FLIP-X Series. Ver T4L/T4LH/T5L/T5LH/T6L/T9/T9H F8/F8L/F8LH/F10/F14/F14H/F17/F17L/F20/F20N N15/N15D/N18/N18D B10/B14/B14H R5/R10/R20

FLIP-X Series T4L/T4LH/T5L/T5LH/T6L/T9/T9H F8/F8L/F8LH/F10/F14/F14H/F17/F17L/F20/F20N N15/N15D/N18/N18D B10/B14/B14H R5/R10/R20 Ver. 1.01 EWA0127101 E50

CONTENTS FLIP-X Installation Manual Safety Instructions 1. Safety Information S-1 2. Signal ords used in this manual S-2 3. Warning labels S-3 3.1 Warning labels S-3 3.1.1 Warning label messages S-3 3.1.2 Supplied arning labels S-5 3.2 Warning symbols S-6 4. Major precautions for each stage of use S-7 4.1 Precautions for using robots and controllers S-7 4.2 Design S-8 4.2.1 Precautions for robots S-8 4.2.2 Precautions for robot controllers S-8 4.3 Moving and installation S-9 4.3.1 Precautions for robots S-9 4.3.2 Precautions for robot controllers S-10 4.4 Safety measures S-12 4.4.1 Safety measures S-12 4.4.2 Installing a safety enclosure S-13 4.5 Operation S-14 4.5.1 Trial operation S-14 4.5.2 Automatic operation S-16 4.5.3 Precautions during operation S-16 4.6 Inspection and maintenance S-18 4.6.1 Before inspection and maintenance ork S-18 4.6.2 Precautions during service ork S-19 4.7 Disposal S-20 5. Emergency action hen a person is caught by robot S-21 6. Using the robot safely S-22 6.1 Robot safety functions S-22 6.2 Special training for industrial robot operation S-23 Warranty T-1

CONTENTS FLIP-X Installation Manual Introduction Before using the single-axis robot FLIP-X series (Be sure to read the folloing notes.) Introduction i iii Chapter 1 Overvie of product 1. Components making up the product 1-1 2. Part names 1-2 Chapter 2 Installation and connections 1. Moving the robot 2-1 1.1 Moving the robot ith hoist or cart 2-1 1.2 Moving the robot by ork personnel 2-2 2. Robot installation conditions 2-3 2.1 Installation environments 2-3 2.2 Installation base 2-4 3. Installing the robot 2-5 3.1 T4L/T4LH/T5L/T5LH/T6L 2-5 3.2 T9/T9H 2-8 3.3 F8/F8L/F8LH 2-11 3.4 F10 2-13 3.5 F14/F14H 2-16 3.6 F17/F17L/F20 2-19 3.7 F20N 2-21 3.8 N15/N15D/N18/N18D 2-23 3.9 B10/B14/B14H 2-25 3.10 R5/R10/R20 2-27 4. Connections 2-29 4.1 Connecting the robot to the controller 2-29 4.2 Changing the cable routing direction 2-31 4.2.1 F10/F14/F14H/F17/F17L/F20 2-31 4.2.2 B10/B14/B14H 2-32 4.3 Changing the motor orientation (B10/B14/B14H) 2-33 4.4 User iring 2-35 5. Setting the operating conditions 2-36 5.1 Payload 2-36 T-2

CONTENTS FLIP-X Installation Manual 5.2 Maximum speed setting 2-37 5.3 Duty 2-37 Chapter 3 Periodic inspection 1. Before beginning ork 3-1 2. List of inspection items 3-3 3. Maintenance parts 3-6 3.1 Consumable parts 3-6 3.2 Robot cables 3-7 3.2.1 Single-axis robot cables 3-7 3.2.2 Multi-robot cables 3-8 Chapter 4 Troubleshooting 1. If you suspect trouble 4-1 1.1 Positioning error 4-1 1.2 Feedback error 4-2 Chapter 5 Specifications 1. Robot specifications 5-1 1.1 T4L/T4LH 5-1 1.2 T5L/T5LH 5-3 1.3 T6L 5-5 1.4 T9 5-7 1.5 T9H 5-9 1.6 F8 5-11 1.7 F8L 5-13 1.8 F8LH 5-16 1.9 F10 5-18 1.10 F14 5-20 1.11 F14H 5-22 1.12 F17 5-24 1.13 F17L 5-27 1.14 F20 5-29 1.15 F20N 5-32 1.16 N15/N15D 5-34 1.17 N18/N18D 5-41 1.18 B10 5-48 1.19 B14 5-52 T-3

1.20 B14H 5-56 1.21 R5 5-60 1.22 R10 5-61 1.23 R20 5-62 Chapter 6 Appendix 1. About machine reference 6-1 2. Equation of moment of inertia calculation 6-2

Safety Instructions Contents 1. Safety Information S-1 2. Signal ords used in this manual S-2 3. Warning labels S-3 3.1 Warning labels S-3 3.1.1 Warning label messages S-3 3.1.2 Supplied arning labels S-5 3.2 Warning symbols S-6 4. Major precautions for each stage of use S-7 4.1 Precautions for using robots and controllers S-7 4.2 Design S-8 4.2.1 Precautions for robots S-8 4.2.2 Precautions for robot controllers S-8 4.3 Moving and installation S-9 4.3.1 Precautions for robots S-9 4.3.2 Precautions for robot controllers S-10 4.4 Safety measures S-12 4.4.1 Safety measures S-12 4.4.2 Installing a safety enclosure S-13 4.5 Operation S-14 4.5.1 Trial operation S-14 4.5.2 Automatic operation S-16 4.5.3 Precautions during operation S-16 4.6 Inspection and maintenance S-18 4.6.1 Before inspection and maintenance ork S-18 4.6.2 Precautions during service ork S-19 4.7 Disposal S-20 5. Emergency action hen a person is caught by robot S-21 6. Using the robot safely S-22 6.1 Robot safety functions S-22 6.2 Special training for industrial robot operation S-23

1. Safety Information Industrial robots are highly programmable, mechanical devices that provide a large degree of freedom hen performing various manipulative tasks. To ensure safe and correct use of YAMAHA industrial robots and controllers, carefully read and comply ith the safety instructions and precautions in this "Safety Instructions" guide. Failure to take necessary safety measures or incorrect handling may result in trouble or damage to the robot and controller, and also may cause personal injury (to installation personnel, robot operator or service personnel) including fatal accidents. Before using this product, read this manual and related manuals and take safety precautions to ensure correct handling. The precautions listed in this manual relate to this product. To ensure safety of the user s final system that includes YAMAHA robots, please take appropriate safety measures as required by the user s individual system. To use YAMAHA robots and controllers safely and correctly, alays comply ith the safety rules and instructions. For specific safety information and standards, refer to the applicable local regulations and comply ith the instructions. This manual and arning labels supplied ith or attached to the robot are ritten in English. Unless the robot operators or service personnel understand English, do not permit them to handle the robot. Cautions regarding the official language of EU countries For equipment that ill be installed in EU countries, the language used for the manuals, arning labels, operation screen characters, and CE declarations is English only. Warning labels only have pictograms or else include arning messages in English. In the latter case, messages in Japanese or other languages might be added. Safety Instructions It is not possible to list all safety items in detail ithin the limited space of this manual. So please note that it is essential that the user have a full knoledge of safety and also make correct judgments on safety procedures. Refer to the manual by any of the folloing methods hen installing, operating or adjusting the robot and controller. 1. Install, operate or adjust the robot and controller hile referring to the printed version of the manual (available for an additional fee). 2. Install, operate or adjust the robot and controller hile vieing the CD-ROM version of the manual on your computer screen. 3. Install, operate or adjust the robot and controller hile referring to a printout of the necessary pages from the CD-ROM version of the manual. S-1

2. Signal ords used in this manual Safety Instructions This manual uses the folloing safety alert symbols and signal ords to provide safety instructions that must be observed and to describe handling precautions, prohibited actions, and compulsory actions. Make sure you understand the meaning of each symbol and signal ord and then read this manual. DANGER Warning c CAUTION This indicates an immediately hazardous situation hich, if not avoided, ill result in death or serious injury. This indicates a potentially hazardous situation hich, if not avoided, could result in death or serious injury. This indicates a potentially hazardous situation hich, if not avoided, could result in minor or moderate injury, or damage to the equipment. n NOTE Explains the key point in the operation in a simple and clear manner. S-2

3. Warning labels Warning labels shon belo are attached to the robot body and controller to alert the operator to potential hazards. To ensure correct use, read the arning labels and comply ith the instructions. 3.1 Warning labels Warning If arning labels are removed or difficult to see, then the necessary precautions may not be taken, resulting in an acident. Do not remove, alter or stain the arning labels on the robot body. Do not allo arning labels to be hidden by devices installed on the robot by the user. Provide proper lighting so that the symbols and instructions on the arning labels can be clearly seen from outside the safety enclosure. 3.1.1 Warning label messages Word messages on the danger, arning and caution labels are concise and brief instructions. For more specific instructions, read and follo the "Instructions on this label" described on the right of each label shon belo. 111 Warning label 1 (SCARA robots, Cartesian robots) DANGER Serious injury may result from contact ith a moving robot. Keep outside of the robot safety enclosure during operation. Press the emergency stop button before entering the safety enclosure. Safety Instructions Instructions on this label Alays install a safety enclosure to keep all persons aay from the robot movement range and prevent injury from contacting the moving part of the robot. Install an interlock that triggers emergency stop hen the door or gate of the safety enclosure is opened. The safety enclosure should be designed so that no one can enter inside except from the door or gate equipped ith an interlock device. Warning label 1 that comes supplied ith a robot should be affixed to an easy-to-see location on the door or gate of the safety enclosure. 222 Warning label 2 (SCARA robots, Cartesian robots, single-axis robots*) * Warning label 2 is not attached to some small single-axis robots, but is supplied ith the robots. Warning Moving parts can pinch or crush hands. Keep hands aay from the movable parts of the robot. 90K41-001470 Instructions on this label Use caution to prevent hands and fingers from being pinched or crushed by the movable parts of the robot hen transporting or moving the robot or during teaching. 90K41-001460 S-3

333 Warning label 3 (SCARA robots, Cartesian robots) Safety Instructions Warning Improper installation or operation may cause serious injury. Before installing or operating the robot, read the manual and instructions on the arning labels and understand the contents. Instructions on this label Be sure to read the arning label and this manual carefully to make you completely understand the contents before attempting installation and operation of the robot. Before starting the robot operation, even after you have read through this manual, read again the corresponding procedures and "Safety instructions" in this manual. Never install, adjust, inspect or service the robot in any manner that does not comply ith the instructions in this manual. 90K41-001290 444 Warning label 4 (SCARA robots) c CAUTION Do not remove the parts on hich Warning label 4 is attached. Doing so may damage the ball scre. Instructions on this label The Z-axis ball scre ill be damaged if the upper end mechanical stopper on the Z-axis spline is removed or moved. Never attempt to remove or move it. 90K41-001520 555 "Read instruction manual" label (Controller)* c CAUTION Refer to the manual. Instructions on this label READ INSTRUCTION MANUAL This indicates important information that you must kno and is described in the manual. Before using the controller, be sure to read the manual thoroughly. When adding external safety circuits or connecting a poer supply to the controller, read the manual carefully and make checks before beginning the ork. Connectors must be attached hile facing a certain direction, so insert each connector in the correct direction. 93005-X0-00 * This label is attached near the poer input connector on the front panel. S-4

3.1.2 Supplied arning labels Some arning labels are not affixed to robots but included in the packing box. These arning labels should be affixed to an easy-to-see location. Warning label is attached to the robot body. Warning label comes supplied ith the robot and should be affixed to an easy-to-see location on the door or gate of the safety enclosure. Warning label comes supplied ith the robot and should be affixed to an easy-to-see location. Warning label 1 SCARA robots * 1 Cartesian robots Single-axis robots Safety Instructions Warning label 2 * 1 * 2 Warning label 3 * 1 Warning label 4 * 1 *1: For the label positions, see the SCARA robot user's manual ("1.2 Part names" in Chapter 1). *2: This label is not attached to some small single-axis robots, but is supplied ith the robots. S-5

3.2 Warning symbols Warning symbols shon belo are printed on the robot and controller to alert the operator to potential hazards. To use the YAMAHA robot safely and correctly alays follo the instructions and cautions indicated by the symbols. Safety Instructions 111 Electrical shock hazard symbol Warning Touching the terminal block or connector may cause electrical shock, so use caution. Instructions by this symbol This indicates a high voltage is present. Touching the terminal block or connector may cause electrical shock. 222 High temperature hazard symbol Warning Motors, heatsinks, and regenerative units become hot, so do not touch them. 93006-X0-00 Instructions by this symbol This indicates the area around this symbol may become very hot. Motors, heatsinks, and regenerative units become hot during and shortly after operation. To avoid burns be careful not to touch those sections. 93008-X0-00 333 Caution symbol c CAUTION Alays read the manual carefully before using the controller. Instructions by this symbol! This indicates important information that you must kno and is described in the manual. Before using the controller, be sure to read the manual thoroughly. When adding external safety circuits or connecting a poer supply to the controller, read the manual carefully and make checks before beginning the ork. Connectors must be attached hile facing a certain direction, so insert each connector in the correct direction. 93007-X0-00 S-6

4. Major precautions for each stage of use This section describes major precautions that must be observed hen using robots and controllers. Be sure to carefully read and comply ith all of these precautions even if there is no alert symbol shon. 4.1 Precautions for using robots and controllers General precautions for using robots and controllers are described belo. 111 Applications here robots cannot be used YAMAHA robots and robot controllers are designed as general-purpose industrial equipment and cannot be used for the folloing applications. DANGER YAMAHA robot controllers and robots are designed as general-purpose industrial equipment and cannot be used for the folloing applications. In medical equipment systems hich are critical to human life In systems that significantly affect society and the general public In equipment intended to carry or transport people In environments hich are subject to vibration such as onboard ships and vehicles. Safety Instructions 222 Qualification of operators/orkers Operators or persons ho handle the robot such as for teaching, programming, movement check, inspection, adjustment, and repair must receive appropriate training and also have the skills needed to perform the job correctly and safely. They must read the manual carefully to understand its contents before attempting the robot operation or maintenance. Tasks related to industrial robots (teaching, programming, movement check, inspection, adjustment, repair, etc.) must be performed by qualified persons ho meet requirements established by local regulations and standards for industrial robots. Warning The robot must be operated only by persons ho have received safety and operation training. Operation by an untrained person is extremely hazardous. Adjustment and maintenance by removing a cover require specialized technical knoledge and skills, and may also involve hazards if attempted by an unskilled person. These tasks must be performed only by persons ho have enough ability and qualifications in accordance ith local las and regulations. For detailed information, please contact your distributor here you purchased the product. S-7

4.2 Design 4.2.1 Precautions for robots Safety Instructions 111 Provide safety measures for end effector (gripper, etc.) Warning End effectors must be designed and manufactured so that they cause no hazards (such as a loose orkpiece or load) even if poer (electricity, air pressure, etc.) is shut off or poer fluctuations occur. If the object gripped by the end effector might possibly fly off or drop, then provide appropriate safety protection taking into account the object size, eight, temperature, and chemical properties. 222 Provide adequate lighting Provide enough lighting to ensure safety during ork. 333 Install an operation status light Warning Install a signal light (signal toer) at an easy-to-see position so that the operator ill be aare of the robot stop status (temporarily stopped, emergency stop, error stop, etc.). 444 Do not use robots for tasks requiring motor thrust c CAUTION Avoid using the belt-driven robots for tasks hich make use of motor thrust (press-fitting, burr removal, etc.). These tasks may cause the robot to malfunction. 555 Clean ork tools Work tools such as elding guns and paint nozzles mounted on the robot manipulator tip should preferably be cleaned automatically hen needed. 4.2.2 Precautions for robot controllers 111 Emergency stop input terminal DANGER Each robot controller has an emergency stop input terminal to trigger emergency stop. Using this terminal, install a safety circuit so that the system including the robot controller ill ork safely. 222 Maintain clearance c CAUTION Do not bundle control lines or communication cables together or in close to the main poer supply or poer lines. Usually separate these by at least 100mm. Failure to follo this instruction may cause malfunction due to noise. S-8

4.3 Moving and installation 4.3.1 Precautions for robots Installation environment 111 Do not use in strong magnetic fields Warning Do not use the robot near equipment or in locations that generate strong magnetic fields. The robot may breakdon or malfunction if used in such locations. 222 Do not use in locations subject to possible electromagnetic interference, etc. Warning Do not use the robot in locations subject to electromagnetic interference, electrostatic discharge or radio frequency interference. The robot may malfunction if used in such locations creating hazardous situations. Safety Instructions 333 Do not use in locations exposed to flammable gases Warning YAMAHA robots are not designed to be explosion-proof. Do not use the robots in locations exposed to explosive or inflammable gases, dust particles or liquid. Failure to follo this instruction may cause serious accidents involving injury or death, or lead to fire. Moving 111 Use caution to prevent pinching or crushing of hands or fingers Warning Moving parts can pinch or crush hands or fingers. Keep hands aay from the movable parts of the robot. As instructed in Warning label 2, use caution to prevent hands or fingers from being pinched or crushed by movable parts hen transporting or moving the robot. For details on arning labels, see "3. Warning labels" in "Safety instructions." 222 Take safety measures hen moving the robot To ensure safety hen moving a SCARA robot ith an arm length of 500mm or more, use the eyebolts that come supplied ith the robot. Refer to the robot manual for details. Installation 111 Protect electrical iring and hydraulic/pneumatic hoses Install a cover or similar item to protect the electrical iring and hydraulic/pneumatic hoses from possible damage. Wiring 111 Protective measures against electrical shock Warning Alays ground the robot to prevent electrical shock. S-9

Adjustment 111 Adjustment that requires removing a cover Safety Instructions Warning YAMAHA robot controllers are not designed to be explosion-proof. Do not use them in locations exposed to explosive or inflammable gases, gasoline or solvent. Fai lure to follo this instruction may cause serious accidents involving injury or death, or lead to fire. For detailed information, please contact your distributor here you purchased the product. 4.3.2 Precautions for robot controllers Installation environment 111 Installation environment Warning YAMAHA robots and robot controllers are not designed to be explosion-proof. Do not use them in locations exposed to explosive or inflammable gases, gasoline or solvent. Failure to follo this instruction may cause serious accidents involving injury or death, and lead to fire. Warning Use the robot controller in locations that support the environmental conditions specified in this manual. Operation outside the specified environmental range may cause electrical shock, fire, malfunction or product damage or deterioration. The robot controller and programming box should be installed at a location that is outside the robot movement range yet here it is easy to operate and vie robot movement. Install the robot controller in locations ith enough space to perform ork (teaching, inspection, etc.) safely. Limited space not only makes it difficult to perform ork but can also cause injury. Install the robot controller in a stable, level location and secure it firmly. Avoid installing the controller upside don or in a tilted position. Provide sufficient clearance around the robot controller for good ventilation. Insufficient clearance may cause malfunction, breakdon or fire. Installation To install the robot controller, observe the installation conditions and method described in the manual. 111 Installation Warning Securely tighten the scres for the L-shaped brackets used to install the robot controller. If not securely tightened, the scres may come loose causing the controller to drop. 222 Connections Warning Alays shut off all phases of the poer supply externally before starting installation or iring ork. Failure to do this may cause electrical shock or product damage. Never directly touch conductive sections and electronic parts other than the connectors, rotary sitches, and DIP sitches on the outside panel of the robot controller. Touching them may cause electrical shock or breakdon. Securely install each cable connector into the receptacles or sockets. Poor connections may cause the controller or robot to malfunction. S-10

Wiring 111 Connection to robot controller The controller parameters are preset at the factory before shipping to match the robot model. Check the specified robot and controller combination, and connect them in the correct combination. Since the softare detects abnormal operation such as motor overloads, the controller parameters must be set correctly to match the motor type used in the robot connected to the controller. 222 Wiring safety points Warning Alays shut off all phases of the poer supply externally before starting installation or iring ork. Failure to do this may cause electrical shock or product damage. c CAUTION Make sure that no foreign matter such as cutting chips or ire scraps get into the robot controller. Malfunction, breakdon or fire may result if these penetrate inside. Do not apply excessive impacts or loads to the connectors hen making cable connections. This might bend the connector pins or damage the internal PC board. When using ferrite cores for noise elimination, be sure to fit them onto the poer cable as close to the robot controller and/or the robot as possible, to prevent malfunction caused by noise. Safety Instructions 333 Wiring method Warning c CAUTION Securely install the connectors into the robot controller and, hen iring the connectors, make the crimp, press-contact or solder connections correctly using the tool specified by the connector manufacturer. When disconnecting the cable from the robot controller, detach by gripping the connector itself and not by tugging on the cable. Loosen the scres on the connector (if fastened ith the scres), and then disconnect the cable. Trying to detach by pulling on the cable itself may damage the connector or cables, and poor cable contact ill cause the controller or robot to malfunction. 444 Precautions for cable routing and installation c CAUTION Alays store the cables connected to the robot controller in a conduit or clamp them securely in place. If the cables are not stored in a conduit or properly clamped, excessive play or movement or mistakenly pulling on the cable may damage the connector or cables, and poor cable contact ill cause the controller or robot to malfunction. Do not modify the cables and do not place any heavy objects on them. Handle them carefully to avoid damage. Damaged cables may cause malfunction or electrical shock. If the cables connected to the robot controller may possibly become damaged, then protect them ith a cover, etc. Check that the control lines and communication cables are routed at a gap sufficiently aay from main poer supply circuits and poer lines, etc. Bundling them together ith poer lines or close to poer lines may cause faulty operation due to noise. 555 Protective measures against electrical shock Warning Be sure to ground the controller using the ground terminal on the poer terminal block. Poor grounding may cause electrical shock. S-11

4.4 Safety measures 4.4.1 Safety measures Safety Instructions 111 Referring to arning labels and manual Warning n NOTE Before starting installation or operation of the robot, be sure to read the arning labels and this manual, and comply ith the instructions. Never attempt any ork or operation unless described in this manual. Never attempt any repair, parts replacement and modification unless described in this manual. These tasks require specialized technical knoledge and skills and may also involve hazards. Please contact your distributor for advice. For details on arning labels, see "3. Warning labels" in "Safety instructions." 222 Dra up "ork instructions" and make the operators/orkers understand them Warning Decide on "ork instructions" in cases here personnel must ork ithin the robot movement range to perform startup or maintenance ork. Make sure the orkers completely understand these "ork instructions". S-12 Decide on "ork instructions" for the folloing items in cases here personnel must ork ithin the robot movement range to perform teaching, maintenance or inspection tasks. Make sure the orkers completely understand these "ork instructions". 1. Robot operating procedures needed for tasks such as startup procedures and handling sitches 2. Robot speeds used during tasks such as teaching 3. Methods for orkers to signal each other hen to or more orkers perform tasks 4. Steps that the orker should take hen a problem or emergency occurs 5. Steps to take after the robot has come to a stop hen the emergency stop device as triggered, including checks for cancelling the problem or error state and safety checks in order to restart the robot. 6. In cases other than above, the folloing actions should be taken as needed to prevent hazardous situations due to sudden or unexpected robot operation or faulty robot operation as listed belo. Place a display sign on the operator panel Ensure the safety of orkers performing tasks ithin the robot movement range Clearly specify position and posture during ork Specify a position and posture here orker can constantly check robot movements and immediately move to avoid trouble if an error/problem occurs Take noise prevention measures Use methods for signaling operators of related equipment Use methods to decide that an error has occurred and identify the type of error Implement the "ork instructions" according to the type of robot, installation location, and type of ork task. When draing up the "ork instructions" make an effort to include opinions from the orkers involved, equipment manufacturer technicians, and orkplace safety consultants, etc. 333 Take safety measures DANGER Never enter the robot movement range hile the robot is operating or the main poer is turned on. Failure to follo this arning may cause serious accidents involving injury or death. Install a safety enclosure or a gate interlock ith an area sensor to keep all persons aay from the robot movement range. When it is necessary to operate the robot hile you are ithin the robot movement range such as for teaching or maintenance/inspection tasks, alays carry the programming box ith you so that you can immediately stop the robot operation in case of an abnormal or hazardous condition. Failure to follo this instruction may cause serious accidents involving injury or death.

