one photoelectron. Many jots are needed to create a single image pixel. e.g. 16x16x16 = 4,096 A QIS might have 1G jots, read out at 1000 fields/sec or 1.0 Tbits/sec -5-

1. Photons to photoelectrons Problems we have been working on Just starting how does light get absorbed by small semiconductor jot structures 2. Photoelectrons to jot signal Invent and evaluate candidate jot devices TCAD modelling of those devices 3. Readout of jot signal to digital circuits Low power, single-bit ADC-per-column 4. Getting massive amounts of data off-chip Compression and compressive sensing? 5. Transforming jot data cube into image Algorithms 6. Understanding imaging characteristics -6-

Understanding QIS Imaging Characteristics E.R. Fossum, Modeling the performance of single-bit and multi-bit quanta image sensors, IEEE J. Electron Devices Society, vol.1(9) pp. 166-174 September 2013. -7-

Photon and photoelectron arrival rate described by Poisson process Define quanta exposure H = f t Probability of k arrivals H = 1 means expect 1 arrival on average. Monte Carlo P k = e H H k k! For jot, only two states of interest P 0 = e H P k > 0 = 1 P 0 = 1 e H For ensemble of M jots, the expected number of 1 s : M 1 = M P[k > 0] -8-

Bit Density Bit Density D M 1 M = 1 e H Can determine H from measured D 1 D H (linear) H = ln 1 D -9-

Film-like Exposure Characteristic QIS D log H Film D log H Bit Density vs. Exposure Film Density vs. Exposure 1890 Hurter and Driffield -10-

Raindrops on Ground H~ 0.3? -11-

Multi-Arrival Threshold (Binary Sensor but not QIS) Binary output of sensor = 1 when # of arrivals k k T Results in reduced higher slope and less overexposure latitude -12-

Shot Noise Variance of a binomial distribution σ 1 2 = M P 0 P k > 0 SNR? -13-

Exposure-Referred Noise σ H = σ 1 dh dm 1 SNR H = H σ H = M H e H 1 M=4096 SNR H 0-14-

Exposure-Referred Noise σ H = σ 1 dh dm 1 SNR H = H σ H = M H e H 1 M=4096 51.5 34.2 db -15-1.6

Readout Assumption for Read Noise ~ 1000 uv/e- Jot Array ~ 150 uv rms = 0.15 e- rms Sense Amps 1 = 3.3 V -16-

Read Noise and Bit Error Rate (BER) -17-

BER vs. Read Noise BER = 1 2 erfc 1 8n r What is an acceptable bit error rate? -18-

BER vs. Read Noise 1 / 20 1 / 2,500 1 / 3,000,000 Fossum 2011 WAG Fossum 2013 Teranishi 2012-19-

Increased Dynamic Range Sum of 16 fields 4@ T=1.0 4@ T=0.2 4@ T=0.04 4@ T=0.008 120 db -20-

Multi-bit Pixels Counting low number of photoelectrons, e.g. 4b yields FW = 15 e- Sum 4x4x16 = 256 pixels Max = 15x256 = 3840 1b v. 4b QIS: M=4096 4b: M=273-21-

Shot Noise and Read Noise Shot Noise σ 2 = < k 2 > < k > 2 plus Read Noise (Gaussian model) P k = e H H k k! -22-

Effect of Read Noise on Photoelectron Counting for Multi-bit Pixel Note peak for H=5 is not at 5 e- 10-23- 0

Transforming the Jot Data Cube into Images Yue Song and E.R. Fossum -24-

End to End System Simulation Input Image 256x256 8b = 0.5 Mb 4096x4096 1b x 16 fields = 256 Mb H = S Hh o 255 Output Image 1024x1024 8b in this example 1 pixel = S 4x4x16 jots SNR 256-25-

Convolution 2D Examples: Binary valued filter 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 Binaryweighted filter * jot data Down sample -26-

Digital Film Sensor Algorithm Threshold e.g. 3 hits in 4x4 gain Synthetic input image After DFS development Plus filter with dynamic kernel size -27-

Readout of Jot Signal to Digital Circuits Saleh Masoodian, Arun Rao, Song Chen, Kofi Odame and E.R. Fossum -28-

Readout Signal Chain Strawman Design General requirements: Need to scan 0.1-10 Gjots at 100-1000 fields per sec 8k 80k jots per column 0.8 80M jots/sec Assumptions: 0.1 Gjot at 100 fps 1Mjot/sec 1 mv/e- conversion gain 150 uv rms noise on column bus (0.15 e- rms) 0.18 um process Vdd = 1.8V -29-