Warning During startup or maintenance tasks, display a sign "WORK IN PROGRESS" on the programming box and operation panel in order to prevent anyone other than the person for that task from mistakenly operating the start or selector sitch. If needed, take other measures such as locking the cover on the operation panel. Alays connect the robot and robot controller in the correct combination. Using them in an incorrect combination may cause fire or breakdon. 444 Install system safeguards When configuring an automated system using a robot, hazardous situations are more likely to occur from the automated system than the robot itself. So the system manufacturer should install the necessary safety measures required for the individual system. The system manufacturer should provide a proper manual for safe, correct operation and servicing of the system. Warning To check the robot controller operating status, refer to this manual and to related manuals. Design and install the system including the robot controller so that it ill alays ork safely. 555 Precautions for operation Warning Do not touch any electrical terminal. Directly touching these terminals may cause electrical shock, equipment damage, and malfunction. Do not touch or operate the robot controller or programming box ith et hands. Touching or operating them ith et hands may result in electrical shock or breakdon. Safety Instructions 666 Do not disassemble and modify Warning Never disassemble and modify any part in the robot, controller, and programming box. Do not open any cover. Doing so may cause electrical shock, breakdon, malfunction, injury, or fire. 4.4.2 Installing a safety enclosure Be sure to install a safety enclosure to keep anyone from entering ithin the movement range of the robot. The safety enclosure ill prevent the operator and other persons from coming in contact ith moving parts of the robot and suffering injury. DANGER Serious injury may result from contact ith a moving robot. Keep outside of the robot safety enclosure during operation. Press the emergency stop button before entering the safety enclosure. Warning Install an interlock that triggers emergency stop hen the door or gate of the safety enclosure is opened. The safety enclosure should be designed so that no one can enter inside except from the door or gate equipped ith an interlock device. Warning label 1 (See "3. Warning labels" in "Safety instructions") that comes supplied ith a robot should be affixed to an easy-to-see location on the door or gate of the safety enclosure. S-13

4.5 Operation Safety Instructions When operating a robot, ignoring safety measures and checks may lead to serious accidents. Alays take the folloing safety measures and checks to ensure safe operation. DANGER Check the folloing points before starting robot operation. No one is ithin the robot movement range. The programming unit is in the specified location. The robot and peripheral equipment are in good condition. 4.5.1 Trial operation After installing, adjusting, inspecting, maintaining or repairing the robot, perform trial operation using the folloing procedures. 111 If a safety enclosure has not yet been provided right after installing the robot: then rope off or chain off the movement range around the robot in place of the safety enclosure and observe the folloing points. DANGER Place a "Robot is moving - KEEP AWAY!" sign to keep the operator or other personnel from entering ithin the movement range of the robot. Warning Use sturdy, stable posts hich ill not fall over easily. The rope or chain should be easily visible to everyone around the robot. 222 Check the folloing points before turning on the controller. Is the robot securely and correctly installed? Are the electrical connections to the robot ired correctly? Are items such as air pressure correctly supplied? Is the robot correctly connected to peripheral equipment? Have safety measures (safety enclosure, etc.) been taken? Does the installation environment meet the specified standards? 333 After the controller is turned on, check the folloing points from outside the safety enclosure. Does the robot start, stop and enter the selected operation mode as intended? Does each axis move as intended ithin the soft limits? Does the end effector move as intended? Are the correct signals being sent to the end effector and peripheral equipment? Does emergency stop function? Are teaching and playback functions normal? Are the safety enclosure and interlocks functioning as intended? S-14

444 Working inside safety enclosures Before starting ork ithin the safety enclosure, alays first confirm from outside the enclosure that each safety function is operating correctly (see the previous section 2.3). DANGER Never enter ithin the movement range hile ithin the safety enclosure. Warning Warning When ork is required ithin the safety enclosure, place a sign "Work in progress" in order to keep other persons from operating the controller sitch or operation panel. When ork ithin the safety enclosure is required, alays turn off the controller poer except for the folloing cases: Exception Work ith poer turned on, but robot in emergency stop Origin position setting SCARA robots Follo the precautions and procedure described in "2. Adjusting the origin position" in Chapter 3. Reference coordinate setting SCARA robots Follo the precautions and procedure described in "4. Setting the reference coordinates" in Chapter 3. Follo the precautions and procedure described in "3. Setting the SCARA robots soft limits" in Chapter 3. Soft limit settings Cartesian robots Follo the precautions and procedure described in "Soft limit" in Single-axis robots each controller manual. Safety Instructions Work ith poer turned on Teaching SCARA robots Cartesian robots Single-axis robots Refer to "5. Teaching ithin safety enclosure" described belo. 555 Teaching ithin the safety enclosure When performing teaching ithin the safety enclosure, check or perform the folloing points from outside the safety enclosure. DANGER Never enter ithin the movement range hile ithin the safety enclosure. Warning Make a visual check to ensure that no hazards are present ithin the safety enclosure. Check that the programming box or handy terminal operates correctly. Check that no failures are found in the robot. Check that emergency stop orks correctly. Select teaching mode and disable automatic operation. S-15

4.5.2 Automatic operation Check the folloing points hen operating the robot in AUTO mode. Observe the instructions belo in cases here an error occurs during automatic operation. Automatic operation described here includes all operations in AUTO mode. Safety Instructions 111 Checkpoints before starting automatic operation Check the folloing points before starting automatic operation DANGER Check that no one is ithin the safety enclosure. Check the safety enclosure is securely installed ith interlocks functional. Warning Check that the programming box / handy terminal and tools are in their specified locations. Check that the alarm or error lamps on the robot and peripheral equipment are not lit or flashing. 222 During automatic operation and hen errors occur After automatic operation starts, check the operation status and the signal toer to ensure that the robot is in automatic operation. DANGER Never enter the safety enclosure during automatic operation. Warning If an error occurs in the robot or peripheral equipment, observe the folloing procedure before entering the safety enclosure. 1) Press the emergency stop button to set the robot to emergency stop. 2) Place a sign on the start sitch, indicating that the robot is being inspected in order to keep other persons from restarting the robot. 4.5.3 Precautions during operation 111 When the robot is damaged or an abnormal condition occurs Warning If unusual odors, noise or smoke occur during operation, immediately turn off poer to prevent possible electrical shock, fire or breakdon. Stop using the robot and contact your distributor. If any of the folloing damage or abnormal conditions occurs the robot, then continuing to operate the robot is dangerous. Immediately stop using the robot and contact your distributor. Damage or abnormal condition Damage to machine harness or robot cable Damage to robot exterior Abnormal robot operation (position deviation, vibration, etc.) Z-axis (vertical axis) or brake malfunction Type of danger Electrical shock, robot malfunction Damaged parts fly off during robot operation Robot malfunction Loads fall off 222 High temperature hazard Warning Do not touch the robot controller and robot during operation. The robot controller and robot body are very hot during operation, so burns may occur if these sections are touched. The motor and speed reduction gear casing are very hot shortly after operation, so burns may occur if these are touched. Before touching those parts for inspections or servicing, turn off the controller, ait for a hile and check that their temperature has cooled. S-16

333 Use caution hen releasing the Z-axis (vertical axis) brake Warning The vertical axis ill slide donard hen the brake is released, causing a hazardous situation. Press the emergency stop button and place a support under the vertical axis before releasing the brake. Be careful not to let your body get caught beteen the vertical axis and the installation base hen releasing the brake to perform direct teach. 444 Be careful of Z-axis movement hen the controller is turned off or emergency stop is triggered (air-driven Z-axis) Warning The Z-axis starts moving upard hen poer to the controller or PLC is turned off, the program is reset, emergency stop is triggered, or air is supplied to the solenoid valve for the Z-axis air cylinder. Do not let hands or fingers get caught and squeezed by robot parts moving along the Z-axis. Keep the usual robot position in mind so as to prevent the Z-axis from hanging up or binding on obstacles during raising of the Z-axis except in case of emergency stop. Safety Instructions 555 Take protective measures hen the Z-axis interferes ith peripheral equipment (air-driven Z-axis) Warning When the Z-axis comes to a stop due to obstruction from peripheral equipment, the Z-axis may move suddenly after the obstruction is removed, causing injury such as pinched or crushed hands. Turn off the controller and reduce the air pressure before attempting to remove the obstruction. Before reducing the air pressure, place a support under the Z-axis because the Z-axis ill drop under its on eight. 666 Be careful of Z-axis movement hen air supply is stopped (air-driven Z-axis) Warning The Z-axis ill slide donard hen the air pressure to the Z-axis air cylinder solenoid valve is reduced, creating a hazardous situation. Turn off the controller and place a support under the Z-axis before cutting off the air supply. 777 Make correct parameter settings c CAUTION The robot must be operated ith the correct tolerable moment of inertia and acceleration coefficients that match the manipulator tip mass and moment of inertia. Failure to follo this instruction ill lead to a premature end to the drive unit service life, damage to robot parts, or cause residual vibration during positioning. 888 If the X-axis, Y-axis or R-axis rotation angle is small c CAUTION If the X-axis, Y-axis or R-axis rotation angle is set smaller than 5 degrees, then it ill alays move ithin the same position. This restricted position makes it difficult for an oil film to form on the joint support bearing, and so may possibly damage the bearing. In this type of operation, add a range of motion so that the joint moves through 90 degrees or more, about 5 times a day. S-17

4.6 Inspection and maintenance Safety Instructions Alays perform daily and periodic inspections and make a pre-operation check to ensure there are no problems ith the robot and related equipment. If a problem or abnormality is found, then promptly repair it or take other measures as necessary. Keep a record of periodic inspections or repairs and store this record for at least 3 years. 4.6.1 Before inspection and maintenance ork 111 Do not attempt any ork or operation unless described in this manual. Never attempt any ork or operation unless described in this manual. If an abnormal condition occurs, please be sure to contact your distributor. Our service personnel ill take appropriate action. Warning Never attempt installation, adjustment, inspection and maintenance unless described in this manual. Never attempt any repair and parts replacement unless described in this manual. These tasks require specialized technical knoledge and skills and may also involve hazards. Please be sure to contact your distributor for advice. 222 Precautions during repair and parts replacement Warning When it is necessary to repair or replace parts of the robot or controller, please be sure to contact your distributor and follo the instructions they provide. Inspection and maintenance of the robot or controller by an unskilled, untrained person is extremely hazardous. Adjustment, maintenance and parts replacement require specialized technical knoledge and skills, and also may involve hazards. These tasks must be performed only by persons ho have enough ability and qualifications required by local las and regulations. WARNING Adjustment and maintenance by removing a cover require specialized technical knoledge and skills, and may also involve hazards if attempted by an unskilled person. For detailed information, please contact your distributor here you purchased the product. 333 Shut off all phases of poer supply Warning Alays shut off all phases of the poer supply externally before cleaning the robot and controller or securely tightening the terminal scres etc. Failure to do this may cause electrical shock or product damage or malfunction. 444 Allo a aiting time after poer is shut off (Allo time for temperature and voltage to drop) Warning When performing maintenance or inspection of the robot controller under your distributor's instructions, ait at least 30 minutes for the RCX series or 5 minutes for the SR1 series after turning the poer off. Some components in the robot controller are very hot or still retain a high voltage shortly after operation, so burns or electrical shock may occur if those parts are touched. The motor and speed reduction gear casing are very hot shortly after operation, so burns may occur if they are touched. Before touching those parts for inspections or servicing, turn off the controller, ait for a hile and check that the temperature has cooled. 555 Precautions during inspection of controller Warning When you need to touch the terminals or connectors on the outside of the controller during inspection, alays first turn off the controller poer sitch and also the poer source in order to prevent possible electrical shock. Do not disassemble the controller. Never touch any internal parts of the controller. Doing so may cause breakdon, malfunction, injury, or fire. S-18

4.6.2 Precautions during service ork 111 Precautions hen removing a motor (Cartesian robots and vertical mount single-axis robots) Warning The vertical axis ill slide don hen the motor is removed, causing a hazardous situation. Turn off the controller and place a support under the vertical axis before removing the motor. Be careful not to let your body get caught by the driving unit of the vertical axis or beteen the vertical axis and the installation base. 222 Be careful hen removing the Z-axis motor (SCARA robots) Warning The Z-axis ill slide donard hen the Z-axis motor is removed, causing a hazardous situation. Turn off the controller and Place a support under the Z-axis before removing the Z-axis motor. Be careful not to let your body get caught by the driving unit of the Z-axis or beteen the Z-axis drive unit and the installation base. 333 Do not remove the Z-axis upper limit mechanical stopper c CAUTION Warning label 4 is attached to each SCARA robot. (For details on arning labels, see "3. Warning labels" in "Safety instructions.") Removing the upper limit mechanical stopper installed to the Z-axis spline or shifting its position ill damage the Z-axis ball scre. Never attempt to remove it. Safety Instructions 444 Use caution hen handling a robot that contains poerful magnets Warning Poerful magnets are installed inside the robot. Do not disassemble the robot since this may cause injury. Devices that may malfunction due to magnetic fields must be kept aay from this robot. 555 Use the folloing caution items hen disassembling or replacing the pneumatic equipment. Warning Air or parts may fly outard if pneumatic equipment is disassembled or parts replaced hile air is still supplied. Do service ork after turning off the controller, reducing the air pressure, and exhausting the residual air from the pneumatic equipment. Before reducing the air pressure, place a support stand under the Z-axis (2-axis robots ith air driven Z-axis) since it ill drop under its on eight. 666 Use caution to avoid contact ith the controller cooling fan Warning Touching the rotating fan may cause injury. If removing the fan cover, first turn off the controller and make sure the fan has stopped. 777 Precautions for robot controllers c CAUTION Back up the robot controller internal data on an external storage device. The robot controller internal data (programs, point data, etc.) may be lost or deleted for unexpected reasons. Alays make a backup of this data. Do not use thinner, benzene, or alcohol to ipe off the surface of the programming box. The surface sheet may be damaged or printed letters or marks erased. Use a soft, dry cloth and gently ipe the surface. Do not use a hard or pointed object to press the keys on the programming box. Malfunction or breakdon may result if the keys are damaged. Use your fingers to operate the keys. Do not insert any SD memory card other than specified into the SD memory card slot in the programming box. Malfunction or breakdon may result if the rong memory card is inserted. S-19

4.7 Disposal When disposing of robots and related items, handle them carefully as industrial astes. Use the correct disposal method in compliance ith your local regulations, or entrust disposal to a licensed industrial aste disposal company. Safety Instructions 111 Disposal of lithium batteries When disposing of lithium batteries, use the correct disposal method in compliance ith your local regulations, or entrust disposal to a licensed industrial aste disposal company. We do not collect and dispose of the used batteries. 222 Disposal of packing boxes and materials When disposing of packing boxes and materials, use the correct disposal method in compliance ith your local regulations. We do not collect and dispose of the used packing boxes and materials. 333 Strong magnet Warning Strong magnets are installed in the robot. Be careful hen disposing of the robot. S-20

5. Emergency action hen a person is caught by robot If a person should get caught beteen the robot and a mechanical part such as the installation base, then release the axis. Emergency action n NOTE Release the axis hile referring to the folloing section in the manual for the robot controller. Controller Refer to: RCX240 Section 8, "Freeing a person caught by the robot" in Chapter 1 Make a printout of the relevant page in the manual and post it a conspicuous location near the controller. Safety Instructions S-21

6. Using the robot safely 6.1 Robot safety functions Safety Instructions Safety functions for YAMAHA robots are described belo. 111 Overload detection This function detects an overload applied to the motor and shuts off the servo poer. If an overload error occurs, take the folloing measures to avoid such errors: 1. Insert a timer in the program. 2. Reduce the acceleration coefficient. 222 Overheat detection This function detects an abnormal temperature rise in the driver inside the controller and shuts off the servo poer. If an overheat error occurs, take the folloing measures to avoid the error: 1. Insert a timer in the program. 2. Reduce the acceleration coefficient. 333 Soft limits Soft limits can be set on each axis to limit the orking envelope in manual operation after return-to-origin and during automatic operation. The orking envelope is the area limited by soft limits. Warning Soft limits must be set ithin the movement range (mechanical stopper). If the soft limit is set outside the movement range, then the robot axis may collide ith the mechanical stopper at high speed, causing the object gripped by the end effector to fly outard or drop, and the robot to malfunction. 444 Mechanical stoppers Warning If the servo poer is shut off by emergency stop operation or safety function hile the robot is moving, then these mechanical stoppers prevent the axis from exceeding the movement range. No mechanical stopper is provided on the rotational axis. The movement range is the area limited by the mechanical stoppers. The X and Y axes have mechanical stoppers that are installed at both ends of the maximum movement range. Some robot models have a standard feature that allos changing the mechanical stopper positions. On some other models, the mechanical stopper positions can also be changed by using option parts. The Z-axis has a mechanical stopper at the upper end and loer end. The stopper positions can be changed by using option parts. No mechanical stopper is provided on the R-axis. Axis movement does not stop immediately after the servo poer supply is shut off by emergency stop or other safety functions. 555 Z-axis (vertical axis) brake An electromagnetic brake is installed on the Z-axis to prevent the Z-axis from sliding donard hen servo poer is OFF. This brake is orking hen the controller is OFF or the Z-axis servo poer is OFF even hen the controller is ON. The Z-axis brake can be released by the programming unit / handy terminal or by a command in the program hen the controller is ON. Warning The vertical axis ill slide donard hen the Z-axis brake is released, creating a hazardous situation. Press the emergency stop button and place a support under the vertical axis before releasing the brake. Be careful not to let your body get caught beteen the vertical axis and installation base hen releasing the brake to perform direct teach. S-22

6.2 Special training for industrial robot operation Operators or persons ho handle the robot for tasks such as for teaching, programming, movement checks, inspections, adjustments, and repairs must receive appropriate training and also have the skills needed to perform the job correctly and safely. They must also read the manual carefully to understand its contents before attempting the robot operation or maintenance. Tasks related to industrial robots (teaching, programming, movement check, inspection, adjustment, repair, etc.) must be performed by qualified persons ho meet requirements established by local regulations and safety standards for industrial robots. Safety Instructions This manual does not serve as a guarantee of any industrial property rights or any other rights and does not grant a license in any form. Please acknoledge that e bear no liability hatsoever for any problems involving industrial property rights hich may arise from the contents of this manual. 2012 YAMAHA MOTOR CO., LTD. S-23

Revision record Manual version Issue date Description Ver. 1.00 May 2012 First edition Ver. 1.01 Jun. 2012 Description of "Emergency action hen a person is caught by robot" as added, the ork sequence for orking ithin the safety enclosure changed, typing errors corrected, etc. Jun. 2012 Ver. 1.01 This manual is based on Ver. 1.01 of Japanese manual. YAMAHA MOTOR CO., LTD. IM Operations All rights reserved. No part of this publication may be reproduced in any form ithout the permission of YAMAHA MOTOR CO., LTD. Information furnished by YAMAHA in this manual is believed to be reliable. Hoever, no responsibility is assumed for possible inaccuracies or omissions. If you find any part unclear in this manual, please contact your distributor.

Warranty For information on the arranty period and terms, please contact our distributor here you purchased the product. This arranty does not cover any failure caused by: 1. Installation, iring, connection to other control devices, operating methods, inspection or maintenance that does not comply ith industry standards or instructions specified in the YAMAHA manual; 2. Usage that exceeded the specifications or standard performance shon in the YAMAHA manual; 3. Product usage other than intended by YAMAHA; 4. Storage, operating conditions and utilities that are outside the range specified in the manual; 5. Damage due to improper shipping or shipping methods; 6. Accident or collision damage; 7. Installation of other than genuine YAMAHA parts and/or accessories; 8. Modification to original parts or modifications not conforming to standard specifications designated by YAMAHA, including customizing performed by YAMAHA in compliance ith distributor or customer requests; 9. Pollution, salt damage, condensation; 10. Fires or natural disasters such as earthquakes, tsunamis, lightning strikes, ind and flood damage, etc; 11. Breakdon due to causes other than the above that are not the fault or responsibility of YAMAHA; Warranty The folloing cases are not covered under the arranty: 1. Products hose serial number or production date (month & year) cannot be verified. 2. Changes in softare or internal data such as programs or points that ere created or changed by the customer. 3. Products hose trouble cannot be reproduced or identified by YAMAHA. 4. Products utilized, for example, in radiological equipment, biological test equipment applications or for other purposes hose arranty repairs are judged as hazardous by YAMAHA. THE WARRANTY STATED HEREIN PROVIDED BY YAMAHA ONLY COVERS DEFECTS IN PRODUCTS AND PARTS SOLD BY YAMAHA TO DISTRIBUTORS UNDER THIS AGREEMENT. ANY AND ALL OTHER WARRANTIES OR LIABILITIES, EXPRESS OR IMPLIED, INCLUDING BUT NOT LIMITED TO ANY IMPLIED WARRANTIES OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE ARE HEREBY EXPRESSLY DISCLAIMED BY YAMAHA. MOREOVER, YAMAHA SHALL NOT BE HELD RESPONSIBLE FOR CONSEQUENT OR INDIRECT DAMAGES IN ANY MANNER RELATING TO THE PRODUCT. Ver.1.00_201205

Introduction Contents Before using the single-axis robot FLIP-X series (Be sure to read the folloing notes.) i Introduction iii

Before using the single-axis robot FLIP-X series (Be sure to read the folloing notes.) Thanks for your purchasing YAMAHA single-axis robot FLIP-X series. Before using this robot, read the folloing notes and set the origin position. The single-axis robot FLIP-X series uses absolute position detectors that do not require return-to-origin after turning on the controller poer again. Hoever, hen the controller poer is turned on in the folloing cases, return-to-origin must be performed just the very first time. 1. When robot cable as first connected after delivery from YAMAHA. 2. When robot cable as disconnected from the controller and then reconnected. 3. When no absolute battery is connected. 4. When a motor or cable as replaced. Introduction In such cases described above, any of the folloing errors occurs immediately after the controller poer has been turned on, but this is not a malfunction. The controller ill operate normally by restarting. When using an SR1 controller: 15 : FEEDBACK ERROR 2 23 : ABS BAT. LOW VOLTAGE 24 : ABS DATA ERROR...etc. When using an RCX240, RCX222 controller: 17.81 : D?.ABS.battery ire breakage 17.92 : D?.Resolver disconnected during poer off 17.93 : D?.Position backup counter overflo...etc. When using a TS-X controller: 82 ENCODER ERROR 83 ABS. ENCODER ERR. 8A ABS. BATTERY ERR. 8B ABS. COUNT ERROR 8D ABS. OVERFLOW ERR....etc. i

Setting the origin position Set the origin position hile referring to the folloing section in the robot controller user's manual. When using an SR1 controller: Introduction See "9.1.1 Return-to-origin by the search method" in Chapter 9 of the "HPB Operation Guide" section. When using an RCX240 controller: See "11.9 Absolute reset" in Chapter 4. When using an RCX222 controller: See "11.8 Absolute reset" in Chapter 4. When using a TS-X controller: c CAUTION n NOTE See "6.2 Origin search (return-to-origin)" in "6. Operating the robot" of the "HT1 Operation Guide" section. Changing the origin position to the opposite side of the initial position may cause a position shift or robot breakdons, so use caution. Avoid changing the origin detection method since it is dangerous in some cases. If the origin position must be changed, please consult your distributor. For N type (N15/N15D/N18/N18D) robot After setting the origin position, affix the stickers (triangular stickers supplied ith the robot) to both the tool side and orkpiece side so that they can be used as the alignment marks. Use these marks as the reference position the next time the origin position must be set. ii

Introduction The YAMAHA SINGLE AXIS ROBOT FLIP-X series a family of single-axis industrial robots that use the absolute positioning method as a standard feature to improve ease of use, resistance to environmental conditions, and maintenance orkability. A ide variety of product lineup allos you to select the desired robot model that best matches your application. This manual describes the safety measures, handling, adjustment and maintenance of FLIP-X series robots for correct, safe and effective use. Be sure to read this manual carefully before installing the robot. Even after you have read this manual, keep it in a safe and convenient place for future reference. This manual should be used ith the robot and considered an integral part of it. When the robot is moved, transferred or sold, send this manual to the ne user along ith the robot. Be sure to explain to the ne user the need to read through this manual. Specifications of robot models other than standard models may be omitted in this manual if they are common to those of standard models. In this case, refer to the specifications of standard models. For details on specific operation of the robot, refer to the separate user's manual for the robot controller being used. Introduction The manual describes the robots listed belo. Type name Model name T type F type R type B type N type T4L, T4LH, T5L, T5LH, T6L, T9, T9H F8, F8L, F8LH, F10, F14, F14H, F17, F17L, F20, F20N R5, R10, R20 B10, B14, B14H N15, N15D, N18, N18D WARNING The adjustment and maintenance ork ith the cover removed needs the special knoledge and skill. If unskilled ork person performs such ork, this may involve risk. These tasks must be performed only by persons ho have enough ability and qualifications in accordance ith local las and regulations, by referring to the separate maintenance manual. For detailed information, please contact your distributor here you purchased the product. NOTES The contents of this manual are subject to change ithout prior notice. Information furnished by YAMAHA in this manual is believed to be reliable. Hoever, if you find any part unclear or inaccurate in this manual, please contact your distributor. YAMAHA MOTOR CO., LTD. IM Operations iii

Chapter 1 Overvie of product Contents 1. Components making up the product 1-1 2. Part names 1-2

1. Components making up the product After unpacking, make sure that all components and accessories are included (as specified in your order). Also check the product for any damage on the exterior hich might have occurred during transportation. If there are any missing parts or damage due to transportation, please notify your distributor immediately. 1 Example Controller : SR1 Robot : B10, B14 or B14H Product name Single-axis robot 1 SR1 1 Robot cable 1 I/O connector 1 Battery 1 Battery attachment Qty 1set Warning label 1 (Danger label) 1 Affix to a conspicuous spot in the system. Overvie of product Warning label 3 (Warning label) 1 Affix to a conspicuous spot in the system. Belt tension adjusting bolt 1 Cover seal (long stroke model only) 3 HPB 1 Option POPCOM 1 Option SD memory card 1 Option WARNING Take out the robot from the packing box by appropriate ork personnel* 1. When to or more ork personnel take out the robot from the packing box, hold the bottoms close to the both ends of the robot securely and take out the robot safely. At this time, move the robot so that it faces upard (slider is located at the top). *1: For robots ith a eight of 30KG or more, to or more ork personnel must ork together. for details about robot eight, see 1. Robot specifications in Chapter 5. When unpacking, be careful not to drop the robot body. If the robot body drops, this may cause serious personal injury or damage to other units. 1-1

1 2. Part names T4L Slider Overvie of product Endplate Slider cover Shutter Side cover Side cover mounting scre Motor case Robot cable (motor ires) Robot cable (I/O signal ires) 23101-A1-00 F14 Slider Upper cover End plate Robot cable (I/O signal ires) Robot cable (motor ires) 23101-A7-00 1-2

B10 Robot cable (I/O signal ires) Robot cable (motor ires) 1 Slider N15 Upper cover End plate 23101-AC-00 Overvie of product Robot cable (motor ires) Robot cable (I/O signal ires) Cable cover Slider Cable carrier End cover 1 End cover 2 23101-AA-00 1-3

Chapter 2 Installation and connections Contents 1. Moving the robot 2-1 1.1 Moving the robot ith hoist or cart 2-1 1.2 Moving the robot by ork personnel 2-2 2. Robot installation conditions 2-3 2.1 Installation environments 2-3 2.2 Installation base 2-4 3. Installing the robot 2-5 3.1 T4L/T4LH/T5L/T5LH/T6L 2-5 3.2 T9/T9H 2-8 3.3 F8/F8L/F8LH 2-11 3.4 F10 2-13 3.5 F14/F14H 2-16 3.6 F17/F17L/F20 2-19 3.7 F20N 2-21 3.8 N15/N15D/N18/N18D 2-23 3.9 B10/B14/B14H 2-25 3.10 R5/R10/R20 2-27 4. Connections 2-29 4.1 Connecting the robot to the controller 2-29 4.2 Changing the cable routing direction 2-31 4.2.1 F10/F14/F14H/F17/F17L/F20 2-31 4.2.2 B10/B14/B14H 2-32 4.3 Changing the motor orientation (B10/B14/B14H) 2-33 4.4 User iring 2-35 5. Setting the operating conditions 2-36 5.1 Payload 2-36 5.2 Maximum speed setting 2-37 5.3 Duty 2-37

1. Moving the robot 1.1 Moving the robot ith hoist or cart Using a hoist, carrying cart (dolly) or forklift is recommended for moving a single-axis robot or controller. Use sufficient caution hen moving robot models ith a long stroke or designed for large payload, since they are heavy. Moving the robot 2 WARNING RCX240 23201-A0-00 Serious injury may occur if the robot falls and pins someone under it. Use a hoist and rope ith carrying capacity strong enough to support the robot eight. Make sure the rope stays securely on the hoist hook. Remove all loads attached to the robot manipulator end. If any load is still attached, the robot balance might shift hile being carried, and the robot topple over causing accidents. Alays ear a safety helmet, shoes and gloves during ork. When moving the robot by equipment such as a forklift that requires a license, only properly qualified personnel may operate such equipment. The equipment and tools used for moving the robot should be serviced daily. Installation and connections 2-1

1.2 Moving the robot by ork personnel 2 Installation and connections Be sure to move the robot by a reasonable number of ork personnel.(*1) Each ork person holds the bottom close to the both ends of the robot and moves the robot hile keeping its balance. At this time, move the robot so that it faces upard (slider is located at the top). *1 : For robots ith a eight of 30kg or more, to or more ork personnel must ork together. For details about robot eight, see "1. Robot specifications" in Chapter 5. WARNING ALWAYS OBSERVE THE FOLLOWING PRECAUTIONS WHEN CARRYING THE ROBOT. REMOVE ANY AND ALL OBJECTS SUCH AS HANDS AND GRIPPERS ATTACHED TO THE ROBOT SLIDER BEFORE MOVING THE ROBOT. THE SLIDER WILL LOSE BALANCE IF MOVED WITH OBJECTS STILL ATTACHED AND CAUSE INJURIES. KEEP THE ROBOT BALANCED AND DON'T LET IT TILT WHILE MOVING IT. IF THE ROBOT TILTS, THE SLIDER MAY MOVE UNDER ITS OWN WEIGHT CAUSING SERIOUS INJURIES SUCH AS CRUSHED FINGERS. MOVE THE SLIDER SO THAT BALL NUT SECTION IS POSITIONED IN THE NEAR CENTER OF THE ROBOT BEFORE CARRYING THE ROBOT. FAILURE TO DO SO MAY CAUSE THE BALL SCREW TO SWING OR VIBRATE LARGELY WHILE CARRYING THE ROBOT. c CAUTION Slider L NEVER ATTEMPT TO HOLD THE ROBOT IN ANY OF THE FOLLOWING MANNERS. [Never try this hen moving!] DO NOT CARRY BY HOLDING THE SLIDER. DO NOT CARRY BY GRIPPING THE END COVER. L / 2 DO NOT CARRY BY HOLDING THE CABLE. DO NOT CARRY BY HOLDING THE UPPER COVER. When moving or carrying the robot by hand, avoid placing your hand or fingers on the shutter at the top of the robot. Pressing don on the shutter, even by a little force, may cause the shutter to arp or deform, resulting in a premature life end of the related parts. Wear safety shoes and gloves before starting the ork. 2-2

2. Robot installation conditions 2.1 Installation environments Be sure to install the robot in the folloing environments. Items Alloable ambient 0 to 45 C temperature Alloable ambient 35 to 85% RH (non condensation) humidity Specifications 2 Altitude Ambient environments Vibration Working space 0 to 1000 meters above sea level Avoid installing near ater, cutting ater, oil, dust, metallic chips and organic solvent. Avoid installation near corrosive gas and corrosive materials. Avoid installation in atmosphere containing inflammable gas, dust and liquid. Avoid installation near objects causing electromagnetic interference, electrostatic discharge and radio frequency interference. Do not subject to impacts or vibrations. Allo sufficient space margin to perform jobs (teaching, inspection, repair, etc.) For detailed information on ho to install the robot controller, refer to the separate "YAMAHA Robot Controller User s Manual". WARNING Avoid installing the robot in locations here the ambient conditions may exceed the alloable temperature or humidity, or in environments here excessive moisture, corrosive gases, metallic poder or dust are generated. Malfunctions, failures or short circuits may otherise result. This robot as not designed for operation in environments here inflammable or explosive substances are present. Do not use the robot in environments containing inflammable gas, dust or liquids. Explosions or fire could otherise result. Avoid using the robot in locations subject to electromagnetic interference, electrostatic discharge or radio frequency interference. Malfunctions may otherise occur. Do not use the robot in locations subject to excessive vibration. Robot installation bolts may otherise become loose causing the manipulator to fall over. Installation and connections 2-3

2.2 Installation base To mount the robot, use an installation base that satisfies the folloing conditions. 2 1. The installation base is subjected to a great deal of stress hile the robot is in operation. Prepare a sufficiently rigid and stable installation base, taking into account the robot eight including the end effector (gripper) and orkpiece. WARNING If the installation base is not sufficiently rigid and stable, vibration (resonance) may occur during operation, causing adverse effects on the robot ork. Installation and connections 2. The installation base surface must be machined ithin a flatness of ±0.05mm/500mm. c CAUTION The robot positioning accuracy might decrease if the installation surface precision is insufficient. 3. Use an installation base of sufficient size to match the robot body so that the robot can be installed ith the specified number of bolts. Avoid installing the robot ith less than the specified number of bolts or installing the robot closer to one end as shon at the loer right. Example of installation base Good example Installation base Bad example Installation base WARNING n NOTE WHEN INSTALLING THE ROBOT, ALWAYS USE ALL THE MOUNTING HOLES DRILLED IN THE BOTTOM OF THE ROBOT. USING LESS THAN THE SPECIFIED NUMBER OF BOLTS TO INSTALL THE ROBOT MAY CAUSE VIBRATION AND POOR POSITIONING ACCURACY. THIS MAY ALSO RESULT IN POSITIONING ERRORS AND REDUCED SERVICE LIFE IN THE WORST CASES. 23203-A0-00 Positions of robot mounting holes differ according to the stroke length of each robot. For details, see the external vie and dimensions stated in "1. Robot specifications" of Chapter 5. 2-4

3. Installing the robot 3.1 T4L/T4LH/T5L/T5LH/T6L To install the T4L/T4LH/T5L/T5LH/T6L robot, tap holes in the installation base and secure the robot to the base ith M4 bolts from the inside of the robot frame. WARNING The installation ork ith the cover removed needs the special knoledge and skill. If unskilled ork person performs this ork, this may involve risk. Only qualified engineers ho have the skill and license in accordance ith the las and regulations in each country are alloed to carry out the installation ork. WARNING c CAUTION BEFORE INSTALLING THE ROBOT, ALWAYS MAKE SURE THAT THE ROBOT CONTROLLER IS NOT CONNECTED TO THE ROBOT OR THE POWER TO THE CONTROLLER IS OFF. SERIOUS ACCIDENTS MAY OCCUR IF THE ROBOT STARTS TO OPERATE DURING INSTALLATION. BE SURE TO USE THE BOLTS OF THE SPECIFIED SIZE AND LENGTH AND TIGHTEN THEM SECURELY TO THE CORRECT TORQUE IN THE CORRECT POSITIONS. FAILURE TO FOLLOW THIS INSTRUCTION MAY CAUSE ROBOT VIBRATIONS, POSITION ERRORS AND SERIOUS ACCIDENTS. DO NOT USE A BOLT LONGER THAN THE SPECIFIED LENGTH SINCE IT MAY INTERFERE WITH THE INTERNAL PARTS OF THE ROBOT AND CAUSE MALFUNCTIONS. Be sure to ear safety gloves before starting the installation ork. If you touch any steel material part by bare hand, this may cause rust. Installation method 1 Tap M4 holes in the installation base here the robot is to be secured. n NOTE For details about machining dimensions and positions, see the external vie and dimensions stated in "1. Robot specifications" of Chapter 5. 2 Remove the side covers (on both sides). Remove the scres securing the side covers of the robot and remove the side covers (on both sides). Be careful not to drop any scre. Step 2 Removing the side cover Side cover Shutter Slider 2 Installation and connections 23201-A1-00 3 Move the slider. Move the slider to a position here the installation holes in the bottom of the robot are not hidden. 23202-A1-00 Step 3 Moving the slider T4L T4LH T5L T5LH T6L 2-5

4 Secure the robot body. Secure the robot body to the installation base ith the specified bolts. Step 4 Installing the robot 23203-A1-00 The bolts and tightening torque are shon belo. 2 Installation and connections WARNING c CAUTION Robot Bolt Tightening torque T4L T4LH T5L T5LH T6L Hex socket-head bolt (M4) Strength: 8.8T Length: 12mm (recommended) Hex socket-head bolt (M4) Strength: 8.8T Length: 15mm (recommended) Hex socket-head bolt (M4) Strength: 8.8T Length: longer than 20mm 30 to 45kgf cm Be sure to tighten the bolt to the correct torque. The rong torque may not only cause robot position errors but also lead to serious accidents. Be careful not to damage the shutter hen tightening the bolts. 5 Reattach the side covers after installing the robot. Be sure to tighten all the bolts securely. 2-6 T4L T4LH T5L T5LH T6L

Protective bonding WARNING Alays ground the robot and controller unit to prevent electrical shock. Alays use the ground terminal (M4 scre) on the robot unit to make ground connection. The ground terminal location is shon belo. Ground terminal position 2 c CAUTION WARNING Robot cable Ground terminal Ground terminal 23204-A1-00 A secure ground connection (less than 100-ohm resistance to ground) is recommended. Use electrical ire thicker than AWG14 (2mm 2 ) as the ground ire. Alays turn off the poer to the controller before making the ground connection. Provide a terminal marked "PE" as the protective conductor for the entire system, and connect it to an external protective conductor. Also securely connect the ground terminal on the robot frame to the protective conductor. Installation and connections Grounding (In conformity ith 417-IEC-5019) 23204-A0-00 T4L T4LH T5L T5LH T6L 2-7

3.2 T9/T9H 2 To install the T9/T9H robot, use either of the folloing to methods. Method A : Drill holes through the installation base and secure the robot to the base ith M8 bolts from the bottom. (M8 tapped holes are already machined on the bottom of the robot frame.) Method B : Tap holes into the installation base and secure the robot to the base ith M6 bolts from inside of the robot frame. WARNING BEFORE INSTALLING THE ROBOT, ALWAYS MAKE SURE THAT THE ROBOT CONTROLLER IS NOT CONNECTED TO THE ROBOT OR THE POWER TO THE CONTROLLER IS OFF. SERIOUS ACCIDENTS MAY OCCUR IF THE ROBOT STARTS TO OPERATE DURING INSTALLATION. Installation and connections c CAUTION Be sure to ear safety gloves before starting the installation ork. If you touch any steel material part by bare hand, this may cause rust. Installation method A Drill holes through the installation base here the robot is to be secured. Then secure the robot ith the specified bolts from the bottom. The bolts and tightening torque are shon belo. WARNING Robot Bolt Tightening torque T9/T9H Hex socket-head bolt (M8), Strength: 8.8T Length: installation base thickness + 12mm (maximum) 230 to 370kgf cm Be sure to secure the robot body to the installation base ith the specified bolt, bolt quantity, and tightening torque. If these are not observed, the robot may drop, causing serious personal injury. If a bolt ith a length exceeding the specified length is used, it may interfere ith an internal unit, causing malfunction. Be sure to use a bolt ith the specified length. Installation method A Installation base Hex socket-head bolt (M8) n NOTE 23201-A4-00 For details about hole and bolt machining dimensions and positions of the robot installation base surface, see the external vie and dimensions stated in "1. Robot specifications" of Chapter 5. 2-8 T9 T9H

Installation method B 1 Tap M6 holes in the installation base here the robot is to be secured. n NOTE For details about machining dimensions and positions, see the external vie and dimensions stated in "1. Robot specifications" of Chapter 5. 2 Remove the robot side cover (on one side). Remove the scres securing the side cover of the robot and remove the side cover (on one side). (When necessary, remove also the upper cover.) Be careful not to drop any scre. 23202-A4-00 3 Move the slider. Move the slider to a position here the installation holes in the bottom of the robot are not hidden. 23203-A4-00 4 Secure the robot body. Secure the robot body to the installation base ith the specified bolts. WARNING Be sure to secure the robot body to the installation base ith the specified bolt, bolt quantity, and tightening torque. If these are not observed, the robot may drop, causing serious personal injury. Step 2 Step 3 Slider Removing the side cover Side cover Moving the slider 2 Installation and connections The bolts and tightening torque are shon belo. Step 4 Installing the robot Robot Bolt Tightening torque Hex socket-head bolt (M6) T9 Strength: 8.8T T9H Length: longer than 100 to 130kgf cm 25mm M6 hex. rench WARNING 23204-A4-00 Be sure to secure the robot body to the installation base ith the specified bolt, bolt quantity, and tightening torque. If these are not observed, the robot may drop, causing serious personal injury. Hex socket-head bolt (M6) 5 Reattach the side covers after installing the robot. Be sure to tighten all the bolts securely. T9 T9H 2-9

Protective bonding WARNING Alays ground the robot and controller unit to prevent electrical shock. 2 Alays use the ground terminal (M4 scre) on the robot unit to make ground connection. The ground terminal location is shon belo. Ground terminal position Installation and connections c CAUTION WARNING Ground terminal Robot cable 23205-A4-00 A secure ground connection (less than 100-ohm resistance to ground) is recommended. Use electrical ire thicker than AWG14 (2mm 2 ) as the ground ire. Alays turn off the poer to the controller before making the ground connection. Provide a terminal marked "PE" as the protective conductor for the entire system, and connect it to an external protective conductor. Also securely connect the ground terminal on the robot frame to the protective conductor. Grounding (In conformity ith 417-IEC-5019) 23204-A0-00 2-10 T9 T9H

3.3 F8/F8L/F8LH To install the F8/F8L/F8LH robot, tap holes in the installation base and secure the robot to the base ith M5 bolts from the inside of the robot frame. WARNING BEFORE INSTALLING THE ROBOT, ALWAYS MAKE SURE THAT THE ROBOT CONTROLLER IS NOT CONNECTED TO THE ROBOT OR THE POWER TO THE CONTROLLER IS OFF. SERIOUS ACCIDENTS MAY OCCUR IF THE ROBOT STARTS TO OPERATE DURING INSTALLATION. BE SURE TO USE THE BOLTS OF THE SPECIFIED SIZE AND LENGTH AND TIGHTEN THEM SECURELY TO THE CORRECT TORQUE IN THE CORRECT POSITIONS. FAILURE TO FOLLOW THIS INSTRUCTION MAY CAUSE ROBOT VIBRATIONS, POSITION ERRORS AND SERIOUS ACCIDENTS. DO NOT USE A BOLT LONGER THAN THE SPECIFIED LENGTH SINCE IT MAY INTERFERE WITH THE INTERNAL PARTS OF THE ROBOT AND CAUSE MALFUNCTIONS. c CAUTION Be sure to ear safety gloves before starting the installation ork. If you touch any steel material part by bare hand, this may cause rust. Installation method 1 Tap M5 holes in the installation base here the robot is to be secured. n NOTE For details about machining dimensions and positions, see the external vie and dimensions stated in "1. Robot specifications" of Chapter 5. 2 Remove the upper cover of the robot. Remove the scres (3 pcs.) securing the upper cover of the robot and remove the upper cover. Be careful not to drop any scre. Move the slider to a position here the installation holes in the bottom of the robot are not hidden. Step 2 Upper cover Removing the upper cover 2 Installation and connections 23201-A5-00 3 Secure the robot body. Secure the robot body to the installation base ith the specified bolts. The bolts and tightening torque are shon belo. Robot Bolt Tightening torque WARNING Hex socket-head bolt (M5) F8 Strength: 8.8T F8L 60 to 90kgf cm Length: longer than F8LH 20mm Be sure to tighten the bolt to the correct torque. The rong torque may not only cause robot position errors but also lead to serious accidents. Step 3 Installing the robot M5 hex. rench 23205-A5-00 F8 4 Reattach the upper covers after installing the robot. Be sure to tighten all the bolts securely. F8L F8LH 2-11

Protective bonding WARNING ALWAYS GROUND THE ROBOT AND CONTROLLER UNIT TO PREVENT ELECTRICAL SHOCK. 2 Alays use the ground terminal (M4 scre) on the robot unit to make ground connection. The ground terminal location is shon belo. Ground terminal position Installation and connections c CAUTION WARNING Ground terminal Robot cable 23203-A5-00 A secure ground connection (less than 100-ohm resistance to ground) is recommended. Use electrical ire thicker than AWG14 (2mm 2 ) as the ground ire. ALWAYS TURN OFF THE POWER TO THE CONTROLLER BEFORE MAKING THE GROUND CONNECTION. Provide a terminal marked "PE" as the protective conductor for the entire system, and connect it to an external protective conductor. Also securely connect the ground terminal on the robot frame to the protective conductor. Grounding (In conformity ith 417-IEC-5019) 23204-A0-00 2-12 F8 F8L F8LH

3.4 F10 To install the F10 robot, use either of the folloing to methods. Method A : Drill holes through the installation base and secure the robot to the base ith M5 bolts from the bottom. (M5 tapped holes are already machined on the bottom of the robot frame.) Method B : Tap holes into the installation base and secure the robot to the base ith M5 bolts from inside of the robot frame. WARNING BEFORE INSTALLING THE ROBOT, ALWAYS MAKE SURE THAT THE ROBOT CONTROLLER IS NOT CONNECTED TO THE ROBOT OR THE POWER TO THE CONTROLLER IS OFF. SERIOUS ACCIDENTS MAY OCCUR IF THE ROBOT STARTS TO OPERATE DURING INSTALLATION. 2 c CAUTION Be sure to ear safety gloves before starting the installation ork. If you touch any steel material part by bare hand, this may cause rust. Installation method A Drill holes through the installation base here the robot is to be secured. Then secure the robot ith the specified bolts from the bottom. The bolts and tightening torque are shon belo. WARNING Robot Bolt Tightening torque F10 Hex socket-head bolt (M5), Strength: 8.8T Length: installation base thickness + 9mm (maximum) 60 to 90kgf cm Be sure to secure the robot body to the installation base ith the specified bolt, bolt quantity, and tightening torque. If these are not observed, the robot may drop, causing serious personal injury. If a bolt ith a length exceeding the specified length is used, it may interfere ith an internal unit, causing malfunction. Be sure to use a bolt ith the specified length. Installation and connections Installation method A Hex socket-head bolt (M5) F10 c CAUTION n NOTE 23201-A6-00 The robot frame is made of aluminum so be careful not to damage the scre threads hen tightening the bolt. For details about hole and bolt machining dimensions and positions of the robot installation base surface, see the external vie and dimensions stated in "1. Robot specifications" of Chapter 5. 2-13

Installation method B 2 Installation and connections 1 Tap M5 holes in the installation base here the robot is to be secured. n NOTE For details about machining dimensions and positions, see the external vie and dimensions stated in "1. Robot specifications" of Chapter 5. 2 Remove the upper cover of the robot. Remove the scres securing the upper cover of the robot and remove the upper cover. Be careful not to drop any scre. 23202-A6-00 3 Move the slider. Move the slider to a position here the installation holes in the bottom of the robot are not hidden. 23203-A6-00 4 Secure the robot body. Secure the robot body to the installation base ith the specified bolts. WARNING Be sure to secure the robot body to the installation base ith the specified bolt, bolt quantity, and tightening torque. If these are not observed, the robot may drop, causing serious personal injury. Step 2 Step 3 Removing the upper cover Upper cover Moving the slider The bolts and tightening torque are shon belo. Slider Robot Bolt Tightening torque WARNING Hex socket-head bolt (M5) F10 Strength: 8.8T Length: longer than 60 to 90kgf cm 20mm Be sure to tighten the bolt to the correct torque. The rong torque may not only cause robot position errors but also lead to serious accidents. Step 4 Installing the robot M5 hex. rench 23204-A6-00 5 Reattach the upper covers after installing the robot. Be sure to tighten all the bolts securely. 2-14 F10

Protective bonding WARNING Alays ground the robot and controller unit to prevent electrical shock. Alays use the ground terminal (M4 scre) inside the robot unit to make ground connection. The ground terminal location is shon belo. (When you remove the upper and loer covers for the motor and also the end plate, you ill see the ground terminal as shon.) Ground terminal position 2 c CAUTION WARNING End plate Motor upper cover Ground terminal Motor loer cover 23205-A6-00 A secure ground connection (less than 100-ohm resistance to ground) is recommended. Use electrical ire thicker than AWG14 (2mm 2 ) as the ground ire. Alays turn off the poer to the controller before making the ground connection. Provide a terminal marked "PE" as the protective conductor for the entire system, and connect it to an external protective conductor. Also securely connect the ground terminal on the robot frame to the protective conductor. Installation and connections Grounding (In conformity ith 417-IEC-5019) 23204-A0-00 F10 2-15

3.5 F14/F14H 2 To install the F14/F14H robot, use either of the folloing to methods. Method A : Drill holes through the installation base and secure the robot to the base ith M6 bolts from the bottom. (M6 tapped holes are already machined on the bottom of the robot frame.) Method B : Tap holes into the installation base and secure the robot to the base ith M6 bolts from inside of the robot frame. WARNING BEFORE INSTALLING THE ROBOT, ALWAYS MAKE SURE THAT THE ROBOT CONTROLLER IS NOT CONNECTED TO THE ROBOT OR THE POWER TO THE CONTROLLER IS OFF. SERIOUS ACCIDENTS MAY OCCUR IF THE ROBOT STARTS TO OPERATE DURING INSTALLATION. Installation and connections c CAUTION Be sure to ear safety gloves before starting the installation ork. If you touch any steel material part by bare hand, this may cause rust. Installation method A Drill holes through the installation base here the robot is to be secured. Then secure the robot ith the specified bolts from the bottom. The bolts and tightening torque are shon belo. WARNING Robot Bolt Tightening torque Hex socket-head bolt (M6), Strength: 8.8T F14 Length: installation base thickness + 10mm (maximum) 100 to 130kgf cm F14H is recommended* * A bolt size of installation base thickness +20mm (maximum) can be used since the robot frame interior is hollo. Even in this case, the scre thread length that actually engages is 10mm. Be sure to secure the robot body to the installation base ith the specified bolt, bolt quantity, and tightening torque. If these are not observed, the robot may drop, causing serious personal injury. If a bolt ith a length exceeding the specified length is used, it may interfere ith an internal unit, causing malfunction. Be sure to use a bolt ith the specified length. Installation method A Installation base Hex socket-head bolt (M6) c CAUTION n NOTE 23201-A7-00 The robot frame is made of aluminum so be careful not to damage the scre threads hen tightening the bolt. For details about hole and bolt machining dimensions and positions of the robot installation base surface, see the external vie and dimensions stated in "1. Robot specifications" of Chapter 5. 2-16 F14 F14H

Installation method B 1 Tap M6 holes in the installation base here the robot is to be secured. n NOTE For details about machining dimensions and positions, see the external vie and dimensions stated in "1. Robot specifications" of Chapter 5. 2 Remove the upper cover of the robot. Remove the scres securing the upper cover of the robot and remove the upper cover. Be careful not to drop any scre. 23202-A7-00 3 Move the slider. Move the slider to a position here the installation holes in the bottom of the robot are not hidden. 23203-A7-00 4 Secure the robot body. Secure the robot body to the installation base ith the specified bolts. WARNING Be sure to secure the robot body to the installation base ith the specified bolt, bolt quantity, and tightening torque. If these are not observed, the robot may drop, causing serious personal injury. Step 2 Step 3 Removing the upper cover Moving the slider Upper cover 2 Installation and connections The bolts and tightening torque are shon belo. Robot Bolt Tightening torque WARNING Hex socket-head bolt (M6) F14 Strength: 8.8T 100 to 130kgf cm F14H Length: longer than 20mm Be sure to tighten the bolt to the correct torque. The rong torque may not only cause robot position errors but also lead to serious accidents. Step 4 Slider Installing the robot M6 hex. rench 23204-A7-00 5 Reattach the upper covers after installing the robot. Be sure to tighten all the bolts securely. F14 F14H 2-17

Protective bonding WARNING Alays ground the robot and controller unit to prevent electrical shock. 2 Alays use the ground terminal (M4 scre) inside the robot unit to make ground connection. The ground terminal location is shon belo. Ground terminal position End plate Ground terminal Installation and connections c CAUTION WARNING Motor cable 23205-A7-00 A secure ground connection (less than 100-ohm resistance to ground) is recommended. Use electrical ire thicker than AWG14 (2mm 2 ) as the ground ire. Alays turn off the poer to the controller before making the ground connection. Provide a terminal marked "PE" as the protective conductor for the entire system, and connect it to an external protective conductor. Also securely connect the ground terminal on the robot frame to the protective conductor. Grounding (In conformity ith 417-IEC-5019) 23204-A0-00 2-18 F14 F14H

3.6 F17/F17L/F20 To install the F17/F17L/F20 robot, tap holes in the installation base and secure the robot to the base ith M8 bolts from the inside of the robot frame. WARNING BEFORE INSTALLING THE ROBOT, ALWAYS MAKE SURE THAT THE ROBOT CONTROLLER IS NOT CONNECTED TO THE ROBOT OR THE POWER TO THE CONTROLLER IS OFF. SERIOUS ACCIDENTS MAY OCCUR IF THE ROBOT STARTS TO OPERATE DURING INSTALLATION. BE SURE TO USE THE BOLTS OF THE SPECIFIED SIZE AND LENGTH AND TIGHTEN THEM SECURELY TO THE CORRECT TORQUE IN THE CORRECT POSITIONS. FAILURE TO FOLLOW THIS INSTRUCTION MAY CAUSE ROBOT VIBRATIONS, POSITION ERRORS AND SERIOUS ACCIDENTS. DO NOT USE A BOLT LONGER THAN THE SPECIFIED LENGTH SINCE IT MAY INTERFERE WITH THE INTERNAL PARTS OF THE ROBOT AND CAUSE MALFUNCTIONS. c CAUTION Be sure to ear safety gloves before starting the installation ork. If you touch any steel material part by bare hand, this may cause rust. Installation method 1 Tap M8 holes in the installation base here the robot is to be secured. n NOTE For details about machining dimensions and positions, see the external vie and dimensions stated in "1. Robot specifications" of Chapter 5. 2 Remove the upper cover of the robot. Remove the scres securing the upper cover of the robot and remove the upper cover. Be careful not to drop any scre. Step 2 Removing the upper cover Upper cover 2 Installation and connections 23201-A8-00 3 Move the slider. Move the slider to a position here the installation holes in the bottom of the robot are not hidden. 4 Secure the robot body. Secure the robot body to the installation base ith the specified bolts. 23202-A8-00 The bolts and tightening torque are shon belo. Robot Bolt Tightening torque Step 4 Installing the robot F17 F17L F20 Hex socket-head bolt (M8) Strength: 8.8T Length: <F17/F17L>longer than 45mm <F20> longer than 50mm 230 to 370kgf cm M8 hex. rench WARNING Be sure to tighten the bolt to the correct torque. The rong torque may not only cause robot position errors but also lead to serious accidents. F17 F17L F20 2-19

5 Reattach the upper covers after installing the robot. Be sure to tighten all the bolts securely. 2 Protective bonding WARNING Alays ground the robot and controller unit to prevent electrical shock. Alays use the ground terminal (M4 scre) inside the robot unit to make ground connection. The ground terminal location is shon belo. Installation and connections c CAUTION WARNING Ground terminal position End plate Ground terminal Motor cable A secure ground connection (less than 100-ohm resistance to ground) is recommended. Use electrical ire thicker than AWG14 (2mm 2 ) as the ground ire. Alays turn off the poer to the controller before making the ground connection. 23203-A8-00 Provide a terminal marked "PE" as the protective conductor for the entire system, and connect it to an external protective conductor. Also securely connect the ground terminal on the robot frame to the protective conductor. Grounding (In conformity ith 417-IEC-5019) 23204-A0-00 2-20 F17 F17L F20

3.7 F20N To install the F20N robot, tap holes in the installation base and secure the robot to the base ith M8 bolts from the inside of the robot frame. WARNING BEFORE INSTALLING THE ROBOT, ALWAYS MAKE SURE THAT THE ROBOT CONTROLLER IS NOT CONNECTED TO THE ROBOT OR THE POWER TO THE CONTROLLER IS OFF. SERIOUS ACCIDENTS MAY OCCUR IF THE ROBOT STARTS TO OPERATE DURING INSTALLATION. BE SURE TO USE THE BOLTS OF THE SPECIFIED SIZE AND LENGTH AND TIGHTEN THEM SECURELY TO THE CORRECT TORQUE IN THE CORRECT POSITIONS. FAILURE TO FOLLOW THIS INSTRUCTION MAY CAUSE ROBOT VIBRATIONS, POSITION ERRORS AND SERIOUS ACCIDENTS. DO NOT USE A BOLT LONGER THAN THE SPECIFIED LENGTH SINCE IT MAY INTERFERE WITH THE INTERNAL PARTS OF THE ROBOT AND CAUSE MALFUNCTIONS. c CAUTION Be sure to ear safety gloves before starting the installation ork. If you touch any steel material part by bare hand, this may cause rust. Installation method 1 Tap M8 holes in the installation base here the robot is to be secured. n NOTE For details about machining dimensions and positions, see the external vie and dimensions stated in "1. Robot specifications" of Chapter 5. 2 Remove the upper cover of the robot. Remove the scres securing the upper cover of the robot and remove the upper cover. Be careful not to drop any scre. Step 2 Upper cover Removing the upper cover 2 Installation and connections 23201-A9-00 3 Move the slider. Move the slider to a position here the installation holes in the bottom of the robot are not hidden. 4 Secure the robot body. Secure the robot body to the installation base ith the specified bolts. The bolts and tightening torque are shon belo. WARNING Robot Bolt Tightening torque F20N Hex socket-head bolt (M8) Strength: 8.8T Length: longer than 50mm 230 to 370kgf cm Be sure to tighten the bolt to the correct torque. The rong torque may not only cause robot position errors but also lead to serious accidents. Step 3 Installing the robot M8 hex. rench 23202-A9-00 F20N 2-21

5 Reattach the upper covers after installing the robot. Be sure to tighten all the bolts securely. 2 Protective bonding WARNING Alays ground the robot and controller unit to prevent electrical shock. Alays use the ground terminal (M4 scre) inside the robot unit to make ground connection. The ground terminal location is shon belo. Installation and connections c CAUTION WARNING Ground terminal position Cable box Cable carrier Robot cable A secure ground connection (less than 100-ohm resistance to ground) is recommended. Use electrical ire thicker than AWG14 (2mm 2 ) as the ground ire. Alays turn off the poer to the controller before making the ground connection. Ground terminal 23203-A9-00 Provide a terminal marked "PE" as the protective conductor for the entire system, and connect it to an external protective conductor. Also securely connect the ground terminal on the robot frame to the protective conductor. Grounding (In conformity ith 417-IEC-5019) 23204-A0-00 2-22 F20N