Readout Signal Chain Generic column bus Adapted from Kotani et al. 1998-30-

Readout Signal Chain Generic column bus Adapted from Kotani et al. 1998-31-

1000fps 1 Mjot binary pixel image sensor Process XFAB-XC018, 0.18um, 6M1P VDD 1.8V (Analog), 3.3V (Array) Pixel type 3T-APS Pixel pitch 3.6um Photo-detector Photodiode Conversion gain 200uV/e- Array 1376(H) X 768(V) (WXGA 16:9 ratio) Frame rate 1000fps Column noise < 150uV ADC sampling rate 768KSa/s ADC input referred offset <500uV Output data rate 32 (output pins) X 33 Mb/s Power (Binary imager) Array 2.3mW ADCs 2.5mW Digital 5mW Total 9.8mW I/O pad power 50mW -32-

1000fps 1 Mjot binary pixel image sensor -33-

1000fps 1 Mjot binary pixel image sensor -34- Chips are just back and packaged but untested

65nm pathfinder for 1 Giga jot at 1000fps 1Gjot imager has a 24,000 X 42,000 pixel array Limited space for Dartmouth on multi-project chip on multiproject wafer so only 32 columns There are 24,000 pixels in each column. Power consumption per column is multiplied by 42,000 to get the power consumption of a 1Gjot imager. -35-

65nm pathfinder for 1 Giga jot at 1000fps Process VDD Pixel type Pixel pitch Array Frame rate Column noise ADC sampling rate ADC input referred offset Output data rate Estimated Power (Binary imager) 65nm, 1P5M 1.2V (Analog), 2.5V (Array) 4-shared PPD, 1.75T/pixel 1.4um 32(H) X 24000(V) 1000fps < 150uV 24MSa/s <500uV 32 (output pins) X 24 Mb/s One 1Gjot column (42K column) Array 50uW 2.1W ADC 15uW 0.63W Design in progress, tapeout end of June -36-

Single Bit v. Multi-bit Single Bit Each jot produces 1 bit 1 bit ADC For same flux of photoelectrons, need higher frame rate readout Conceptual simplicity Easier on chip digital electronics Multi-bit Each jot produces n bits n-bit ADC For same flux of photoelectrons, lower relative frame rate 1/2 (n-1) Like current CMOS APS but low FW capacity and high conversion gain (quantized digital integration sensor qdis*) -37- *S, Chen, A. Ceballos, E.R. Fossum, 2013 IISW

Single Bit v. Multi-bit Power Comparison -38-

Jots Jiaju Ma, Donald Hondongwa and E.R. Fossum -39-

Jot Device Considerations General requirements: 200 nm device in 22 nm process node ( 10L ) High conversion gain > 1 mv/e- (per photoelectron) Small storage well capacity ~1-100 e- Complete reset for low noise Low active pixel transistor noise <150 uv rms Low dark current ~ 1 e-/s Not too difficult to fabricate in CIS line For early investigation Cobbled together an imaginary 85 nm process Students learned to use TCAD tools etc. Anticipated that device principles can be migrated to real process -40-

Bipolar Jot Concept S R CMOS APS but use pinning layer as emitter, storage well as base Complete reset of base using TG Emitter follower to reduce base-emitter cap -41-

BSI CMOS APS Jot with Storage under Transfer Gate TG FD R Low capacity storage gate makes barrier easier to overcome with low TG voltage Minimum FD size to increase conversion gain Storage under transfer gate first proposed in Back Illuminated Vertically Pinned Photodiode with in Depth Charge Storage, by J. Michelot, et al., 2011 IISW -42-

Pump-gate Jot Device To Increase Conversion Gain 65 nm Node 1.4 um pitch 3.3 V operation 200 e- FW >300 uv/e- Test array tapeout June 2014-43-

SPAD Implementation of QIS At Univ. Edinburgh -44-

320x240 SPAD-based QIS Dutton et al. IEEE VLSI Symposium 2014 University of Edinburgh & ST Microelectronics 8µm SPAD-based Pixel with 26.8% FF NMOS SPAD SPAD NMOS QIS Digital Readout PW NW PW NW PW NW PW Deep NW P-Sub 320 x 240 SPAD Array 8µm Pixel Analogue Readout 8µm -45-

320x240 SPAD-based QIS Dutton et al. IEEE VLSI Symposium 2014 5k FPS Binary Frames 20 FPS 8b DR (256 frames summed) 0Ph Comparator Threshold 1Ph 2Ph 3Ph 4Ph -46-

Summary Good progress in understanding response v. exposure, SNR, DR, etc. using photon statistics Early progress made on realizing Quanta Image Sensor >2 years support of Rambus (thanks Rambus!) Students up to speed and making great headway Challenges don t look as challenging Lots of work still to do! -47-