3.8 N15/N15D/N18/N18D The folloing describes ho to install the N15/N15D/N18/N18D robot. Method A (N15/N15D only) : Drill holes through the installation base and secure the robot to the base ith M6 bolts from the bottom. (M6 tapped holes are already machined on the bottom of the robot frame.) Method B : Tap holes in the installation base and secure the robot to the base ith M6 bolts (N15/N15D) or M8 bolts (N18/N18D) from the top surface of the robot. WARNING BEFORE INSTALLING THE ROBOT, ALWAYS MAKE SURE THAT THE ROBOT CONTROLLER IS NOT CONNECTED TO THE ROBOT OR THE POWER TO THE CONTROLLER IS OFF. SERIOUS ACCIDENTS MAY OCCUR IF THE ROBOT STARTS TO OPERATE DURING INSTALLATION. c CAUTION Be sure to ear safety gloves before starting the installation ork. If you touch any steel material part by bare hand, this may cause rust. Installation method A (N15/N15D only) WARNING Drill holes through the installation base here the robot is secured. Then secure the robot to the base ith specified bolts from belo the base. The bolts and tightening torque are shon belo. Robot Bolt Tightening torque N15 N15D Hex socket-head bolt (M6), Strength: 8.8T Length: installation base thickness +10 mm * 100 to 130kgf cm * Because the robot frame has a cavity inside the tapped holes, it is possible to use bolts hose length is up to the installation base thickness + 20mm. Even in this case, the length of the bolt thread engagement is 10mm. Be sure to secure the robot body to the installation base ith the specified bolt, bolt quantity, and tightening torque. If these are not observed, the robot may drop, causing serious personal injury. If a bolt ith a length exceeding the specified length is used, it may interfere ith an internal unit, causing malfunction. Be sure to use a bolt ith the specified length. 2 Installation and connections Installation method A (N15/N15D) Installation base N15 n NOTE Hex socket-head bolt (M6) 23201-AA-00 For details about hole and bolt machining dimensions and positions of the robot installation base surface, see the external vie and dimensions stated in "1. Robot specifications" of Chapter 5. N15D N18 N18D 2-23

Installation method B 2 1 Tap M6 holes (for N15/N15D) or M8 holes (for N18/N18D) in the installation base here the robot is to be secured. n NOTE For details about machining dimensions and positions, see the external vie and dimensions stated in "1. Robot specifications" of Chapter 5. Step 2 Removing the end cover 1 (N15) 2 Remove the end cover 1 (upper). Installation and connections 23202-AA-00 3 Remove the upper cover of the robot. Remove the scres (4 pcs.) securing the upper cover and remove the upper cover. Be careful not to drop any scre. 23203-AA-00 4 Secure the robot body to the installation base ith the specified bolts. Move the table slide to secure all the installation holes in the bottom of the robot to the base. WARNING Be sure to secure the robot body to the installation base ith the specified bolt, bolt quantity, and tightening torque. If these are not observed, the robot may drop, causing serious personal injury. Step 3 End cover 1 Removing the upper cover (N15) Upper cover The bolts and tightening torque are shon belo. Step 4 Installing the robot Robot Bolt Tightening torque WARNING Hex socket-head bolt (M6) N15 Strength: 8.8T 100 to 130kgf cm N15D Length: longer than 16mm Hex socket-head bolt (M8) N18 Strength: 8.8T 230 to 370kgf cm N18D Length: longer than 50mm Be sure to tighten the bolt to the correct torque. The rong torque may not only cause robot position errors but also lead to serious accidents. N15 M6 hex. rench N18 23204-AA-00 5 After installing the robot, reattach the top cover and end covers 1 (upper end covers). Be sure to tighten all the bolts securely. M8 hex. rench 2-24 N15 N15D N18 N18D

3.9 B10/B14/B14H WARNING c CAUTION BEFORE INSTALLING THE ROBOT, ALWAYS MAKE SURE THAT THE ROBOT CONTROLLER IS NOT CONNECTED TO THE ROBOT OR THE POWER TO THE CONTROLLER IS OFF. SERIOUS ACCIDENTS MAY OCCUR IF THE ROBOT STARTS TO OPERATE DURING INSTALLATION. Be sure to ear safety gloves before starting the installation ork. If you touch any steel material part by bare hand, this may cause rust. 2 Installation method Drill holes through the installation base here the robot is to be secured. Then secure the robot ith the specified bolts from the bottom. The bolts and tightening torque are shon belo. WARNING c CAUTION Robot Bolt Tightening torque B10 Hex socket-head bolt (M5), Strength: 8.8T Length: installation base thickness + 10mm (maximum) 60 to 90kgf cm B14/B14H Hex socket-head bolt (M6), Strength: 8.8T Length: installation base thickness + 10mm (maximum) 100 to 130kgf cm Be sure to tighten the bolt to the correct torque. The rong torque may not only cause robot position errors but also lead to serious accidents. If a bolt ith a length exceeding the specified length is used, it may interfere ith an internal unit, causing malfunction. Be sure to use a bolt ith the specified length. The robot frame is made of aluminum so be careful not to damage the scre threads hen tightening the bolt. Installation and connections Installation method Hex socket-head bolt (M5) n NOTE 23201-AC-00 For details about hole and bolt machining dimensions and positions of the robot installation base surface, see the external vie and dimensions stated in "1. Robot specifications" of Chapter 5. B10 B14 B14H 2-25

Protective bonding WARNING Alays ground the robot and controller unit to prevent electrical shock. 2 Alays use the ground terminal (M4 scre) of the robot unit to make ground connection. The ground terminal location is shon belo. Ground terminal position Installation and connections c CAUTION WARNING Robot cable Ground terminal 23202-AC-00 A secure ground connection (less than 100-ohm resistance to ground) is recommended. Use electrical ire thicker than AWG14 (2mm 2 ) as the ground ire. Alays turn off the controller before making the ground connection. Provide a terminal marked "PE" as the protective conductor for the entire system, and connect it to an external protective conductor. Also securely connect the ground terminal on the robot frame to the protective conductor. Grounding (In conformity ith 417-IEC-5019) 23204-A0-00 2-26 B10 B14 B14H

3.10 R5/R10/R20 WARNING c CAUTION BEFORE INSTALLING THE ROBOT, ALWAYS MAKE SURE THAT THE ROBOT CONTROLLER IS NOT CONNECTED TO THE ROBOT OR THE POWER TO THE CONTROLLER IS OFF. SERIOUS ACCIDENTS MAY OCCUR IF THE ROBOT STARTS TO OPERATE DURING INSTALLATION. Be sure to ear safety gloves before starting the installation ork. If you touch any steel material part by bare hand, this may cause rust. 2 Installation method Tap holes or drill holes through the installation base and install the robot as shon in the figure belo. The bolts and tightening torque are shon belo. WARNING Robot Bolt Tightening torque Hex socket-head bolt (M5), Strength: 8.8T 60 to 90kgf cm R5/R10/R20 Hex socket-head bolt (M6), Strength: 8.8T 100 to 130kgf cm Be sure to secure the robot body to the installation base ith the specified bolt, bolt quantity, and tightening torque. If these are not observed, the robot may drop, causing serious personal injury. If a bolt ith a length exceeding the specified length is used, it may interfere ith an internal unit, causing malfunction. Be sure to use a bolt ith the specified length. Installation method Hex socket-head bolt (M6) Hex socket-head bolt (M6) Installation base Installation and connections Installation base Hex socket-head bolt (M5, M6) Installation base n NOTE 23201-AG-00 For details about hole and bolt machining dimensions and positions of the robot installation base surface, see the external vie and dimensions stated in "1. Robot specifications" of Chapter 5. R5 R10 R20 2-27

Protective bonding WARNING Alays ground the robot and controller unit to prevent electrical shock. 2 Alays use the ground terminal (M4 scre) inside the robot unit to make ground connection. The ground terminal location is shon belo. Ground terminal position Ground terminal (M4 scre) Installation and connections c CAUTION WARNING A secure ground connection (less than 100-ohm resistance to ground) is recommended. Use electrical ire thicker than AWG14 (2mm 2 ) as the ground ire. Alays turn off the poer to the controller before making the ground connection. 23202-AG-00 Provide a terminal marked "PE" as the protective conductor for the entire system, and connect it to an external protective conductor. Also securely connect the ground terminal on the robot frame to the protective conductor. Grounding (In conformity ith 417-IEC-5019) 23204-A0-00 Origin position The Flip-X series uses the absolute method so performing return-to-origin is not necessary after the poer is turned on. Hoever, data containing the origin position may be lost if the absolute battery is removed from the controller or the battery dies. When this happens, origin return (or origin reset) must be performed after the battery is reconnected. The R5, R10 and R20 robots utilize the mark method (refer to controller manual) that does not use sensors. Use a triangular seal enclosed in the package to affix it at the desired position, and perform origin return (or origin reset). When the next time origin return is required, this seal can be used as the matching mark to ensure reproducibility. We recommend affixing the seal as far aay from the R5, R10 and R20 shaft center as possible to achieve high reproducibility. 2-28 R5 R10 R20

4. Connections 4.1 Connecting the robot to the controller Follo the steps belo to connect the robot cables of the robot main body to the mating connectors on the controller. For details about connection connectors on the controller side, see the User s Manual for controller to be used. WARNING WARNING WARNING c CAUTION BEFORE CONNECTING THE CABLES, CHECK THAT THERE ARE NO BENDS OR BREAKS IN THE ROBOT CABLE CONNECTOR PINS AND THAT THE CABLES ARE NOT DAMAGED. CONTACT FAILURE MAY CAUSE ROBOT MALFUNCTIONS. ALWAYS MAKE SURE THAT THE POWER TO THE ROBOT CONTROLLER IS OFF BEFORE CONNECTING THE ROBOT CABLES TO THE CONTROLLER. If any connector is connected incompletely and any pin has faulty contact, the robot may malfunction, leading to hazardous situation. Before turning on the controller poer, make sure that each connector is connected securely. Take appropriate measures so that no load is applied to the connector even hen the robot cable is stretched. Arrange the robot cables so that they do not hinder the robot operation. Additionally, do not use an area here any robot cable interferes ith the load attached to the robot tip as ork area. If any cable interferes ith the robot movable part, this may cause the robot to malfunction, leading to hazardous situation. Arrange the robot cables so that the connected cables do not hinder a ork person. If a ork person stumbles over any robot cable and falls don, this may cause personal injury. After connecting the relay connectors on the robot cables, fit the connector hoods together securely. The standard robot cables are not movable cables. So, connect the cables so that the motor poer cable and signal cable connectors of the robot cables do not move. 2 Installation and connections Connections 1 Connect the robot cables (motor and signal ires) to the mating connectors coming out from the robot. Connecting the poer cable and signal cable Robot cable connector (signal ire) Robot cable connector (motor ire) 23205-A0-00 2-29

U V W MOTOR AC IN RGEN PWR HPB L N I/O BAT L1 N1 P N SHORT: OPEN: ROB I/O SAFETY ERR 2 After making the connections, fit the connector hoods together securely. Connecting the hoods 2 Hood Installation and connections Robot cable connections (hen connected to SR1) Single-axis robot FLIP-X series Robot cable (poer cable) MO connector...motor ire SR1 Hood U V W MOTOR AC IN RGEN PWR HPB L I/O BAT N L1 N1 P N SHORT: AC100V OPEN: AC200V ROB I/O SAFETY Robot cable (signal cable) ERR HPB ORG connector Origin sensor ire (only robots ith origin sensor) BK connector...brake ire (only robots ith brake) P connector...resolver signal ire * After making connections, fasten the hoods securely. 23206-A0-00 System Configurations Resolver signal Motor poer Robot controller SR1 RS-232C communication control RS-232C or communication control (communication cable) SD MEMORY CARD SD memory card (option) Programming box HPB (option) Servo control Input 16 general-purpose pins 7 custom-purpose pins Output 16 general-purpose pins 3 custom-purpose pins I/O control (24V poer supply built-in) PC POPCOM communication softare (option) Poer supply AC100 to 115/200 to 230V ±10% External control (PLC) Single-axis robot FLIP-X series The controller is supplied ith the robot as a standard unit. The programming box HPB is optional. 2-30 23207-A0-00

4.2 Changing the cable routing direction WARNING WARNING Before starting the ork, be sure to turn off the controller poer. The adjustment ork ith the cover removed needs the special knoledge and skill. If unskilled ork person performs this ork, this may involve risk. Only qualified engineers ho have the skill and license in accordance ith the las and regulations in each country are alloed to carry out the adjustment ork. 2 c CAUTION Be sure to ear safety gloves before starting the installation ork. If you touch any steel material part by bare hand, this may cause rust. 4.2.1 F10/F14/F14H/F17/F17L/F20 The cable in the robots (F10, F14, F14H, F17, F17L, and F20) can be run out (extracted) in any direction. Limits on iring directions have been eliminated and vertical or horizontal installations are made possible for efficient use of space. Methods for changing the cable extraction direction are shon belo. (The standard cable extraction slot is on the rear side hen shipped from the factory.) Standard cable extraction direction Installation and connections 23206-A6-00 1 Turn off the controller. 2 Place a sign indicating the robot is being adjusted. Place a sign indicating the robot is being adjusted, to keep others from touching the controller sitch. 3 Enter the safety enclosure. 4 Remove the upper cover and motor endplate. On the F10, remove both upper and loer motor covers and endplate. At this time, be careful not to drop any scre. 5 Remove the robot cable from the endplate. F10 F14 F14H F17 F17L F20 2-31

6 Change the cable extraction (routing) direction. Step 6 Top extraction and side extraction 2 Extraction direction Top extraction Side extraction Procedure Clip the endplate cable installation slot ith ire nippers or similar tool, fit a robot cable grommet into that slot and route the cable out through that slot. Fit a robot cable grommet into the side routing bracket and route the cable out through that slot. * Side extraction is not possible on the F10. Top extraction Installation and connections n NOTE 51202-A6-00 When routing the cable from the opposite side, you must change the clamping position of the cable routing bracket. (Change the ground ire installation position to the opposite side at this time.) 7 Reattach the endplate and upper cover (or motor upper and loer covers) back to their original positions. Be careful not to forget to tighten any scre. 4.2.2 B10/B14/B14H Cable routing bracket Side extraction The cable in the robots (B10, B14, and B14H) can be run out (extracted) in any direction. Limits on iring directions have been eliminated so available space can be efficiently used. Methods for changing the cable routing (extraction) direction are shon belo. 1 Turn off the controller. 2 Place a sign indicating the robot is being adjusted. Place a sign indicating the robot is being adjusted, to keep others from touching the controller sitch. Step 4 Removing the motor cover 3 Enter the safety enclosure. When rotating 180 degrees 4 Remove the four scres securing the motor cover. At this time, be careful not to drop any scre. 23203-AC-00 Step 5 Rotating 180 degrees 5 Remove the motor cover and rotate it 180 degrees. Motor cover 23204-AC-00 6 Reattach the motor cover and tighten the four scres to secure the motor cover and cables. Be careful not to forget to tighten any scre. Rotate 180 degrees. 2-32 B10 B14 B14H

When rotating 90 degrees 4 Remove the four scres securing the motor cover and remove the motor cover. At this time, be careful not to drop any scre. Step 6 Trimming ith ire nippers 5 Remove the cables from the motor cover. 6 Trim the unused cable extraction slots ith ire nippers or similar tool. 7 Fit the robot cable grommets. Fit the robot cable grommets into the trimmed cable extraction slots. 23205-AC-00 23206-AC-00 8 Reattach the motor cover and tighten the four scres to secure the motor cover and cables. Be careful not to forget to tighten any scre. Step 7 4.3 Changing the motor orientation (B10/B14/B14H) Fitting the robot cable grommets 2 Installation and connections A desired motor orientation in the robots (B10, B14, and B14H) can be selected freely. If the motor case is hanging up on an object and hampers installation of the robot, use the folloing method to change the motor orientation. 1 Turn off the controller. 2 Place a sign indicating the robot is being adjusted. Place a sign indicating the robot is being adjusted, to keep others from touching the controller sitch. 3 Enter the safety enclosure. 4 Remove the scres securing the belt cover and remove the belt cover. 23207-AC-00 Step 4 Removing the cover B10 B14 B14H 2-33

5 Remove the motor plate bolts (4 pieces). Step 5 Removing the bolts 23208-AC-00 Motor plate 2 6 Tighten the motor plate bolts temporarily. Install the motor case at necessary installation position and secure it ith the motor plate bolts (4 pcs.) temporarily. No shift the motor case toards the large pulley as shon by the arro. 23209-AC-00 Installation and connections 7 First fit the belt onto the small pulley and then onto the large pulley. c CAUTION 23210-AC-00 Check that the belt teeth correctly mesh ith the large pulley teeth. A poor intermesh may cause positioning errors or shorten the belt service life. 8 Tighten the motor plate bolts temporarily. Tighten the motor plate bolts temporarily hile pulling the motor case. 9 Adjust the belt tension. n NOTE For details about ho to adjust the speed reduction belt tension, see the separate Maintenance Manual for FLIP-X series. 23211-AC-00 Motor plate bolt Step 6 Tightening the bolts temporarily Motor plate Motor plate bolt Step 7 Fitting the belt c CAUTION Since a positional shift occurs after adjusting the belt tension, absolute reset, and the point data. 0 Reattach the belt cover. Be careful not to forget to tighten any scre. Step 8 Tightening the bolts temporarily Motor case Motor plate bolt 2-34 B10 B14 B14H

4.4 User iring Cable carrier Observe the folloing precautions hen using a cable carrier ith the FLIP-X series. Example of single-axis robot using cable carrier Cable carrier 2 c CAUTION 23210-A0-00 Use a cable carrier that maintains an R50 or larger cable bend diameter. When fitting the robot cables into the cable carrier, keep the space used ithin 30 percent of the total space including other cables and air hoses. Lay the cables and air hoses in ros inside the cable carrier so they do not cross each other. The cables and tubes inside the cable carrier ill move during robot operation applying tension to both ends. ently secure the cables to allo for some slack so a large amount of force is not applied to cable connector during robot movement. Breaks or electrical discontinuity may occur if the cables are fastened too tightly ith snap bands or fastening ties so allo for some slack and gently secure the cables. Installation and connections n NOTE Separating the robot cables from the user cables in the cable carrier ith plate partitions (see draing belo) improves reliability and makes maintenance easier. Cross section vie inside cable carrier Partitions 23211-A0-00 2-35

5. Setting the operating conditions 5.1 Payload 2 As the payload parameter is set for the controller, optimal acceleration setting is performed automatically. Set the total eight of the orkpiece and the end effectors such as grippers attached to the robot slider in the payload parameter as shon belo. c CAUTION Be sure to enter an accurate value hen making this setting, since a mistake ill cause troubles such as vibration or a shorter machine service life span. Installation and connections To set the payload parameter The folloing describes ho to set the payload parameter for the SR1. For other controllers, see the User s Manual for relevant controller. 1 Press (SYS) on the initial menu screen. The SYS (system) mode screen appears. 2 Press (PRM) to enter the parameter setting mode. The SYS-PRM mode screen appears. 3 Select the parameter group. Press (AXIS) to select the axis 24201-A0-00 24202-A0-00 parameter. The current setting for PRM100 (Robot type) appears on the screen. 24203-A0-00 Step 1 Step 2 Step 3 Initial menu screen SYS (system) mode screen Selecting the parameter group. 4 Display PRM112 (payload). Press the keys to scroll up or don the parameter list and select the parameter you ant to set. 22204-A0-00 5 Set the parameter. Enter the parameter value ith the number keys and press. The parameter setting range is shon on the bottom line of the screen. When setting is complete, the cursor moves back to the beginning of the parameter data. Step 4-5 Setting the PRM112 (payload) 2-36

5.2 Maximum speed setting In operation of a single-axis robot ith a long stroke ball scre, resonance of the ball scre may occur. In this case, the maximum speed must be reduced to an appropriate level. The maximum speed can be reduced by loering the SPEED setting in automatic operation or by programming. Use the desired method that matches your application. For details about maximum speed setting in response to the stroke length, see "1. Robot specifications" in Chapter 5. If the maximum speed does not reach a hazardous level, reducing the speed is unnecessary even hen a robot has a long stroke axis. c CAUTION Do not operate the robot if the ball scre is vibrating. The ball scre may otherise ear out prematurely. 2 5.3 Duty To achieve maximum service life for the single-axis robots, the robot must be operated ithin the alloable duty (50%). The duty is calculated as follos: Duty (%) = Operation time Operation time+ Non-operation time 100 If the robot duty is too high, an error such as "overload" or "overheat" occurs. In this case, increase the stop time to reduce the duty. Installation and connections 2-37

Chapter 3 Periodic inspection Contents 1. Before beginning ork 3-1 2. List of inspection items 3-3 3. Maintenance parts 3-6 3.1 Consumable parts 3-6 3.2 Robot cables 3-7 3.2.1 Single-axis robot cables 3-7 3.2.2 Multi-robot cables 3-8

1. Before beginning ork Periodic inspection and maintenance are essential to ensure safe and efficient operation of YAMAHA robots. The periodic inspection of the FLP-X series consists of "daily inspection", "three-month inspection", "six-month inspection", and "three-year inspection". The daily inspection must be carried out before starting the operation and after completion of the day s ork. For details about inspection items, see "2. List of inspection items". The periodic inspection procedures are described in the separate Maintenance Manual for FLIP-X series. Before beginning the ork, thoroughly read the safety precautions described belo and the Safety Instructions to strictly observe the instructions. Safety precautions DANGER WARNING If the inspection or maintenance procedure calls for operation of the robot, stay out of the orking area of the robot during operation. Keep atching the robot movement and surrounding area so that the operator can press the emergency stop button if any danger occurs. When the robot does not need to be operated during adjustment or maintenance, alays turn off the controller and the external sitch board. Never touch internal parts of the controller. WHEN ONLY MAKING ELECTRICAL INSPECTIONS AND REQUIRING NO MECHANICAL MOVEMENT OF THE ROBOT, KEEP THE EMERGENCY STOP BUTTON PRESSED. Be sure to use the lubricant specified by your distributor. Be sure to use the parts specified by your distributor hen replacing parts. Take sufficient care not to allo any foreign matter to contaminate them during adjustment, parts replacement or reassembly. Do not modify any parts on the robot or controller. Modification may result in unsatisfactory specifications or threaten operator safety. When adjustment or maintenance is complete, retighten the bolts and scres securely. During robot adjustment or maintenance, place a sign indicating that the robot is being adjusted or serviced, to prevent others from touching the control keys or sitches. Provide a lock on the sitch keys or ask someone to keep atch as needed. 3 Periodic inspection c CAUTION Before starting each adjustment ork, thoroughly read this Chapter to fully understand its contents. Post a sign stating "UNDER WORK" to prevent the controller poer sitch, programming box/handy terminal, or operation panel from being operated by other ork person. If the safeguard enclose is not prepared immediately after the installation ork, stretch a rope or chain around the robot movable area to use this area as a safeguard enclosure. Additionally, strictly observe the folloing cautions. 1. Columns should not move easily. 2. Rope or chain is legible from surroundings. 3. Post a sign stating "ENTRY PROHIBITED UNDER WORK" to prevent ork personal other than those in charge of robot adjustment ork from entering the robot movable area. When checking the operation after completion of the adjustment, see "4.5.1 Trial operation" in the Safety Instructions. Be sure to ear safety gloves before starting the installation ork. If you touch any steel material part by bare hand, this may cause rust. For details about cautions on controller, see the User s Manual for controller. 3-1

3 When applying grease to the ball scres and linear guide, take the folloing precautions. WARNING Precautions hen handling grease: Inflammation may occur if this gets in the eyes. Before handling the grease, ear your safety goggles to ensure the grease ill not come in contact ith the eyes. Inflammation may occur if the grease comes into contact ith skin. Be sure to ear protective gloves to prevent contact ith skin. Do not take orally or eat. (Eating ill cause diarrhea and vomiting.) Hands and fingers might be cut hen opening the container, so use protective gloves. Keep out of the reach of children. Do not heat the grease or place near an open flame since this could lead to sparks and fires. Emergency Treatment: If grease gets in the eyes, ash liberally ith pure ater for about 15 minutes and consult a physician for treatment. If grease comes in contact ith the skin, ash aay completely ith soap and ater. If taken internally, do not induce vomiting but promptly consult a physician for proper treatment. Periodic inspection WARNING WARNING Cautions on grease handling It is required by la to properly treat the grease. Treat the grease appropriately according to the las and regulations. Do not apply any pressure to the empty container. If any pressure is applied, this may cause the container to burst. Do not eld, heat up, drill, or cut the container. Doing so may cause residual grease to ignite in association ith explosion. When the brake of the vertical axis is released, the slider axis may drop, leading to hazardous situation. When applying the grease to the vertical axis parts, do not release the brake. 3-2

2. List of inspection items WARNING Only qualified engineers ho have the skill and license in accordance ith the las and regulations in each country are alloed to inspect the items that need to remove the cover hile referring to the separate Maintenance Manual for FLIP-X series. Inspection to be performed ith the controller turned off : Implementation Checkpoint Procedure Daily Cables Check for damage, dent and excessively tight bends. Threemonth Sixmonth Threeyear Remarks Make the adjustment so that any stress is not applied to the cables. If any damage is found, replace the defective cable according to the conditions. 3 Shutter Top surface of shutter close to stop point Slider Check for scratches, dents, and excessively tight bends. Check for looseness. Check for flo-up (clearance). Check for stripes caused by contamination. Check for unusual ear or breakage. For details about ho to adjust the looseness, see "4. Adjusting the shutter looseness" in Chapter 3 of the Maintenance Manual. For details about ho to replace the shutter, see "1. Replacing the shutter" in Chapter 4 of the Maintenance Manual. For details about ho to adjust the looseness, see "4. Adjusting the shutter looseness" in Chapter 3 of the Maintenance Manual. Wipe off the contamination ith a cloth rag moistened ith alcohol cleaning agent. If this trouble occurs frequently, contact your distributor. If the slider is orn out, adjust the mating material so that the interference ith the slider is eliminated. If the slider is broken, contact your distributor. Periodic inspection Check ith the load factor monitor that the Motor Check for unusual vibration and noise, and for abnormal temperature rise. load factor is 100% or less. (*1) For details about ho to replace the motor, see "2. Replacing the motor" in Chapter 4 of the Maintenance Manual. Bolt and scre on exterior of robot body Check for looseness. Retighten the bolts and scres. (See the Table belo.) (*2) Check the terminal outside Controller the controller for looseness. Check if connectors are loose. If any faulty part is found, make the adjustment. Linear guide Check for dirt or contamination. Check for dried part (insufficient grease). Check for play. Check for vibration during operation. Check for backlash due to ear. Grease application Clean the linear guide and apply the grease. If the linear guide is dried or if the grease is insufficient, apply the grease. Retighten the bolts and If the trouble is scres. (See the Table not solved, belo.) (*2) contact your Retighten the drive unit or distributor. axis installation bolts. Contact your distributor. Recommended grease : Alvania grease S2 (Shoa Shell) : Daphne Eponex No.2 (Idemitsu) See "3. Applying grease" in Chapter 2 of the Maintenance Manual. 3-3

Checkpoint Procedure Daily Threemonth Sixmonth Threeyear Remarks Check for unusual vibration or noise. If any trouble is found, contact your distributor. Check for dirt or contamination. Clean the linear guide and apply the grease. Check for dried part (insufficient grease). If the linear guide is dried or if the grease is insufficient, apply the grease. 3 Periodic inspection Ball scre (scre/nut) Insert Check for play. Check for vibration during operation. Check for backlash due to ear. Grease application Check that the positioning is correct during operation. Check for unusual noise during operation. Retighten the bolts and If the trouble is scres. (See the Table not solved, belo.) (*2) contact your Retighten the drive unit or distributor. axis installation bolts. Contact your distributor. Recommended grease : Alvania grease S2 (Shoa Shell) : Daphne Eponex No.2 (Idemitsu) See "3. Applying grease" in Chapter 2 of the Maintenance Manual. For details about ho to replace the insert, see "3. Replacing the insert" in Chapter 4 of the Maintenance Manual. 3-4

Inspection to be performed ith the controller turned on : Implementation Checkpoint Procedure Daily Threemonth Sixmonth Threeyear Remarks Check if the safety enclosure is in place. Check if emergency stop is Safety enclosure triggered hen the door is opened. Check if arning labels are affixed at the entrance and clearly visible. Emergency stop device Robot movement Press the emergency stop button to check if it orks. Check for abnormal movement and excessive vibration and noise. Contact your distributor. 3 Check if the brake orks to Z-axis brake stop the Z-axis from dropping operation (*3) more than 3mm from the stationary point. Check that the fan rotates. Check if any foreign object blocks the fan. Cooling fan on the rear of the controller Check for unusual noise during rotation. Check the fan cover for contamination. *1: Some robot controller models cannot monitor the load factor. Contact your distributor. Visually check the fan. If any foreign object is found, remove it. If unusual noise is heard even hen there is no foreign object, contact your distributor. Remove the fan cover and clean it. Periodic inspection *2: Bolt tightening torque Bolt size Tightening torque (kgf cm) Tightening torque (N m) M3 button head bolt 14 1.4 M3 20 2.0 M4 46 4.5 M5 92 9.0 M6 156 15.3 M8 380 37 M10 720 71 M12 1310 128 *3: Visually check the tightening torque from the outside of the safeguard enclosure ith the emergency stop sitch pressed and the controller poer turned off. 3-5

3. Maintenance parts 3.1 Consumable parts T4L/T4LH Part name Part number Remarks Shutter KDC-M229J-xxx SHUTTER 1 50st to 400st 3 Insert KDC-M2243-xxx INSERT Coupling resin part Slider KX1-M22L1-xxx SLIDER Slider resin part T5L/T5LH Periodic inspection T6L Part name Part number Remarks Shutter KDD-M229J-xxx SHUTTER 1 50st to 800st Insert KDD-M2243-xxx INSERT Coupling resin part Slider KX2-M22L1-xxx SLIDER Slider resin part Part name Part number Remarks Shutter KDE-M229J-xxx SHUTTER 1 50st to 800st Insert KDD-M2243-xxx INSERT Coupling resin part Slider KX3-M22L1-xxx SLIDER Slider resin part B10 Part name Part number Remarks KY1-M225E-xxx BELT Motor drive unit Belt KY1-M225F-xxx BELT, STROKE 150 to 2250 (Movable part) KY1-M225G-xxx BELT, STROKE 200 to 2500 (Movable part) B14 Part name Part number Remarks KY1-M225E-xxx BELT Motor drive unit Belt KY2-M225F-xxx BELT, STROKE 150 to 3050 (Movable part) KY2-M225G-xxx BELT, STROKE 200 to 3000 (Movable part) B14H Part name Part number Remarks KY1-M225E-xxx BELT Motor drive unit Belt KY2-M225F-xxx BELT, STROKE 150 to 3050 (Movable part) KY2-M225G-xxx BELT, STROKE 200 to 3000 (Movable part) 3-6

3.2 Robot cables 3.2.1 Single-axis robot cables Cables for ERCD Cable type Set model number Individual part model number Standard cable Composite cable KX1-M4751-0 Flexing cable Composite cable KX1-M4752-0 Cables for TS-X Cable type Set model number Individual part model number Signal cable KBY-M4751-0 Standard cable KBY-M4710-0 Poer cable KX7-M4752-0 Signal cable KBY-M4755-0 Flexing cable KBY-M4720-0 Poer cable KX7-M4752-0 Cables for SR1-X Cable type Set model number Individual part model number Signal cable KX7-M4751-1 Standard cable KX7-M4710-0 Poer cable KX7-M4752-0 Signal cable KX7-M4755-0 Flexing cable KX7-M4720-0 Poer cable KX7-M4752-0 3 Periodic inspection Cables for RDX (robot ith brake) Cable type Set model number Individual part model number Signal cable KBH-M4753-0 Standard cable KBH-M4720- B Poer cable KBH-M4752-0 ORG, BK cable KBH-M4421-00 Signal cable KBH-M4757-0 Flexing cable KBH-M4740- B Poer cable KBH-M4752-0 ORG, BK cable KBH-M4421-00 Cables for RDX (robot ithout brake) Cable type Set model number Individual part model number Signal cable KBH-M4751-0 Standard cable KBH-M4710- A Poer cable KBH-M4752-0 I/O connector KBH-M4420-00 Signal cable KBH-M4756-0 Flexing cable KBH-M4730- A Poer cable KBH-M4752-0 I/O connector KBH-M4420-00 3-7

3.2.2 Multi-robot cables Cables for single-axis multi-robot Connection controller : RCX240 Cable type Cable model number Flexing cable KX7-M4754-0 Cables for to-axis multi-robot 3 Connection controller : RCX221/222/240 Robot combination Cable type Cable model number 1st axis 2nd axis Flexing cable FLIP-X FLIP-X KX7-M4753-1 Periodic inspection Connection controller : RCX221/240 Robot combination Cable type Cable model number 1st axis 2nd axis PHASER FLIP-X KAU-M4754-2 Flexing cable FLIP-X PHASER KAU-M4756-2 The number in shon in the model number has the folloing meaning. Number in Cable length 1 * 1m 3 3.5m 5 5m A 10m * Cables for ERCD only 3-8

Chapter 4 Troubleshooting Contents 1. If you suspect trouble 4-1 1.1 Positioning error 4-1 1.2 Feedback error 4-2

1. If you suspect trouble If an error such as a positioning error or feedback error occurs, check the folloing points to find the solution before you determine the robot or controller has malfunctioned. If the trouble still exists even after checking these points, please contact your distributor ith a detailed description of the trouble. 1.1 Positioning error Positioning error Position deviates. The position deviates after moving the robot or set up of orkpiece tool. Robot bumped into something, or there are traces of bumping into (rubbing against) something. Operation as correct, but position deviates. 4 No Are cables correctly ired? Are connectors correctly fitted? Check iring and connectors. Yes Is cable broken? No (1) Check tool and orkpiece for arping. (2) Check robot alignment. Yes Replace the cable. Troubleshooting No Are the robot, tools and orkpiece correctly installed? Mechanical cause No Does the position return after return-to-origin operation? Check installation method. Yes Check for looseness of robot mechanical parts. (1) Check for looseness of mechanical parts. Retighten if necessary. (2) Replace mechanical parts. Yes Electrical cause Yes Is there a large source of noise nearby? Take measures against noise. No Check or replace the motor, cable and controller. 23401-A0-00 4-1

1.2 Feedback error Feedback error Feedback error Any foreign matter caught inside? No No Adjust mechanical alignment 4 Troubleshooting No Turn poer off and check for friction by moving manually Repair Yes Is there electrical discontinuity? No Are connector pins securely inserted? No Securely insert pins or repair defective pins Take noise reduction measures Yes Is external noise large? Yes Much mechanical friction? No Are parameters for controller and robot OK? No Are iring and connector securely connected? Yes Is iring live? Yes Is motor resistance OK? Yes Is motor encoder OK? Yes Is controller hardare OK? Yes No No No No Is brake installed? Yes Is brake sound heard hen turning poer on and off? Yes Replace motor (ith brake) Initialize parameters Securely connect iring and connector When feedback error is occurring, perform continuity check (1) Check motor poer supply lines U, V and W (2) Check encoder signal lines for phases A and B Replace motor since motor has shorted or burnt out Replace motor Recheck No Is there electrical discontinuity? Is 24V supplied to brake? Replace poer supply unit or repair defective parts (1) Check position shift by repetitive accuracy measurement (2) If replacement motor is available, check by exchanging the motors Yes No (1) If replacement controller is available, check by exchanging the controllers Yes Repair 23402-A0-00 4-2

Chapter 5 Specifications Contents 1. Robot specifications 5-1 1.1 T4L/T4LH 5-1 1.2 T5L/T5LH 5-3 1.3 T6L 5-5 1.4 T9 5-7 1.5 T9H 5-9 1.6 F8 5-11 1.7 F8L 5-13 1.8 F8LH 5-16 1.9 F10 5-18 1.10 F14 5-20 1.11 F14H 5-22 1.12 F17 5-24 1.13 F17L 5-27 1.14 F20 5-29 1.15 F20N 5-32 1.16 N15/N15D 5-34 1.17 N18/N18D 5-41 1.18 B10 5-48 1.19 B14 5-52 1.20 B14H 5-56 1.21 R5 5-60 1.22 R10 5-61 1.23 R20 5-62

1. Robot specifications 1.1 T4L/T4LH Specifications Static loading moment T4L T4LH AC servo motor output (W) 30 Repeatability(mm) Note 1 ±0.02 M Y Deceleration mechanism Ball scre φ8 (Class C10) Ball scre lead (mm) 12 6 2 Maximum speed (mm/sec) 720 360 120 Maximum Horizontal 4.5 6 6 payload (kg) Vertical 1.2 2.4 7.2 Rated thrust (N) 32 64 153 Stroke (mm) 50 to 400 M P M R MY MP MR 15 19 18 Overall length Horizontal Stroke+198 (Unit: N m) (mm) Vertical Stroke+236 Maximum dimensions of cross section of main unit (mm) W45 H53 Cable length (m) Standard: 3.5 / Option: 5,10 Controller ERCD SR1, TS-X, RCX222, Note 1. Positioning repeatability in one RCX240 direction. Robot driver RDX-05 Note 2. Position detectors (resolvers) are Linear guide type Position detector Resolution (Pulse/rotation) 2 ros of gothic arch grooves 1 rail Resolvers Note 2 16384 common to incremental and absolute specifications. If the controller has a backup function then it ill be absolute specifications. Alloable overhang Note. Distance from center of slider top to center of gravity of object being carried at a guide servicelife of 10,000km. Note. Stroke is 300mm hen calculating the service life. Horizontal installation Wall installation Vertical installation A 5 Specifications B C A C B A C T4L A B C T4L A B C T4L A C Lead 12 Lead 6 Lead 2 2kg 433 87 180 2kg 149 54 376 Lead 12 1.2kg 125 125 Lead 12 4.5kg 223 33 75 4.5kg 50 1 148 Lead 6 2.4kg 56 57 3kg 515 58 135 3kg 107 24 380 3kg 41 42 Lead 6 Lead 2 6kg 340 26 62 6kg 31 0 195 7.2kg 0 0 3kg 1585 58 142 3kg 113 24 1180 Lead 2 6kg 755 27 66 6kg 32 0 440 T4LH A B C T4LH A B C T4LH A C T4L Lead 12 Lead 6 Lead 2 T4LH 2kg 341 90 174 2kg 140 73 300 Lead 12 1.2kg 122 121 Lead 12 4.5kg 172 37 72 4.5kg 47 22 119 Lead 6 2.4kg 56 57 3kg 355 58 134 3kg 105 42 260 3kg 41 42 Lead 6 Lead 2 6kg 235 27 62 6kg 31 11 135 7.2kg 0 0 3kg 1105 59 142 3kg 113 42 810 Lead 2 6kg 520 27 66 6kg 32 11 305 (Unit: mm) 5-1

Dimensions Approx. 250 (Motor cable length) 125.5±3 Effective stroke When origin is on motor side 74.5±2(Note 1) 35 20±0.02 30 (Beteen knocks ±0.02) 72.5±3 When origin is on non-motor side 21.5±2(Note 1) (3) 109.5±1(ith brakes) 160.5±3 (ith brakes) (90) (44) 53 35 (38.5) 45 2-φ3 H7 Depth6 4-M4 0.7 Depth 9 1.6 (44) 36 24 45 (3: Scre head) (2) Grounding terminal (M4) L L+35 (ith brakes) 5 12 mm or less (Note 4) 1.2 φ8 11 4.5 8.5 φ4.5 Cross-section B-B 24 122.5 (ith brakes) 87.5 B B 121.5 156.5 (ith brakes) D φ4h7 Depth6 A E M 50 Installation hole:n-(see cross-section B-B) C R 2 Depth6 +0.02 4 0 (35) 11 Specifications 23501-A1-00 Note 1. Distance from both ends to the mechanical stopper. Note 2. Minimum bend radius of motor cable is R30. Note 3. Weight of models ith no brake. The eight of brake-attached models is 0.2kg heavier than the models ith no brake shon in the table. Note 4. The under-head length of the hex socket-head bolt (M4 0.7) to be used for the installation ork is 12mm or less. Effective stroke 50 100 150 200 250 300 350 400 L 248 298 348 398 448 498 548 598 A 125.5 175.5 225.5 275.5 325.5 375.5 425.5 475.5 C 50 100 150 200 250 300 350 400 D 125.5 125.5 125.5 125.5 E 200 200 M 0 1 2 3 0 1 0 1 N 4 6 8 10 6 8 8 10 Weight (kg) Note 3 1.1 1.2 1.4 1.5 1.6 1.7 1.8 1.9 5-2 T4L T4LH

1.2 T5L/T5LH Specifications Static loading moment T5L T5LH AC servo motor output (W) 30 Repeatability(mm) Note 1 ±0.02 M Y Deceleration mechanism Ball scre φ12 (Class C10) Ball scre lead (mm) 20 12 6 Maximum speed (mm/sec) Note 2 1200 800 400 Maximum Horizontal 3 5 9 payload (kg) Vertical 1.2 2.4 Rated thrust (N) 19 32 64 Stroke (mm) 50 to 800 M P M R MY MP MR 30 34 40 Overall length Horizontal Stroke+201.5 (Unit: N m) (mm) Vertical Stroke+239.5 Note 1. Positioning repeatability in one direction. Maximum dimensions of cross W55 H52 Note 2. If the stroke exceeds 600mm, section of main unit (mm) resonance may occur in the ball scre Cable length (m) Standard: 3.5 / Option: 5,10 depending on the operation area Controller ERCD SR1-X, TS-X, (critical speed). If this occurs, make RCX222, RCX240 the adjustment to decrease the Robot driver RDX-05 operation speed based on the max. Linear guide type Position detector Resolution (Pulse/rotation) 2 ros of gothic arch grooves 1 rail Resolvers Note 3 16384 speed stated in the table shon at the loer portion of the draing. Note 3. Position detectors (resolvers) are common to incremental and absolute specifications. If the controller has a backup function then it ill be absolute specifications. Alloable overhang Note. Distance from center of slider top to center of gravity of object being carried at a guide servicelife of 10,000km. Note. Stroke is 600mm hen calculating the service life. Horizontal installation Wall installation Vertical installation A 5 Specifications B C A C B A C T5L A B C T5L A B C T5L A C Lead 20 Lead 12 Lead 6 1kg 600 323 683 1kg 600 291 600 Lead 12 1.2kg 242 240 Lead 20 3kg 675 103 247 3kg 215 73 589 Lead 6 2.4kg 113 113 2kg 1170 159 406 2kg 368 127 1082 Lead 12 5kg 555 59 155 5kg 127 30 449 3kg 1498 104 294 3kg 263 73 970 Lead 6 9kg 628 31 89 9kg 54 0 400 T5LH A B C T5LH A B C T5LH A C Lead 20 Lead 12 Lead 6 1kg 967 324 598 1kg 551 304 925 Lead 12 1.2kg 240 239 Lead 20 3kg 429 104 226 3kg 185 89 378 Lead 6 2.4kg 109 110 2kg 916 159 398 2kg 347 141 800 Lead 12 5kg 436 60 152 5kg 119 44 355 3kg 1194 105 294 3kg 259 87 950 Lead 6 9kg 624 31 89 9kg 50 15 385 (Unit: mm) T5L T5LH 5-3

Dimensions Approx. 250 (Motor cable length) 127±3 Effective stroke 74.5±3 When origin is on motor side When origin is on non-motor side 73±2(Note 1) 40 25±0.02 35 (Beteen knocks ±0.02) 20.5±2(Note 1) (3) 108±1 (ith brakes) (Note 1) 162±3 (ith brakes) (96) (55) 50 42 (45.5) 52 55 2-φ3 H7 Depth6 4-M4 0.7 Depth9 1.6 (51) 41 29 (3: Scre head) (2) Grounding terminal (M4) L L+35 (ith brakes) 5 15 mm or less (Note 4) 1 16 φ8 4.5 9 φ4.5 Cross-section B-B 30 122 (ith brakes) 87 A (34.5) D Installation hole:n-(see cross-section B-B) M 50 B B 135.5 170.5 (ith brakes) φ4h7 Depth6 C R 2 4 +0.02 0 Depth6 16 Specifications 23501-A2-00 Note 1. Distance from both ends to the mechanical stopper. Note 2. Minimum bend radius of motor cable is R30. Note 3. Weight of models ith no brake. The eight of brake-attached models is 0.2kg heavier than the models ith no brake shon in the table. Note 4. The under-head length of the hex socket-head bolt (M4 0.7) to be used for the installation ork is 15mm or less. Effective stroke 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 L 251.5 301.5 351.5 401.5 451.5 501.5 551.5 601.5 651.5 701.5 751.5 801.5 851.5 901.5 951.5 1001.5 A 130 180 230 280 330 380 430 480 530 580 630 680 730 780 830 880 C 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 D 230 230 230 230 230 230 230 230 230 230 M 0 1 2 3 4 5 0 1 2 3 4 5 6 7 8 9 N 4 6 8 10 12 14 6 8 10 12 14 16 18 20 22 24 Weight (kg) Note 3 1.7 1.8 2.0 2.2 2.3 2.5 2.7 2.8 3.0 3.2 3.3 3.5 3.7 3.8 4.0 4.2 Maximum speed (mm/sec) Lead 20 Lead 12 Lead 6 1200 800 400 960 640 320 840 560 280 720 480 240 660 440 220 Note 5 Speed setting 80% 70% 60% 55% Note 5. When the stroke is longer than 600mm, resonance of the ball scre may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shon in the table above. 5-4 T5L T5LH

1.3 T6L Specifications Static loading moment AC servo motor output (W) 60 Repeatability(mm) Note 1 ±0.02 M Y Deceleration mechanism Ball scre φ12 (Class C10) Ball scre lead (mm) 20 12 6 Maximum speed (mm/sec) Note 2 1333 800 400 Maximum Horizontal 10 12 30 payload (kg) Vertical 4 8 Rated thrust (N) 51 85 170 Stroke (mm) 50 to 800 M P M R MY MP MR 35 40 50 (Unit: N m) Note 1. Positioning repeatability in one Overall length Horizontal Stroke+247.5 direction. (mm) Vertical Stroke+285.5 Note 2. If the stroke exceeds 600mm, Maximum dimensions of cross resonance may occur in the ball scre W65 H56 section of main unit (mm) depending on the operation area (critical speed). If this occurs, make Cable length (m) Controller Robot driver Linear guide type Position detector Resolution (Pulse/rotation) Standard: 3.5 / Option: 5,10 SR1-X, TS-X, RCX222, RCX240 RDX-05 2 ros of gothic arch grooves 1 rail Resolvers Note 3 16384 the adjustment to decrease the operation speed based on the max. speed stated in the table shon at the loer portion of the draing. Note 3. Position detectors (resolvers) are common to incremental and absolute specifications. If the controller has a backup function then it ill be absolute specifications. Alloable overhang Note. Distance from center of slider top to center of gravity of object being carried at a guide servicelife of 10,000km. Note. Stroke is 600mm hen calculating the service life. Horizontal installation Wall installation Vertical installation A 5 Specifications B C A C B A C A B C A B C A C 2kg 319 184 234 2kg 234 152 265 1kg 355 352 Lead 20 6kg 98 37 77 Lead 20 6kg 61 13 71 Lead 12 2kg 165 165 10kg 64 0 55 10kg 30 0 42 4kg 70 72 3kg 624 125 335 3kg 293 96 510 2kg 171 172 Lead 12 8kg 273 41 121 Lead 12 8kg 89 14 210 Lead 6 4kg 73 74 12kg 216 24 77 12kg 43 0 130 8kg 23 26 5kg 694 73 236 5kg 204 45 530 Lead 6 10kg 374 33 109 Lead 6 10kg 72 0 245 30kg 159 0 25 30kg 0 0 0 (Unit: mm) T6L 5-5

Dimensions Approx. 250 (Motor cable length) 156.5±3 Effective stroke 91±3 When origin is on motor side When origin is on non-motor side 92.5±2(Note 1) 45 27±2(Note 1) 30±0.02 40 (Beteen knocks±0.02) (3) (116) (60) (58) 48 32 53 44 (47.5) 56 65 127.5±1(ith brakes)(note 1) 191.5±3 2-φ3H7 Depth6 4-M5 0.8 Depth11 1.6 (3: Scre head) (2) Grounding terminal (M4) L L+35 (ith brakes) 15 mm or less (Note 4) 1.8 148.5 (ith brakes) 113.5 40 A (49) B D Installation hole:n-(see cross-section B-B) M 50 5 23 φ 8 4.5 9.5 φ 4.5 Cross-section B-B 42 B 168 203 (ith brakes) φ4h7 Depth6 C R 2 Depth6 + 0.02 4 0 23 Specifications 23501-A3-00 Note 1. Distance from both ends to the mechanical stopper. Note 2. Minimum bend radius of motor cable is R30. Note 3. Weight of models ith no brake. The eight of brake-attached models is 0.2kg heavier than the models ith no brake shon in the table. Note 4. The under-head length of the hex socket-head bolt (M4 0.7) to be used for the installation ork is 15mm or less. Effective stroke 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 L 297.5 347.5 397.5 447.5 497.5 547.5 597.5 647.5 697.5 747.5 797.5 847.5 897.5 947.5 997.5 1047.5 A 95 145 195 245 295 345 395 445 495 545 595 645 695 745 795 845 C 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 D 195 195 195 195 195 195 195 195 195 195 M 0 1 2 3 4 5 0 1 2 3 4 5 6 7 8 9 N 6 8 10 12 14 16 8 10 12 14 16 18 20 22 24 26 Weight (kg) Note 3 2.4 2.6 2.8 3.1 3.3 3.5 3.7 4.0 4.2 4.4 4.6 4.8 5.1 5.3 5.5 5.7 Maximum speed (mm/sec) Lead 20 Lead 12 Lead 6 1333 800 400 1133 680 340 1000 600 300 866 520 260 800 480 240 Note 5 Speed setting 85% 75% 65% 60% Note 5. When the stroke is longer than 600mm, resonance of the ball scre may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shon in the table above. 5-6 T6L

1.4 T9 Specifications Static loading moment AC servo motor output (W) 100 Repeatability(mm) Note 1 ±0.01 M Y Deceleration mechanism Ball scre φ15 (Class C7) Ball scre lead (mm) 30 20 10 5 Maximum speed (mm/sec) Note 2 1800 1200 600 300 Maximum Horizontal 15 30 55 80 payload (kg) Vertical 4 10 20 Rated thrust (N) 56 84 169 339 M P M R MY MP MR 86 133 117 Stroke (mm) 150 to 1050 (50mm pitch) (Unit: N m) Note 1. Positioning repeatability in one Overall length Horizontal Stroke+259 direction. (mm) Vertical Stroke+289 Note 2. If the stroke exceeds 700mm, Maximum dimensions of cross resonance may occur in the ball scre W94 H98 section of main unit (mm) depending on the operation area (critical speed). If this occurs, make Cable length (m) Controller Robot driver Linear guide type Position detector Resolution (Pulse/rotation) Standard: 3.5 / Option: 5,10 SR1-X, TS-X, RCX222, RCX240 RDX-05 4 ros of circular arc grooves 1 rail Resolvers Note 3 16384 the adjustment to decrease the operation speed based on the max. speed stated in the table shon at the loer portion of the draing. Note 3. Position detectors (resolvers) are common to incremental and absolute specifications. If the controller has a backup function then it ill be absolute specifications. Alloable overhang Note. Distance from center of slider top to center of gravity of object being carried at a guide servicelife of 10,000km. Note. Stroke is 600mm hen calculating the service life. Horizontal installation Wall installation Vertical installation A 5 Specifications B C A C B A C A B C A B C A C Lead 30 5kg 864 501 383 5kg 348 384 776 1kg 600 600 Lead 30 15kg 491 156 140 15kg 87 40 306 Lead 20 2kg 1098 1098 5kg 1292 505 462 5kg 416 388 1186 4kg 545 545 Lead 20 15kg 572 158 151 Lead 20 15kg 92 42 386 4kg 594 594 30kg 455 73 75 30kg 0 0 61 Lead 10 8kg 280 280 20kg 617 119 127 10kg 193 132 910 10kg 217 217 Lead 10 40kg 422 53 59 Lead 10 20kg 53 0 400 10kg 221 221 55kg 420 36 40 30kg 0 0 109 Lead 5 15kg 135 135 50kg 722 42 47 10kg 197 133 2360 20kg 92 92 Lead 5 60kg 657 33 37 Lead 5 20kg 54 0 985 80kg 577 23 25 30kg 0 0 427 (Unit: mm) T9 5-7

Dimensions Approx. 250 (Motor cable length) 165±3 (Note 2): When origin is on motor side (165): When origin is on non-motor side 115±1 (Note 1) 90 2-φ6H7 Depth8 60 4-M6 1.0 Depth18 82 (Beteen knocks ±0.02) Effective stroke (94): When origin is on motor side 94±3 (Note 3): When origin is on non-motor side 44±1 (Note 4) Approx. 250 145±1 (ith brakes) (Note 1) 195±3: When origin is on motor side (195): When origin is on non-motor side 94 4-M5 0.8 Depth4 (The same position on the opposite surface at to (2) locations) 50 20 10 13 23 43 83.7 87.7 2.5 20 17.5 98 95.5 30 (ith brakes) Grounding terminal L 165 60 (N-1) A φ11 B (Note 5) 60 5 195 (ith brakes) B 22 13 N-M8 1.25 23501-A4-00 Specifications Note 1. Distance from both ends to the mechanical stopper. Note 2. 167.5±4 hen the high lead specifi cation (Lead 30) is used. Note 3. 94±4 hen the high lead specifi cation (Lead 30) is used. Note 4. 41.5±1 hen the high lead specifi cation (Lead 30) is used. Note 5. When installing the robot, ashers, etc., cannot be used in the φ11 counter bore hole. Note 6. Minimum bend radius of motor cable is R50. Note 7. Weight of models ith no brake. The eight of brake-attached models is 0.5kg heavier than the models ith no brake shon in the table. Effective stroke 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1050 L 409 459 509 559 609 659 709 759 809 859 909 959 1009 1059 1109 1159 1209 1259 1309 A 64 54 44 94 84 74 64 54 44 94 84 74 64 54 44 94 84 74 64 N 4 5 6 6 7 8 9 10 11 11 12 13 14 15 16 16 17 18 19 Weight (kg) Note 7 5.5 5.9 6.2 6.6 6.9 7.3 7.6 8.0 8.3 8.7 9.0 9.4 9.7 10.0 10.3 10.7 11.0 11.4 11.7 Lead 30 1800 1440 1170 900 810 Maximum Lead 20 1200 960 780 600 540 speed (mm/sec) Lead 10 600 480 390 300 270 Note 8 Lead 5 300 240 195 150 135 Speed setting 80% 65% 50% 45% Note 8. When the stroke is longer than 700mm, resonance of the ball scre may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shon in the table above. 5-8 T9

1.5 T9H Specifications Static loading moment AC servo motor output (W) 200 Repeatability(mm) Note 1 ±0.01 M Y Deceleration mechanism Ball scre φ15 (Class C7) Ball scre lead (mm) 30 20 10 5 Maximum speed (mm/sec) Note 2 1800 1200 600 300 Maximum Horizontal 25 40 80 100 payload (kg) Vertical 8 20 30 Rated thrust (N) 113 170 341 683 M P M R MY MP MR 86 133 117 Stroke (mm) 150 to 1050 (50mm pitch) (Unit: N m) Note 1. Positioning repeatability in one Overall length Horizontal Stroke+273 direction. (mm) Vertical Stroke+303 Note 2. If the stroke exceeds 700mm, Maximum dimensions of cross resonance may occur in the ball scre W94 H98 section of main unit (mm) depending on the operation area (critical speed). If this occurs, make Cable length (m) Controller Robot driver Linear guide type Position detector Resolution (Pulse/rotation) Standard: 3.5 / Option: 5,10 SR1-X, TS-X, RCX222, RCX240 RDX-10 4 ros of circular arc grooves 1 rail Resolvers Note 3 16384 the adjustment to decrease the operation speed based on the max. speed stated in the table shon at the loer portion of the draing. Note 3. Position detectors (resolvers) are common to incremental and absolute specifications. If the controller has a backup function then it ill be absolute specifications. Alloable overhang Note. Distance from center of slider top to center of gravity of object being carried at a guide servicelife of 10,000km. Note. Stroke is 600mm hen calculating the service life. Horizontal installation Wall installation Vertical installation A 5 Specifications B C A C B A C A B C A B C A C Lead 30 10kg 415 286 183 10kg 140 120 323 4kg 515 515 Lead 30 20kg 270 105 93 20kg 41 0 123 Lead 20 6kg 334 334 10kg 667 244 225 10kg 170 128 549 8kg 244 244 Lead 20 20kg 330 112 107 Lead 20 20kg 46 0 182 10kg 217 217 40kg 162 42 47 40kg 0 0 0 Lead 10 15kg 133 133 30kg 392 75 81 20kg 52 0 335 20kg 90 90 Lead 10 50kg 297 40 44 Lead 10 25kg 24 0 235 15kg 135 135 80kg 265 21 24 30kg 0 0 108 Lead 5 20kg 92 92 60kg 477 22 37 20kg 54 0 710 30kg 49 49 Lead 5 80kg 412 22 25 Lead 5 25kg 25 0 505 100kg 362 16 18 30kg 0 0 355 (Unit: mm) T9H 5-9

Dimensions Approx. 250 (Motor cable length) 179±3 (Note 2): When origin is on motor side Effective stroke 94±3 (Note 3): When origin is on non-motor side (179): When origin is on non-motor side (94): When origin is on motor side 129±1 (Note 1) 90 60 2-φ6H7 Depth8 4-M6 1.0 Depth18 44±1 (Note 4) 82 (Beteen knocks ±0.02) Approx. 250 159±1 (ith brakes) (Note 1) 209±3 (ith brakes): When origin is on motor side (209): When origin is on non-motor side 94 4-M5 0.8 Depth4 (The same position on the opposite surface at 2 locations) 50 20 10 13 23 43 83.7 87.7 2.5 20 17.5 98 Grounding terminal 95.5 30 (ith brakes) L 179 60 (N-1) A B (Note 5) 60 φ11 5 209 (ith brakes) B 22 13 N-M8 1.25 23502-A4-00 Specifications Note 1. Distance from both ends to the mechanical stopper. Note 2. 181.5±4 hen the high lead specifi cation (Lead 30) is used. Note 3. 94±4 hen the high lead specifi cation (Lead 30) is used. Note 4. 41.5±1 hen the high lead specifi cation (Lead 30) is used. Note 5. When installing the robot, ashers, etc., cannot be used in the φ11 counter bore hole. Note 6. Minimum bend radius of motor cable is R50. Note 7. Weight of models ith no brake. The eight of brake-attached models is 0.5kg heavier than the models ith no brake shon in the table. Effective stroke 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1050 L 423 473 523 573 623 673 723 773 823 873 923 973 1023 1073 1123 1173 1223 1273 1323 A 64 54 44 94 84 74 64 54 44 94 84 74 64 54 44 94 84 74 64 N 4 5 6 6 7 8 9 10 11 11 12 13 14 15 16 16 17 18 19 Weight (kg) Note 7 5.8 6.2 6.5 6.9 7.3 7.7 8.0 8.4 8.8 9.1 9.5 9.9 10.2 10.6 11.0 11.4 11.7 12.1 12.5 Lead 30 1800 1440 1170 900 810 Maximum Lead 20 1200 960 780 600 540 speed (mm/sec) Lead 10 600 480 390 300 270 Note 8 Lead 5 300 240 195 150 135 Speed setting 80% 65% 50% 45% Note 8. When the stroke is longer than 700mm, resonance of the ball scre may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shon in the table above. 5-10 T9H

1.6 F8 Specifications Static loading moment AC servo motor output (W) 100 Repeatability(mm) Note 1 ±0.02 M Y Deceleration mechanism Ball scre φ12 (Class C10) Ball scre lead (mm) 20 12 6 Maximum speed (mm/sec) Note 2 1200 720 360 Maximum Horizontal 12 20 40 payload (kg) Vertical 4 8 Rated thrust (N) 84 141 283 M P M R MY MP MR 70 95 110 Stroke (mm) 150 to 800 (50mm pitch) (Unit: N m) Note 1. Positioning repeatability in one Overall length Horizontal Stroke+286 direction. (mm) Vertical Stroke+316 Note 2. If the stroke exceeds 550mm, Maximum dimensions of cross resonance may occur in the ball scre W80 H65 section of main unit (mm) depending on the operation area (critical speed). If this occurs, make Cable length (m) Controller Robot driver Linear guide type Position detector Resolution (Pulse/rotation) Standard: 3.5 / Option: 5,10 SR1-X, TS-X, RCX222, RCX240 RDX-05 4 ros of circular arc grooves 1 rail Resolvers Note 3 16384 the adjustment to decrease the operation speed based on the max. speed stated in the table shon at the loer portion of the draing. Note 3. Position detectors (resolvers) are common to incremental and absolute specifications. If the controller has a backup function then it ill be absolute specifications. Alloable overhang Note. Distance from center of slider top to center of gravity of object being carried at a guide servicelife of 10,000km. Note. Stroke is 600mm hen calculating the service life. Horizontal installation Wall installation Vertical installation A 5 Specifications B C A C B A C A B C A B C A C 5kg 197 76 120 5kg 104 67 174 1kg 447 448 Lead 20 10kg 100 32 54 Lead 20 10kg 37 23 72 2kg 214 216 Lead 12 12kg 85 25 43 12kg 27 15 55 3kg 137 138 5kg 364 89 188 5kg 171 81 340 4kg 98 99 Lead 12 10kg 203 39 87 10kg 69 32 172 2kg 244 245 Lead 12 15kg 139 22 51 15kg 33 15 100 4kg 113 113 Lead 6 20kg 103 14 33 20kg 15 6 55 6kg 69 69 10kg 403 43 113 10kg 94 36 369 8kg 46 46 Lead 6 20kg 214 16 43 20kg 25 9 157 Lead 6 30kg 140 6 20 30kg 0 0 14 40kg 113 0 8 40kg 0 0 0 (Unit: mm) F8 5-11

Dimensions Approx. 240 (Motor cable length) 193±3 : When origin is on motor side Effective stroke (93) : When origin is on motor side (193) : When origin is on non-motor side 50 93±3 : When origin is on non-motor side 148±1 (Note 1) 30 ±0.02 48±1 (Note1) 80 70 (Tolerance beteen knocks±0.02) F Approx. 210 (Motor cable length) 80 60 178±1 (ith brake) (Note 1) 223±3 (ith brake) : When origin is on motor side (223) : When origin is on non-motor side 78 4-M6 1.0 Depth 12 2-φ5H7 Depth 10 L+30 (ith brake) L Greasing hole 34 65 63.5 5 Grounding terminal (M4) 5 1.5 2 40 198 (ith brake) 168 50 A 100 B 50 (68) C-φ5.5 See cross-section E-E. E 100 R Specifications 6.4 3.5 *Recommended plate nut: M3 ( F: Detail of T-groove 6 t1.6) φ9.5 5 145 175 (ith brake) φ5.5 Use hex socket-head bolt (M5 0.8) ith under-head length of 16mm or more. E φ10h7 Plate thickness 10 (Note 4) D 2 10H7 (Note 4) Cross-section E-E 23501-A5-00 Note 1. Distance from both ends to the mechanical stopper. Note 2. When installing the robot, ashers, etc., cannot be used in the main unit. Note 3. Minimum bend radius of motor cable is R50. Note 4. When using this φ10 knock-pin hole to position the robot body, the knockpin must not protrude more than 10mm inside the robot body. Note 5. Weight of models ith no brake. The eight of brake-attached models is 0.3kg heavier than the models ith no brake shon in the table. Effective stroke 150 200 250 300 350 400 450 500 550 600 650 700 750 800 L 436 486 536 586 636 686 736 786 836 886 936 986 1036 1086 A 0 0 1 1 2 2 3 3 4 4 5 5 6 6 B 100 150 100 150 100 150 100 150 100 150 100 150 100 150 C 8 8 10 10 12 12 14 14 16 16 18 18 20 20 D 240 290 340 390 440 490 540 590 640 690 740 790 840 890 Weight (kg) Note 5 3.6 3.9 4.2 4.4 4.7 5.0 5.3 5.6 5.9 6.2 6.4 6.7 7.0 7.3 Maximum speed (mm/sec) Lead 20 Lead 12 Lead 6 1200 720 360 1080 648 324 900 540 270 780 468 234 720 432 216 600 360 180 Note 6 Speed setting 90% 75% 65% 60% 50% Note 6. When the stroke is longer than 550mm, resonance of the ball scre may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shon in the table above. 5-12 F8

1.7 F8L Specifications Static loading moment AC servo motor output (W) 100 Repeatability(mm) Note 1 ±0.01 Deceleration mechanism Ball scre φ15 (Class C7) M Y Ball scre lead (mm) 30 20 10 5 Maximum speed (mm/sec) Note 2 1800 1200 600 300 Maximum Horizontal 7 20 40 50 payload (kg) Vertical 4 8 16 M R M P Rated thrust (N) 56 84 169 339 Stroke (mm) 150 to 1050 (50mm pitch) MY MP MR Overall length Horizontal Stroke+300 Stroke+292 70 95 110 (mm) Vertical Stroke+322 (Unit: N m) Maximum dimensions of cross W80 H65 Note 1. Positioning repeatability in one section of main unit (mm) direction. Cable length (m) Controller Robot driver Linear guide type Position detector Resolution (Pulse/rotation) Standard: 3.5 / Option: 5,10 SR1-X, TS-X, RCX222, RCX240 RDX-05 4 ros of circular arc grooves 1 rail Resolvers Note 3 16384 Note 2. If the stroke exceeds 650mm, resonance may occur in the ball scre depending on the operation area (critical speed). If this occurs, make the adjustment to decrease the operation speed based on the max. speed stated in the table shon at the loer portion of the draing. Note 3. Position detectors (resolvers) are common to incremental and absolute specifications. If the controller has a backup function then it ill be absolute specifications. Alloable overhang Note. Distance from center of slider top to center of gravity of object being carried at a guide servicelife of 10,000km. Note. Stroke is 600mm hen calculating the service life. Horizontal installation Wall installation Vertical installation A 5 Specifications B C A C B A C A B C A B C A C Lead 30 5kg 112 80 80 5kg 55 57 77 2kg 236 240 Lead 30 Lead 20 8kg 78 43 49 8kg 21 19 34 4kg 106 110 5kg 211 108 147 5kg 119 89 176 2kg 310 311 Lead 20 10kg 116 45 69 10kg 38 26 69 4kg 141 143 Lead 20 Lead 10 15kg 76 24 39 15kg 7 0 16 6kg 85 86 20kg 58 14 26 20kg 0 0 0 8kg 57 58 10kg 251 56 122 10kg 85 39 202 5kg 123 124 Lead 10 20kg 121 20 46 20kg 7 0 30 10kg 47 48 Lead 10 Lead 5 30kg 74 8 20 30kg 0 0 0 15kg 22 22 40kg 35 0 6 40kg 0 0 0 16kg 19 19 20kg 249 23 62 20kg 19 7 140 Lead 5 30kg 170 10 29 30kg 0 0 0 Lead 5 40kg 138 4 12 40kg 0 0 0 F8L 50kg 51 0 0 50kg 0 0 0 (Unit: mm) 5-13

Dimensions Approx. 240 (Motor cable length) 204±3 : When origin is on motor side Effective stroke (88) : When origin is on motor side (204) : When origin is on non-motor side 50 88±3 : When origin is on non-motor side 160±1 (Note 1) 30 ±0.02 44±1 (Note 1) 80 70 (Tolerance beteen knocks±0.02) F Approx. 210 (Motor cable length) 80 60 190±1 (ith brake) (Note 1) 234±3 (ith brake) : When origin is on motor side (234) : When origin is on non-motor side 78 4-M6 1.0 Depth 12 2-φ5H7 Depth 10 L+30 (ith brake) L Greasing hole 34 65 63.5 Grounding terminal (M4) 209 (ith brake) C-φ5.5 See cross-section E-E. 179 50 A 100 B 50 (63) E 100 5 Specifications 5 1.5 2 6.4 3.5 40 *Recommended plate nut: M3 ( 6 t1.6) F: Detail of T-groove 9.5 5 156 186 (ith brake) 5.5 Use hex socket-head bolt (M5 0.8) ith under-head length of 16mm or more. Cross-section E-E E φ10h7 Plate thickness 10 (Note 4) D R 2 10H7 (Note 4) 23502-A5-00 Note 1. Distance from both ends to the mechanical stopper. Note 2. When installing the robot, do not use ashers inside the robot body. Note 3. Minimum bend radius of motor cable is R50. Note 4. When using this φ10 knock-pin hole to position the robot body, the knockpin must not protrude more than 10mm inside the robot body. Note 5. Weight of models ith no brake. The eight of brake-attached models is 0.3kg heavier than the models ith no brake shon in the table. Effective stroke 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1050 L 442 492 542 592 642 692 742 792 842 892 942 992 1042 1092 1142 1192 1242 1292 1342 A 0 0 1 1 2 2 3 3 4 4 5 5 6 6 7 7 8 8 9 B 100 150 100 150 100 150 100 150 100 150 100 150 100 150 100 150 100 150 100 C 8 8 10 10 12 12 14 14 16 16 18 18 20 20 22 22 24 24 26 D 240 290 340 390 440 490 540 590 640 690 740 790 840 890 940 990 1040 1090 1140 Weight (kg) Note 5 3.9 4.2 4.5 4.8 5.1 5.4 5.7 6.1 6.4 6.7 7.0 7.3 7.6 7.9 8.2 8.5 8.8 9.2 9.5 Maximum speed (mm/sec) Lead 20 Lead 10 Lead 5 1200 600 300 1020 510 255 900 450 225 780 390 195 720 360 180 660 330 165 600 300 150 540 270 135 480 240 120 Note 6 Speed setting 85% 75% 65% 60% 55% 50% 45% 40% Note 6. When the stroke is longer than 650mm, resonance of the ball scre may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shon in the table above. 5-14 F8L

Dimensions (High lead type: Lead 30) Approx. 240 (Motor cable length) 212±4 : When origin is on motor side (209.5) : When origin is on non-motor side 50 Effective stroke (88) : When origin is on motor side 90.5±4: When origin is on non-motor side 165.5±1 (Note 1) 30 ±0.02 44±1 (Note 1) 80 70 (Tolerance beteen knocks±0.02) 4-M6 1.0 Depth 12 2-φ5H7 Depth 10 F 80 60 78 L Greasing hole 34 65 63.5 Grounding terminal (M4) 5 1.5 2 6.4 3.5 40 *Recommended plate nut: M3 ( 6 t1.6) F: Detail of T-groove 9.5 C-φ5.5 See cross-section E-E. 5 5.5 187 50 A 100 B 50 (63) 164 Use hex socket-head bolt (M5 0.8) ith under-head length of 16mm or more. Cross-section E-E E E 100 φ10h7 Plate thickness 10 (Note 4) D R 2 10H7 (Note 4) 23503-A5-00 5 Specifications Note 1. Distance from both ends to the mechanical stopper. Note 2. When installing the robot, do not use ashers inside the robot body. Note 3. Minimum bend radius of motor cable is R50. Note 4. When using this φ10 knock-pin hole to position the robot body, the knockpin must not protrude more than 10mm inside the robot body. Effective stroke 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1050 L 450 500 550 600 650 700 750 800 850 900 950 1000 1050 1100 1150 1200 1250 1300 1350 A 0 0 1 1 2 2 3 3 4 4 5 5 6 6 7 7 8 8 9 B 100 150 100 150 100 150 100 150 100 150 100 150 100 150 100 150 100 150 100 C 8 8 10 10 12 12 14 14 16 16 18 18 20 20 22 22 24 24 26 D 240 290 340 390 440 490 540 590 640 690 740 790 840 890 940 990 1040 1090 1140 Weight (kg) 3.9 4.2 4.5 4.8 5.1 5.4 5.7 6.1 6.4 6.7 7.0 7.3 7.6 7.9 8.2 8.5 8.8 9.2 9.5 Maximum speed Lead 30 1800 1530 1350 1170 1080 990 900 810 720 (mm/sec) Note 5 Speed setting 85% 75% 65% 60% 55% 50% 45% 40% Note 5. When the stroke is longer than 650mm, resonance of the ball scre may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shon in the table above. F8L 5-15

1.8 F8LH Specifications Static loading moment AC servo motor output (W) 100 Repeatability(mm) Note 1 ±0.01 M Y Deceleration mechanism Ball scre φ15 (Class C7) Ball scre lead (mm) 20 10 5 Maximum speed (mm/sec) Note 2 1200 600 300 Maximum payload (kg) Horizontal 30 60 80 M R M P Rated thrust (N) 84 169 339 MY MP MR Stroke (mm) Overall length (mm) 150 to 1050 (50mm pitch) Stroke+368 128 163 143 (Unit: N m) 5 Specifications Maximum dimensions of cross Note 1. Positioning repeatability in one W80 H65 section of main unit (mm) direction. Cable length (m) Controller Robot driver Linear guide type Position detector Resolution (Pulse/rotation) Standard: 3.5 / Option: 5,10 SR1-X, TS-X, RCX222, RCX240 RDX-05 4 ros of circular arc grooves 1 rail Resolvers Note 3 16384 Note 2. If the stroke exceeds 600mm, resonance may occur in the ball scre depending on the operation area (critical speed). If this occurs, make the adjustment to decrease the operation speed based on the max. speed stated in the table shon at the loer portion of the draing. Note 3. Position detectors (resolvers) are common to incremental and absolute specifications. If the controller has a backup function then it ill be absolute specifications. Alloable overhang Note. Distance from center of slider top to center of gravity of object being carried at a guide servicelife of 10,000km. Note. Stroke is 600mm hen calculating the service life. Horizontal installation Wall installation A B C A C B A B C A B C 10kg 573 256 176 10kg 147 215 515 Lead 20 20kg 334 116 81 Lead 20 20kg 53 75 255 30kg 279 70 50 30kg 20 29 160 20kg 629 137 111 20kg 80 99 545 Lead 10 40kg 479 57 47 Lead 10 40kg 15 19 270 60kg 382 30 25 60kg 20kg 1094 148 127 20kg 96 112 1005 Lead 5 40kg 851 63 54 40kg 22 26 604 Lead 5 60kg 714 34 29 60kg 80kg 601 20 17 80kg (Unit: mm) 5-16 F8LH

Dimensions Approx. 240 (Motor cable length) 242±3 : When origin is on motor side Effective stroke (126) : When origin is on motor side (242) : When origin is on non-motor side 120 126±3 : When origin is on 50 non-motor side 160±1 (Note 1) 30 ±0.02 44±1 (Note 1) 80 70 (Tolerance beteen knocks±0.02) 8-M6 1.0 Depth 12 2-φ5H7 Depth 10 F 80 60 154 L 2-Greasing hole 34 65 6.4 3.5 63.5 1.5 Grounding terminal (M4) 5 2 *Recommended plate nut: M3 ( F: Detail of T-groove 40 6 t1.6) 9.5 C-φ5.5 See cross-section E-E. 5 5.5 192 50 A 100 B 50 (76) 169 Use hex socket-head bolt (M5 0.8) ith under-head length of 16mm or more. Cross-section E-E E E 100 φ10h7 Plate thickness 10 (Note 4) D R 2 10H7 (Note 4) 23504-A5-00 Note 1. Distance from both ends to the mechanical stopper. Note 2. When installing the robot, do not use ashers inside the robot body. Note 3. Minimum bend radius of motor cable is R50. Note 4. When using this φ10 knock-pin hole to position the robot body, the knockpin must not protrude more than 10mm inside the robot body. 5 Specifications Effective stroke 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1050 L 518 568 618 668 718 768 818 868 918 968 1018 1068 1118 1168 1218 1268 1318 1368 1418 A 0 1 1 2 2 3 3 4 4 5 5 6 6 7 7 8 8 9 9 B 150 100 150 100 150 100 150 100 150 100 150 100 150 100 150 100 150 100 150 C 8 10 10 12 12 14 14 16 16 18 18 20 20 22 22 24 24 26 26 D 290 340 390 440 490 540 590 640 690 740 790 840 890 940 990 1040 1090 1140 1190 Weight (kg) 4.7 5.0 5.3 5.6 5.9 6.2 6.6 6.9 7.2 7.5 7.8 8.1 8.4 8.7 9.0 9.3 9.7 10.0 10.3 Maximum speed (mm/sec) Lead 20 Lead 10 Lead 5 1200 600 300 1020 510 255 900 450 225 780 390 195 720 360 180 660 330 165 600 300 150 540 270 135 480 240 120 420 210 105 Note 5 Speed setting 85% 75% 65% 60% 55% 50% 45% 40% 35% Note 5. When the stroke is longer than 600mm, resonance of the ball scre may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shon in the table above. F8LH 5-17

1.9 F10 Specifications Static loading moment AC servo motor output (W) 100 Repeatability(mm) Note 1 ±0.01 M Y Deceleration mechanism Ball scre φ15 (Class C7) 5 Specifications Ball scre lead (mm) 30 20 10 5 M P Maximum speed (mm/sec) Note 2 1800 1200 600 300 M R Maximum Horizontal 15 20 40 60 payload (kg) Vertical 4 10 20 MY MP MR Rated thrust (N) 56 84 169 339 131 131 115 Stroke (mm) 150 to 1050 (50mm pitch) (Unit: N m) Overall length Horizontal Stroke+260 (mm) Vertical Stroke+290 Note 1. Positioning repeatability in one direction. Maximum dimensions of cross W110 H71 Note 2. If the stroke exceeds 700mm, section of main unit (mm) resonance may occur in the ball scre Cable length (m) Controller Robot driver Linear guide type Position detector Resolution (Pulse/rotation) Standard: 3.5 / Option: 5,10 SR1-X, TS-X, RCX222, RCX240 RDX-05 4 ros of circular arc grooves 1 rail Resolvers Note 3 16384 depending on the operation area (critical speed). If this occurs, make the adjustment to decrease the operation speed based on the max. speed stated in the table shon at the loer portion of the draing. Note 3. Position detectors (resolvers) are common to incremental and absolute specifications. If the controller has a backup function then it ill be absolute specifications. Alloable overhang Note. Distance from center of slider top to center of gravity of object being carried at a guide servicelife of 10,000km. Note. Stroke is 600mm hen calculating the service life. Horizontal installation Wall installation Vertical installation A B C A C B A C A B C A B C A C Lead 30 5kg 491 273 215 5kg 206 209 480 1kg 600 600 Lead 30 15kg 223 61 63 15kg 45 0 177 Lead 20 2kg 649 691 5kg 937 282 259 5kg 250 213 905 4kg 306 347 Lead 20 10kg 487 121 116 Lead 20 10kg 99 51 438 4kg 338 380 20kg 236 40 44 20kg 21 0 149 Lead 10 8kg 142 183 15kg 389 71 74 10kg 105 53 550 10kg 102 144 Lead 10 30kg 179 17 20 Lead 10 20kg 22 0 230 10kg 105 146 40kg 106 0 0 30kg 0 0 0 Lead 5 15kg 51 93 30kg 419 19 20 10kg 107 54 1410 20kg 25 66 Lead 5 50kg 0 0 0 Lead 5 20kg 22 0 540 60kg 0 0 0 30kg 0 0 0 (Unit: mm) 5-18 F10

Dimensions When origin is on motor side Approx. 250 (Motor cable length) 165±3 (Note 2): Effective stroke 95±3 (Note 3): When origin is on non-motor side (165): When origin is on non-motor side (95): When origin is on motor side 117±1 (Note 1) 86 2-φ5H7 Depth15 47±1 97 70 4-M5 0.8 Depth12 (Note 4) 100 (Beteen knocks ±0.02) 127 (ith brake) Approx. 250 147±1 (ith brake) (Note 1) 195±3 (ith brake): When origin is on motor side (195): When origin is on non-motor side 4-M5 0.8 Depth9 (The same position on the opposite surface at 2 locations) 50 18 10 110 69.5 71 26 68 109 30 (ith brake) L 102 B (S=1/1) φ9.5 (Note 5) 5 N-φ5.5 80 14 195 (ith brake) 165 175 205 (ith brake) Cable extraction direction U 17 18.5 17 18.5 S 12.5 200 K ±0.02 M 200 A 45 B (Note 5) 200 N-M5 0.8 Depth10 Mx200 A 35 2-φ10H7 Plate thickness 10 (Note 7) 23501-A6-00 Note 1. Distance from both ends to the mechanical stopper. Note 2. 167.5±4 hen the high lead specifi cation (Lead 30) is used. Note 3. 95±4 hen the high lead specifi cation (Lead 30) is used. Note 4. 44.5±1 hen the high lead specifi cation (Lead 30) is used. Note 5. When installing the unit, ashers, etc., cannot be used in the φ9.5 counter bore hole. Note 6. Minimum bend radius of motor cable is R50. Note 7. When using this φ10 knock-pin hole to position the robot body, the knockpin must not protrude more than 10mm inside the robot body. Note 8. Weight of models ith no brake. The eight of brake-attached models is 0.6kg heavier than the models ith no brake shon in the table. 5 Specifications Effective stroke 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1050 L 410 460 510 560 610 660 710 760 810 860 910 960 1010 1060 1110 1160 1210 1260 1310 A 200 50 100 150 200 50 100 150 200 50 100 150 200 50 100 150 200 50 100 M 0 1 1 1 1 2 2 2 2 3 3 3 3 4 4 4 4 5 5 N 4 6 6 6 6 8 8 8 8 10 10 10 10 12 12 12 12 14 14 K 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1050 Weight (kg) Note 8 5.5 5.7 5.8 6.2 6.5 6.9 7.3 7.7 8.1 8.5 8.8 9.2 9.6 10.0 10.4 10.8 11.1 11.5 11.9 Lead 30 1800 1440 1170 900 810 Maximum Lead 20 1200 960 780 600 540 speed (mm/sec) Lead 10 600 480 390 300 270 Note 9 Lead 5 300 240 195 150 135 Speed setting 80% 65% 50% 45% Note 9. When the stroke is longer than 700mm, resonance of the ball scre may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shon in the table above. F10 5-19

1.10 F14 Specifications Static loading moment AC servo motor output (W) 100 Repeatability(mm) Note 1 ±0.01 M Y Deceleration mechanism Ball scre φ15 (Class C7) 5 Specifications Ball scre lead (mm) 30 20 10 5 M P Maximum speed (mm/sec) Note 2 1800 1200 600 300 M R Maximum Horizontal 15 30 55 80 payload (kg) Vertical 4 10 20 MY MP MR Rated thrust (N) 56 84 169 339 232 233 204 Stroke (mm) 150 to 1050 (50mm pitch) (Unit: N m) Overall length Horizontal Stroke+255 (mm) Vertical Stroke+285 Note 1. Positioning repeatability in one direction. Maximum dimensions of cross W136 H83 Note 2. If the stroke exceeds 700mm, section of main unit (mm) resonance may occur in the ball scre Cable length (m) Controller Robot driver Linear guide type Position detector Resolution (Pulse/rotation) Standard: 3.5 / Option: 5,10 SR1-X, TS-X, RCX222, RCX240 RDX-05 4 ros of circular arc grooves 2 rail Resolvers Note 3 16384 depending on the operation area (critical speed). If this occurs, make the adjustment to decrease the operation speed based on the max. speed stated in the table shon at the loer portion of the draing. Note 3. Position detectors (resolvers) are common to incremental and absolute specifications. If the controller has a backup function then it ill be absolute specifications. Alloable overhang Note. Distance from center of slider top to center of gravity of object being carried at a guide servicelife of 10,000km. Note. Stroke is 600mm hen calculating the service life. Horizontal installation Wall installation Vertical installation A B C A C B A C A B C A B C A C Lead 30 5kg 1756 1364 863 5kg 951 969 1286 1kg 600 600 Lead 30 15kg 1236 467 438 15kg 408 277 803 Lead 20 2kg 1200 1200 5kg 2153 1366 980 5kg 1066 974 1578 4kg 1154 895 Lead 20 15kg 1193 465 430 Lead 20 15kg 402 276 775 4kg 1232 956 30kg 1266 245 294 30kg 219 105 678 Lead 10 8kg 634 492 20kg 1132 353 361 20kg 312 189 690 10kg 499 387 Lead 10 40kg 872 183 218 Lead 10 40kg 140 57 402 10kg 587 456 55kg 946 140 184 55kg 92 0 345 Lead 5 15kg 383 297 50kg 1575 158 222 30kg 246 107 1095 20kg 281 218 Lead 5 60kg 1493 135 194 Lead 5 40kg 167 64 798 80kg 1466 107 159 60kg 88 20 508 (Unit: mm) 5-20 F14

Dimensions 1.5 B 3.5 1.5 135 131 5.5 8.3 When origin is on motor side Approx. 250 (Motor cable length) 170±3 (Note 2): (170): When origin is on non-motor side 120±1 (Note 1) 90 70 32 110 (Beteen knocks ±0.02) Approx. 250 150±1 (ith brake) (Note 1) 4-M5 0.8 Depth7 (The same position on the opposite surface at 2 locations) 2-φ6H7 Depth8 8-M6 1.0 Depth8 Effective stroke 200±3: When origin is on motor side (200): When origin is on non-motor side 50 20 19 23.5 85±3 (Note 3): When origin is on non-motor side (85): When origin is on motor side 35±1 (Note 4) 83 22.5 77.5 75 136 B 30 (ith brake) L 130 (ith brake) 100 200 M 200 N-M6 1.0 Depth10 A C 105 110 100 62 11.5 125 155 (ith brake) 20 126 Direction of robot cable extraction U 17 14 S 156 (ith brake) 41.5 200 N-φ7 Depth9 M 200 2-φ10H7 See cross-section C-C. 17 R L K ±0.02 (φ10h7) 18.5 5.5 (9) C A 80 Use hex socket-head bolt (M6 1.0) ith under-head length of 20mm or more. Cross-section C-C 5 Specifications 23501-A7-00 Note 1. Distance from both ends to the mechanical stopper. Note 2. 172.5±4 hen the high lead specifi cation (Lead 30) is used. Note 3. 85±4 hen the high lead specifi cation (Lead 30) is used. Note 4. 32.5±1 hen the high lead specifi cation (Lead 30) is used. Note 5. Minimum bend radius of motor cable is R50. Note 6. Weight of models ith no brake. The eight of brake-attached models is 0.7kg heavier than the models ith no brake shon in the table. Effective stroke 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1050 L 405 455 505 555 605 655 705 755 805 855 905 955 1005 1055 1105 1155 1205 1255 1305 A 200 50 100 150 200 50 100 150 200 50 100 150 200 50 100 150 200 50 100 M 0 1 1 1 1 2 2 2 2 3 3 3 3 4 4 4 4 5 5 N 4 6 6 6 6 8 8 8 8 10 10 10 10 12 12 12 12 14 14 K 240 240 240 240 420 420 420 420 600 600 600 600 780 780 780 780 960 960 960 Weight (kg) Note 6 6.2 6.9 7.5 8.2 8.8 9.5 10.1 10.8 11.4 12.1 12.6 13.4 13.9 14.6 15.2 15.9 16.5 17.2 17.8 Lead 30 1800 1440 1170 900 810 Maximum Lead 20 1200 960 780 600 540 speed (mm/sec) Lead 10 600 480 390 300 270 Note 7 Lead 5 300 240 195 150 135 Speed setting 80% 65% 50% 45% Note 7. When the stroke is longer than 700mm, resonance of the ball scre may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shon in the table above. F14 5-21

1.11 F14H Specifications Static loading moment AC servo motor output (W) 200 Repeatability(mm) Note 1 ±0.01 M Y Deceleration mechanism Ball scre φ15 (Class C7) 5 Specifications Ball scre lead (mm) 30 20 10 5 M P Maximum speed (mm/sec) Note 2 1800 1200 600 300 M R Maximum Horizontal 25 40 80 100 payload (kg) Vertical 8 20 30 MY MP MR Rated thrust (N) 113 170 341 683 551 552 485 Stroke (mm) 150 to 1050 (50mm pitch) (Unit: N m) Overall length Horizontal Stroke+320 (mm) Vertical Stroke+350 Note 1. Positioning repeatability in one direction. Maximum dimensions of cross W136 H83 Note 2. If the stroke exceeds 700mm, section of main unit (mm) resonance may occur in the ball scre Cable length (m) Controller Robot driver Linear guide type Position detector Resolution (Pulse/rotation) Standard: 3.5 / Option: 5,10 SR1-X, TS-X, RCX222, RCX240 RDX-10 4 ros of circular arc grooves 2 rail Resolvers Note 3 16384 depending on the operation area (critical speed). If this occurs, make the adjustment to decrease the operation speed based on the max. speed stated in the table shon at the loer portion of the draing. Note 3. Position detectors (resolvers) are common to incremental and absolute specifications. If the controller has a backup function then it ill be absolute specifications. Alloable overhang Note. Distance from center of slider top to center of gravity of object being carried at a guide servicelife of 10,000km. Note. Stroke is 600mm hen calculating the service life. Horizontal installation Wall installation Vertical installation A B C A C B A C A B C A B C A C Lead 30 10kg 2152 1673 934 10kg 975 1219 1625 4kg 2400 2016 Lead 30 25kg 1847 691 533 25kg 482 426 1257 Lead 20 6kg 1699 1364 10kg 2265 1674 961 10kg 999 1220 1711 8kg 1301 1051 Lead 20 20kg 1402 855 537 Lead 20 20kg 515 558 987 10kg 1370 1106 40kg 1047 445 324 40kg 263 227 635 Lead 10 15kg 906 732 30kg 1953 583 485 30kg 419 338 1282 20kg 678 548 Lead 10 50kg 1655 365 328 Lead 10 50kg 240 162 934 20kg 767 619 80kg 1720 242 238 80kg 134 62 756 Lead 5 25kg 612 494 60kg 2443 311 317 60kg 209 117 1398 30kg 503 407 Lead 5 80kg 2193 242 253 Lead 5 80kg 135 62 1120 100kg 2000 202 214 100kg 90 29 900 (Unit: mm) 5-22 F14H

Dimensions 3.5 1.5 1.5 B 5.5 8.3 210±3 (Note 2): Approx. 250 (Motor cable length) When origin is on motor side (210): When origin is on non-motor side 140 135±1 (Note 1) 124 70 110 (Beteen knocks ±0.02) Approx. 250 165±1 (ith brake) (Note 1) Effective stroke 2-φ6H7 Depth8 8-M6 1.0 Depth8 240±3: When origin is on motor side (240): When origin is on non-motor side 110±3 (Note 3): When origin is on non-motor side (110): When origin is on motor side 35±1 (Note 4) 135 131 4-M5 0.8 Depth7 (The same position on the opposite surface at 2 locations) 50 45 83 19 23.5 22.5 77.5 75 136 B 30 (ith brake) L 113 143 (ith brake) 200 M 200 N-M6 1.0 Depth10 A C 157 110 100 151 138 168 (ith brake) K ±0.02 181 (ith brake) 200 N-φ7 Depth9 M 200 2-φ10H7 See cross-section C-C. C A 132 5 Direction of robot cable extraction 62 40.5 17 11.5 14 R U 20 17 S L (φ10h7) 18.5 5.5 (9) Use hex socket-head bolt (M6 1.0) ith under-head length of 20mm or more. Cross-section C-C Specifications 23502-A7-00 Note 1. Distance from both ends to the mechanical stopper. Note 2. 212.5±4 hen the high lead specifi cation (Lead 30) is used. Note 3. 110±4 hen the high lead specifi cation (Lead 30) is used. Note 4. 32.5±1 hen the high lead specifi cation (Lead 30) is used. Note 5. Minimum bend radius of motor cable is R50. Note 6. Weight of models ith no brake. The eight of brake-attached models is 0.7kg heavier than the models ith no brake shon in the table. Effective stroke 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1050 L 470 520 570 620 670 720 770 820 870 920 970 1020 1070 1120 1170 1220 1270 1320 1370 A 200 50 100 150 200 50 100 150 200 50 100 150 200 50 100 150 200 50 100 M 0 1 1 1 1 2 2 2 2 3 3 3 3 4 4 4 4 5 5 N 4 6 6 6 6 8 8 8 8 10 10 10 10 12 12 12 12 14 14 K 240 240 240 420 420 420 420 600 600 600 600 780 780 780 960 960 960 960 1140 Weight (kg) Note 6 7.5 8.2 8.8 9.5 10.1 10.8 11.4 12.1 12.7 13.4 13.9 14.6 15.2 15.9 16.5 17.2 17.8 18.5 19.1 Lead 30 1800 1440 1170 900 810 Maximum Lead 20 1200 960 780 600 540 speed (mm/sec) Lead 10 600 480 390 300 270 Note 7 Lead 5 300 240 195 150 135 Speed setting 80% 65% 50% 45% Note 7. When the stroke is longer than 700mm, resonance of the ball scre may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shon in the table above. F14H 5-23

1.12 F17 Specifications Static loading moment AC servo motor output (W) 400 Repeatability(mm) Note 1 ±0.01 M Y Deceleration mechanism Ball scre φ20 (Class C7) 5 Specifications Ball scre lead (mm) 40 20 10 Maximum speed (mm/sec) Note 2 2400 1000(1200 Note 3 ) 600 Maximum Horizontal 40 80 120 payload (kg) Vertical 15 35 Rated thrust (N) 169 339 678 Stroke (mm) 200 to 1450 Note 4 (50mm pitch) Overall length Horizontal Stroke+375 Stroke+365 (mm) Vertical Stroke+395 Maximum dimensions of cross section of main unit (mm) W168 H100 Cable length (m) Standard: 3.5 / Option: 5,10 Controller SR1-X, TS-X, RCX222, RCX240 Robot driver RDX-20 Linear guide type 4 ros of circular arc grooves 2 rail Position detector Resolvers Note 5 Resolution (Pulse/rotation) 16384 M P M R MY MP MR 1032 1034 908 (Unit: N m) Note 1. Positioning repeatability in one direction. Note 2. If the stroke exceeds 800mm, resonance may occur in the ball scre depending on the operation area (critical speed). If this occurs, make the adjustment to decrease the operation speed based on the max. speed stated in the table shon at the loer portion of the draing. Note 3. To operate the unit at a speed exceeding 1,000mm/sec. (Max. speed), a regeneration unit RG1 is required. Note 4. Longer than 1250mm stroke can be handled by the high lead specification (Lead 40) only. Note 5. Position detectors (resolvers) are common to incremental and absolute specifications. If the controller has a backup function then it ill be absolute specifications. Alloable overhang Note. Distance from center of slider top to center of gravity of object being carried at a guide servicelife of 10,000km. Note. Stroke is 600mm hen calculating the service life. Horizontal installation Wall installation Vertical installation A B C A C B A C A B C A B C A C 10kg 3540 2753 1999 10kg 2022 2670 3501 5kg 3000 3000 Lead 40 20kg 2541 1357 1181 Lead 40 20kg 1202 1283 2483 Lead 20 10kg 2447 2447 40kg 2639 661 736 40kg 752 587 2516 15kg 1650 1650 30kg 2647 894 989 30kg 987 820 2578 15kg 1782 1782 Lead 20 50kg 1770 521 588 Lead 20 50kg 574 447 1685 Lead 10 25kg 1054 1054 80kg 1391 312 362 80kg 342 237 1263 35kg 742 742 60kg 2443 430 572 60kg 535 355 2443 Lead 10 100kg 2000 243 326 Lead 10 100kg 283 169 2000 120kg 1841 197 264 120kg 220 123 1841 (Unit: mm) 5-24 F17

Dimensions Approx. 250 (Motor cable length) 240±3: When origin is on motor side (240): When origin is on non-motor side 155 156.5±2 (Note 1) 142 120 154 (Beteen knocks ±0.02) Effective stroke 2-φ6H7 Depth10 8-M8 1.25 Depth25 125±3: When origin is on non-motor side (125): When origin is on motor side 42.5±1(Note 1) (165) (12) 27 186.5±2 (ith brake) (Note 1) Approx. 250 270±3: When origin is on motor side (270): When origin is on non-motor side 4-M5 0.8 Depth12 (The same position on the opposite surface at to (2) locations) 50 52.5 28 20 100 12.5 97.5 97.1 168 B 30 (ith brake) L 3.7 1.5 2.5 B (S=2/1) 5.5 8.6 70 (ith brake) 132 40 200 166.5 196.5 (ith brake) M 200 N-φ9 Depth27 (Note 2) 2-φ10H7 Depth16 C ±0.02 A 75 5 Direction of robot cable extraction 76.5 56.5 (ith brake 37.5) 17 22 (ith brake) 13 R (Note 5) U S 24 30 L 23501-A8-00 Specifications Note 1. Distance from both ends to the mechanical stopper. Note 2. When installing the robot, do not use ashers inside the robot body. Note 3. Minimum bend radius of motor cable is R50. Note 4. Weight of models ith no brake. The eight of brake-attached models is 1.2kg heavier than the models ith no brake shon in the table. Note 5. Make a separate consultation ith us regarding robot cable (brake specifi cations) U extraction. Effective stroke 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1050 1100 1150 1200 1250 L 565 615 665 715 765 815 865 915 965 1015 1065 1115 1165 1215 1265 1315 1365 1415 1465 1515 1565 1615 A 50 100 150 200 50 100 150 200 50 100 150 200 50 100 150 200 50 100 150 200 50 100 M 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 7 7 N 8 8 8 8 10 10 10 10 12 12 12 12 14 14 14 14 16 16 16 16 18 18 C 240 240 420 420 420 600 600 600 600 780 780 780 780 960 960 960 960 1140 1140 1140 1140 1320 Weight (kg) Note 4 14.5 15.3 16.2 17.0 17.8 18.6 19.5 20.3 21.1 21.9 22.8 23.6 24.4 25.2 26.1 26.9 27.7 28.5 29.4 30.2 31.0 31.8 Lead 20 1000(1200 Note 6 ) 960 840 720 600 480 Maximum speed (mm/sec) Note 5 Lead 10 600 480 420 360 300 240 Speed setting 80% 70% 60% 50% 40% Note 5. When the stroke is longer than 800mm, resonance of the ball scre may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shon in the table above. Note 6. To operate the unit at a speed exceeding 1,000mm/sec. (Max. speed), a regeneration unit RG1 is required. F17 5-25

Dimensions (High lead type: Lead 40) Approx. 250 (Motor cable length) 245±5: When origin is on motor side Effective stroke 131±5: When origin is on non-motor side (244): When origin is on non-motor side 155 2-φ6H7 Depth10 (130): When origin is on motor side 157.5±2 (Note 1) 142 8-M8 1.25 Depth25 43.5±1 120 (Note 1) 154 (Beteen knocks ±0.02) (165) (12) 4-M5 0.8 Depth12 (The same position on the opposite surface at 2 locations) 50 52.5 20 100 97.5 97.1 12.5 27 168 28 B L 3.7 1.5 2.5 45 200 M 200 N-φ9 Depth26.5 (Note 2) A 80 D 8.6 5.5 132 5 B 171.5 2-φ10H7 Depth16 See cross-section D-D. ±0.02 C D Specifications (φ10h7) (16) (26.5) Use hex socket-head bolt (M8 1.25) ith under-head length of 40mm or more. Cross-section D-D Direction of robot cable extraction 76.5 61.5 17 22 13 R Note 1. Distance from both ends to the mechanical stopper. Note 2. When installing the robot, do not use ashers inside the robot body. Note 3. Minimum bend radius of motor cable is R50. U 24 30 S L 23502-A8-00 Effective stroke 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1050 1100 1150 1200 1250 1300 1350 1400 1450 L 575 625 675 725 775 825 875 925 975 1025 1075 1125 1175 1225 1275 1325 1375 1425 1475 1525 1575 1625 1675 1725 1775 1825 A 50 100 150 200 50 100 150 200 50 100 150 200 50 100 150 200 50 100 150 200 50 100 150 200 50 100 M 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 7 7 7 7 8 8 N 8 8 8 8 10 10 10 10 12 12 12 12 14 14 14 14 16 16 16 16 18 18 18 18 20 20 C 240 240 420 420 420 600 600 600 600 780 780 780 780 960 960 960 960 1140 1140 1140 1140 1320 1320 1320 1320 1320 Weight (kg) 14.7 15.5 16.4 17.2 18.0 18.8 19.7 20.5 21.3 22.1 23.0 23.8 24.6 25.4 26.3 27.1 27.9 28.7 29.6 30.4 31.2 32.0 32.8 33.6 34.4 35.2 Maximum speed Lead 40 2400 1920 1680 1440 1200 960 840 720 (mm/sec) Note 5 Speed setting 80% 70% 60% 50% 40% 35% 30% Note 4. When the stroke is longer than 800mm, resonance of the ball scre may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shon in the table above. 5-26 F17

1.13 F17L Specifications Static loading moment AC servo motor output (W) 600 Repeatability(mm) Note 1 ±0.02 M Y Deceleration mechanism Ball scre φ25 (Class C10) Ball scre lead (mm) 50 M P Maximum speed (mm/sec) Note 2 2200 M R Maximum Horizontal 50 payload (kg) Vertical 10 MY MP MR Rated thrust (N) 204 1032 1034 908 Stroke (mm) 1100 to 2050 (50mm pitch) (Unit: N m) Overall length Horizontal Stroke+475 (mm) Vertical Stroke+505 Note 1. Positioning repeatability in one direction. Maximum dimensions of cross W168 H100 Note 2. If the stroke exceeds 1200mm, section of main unit (mm) resonance may occur in the ball scre Cable length (m) Controller Robot driver Linear guide type Position detector Resolution (Pulse/rotation) Standard: 3.5 / Option: 5,10 SR1-X, TS-X, RCX222, RCX240 RDX-20 4 ros of circular arc grooves 2 rail Resolvers Note 3 16384 depending on the operation area (critical speed). If this occurs, make the adjustment to decrease the operation speed based on the max. speed stated in the table shon at the loer portion of the draing. Note 3. Position detectors (resolvers) are common to incremental and absolute specifications. If the controller has a backup function then it ill be absolute specifications. Alloable overhang Note. Distance from center of slider top to center of gravity of object being carried at a guide servicelife of 10,000km. Note. Stroke is 600mm hen calculating the service life. Horizontal installation Wall installation Vertical installation A 5 Specifications B C A C B A C A B C A B C A C 10kg 4000 2755 2608 10kg 2720 2681 4000 2kg 1200 1200 Lead 50 30kg 3045 895 1175 Lead 50 30kg 1185 821 3045 Lead 50 5kg 3000 3000 50kg 2602 523 715 50kg 680 449 2602 10kg 2650 2650 (Unit: mm) F17L 5-27

Dimensions 1.5 B 3.7 2.5 5.5 8.6 Approx. 250 (Motor cable length) 293±7: When origin is on motor side Effective stroke 182±7: When origin is on non-motor side (293): When origin is on non-motor side (182): When origin is on motor side 203±2 (Note 1) 155 2-φ6H7 Depth10 92±2 (Note 1) 142 8-M8 1.25 Depth25 120 154 (Beteen knocks ±0.02) 233±2 (With brake) (Note 1) 323±7 (With brake) 165 4-M5 0.8 Depth12 (The same position on the opposite surface at 2 locations) 50 52.5 20 100 97.5 27 12.5 168 28 B 30 (With brake) L 123 (With brake) M 200 A 82 93 200 N-φ9 Depth26.5 (Note 2) C 5 Specifications 132 211.5 2-φ10H7 Depth16 See cross-section C-C. 241.5 (With brake) K ±0.02 Direction of robot cable extraction 76.5 56.5 (With brake 37.5) 17 22 (With brake 12) 13 R (Note 4) U S 24 30 L (φ10h7) (16) (26.5) Use hex socket-head bolt (M8 1.25) ith under-head length of 40mm or more. Cross-section C-C C 23503-A8-00 Note 1. Distance from both ends to the mechanical stopper. Note 2. When installing the robot, ashers and spring ashers, etc., cannot be used in the main unit. Note 3. Weight of models ith no brake. The eight of brake-attached models is 1.2kg heavier than the models ith no brake shon in the table. Note 4. Make a separate consultation ith us regarding robot cable (brake specifi cations) U extraction. Effective stroke 1100 1150 1200 1250 1300 1350 1400 1450 1500 1550 1600 1650 1700 1750 1800 1850 1900 1950 2000 2050 L 1575 1625 1675 1725 1775 1825 1875 1925 1975 2025 2075 2125 2175 2225 2275 2325 2375 2425 2475 2525 A 200 50 100 150 200 50 100 150 200 50 100 150 200 50 100 150 200 50 100 150 M 6 7 7 7 7 8 8 8 8 9 9 9 9 10 10 10 10 11 11 11 N 16 18 18 18 18 20 20 20 20 22 22 22 22 24 24 24 26 26 26 26 K 1140 1140 1320 1320 1320 1320 1320 1320 1320 1320 1320 1320 1320 1320 1320 1320 1320 1320 1320 1320 Weight (kg) Note 3 34.1 34.9 35.8 36.7 37.6 38.4 39.3 40.2 41.1 42 42.9 43.8 44.7 45.6 46.5 47.3 48.2 49.1 50 50.9 Maximum speed Lead 50 2200 1900 1500 1200 900 800 (mm/sec) Note 4 Speed setting 86% 68% 54% 40% 36% Note 4. When the stroke is longer than 1200mm, resonance of the ball scre may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shon in the table above. 5-28 F17L

1.14 F20 Specifications Static loading moment AC servo motor output (W) 600 Repeatability(mm) Note 1 ±0.01 M Y Deceleration mechanism Ball scre φ20 (Class C7) Ball scre lead (mm) 40 20 10 Maximum speed (mm/sec) Note 2 2400 1000 (1200 Note 3 ) 600 Maximum Horizontal 60 120 payload (kg) Vertical 25 45 Rated thrust (N) 255 510 1020 Stroke (mm) 200 to 1450 Note 4 (50mm pitch) Overall length Horizontal Stroke+427 Stroke+417 (mm) Vertical Stroke+447 Maximum dimensions of cross section of main unit (mm) W202 H115 Cable length (m) Standard: 3.5 / Option: 5,10 Controller SR1-X, TS-X, RCX222, RCX240 Robot driver RDX-20 Linear guide type 4 ros of circular arc grooves 2 rail Position detector Resolvers Note 5 Resolution (Pulse/rotation) 16384 M P M R MY MP MR 1196 1199 1052 (Unit: N m) Note 1. Positioning repeatability in one direction. Note 2. If the stroke exceeds 800mm, resonance may occur in the ball scre depending on the operation area (critical speed). If this occurs, make the adjustment to decrease the operation speed based on the max. speed stated in the table shon at the loer portion of the draing. Note 3. To operate the unit at a speed exceeding 1,000mm/sec. (Max. speed), a regeneration unit RG1 is required. Note 4. Longer than 1250mm stroke can be handled by the high lead specification (Lead 40) only. Note 5. Position detectors (resolvers) are common to incremental and absolute specifications. If the controller has a backup function then it ill be absolute specifications. 5 Specifications Alloable overhang Note. Distance from center of slider top to center of gravity of object being carried at a guide servicelife of 10,000km. Note. Stroke is 600mm hen calculating the service life. Horizontal installation Wall installation Vertical installation A B C A C B A C A B C A B C A C 10kg 4000 4000 3450 10kg 3571 4000 4000 15kg 2635 2635 Lead 40 20kg 3397 2235 2073 Lead 40 20kg 2118 2164 3397 Lead 20 20kg 2000 2000 60kg 2443 718 977 60kg 1000 648 2443 25kg 1621 1621 50kg 2602 869 1083 50kg 1097 799 2602 20kg 2188 2188 Lead 20 80kg 2193 528 703 Lead 20 80kg 708 458 2193 Lead 10 30kg 1446 1446 120kg 1841 339 505 120kg 468 268 1841 45kg 951 951 (Unit: mm) F20 5-29

Dimensions Approx. 250 (Motor cable length) 272±3: When origin is on motor side Effective stroke (272): When origin is on non-motor side 176±2 (Note 1) 180 2-φ8H7 Depth10 50±1 160 4-M8 1.25 Depth30 (Note 1) 185 (Beteen knocks ±0.02) (145): When origin is on motor side 145±3: When origin is on non-motor side Approx. 250 206±2 (ith brake) (Note 1) 302±3: When origin is on motor side (302): When origin is on non-motor side 4-M5 0.8 Depth15 (The same position on the opposite surface at 2 locations) 50 65 12.5 202 28 20 31 115 B 114.1 112.1 30 (ith brake) L 1.5 3.7 2.5 72 M 200 A 95 200 N-φ9 Depth33 (Note 2) C 5 Specifications B 5.5 8.6 162 102 (ith brake) 176 K ±0.02 206 (ith brake) Direction of robot cable extraction 90 39 (ith brake 42.5) 17 27 (ith brake 14.5) 13 R (Note 5) U S 20 30 2-φ10H7 See cross-section C-C. L (14.8) 4.8 (φ10h7) (33) Use hex socket-head bolt (M8 1.25) ith under-head length of 45mm or more. Cross-section C-C C 23501-A9-00 Note 1. Distance from both ends to the mechanical stopper. Note 2. When installing the robot, do not use ashers inside the robot body. Note 3. Minimum bend radius of motor cable is R50. Note 4. Weight of models ith no brake. The eight of brake-attached models is 1.5kg heavier than the models ith no brake shon in the table. Note 5. Make a separate consultation ith us regarding robot cable (brake specifi cations) U extraction. Effective stroke 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1050 1100 1150 1200 1250 L 617 667 717 767 817 867 917 967 1017 1067 1117 1167 1217 1267 1317 1367 1417 1467 1517 1567 1617 1667 A 50 100 150 200 50 100 150 200 50 100 150 200 50 100 150 200 50 100 150 200 50 100 M 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 7 7 N 8 8 8 8 10 10 10 10 12 12 12 12 14 14 14 14 16 16 16 16 18 18 K 420 420 420 420 600 600 600 600 780 780 780 780 960 960 960 960 1140 1140 1140 1320 1320 1320 Weight (kg) Note 4 21.0 22.0 22.9 23.8 24.8 25.7 26.6 27.5 28.5 29.4 30.3 31.2 32.1 33.0 34.0 34.9 35.8 36.7 37.7 38.6 39.5 40.4 Lead 20 1000(1200 Note 6 ) 960 840 720 600 480 Maximum speed (mm/sec) Note 5 Lead 10 600 480 420 360 300 240 Speed setting 80% 70% 60% 50% 40% Note 5. When the stroke is longer than 800mm, resonance of the ball scre may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shon in the table above. Note 6. To operate the unit at a speed exceeding 1,000mm/sec. (Max. speed), a regeneration unit RG1 is required. 5-30 F20

Dimensions (High lead type: Lead 40) Approx. 250 (Motor cable length) 277±5: When origin is on motor side (276): When origin is on non-motor side 177±1 (Note 1) 180 160 185 (Beteen knocks ±0.02) Effective stroke 2-φ8H7 Depth10 4-M8 1.25 Depth30 51±1 (Note 1) 151±5: When origin is on non-motor side (150): When origin is on motor side 4-M5 0.8 Depth15 (The same position on the opposite surface at 2 locations) 50 65 12.5 202 28 20 31 115 B 114.1 112.1 L 1.5 3.7 2.5 B 5.5 8.6 162 77 181 200 M 200 N-φ9 Depth33 (Note 2) 2-φ10H7: See cross-section C-C. K ±0.02 C C A 100 5 Direction of robot cable extraction 27 90 U 20 30 39 17 13 R S L (14.8) 4.8 (φ10h7) (33) Use hex socket-head bolt (M8 1.25) ith under-head length of 45mm or more. Cross-section C-C Specifications 23502-A9-00 Note 1. Distance from both ends to the mechanical stopper. Note 2. When installing the robot, do not use ashers inside the robot body. Note 3. Minimum bend radius of motor cable is R50. Effective stroke 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1050 1100 1150 1200 1250 1300 1350 1400 1450 L 627 677 727 777 827 877 927 977 1027 1077 1127 1177 1227 1277 1327 1377 1427 1477 1527 1577 1627 1677 1727 1777 1827 1877 A 50 100 150 200 50 100 150 200 50 100 150 200 50 100 150 200 50 100 150 200 50 100 150 200 50 100 M 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 7 7 7 7 8 8 N 8 8 8 8 10 10 10 10 12 12 12 12 14 14 14 14 16 16 16 16 18 18 18 18 20 20 K 420 420 420 420 600 600 600 600 780 780 780 780 960 960 960 960 1140 1140 1140 1320 1320 1320 1320 1320 1320 1320 Weight (kg) 21.2 22.2 23.1 24.0 25.0 25.9 26.8 27.7 28.7 29.6 30.5 31.4 32.3 33.2 34.2 35.1 36.0 36.9 37.9 38.8 39.7 40.6 41.5 42.4 43.3 44.2 Maximum speed Lead 40 2400 1920 1680 1440 1200 960 840 720 (mm/sec) Note 4 Speed setting 80% 70% 60% 50% 40% 35% 30% Note 4. When the stroke is longer than 800mm, resonance of the ball scre may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shon in the table above. F20 5-31

1.15 F20N Specifications Static loading moment AC servo motor output (W) 400 Repeatability (mm) Note 1 ±0.04 M Y Deceleration mechanism Ball scre φ20 (Class C10) Ball scre lead (mm) 20 Maximum speed (mm/sec) 1000 (1200 Note 2 ) Maximum payload (kg) 80 M R M P 5 Specifications Rated thrust (N) 339 MY MP MR Stroke (mm) 1150 to 2050 (100mm pitch) 1196 1199 1052 Overall length (mm) Stroke+420 (Unit: N m) Maximum dimensions of cross W202 H120 Note 1. Positioning repeatability in one section of main unit (mm) direction. Cable length (m) Controller Robot driver Linear guide type Position detector Resolution (Pulse/rotation) Standard: 3.5 / Option: 5,10 SR1-X, TS-X, RCX222, RCX240 RDX-20 4 ros of circular arc grooves 2 rail Resolvers Note 3 16384 Note 2. A regenerative unit is needed if using the SR1-X, TS-X at maximum speeds exceeding 1000mm /sec.. If using the RDX, then the regenerative unit RBR1 is required regardless of the installation conditions. Note 3. Position detectors (resolvers) are common to incremental and absolute specifications. If the controller has a backup function then it ill be absolute specifications. Alloable overhang Note. Distance from center of slider top to center of gravity of object being carried at a guide servicelife of 10,000km. Note. Stroke is 600mm hen calculating the service life. Horizontal installation A C B A B C 20kg 3397 2332 2683 Lead 20 40kg 2795 1144 1361 60kg 2443 749 914 80kg 2193 551 695 (Unit: mm) 5-32 F20N

Dimensions 219±3: When origin is on L-side (219): When origin is on R-side 57 122 242 160 17 90 Effective stroke 2-φ8H7 Depth10 4-M8 1.25 Depth16 201±3: When origin is on R-side (201): When origin is on L-side 3.7 1.5 2.5 0.5 5.5 8.6 C section detailed chart (140) B 152 L (50) 53 224.5 201 185 (Beteen knocks ±0.02) 114 79 23 79 23 199 20 120 219.5 34 57 (Note 1) 101±2 (Note 1) Note 2 53 202 C 28 35 200 M 200 N-φ9 thickness 33 (Note 3) D A 35 (14.8) 4.8 35 25 93 77 5 Cross section of cable guide 162 2-φ10H7: See cross-section D-D. 129 E ±0.02 Note 1. Distance from both ends to the mechanical stopper. Note 2. The shaded position indicates the user cable extraction port. Note 3. When installing the robot, do not use ashers inside the robot body. Note 4. The origin is set on the left (L) side at shipping. D (φ10h7) (33) Use hex socket-head bolt (M8 1.25) ith under-head length of 45mm or more. Cross-section D-D 23503-A9-00 Specifications Effective stroke 1150 1250 1350 1450 1550 1650 1750 1850 1950 2050 L 1570 1670 1770 1870 1970 2070 2170 2270 2370 2470 A 100 200 100 200 100 200 100 200 100 200 B 602 648 694 740 786 832 878 924 970 1016 E 1320 1320 1320 1320 1320 1320 1320 1320 1320 1320 M 7 7 8 8 9 9 10 10 11 11 N 18 18 20 20 22 22 24 24 26 26 Weight (kg) 54.0 56.2 58.4 60.6 62.9 65.1 67.3 69.6 71.8 74.0 F20N 5-33

1.16 N15/N15D Specifications Static loading moment AC servo motor output (W) 400 Repeatability (mm) Note 1 ±0.01 M Y Deceleration mechanism Ball scre φ15 (Class C7) Ball scre lead (mm) 20 Maximum speed (mm/sec) Note 2 1200 Maximum payload (kg) 50 M R M P 5 Specifications Rated thrust (N) 339 MY MP MR Single carrier 500 to 2000 (100mm pitch) Stroke (mm) 691 692 608 Double carrier 250 to 1750 (100mm pitch) (Unit: N m) Overall length (mm) Stroke+330 Maximum dimensions of cross Note 1. Positioning repeatability in one W145 H120 section of main unit (mm) direction. Note 2. The maximum speed may not be Cable length (m) Controller Note 3 Robot driver Linear guide type Position detector Resolution (Pulse/rotation) Standard: 3.5 / Option: 5,10 SR1-X, TS-X, RCX222, RCX240 RDX-20 4 ros of circular arc grooves 2 rail Resolvers Note 4 16384 reached hen the moving distance is short. Note 3. For the double-carrier, to units of SR1-X or TS-X are required. Note 4. Position detectors (resolvers) are common to incremental and absolute specifications. If the controller has a backup function then it ill be absolute specifications. Alloable overhang Note. Distance from center of slider top to center of gravity of object being carried at a guide servicelife of 10,000km. Note. Stroke is 600mm hen calculating the service life. Horizontal installation Wall installation A B C A B C A B C A B C 10kg 3048 2322 1259 10kg 1258 1823 2449 Lead 20 30kg 1489 841 500 Lead 20 30kg 428 545 1039 50kg 1278 544 344 50kg 248 289 749 (Unit: mm) 5-34 N15 N15D

Dimensions (Horizontal installation / Standard Cable carrier specification) 165±3: L-side origin position (165: When origin is on R-side) L Effective stroke 165±3: R-side origin position (165: When origin is on L-side) K 120 Top face of slider 24 145 123 (61) 58 119 118 65±1 (Note 1) Ground terminal for user (M4) 2-φ6H7 Depth10 8-M6 1.0 Depth14 190 150 98 65 (Note 1) 134 (Beteen knocks φ6h7 ±0.02) 25 J 7.2 4.5 145 7 2.5 3.7 R0.3 R0.3 (φ11) Detail of section J (17) (6) (φ7) (φ10h7) 12 50 2-M5 0.8 Depth10 40 5 14 100 56 A H 200 C-M6 1.0 Depth10 B 200 (A) 2-φ10H7 Depth17 See cross-section H-H. (Note 5) H F-φ7 Depth6 See cross-section H-H. (Note 2) 200 D E 200 (D) 105 G ±0.02 Use hex socket-head bolt (M6 1.0) ith under-head length of 20mm or more. Cross-section H-H VIEW K φ6.5 φ8.2 Cross-section ofcable carrier 23501-AA-00 Note 1. Distance from both ends to the mechanical stopper. Note 2. When using φ7 holes for installation, ashers and spring ashers, etc., cannot be used in the main unit. Note 3. When shipped from the factory, the origin is set on the right (R) side for the horizontal installation hile the origin is set on the left (L) side for the all installation. (This diagram shos the machine hose cable carrier taken out from right.) Note 4. If the model is a standard cable carrier specifi cation, it is not possible to pass 3 or more φ6 4 urethane air hoses. Note 5. When using a φ10h7 hole, make sure that the pin does not go into deeper than as shon in the draing. Note 6. Weight of models ith no brake. The eight of brake-attached models is 1kg heavier than the models ith no brake shon in the table. Specifications Effective stroke 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 L 830 930 1030 1130 1230 1330 1430 1530 1630 1730 1830 1930 2030 2130 2230 2330 A 15 65 15 65 15 65 15 65 15 65 15 65 15 65 15 65 B 4 4 5 5 6 6 7 7 8 8 9 9 10 10 11 11 C 10 10 12 12 14 14 16 16 18 18 20 20 22 22 24 24 D 115 165 115 165 115 165 115 165 115 165 115 165 115 165 115 165 E 3 3 4 4 5 5 6 6 7 7 8 8 9 9 10 10 F 8 8 10 10 12 12 14 14 16 16 18 18 20 20 22 22 G 620 720 820 920 1020 1120 1220 1320 1420 1520 1620 1720 1820 1920 2020 2120 Weight (kg) Note 6 19 20 22 23 24 26 27 29 30 32 33 35 36 38 39 40 N15 5-35

Dimensions (Horizontal installation / Optional Cable carrier specification) K Top face of slider 120 24 165±3: L-side origin position (165:When origin is on R-side) 145 123 168 118 65±1 (Note 1) Ground terminal for user (M4) L Effective stroke 2-φ6H7 Depth10 8-M6 1.0 Depth14 190 165±3: R-side origin position (165: When origin is on L-side) 150 98 65 (Note 1) 134 25 (Beteen knocks φ6h7 ±0.02) J 7.2 4.5 145 86 7 2.5 3.7 R0.3 A H 200 C-M6 1.0 Depth10 B 200 (A) R0.3 100 56 5 (φ11) Detail of section J (17) (6) (φ7) (φ10h7) 2-φ10H7 Depth17 See cross-section H-H. (Note 5) H F-φ7 Depth6 See cross-section H-H. (Note 2) D 200 E 200 105 G ±0.02 12 50 2-M5 0.8 Depth10 73 57 (D) 35 25 Specifications Use hex socket-head bolt (M6 1.0) ith under-head length of 20mm or more. Cross-section H-H (φ11) VIEW K φ6.5 φ8.2 Cross-section of cable carrier Dimensions (Wall installation / Standard Cable carrier specification) (17) (6) (φ7) (φ10h7) 100 56 H A B 200 200 C-M6 1.0 Depth10 (A) 23502-AA-00 Use hex socket-head bolt (M6 1.0) ith under-head length of 20mm or more. Cross-section H-H 2-φ10H7 Depth17 See cross-section H-H. (Note 5) 118 D 105 H 200 F-φ7 Depth6 See cross-section H-H. (Note 2) E 200 G ±0.02 Ground terminal for user (M4) (D) 34 85 165±3: L-side origin position (165: When origin is on R-side) 105 55 L Effective stroke 165±3: R-side origin position (165: When origin is on L-side) 260 145 123 145 134 (Beteen knocks φ6h7 ±0.02) J 25 3.7 R0.3 120 24 R0.3 65 (Note 1) 12 98 8-M6 1.0 Depth14 150 2-φ6H7 Depth10 190 65±1 (Note 1) K 40 50 2-M5 0.8 Depth10 14 7 2.5 4.5 7.2 Detail of section J VIEW K φ6.5 φ8.2 Cross-section of cable carrier 23503-AA-00 5-36 N15

Dimensions (Wall installation / Optional Cable carrier specification) (17) (6) A H 200 C-M6 1.0 Depth10 B 200 (A) 9 110 145 310 123 145 (φ11) (φ7) (φ10h7) 100 56 Use hex socket-head bolt (M6 1.0) ith under-head length of 20mm or more. 2-φ10H7 Depth17 See cross-section H-H. (Note 5) D 105 H 200 F-φ7 Depth6 See cross-section H-H. (Note 2) E 200 G ±0.02 Ground terminal for user (M4) (D) Cross-section H-H 118 165±3: L-side origin position (165: When origin is on R-side) 105 55 L Effective stroke 165±3: R-side origin position (165: When origin is on L-side) 134 (Beteen knocks φ6h7 ±0.02) J 25 7 2.5 3.7 120 R0.3 4.5 7.2 24 R0.3 Detail of section J 65 (Note 1) 12 98 8-M6 1.0 Depth14 150 2-φ6H7 Depth10 190 K 50 2-M5 0.8 Depth10 VIEW K 35 25 73 57 φ6.5 φ8.2 Cross-section of cable carrier 65±1 (Note 1) 23504-AA-00 5 Specifications N15 5-37

Dimensions (Horizontal installation / Standard Cable carrier specification) K Top face of slider 24 145 123 (61) 58 134 (Beteen knocks φ6h7 ±0.02) L 165±3 (Note 1) Effective stroke (250: Minimum distance beteen carrier) Effective stroke 165±3 (Note 1) 65 (Note 2) 190 150 98 2-φ6H7 Depth10 8-M6 1.0 Depth14 Ground terminal for user (M4) 2-φ6H7 Depth10 8-M6 1.0 Depth14 190 150 98 65 (Note 2) 120 119 134 (Beteen knocks φ6h7 ±0.02) 25 118 J (17) (6) 145 A H 200 C-M6 1.0 Depth10 B 200 (A) 5 Specifications (φ11) (φ7) (φ10h7) Use hex socket-head bolt (M6 1.0) ith under-head length of 20mm or more. Cross-section H-H 100 56 2-φ10H7 Depth17 See cross-section H-H. (Note 5) 2-M5 0.8 Depth10 H F-φ7 Depth6 See cross-section H-H. (Note 3) 200 D E 200 105 G ±0.02 50 VIEW K 12 14 40 φ6.5 φ8.2 Cross-section of cable carrier 7.2 4.5 7 2.5 (D) 3.7 R0.3 R0.3 Detail of section J 23501-AB-00 Note 1. Position of table carriage hen searched to the origin. Note 2. Distance from both ends to the mechanical stopper. Note 3. When using φ7 holes for installation, do not use a asher, spring asher, etc. in the main unit. Note 4. If the model is a standard cable carrier specifi cation, it is not possible to pass 3 or more φ6 4 urethane air hoses. Note 5. When using a φ10h7 hole, make sure that the pin does not go into deeper than as shon in the draing. Note 6. Weight of models ith no brake. The eight of brake-attached models is 1kg heavier than the models ith no brake shon in the table. Effective stroke 250 350 450 550 650 750 850 950 1050 1150 1250 1350 1450 1550 1650 1750 L 830 930 1030 1130 1230 1330 1430 1530 1630 1730 1830 1930 2030 2130 2230 2330 A 15 65 15 65 15 65 15 65 15 65 15 65 15 65 15 65 B 4 4 5 5 6 6 7 7 8 8 9 9 10 10 11 11 C 10 10 12 12 14 14 16 16 18 18 20 20 22 22 24 24 D 115 165 115 165 115 165 115 165 115 165 115 165 115 165 115 165 E 3 3 4 4 5 5 6 6 7 7 8 8 9 9 10 10 F 8 8 10 10 12 12 14 14 16 16 18 18 20 20 22 22 G 620 720 820 920 1020 1120 1220 1320 1420 1520 1620 1720 1820 1920 2020 2120 Weight (kg) Note 6 24 26 27 29 30 32 33 35 36 38 39 40 42 43 45 46 5-38 N15D

Dimensions (Horizontal installation / Optional Cable carrier specification) K Top face of slider 120 24 145 123 168 134 (Beteen knocks φ6h7 ±0.02) 25 118 165±3 (Note 1) Effective stroke 65 (Note 2) 190 150 98 2-φ6H7 Depth10 8-M6 1.0 Depth14 Ground terminal for user (M4) L (250: Minimum distance beteen carrier) Effective stroke 165±3 (Note 1) 190 2-φ6H7 Depth10 8-M6 1.0 Depth14 150 98 65 (Note 2) 134 (Beteen knocks φ6h7 ±0.02) J 7.2 4.5 145 7 2.5 3.7 R0.3 86 H A B 200 200 C-M6 1.0 Depth10 (A) R0.3 100 56 (φ11) Detail of section J (17) (6) (φ7) (φ10h7) 2-φ10H7 Depth17 See cross-section H-H. (Note 5) 105 2-M5 0.8 Depth10 D H 50 12 200 F-φ7 Depth6 See cross-section H-H. (Note 3) E 200 G ±0.02 73 57 (D) 5 Use hex socket-head bolt (M6 1.0) ith under-head length of 20mm or more. Cross-section H-H VIEW K 35 25 φ6.5 φ8.2 Cross-section of cable carrier Dimensions (Wall installation / Standard Cable carrier specification) (φ11) (17) (6) (φ7) (φ10h7) 100 56 A H 200 C-M6 1.0 Depth10 B 200 (A) 23502-AB-00 Specifications Use hex socket-head bolt (M6 1.0) ith under-head length of 20mm or more. Cross-section H-H 2-φ10H7 Depth17 See cross-section H-H. (Note 5) 118 D 105 H 200 F-φ7 Depth6 See cross-section H-H. (Note 3) E 200 G ±0.02 Ground terminal for user (M4) (D) 260 145 34 85 J 25 120 123 145 24 134 (Beteen knocks φ6h7 ±0.02) 65 (Note 2) (250: Minimum distance beteen carrier) 165±3 (Note 1) 105 55 98 8-M6 1.0 Depth14 150 190 2-φ6H7 Depth10 K Effective stroke L Effective stroke 165±3 (Note 1) 55 105 8-M6 1.0 Depth14 98 2-φ6H7 Depth10 150 190 65 K (Note 2) 134 (Beteen knocks φ6h7 ±0.02) 3.7 R0.3 R0.3 2-M5 0.8 Depth10 50 12 40 7 2.5 4.5 7.2 Detail of section J VIEW K 14 φ6.5 φ8.2 Cross-section of cable carrier 23503-AB-00 N15D 5-39

Dimensions (Wall installation / Optional Cable carrier specification) (φ11) (17) (6) (φ7) (φ10h7) 100 56 A H 200 C-M6 1.0 Depth10 B 200 (A) Use hex socket-head bolt (M6 1.0) ith under-head length of 20mm or more. Cross-section H-H 2-φ10H7 Depth17 See cross-section H-H. (Note 5) 118 H D 105 200 F-φ7 Depth6 See cross-section H-H. (Note 3) E 200 G ±0.02 Ground terminal for user (M4) (D) 5 Specifications J310 145 25 7 2.5 3.7 9 110 R0.3 4.5 7.2 120 R0.3 123 145 24 Detail of section J 134 (Beteen knocks φ6h7 ±0.02) (250: Minimum distance beteen carrier) 165±3 (Note 1) 105 55 65 (Note 2) 98 150 190 2-M5 0.8 Depth10 50 VIEW K 12 8-M6 1.0 Depth14 2-φ6H7 Depth10 Effective stroke L 35 25 Effective stroke 73 57 8-M6 1.0 Depth14 2-φ6H7 Depth10 φ6.5 φ8.2 Cross-section of cable carrier 55 165±3 (Note 1) 105 98 150 190 65 (Note 2) 134 (Beteen knocks φ6h7 ±0.02) 23504-AB-00 5-40 N15D

1.17 N18/N18D Specifications Static loading moment AC servo motor output (W) 400 Repeatability (mm) Note 1 ±0.01 M Y Deceleration mechanism Ball scre φ20 (Class C7) Ball scre lead (mm) 20 Maximum speed (mm/sec) Note 2 1200 Maximum payload (kg) 80 M R M P Rated thrust (N) 339 MY MP MR Single carrier 500 to 2500 (100mm pitch) Stroke (mm) 1161 1163 1021 Double carrier 250 to 2250 (100mm pitch) (Unit: N m) Overall length (mm) Stroke+362 Maximum dimensions of cross Note 1. Positioning repeatability in one W180 H115 section of main unit (mm) direction. Note 2. The maximum speed may not be Cable length (m) Controller Note 3 Robot driver Linear guide type Position detector Resolution (Pulse/rotation) Standard: 3.5 / Option: 5,10 SR1-X, TS-X, RCX222, RCX240 RDX-20 4 ros of circular arc grooves 2 rail Resolvers Note 4 16384 reached hen the moving distance is short. Note 3. For the double-carrier, to units of SR1-X or TS-X are required. Note 4. Position detectors (resolvers) are common to incremental and absolute specifications. If the controller has a backup function then it ill be absolute specifications. Alloable overhang Note. Distance from center of slider top to center of gravity of object being carried at a guide servicelife of 10,000km. Note. Stroke is 600mm hen calculating the service life. Horizontal installation Wall installation A B C A 5 Specifications B C A B C A B C 30kg 3045 1629 1902 30kg 1928 1553 3045 Lead 20 50kg 2602 961 1150 Lead 20 50kg 1157 885 2602 80kg 2193 586 716 80kg 707 509 2193 (Unit: mm) N18 N18D 5-41

Dimensions (Horizontal installation / Standard Cable carrier specification) 179 (61) 156 58 (Diameter or roller: φ20) 181±3: L-side origin position (181: When origin is on R-side) 78±1 (Note 1) L Effective stroke (Note 7) Ground terminal for user (M4) 2-φ6H7 Depth10 8-M8 1.25 Depth25 190 150 98 181±3: R-side origin position (181: When origin is on L-side) 78 (Note 1) 168 (Beteen knocks φ6h7 ±0.02) 36 5 115 22 F 7.2 4.5 180 7 2.5 3.7 (30) (65) 114 12 50 2-M5 0.8 Depth11 40 14 R1 R0.3 Detail of section F φ14 (φ9) 149 113 A B 200 (A) 200 C-φ9 Depth30 See cross-section E-E. (Note 2) E E 2-φ10H7 Depth15 See cross-section E-E. (Note 5) 106 D ±0.02 Specifications Use hex socket-head bolt (M8 1.25) ith under-head length of 40mm or more. (φ10h7) Cross-section E-E VIEW K φ6.5 φ8.2 Cross-section of cable carrier 23505-AA-00 Note 1. Distance from both ends to the mechanical stopper. Note 2. When using φ9 holes for installation, do not use a asher, spring asher, etc. in the main unit. Note 3. When shipped from the factory, the origin is set on the right (R) side for the horizontal installation hile the origin is set on the left (L) side for the all installation. (This diagram shos the machine hose cable carrier taken out from right.) Note 4. If the model is a standard cable carrier specifi cation, it is not possible to pass 3 or more φ6 4 urethane air hoses. Note 5. When using a φ10h7 hole, make sure that the pin does not go into deeper than as shon in the draing. Note 6. For the robot ith more than 2,100 stroke, a roller is installed to prevent the cable carrier hanging. Note 7. Weight of models ith no brake. The eight of brake-attached models is 1kg heavier than the models ith no brake shon in the table. Effective stroke 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2100 2200 2300 2400 2500 L 862 962 1062 1162 1262 1362 1462 1562 1662 1762 1862 1962 2062 2162 2262 2362 2462 2562 2662 2762 2862 A 131 81 131 81 131 81 131 81 131 81 131 81 131 81 131 81 131 81 131 81 131 B 3 4 4 5 5 6 6 7 7 8 8 9 9 10 10 11 11 12 12 13 13 C 8 10 10 12 12 14 14 16 16 18 18 20 20 22 22 24 24 26 26 28 28 D 650 750 850 950 1050 1150 1250 1350 1450 1550 1650 1750 1850 1950 2050 2150 2250 2350 2450 2550 2650 Weight (kg) Note 7 27 29 31 33 35 37 39 41 43 45 47 48 50 52 54 56 58 60 62 64 66 5-42 N18

Dimensions (Horizontal installation / Optional Cable carrier specification) 181±3: L-side origin position (181: When origin is on R-side) 78±1 (Note 1) L Effective stroke 2-φ6H7 Depth10 8-M8 1.25 Depth25 190 150 98 181±3: R-side origin position (181: When origin is on L-side) 78 (Note 1) 168 (Beteen knocks φ6h7 ±0.02) 179 156 Ground terminal for user (M4) 115 22 36 165 F 180 7 2.5 3.7 86 (30) 12 50 2-M5 0.8 Depth11 73 57 5 35 25 7.2 4.5 113 A B 200 (A) 200 C-φ9 Depth30 See cross-section E-E. (Note 2) E R1 R0.3 Detail of section F φ14 (φ9) 149 E 2-φ10H7 Depth15 See cross-section E-E. (Note 5) 106 D ±0.02 Use hex socket-head bolt (M8 1.25) ith under-head length of 40mm or more. φ14 (φ10h7) Cross-section E-E VIEW K φ6.5 φ8.2 Cross-section of cable carrier Dimensions (Wall installation / Standard Cable carrier specification) (30) (φ9) A B 200 (A) 200 C-φ9 Depth30 See cross-section E-E. (Note 2) E 23506-AA-00 Specifications (φ10h7) Use hex socket-head bolt (M8 1.25) ith under-head length of 40mm or more. Cross-section E-E 113 E 106 (Diameter or roller: φ20) (Note 7) 14 181±3: L-side origin position 100 (181: When origin is on R-side) 300 180 72 156 179 149 2-φ10H7 Depth15 See cross-section E-E. (Note 5) Ground terminal for user (M4) D ±0.02 105 55 L Effective stroke 181±3: R-side origin position (181: When origin is on L-side) 168 (Beteen knocks φ6h7 ±0.02) 7 F 22 N18 2.5 3.7 R1 115 36 R0.3 4.5 7.2 Detail of section F 78 (Note 1) 12 98 150 190 K 50 VIEW K 8-M8 1.25 Depth25 2-φ6H7 Depth10 2-M5 0.8 Depth11 40 φ6.5 φ8.2 Cross-section of cable carrier 14 78±1 (Note 1) 21507-AA-00 5-43

Dimensions (Wall installation / Optional Cable carrier specification) A B 200 E 200 C-φ9 Depth30 See cross-section E-E. (Note 2) (A) Use hex socket-head bolt (M8 1.25) ith under-head length of 40mm or more. 114 5 3.7 R0.3 50 73 2-M5 0.8 Depth11 57 7 12 180 345 156 179 149 Cross-section E-E 113 106 E 2-φ10H7 Depth15 See cross-section E-E. (Note 5) Ground terminal for user (M4) D ±0.02 181±3: L-side origin position (181: When origin is on R-side) 105 55 L Effective stroke 181±3: R-side origin position (181: When origin is on L-side) 168 (Beteen knocks φ6h7 ±0.02) F 22 36 115 98 150 8-M8 1.25 Depth25 78 (Note 1) 190 2-φ6H7 Depth10 78±1 (Note 1) Specifications 2.5 R1 4.5 7.2 Detail of section F VIEW K 35 25 φ6.5 φ8.2 Cross-section of cable carrier 23508-AA-00 5-44 N18

Dimensions (Horizontal installation / Standard Cable carrier specification) 179 (61) 156 58 (Diameter or roller: φ20) 168 (Beteen knocks φ6h7 ±0.02) 181±3 (Note 1) Effective stroke 78 (Note 2) 190 150 98 2-φ6H7 Depth10 8-M8 1.25 Depth25 (Note 7) Ground terminal for user (M4) L Effective stroke (250: Minimum distance beteen carrier) 181±3 (Note 1) 2-φ6H7 Depth10 8-M8 1.25 Depth25 190 150 98 78 (Note 2) 22 115 36 168 (Beteen knocks φ6h7 ±0.02) (65) 114 F 180 7 2.5 3.7 2-M5 0.8 Depth11 50 12 40 5 14 113 7.2 4.5 A B 200 (A) E 200 C-φ9 Depth30 See cross-section E-E. (Note 3) R1 R0.3 Detail of section F (30) φ14 (φ9) 149 E 2-φ10H7 Depth15 See cross-section E-E. (Note 5) 106 D ±0.02 ( φ10h7) Use hex socket-head bolt (M8 1.25) ith under-head length of 40mm or more. Cross-section E-E VIEW K φ6.5 φ8.2 Cross-section of cable carrier 23505-AB-00 Note 1. Position of table carriage hen searched to the origin. Note 2. Distance from both ends to the mechanical stopper. Note 3. When using φ9 holes for installation, do not use a asher, spring asher, etc. in the main unit. Note 4. If the model is a standard cable carrier specifi cation, it is not possible to pass 3 or more φ6 4 urethane air hoses. Note 5. When using a φ10h7 hole, make sure that the pin does not go into deeper than as shon in the draing. Note 6. For the robot ith more than 2,050 stroke, a roller to prevent the cable carrier from hanging is provided. Note 7. Weight of models ith no brake. The eight of brake-attached models is 1kg heavier than the models ith no brake shon in the table. Specifications Effective stroke 250 350 450 550 650 750 850 950 1050 1150 1250 1350 1450 1550 1650 1750 1850 1950 2050 2150 2250 L 862 962 1062 1162 1262 1362 1462 1562 1662 1762 1862 1962 2062 2162 2262 2362 2462 2562 2662 2762 2862 A 131 81 131 81 131 81 131 81 131 81 131 81 131 81 131 81 131 81 131 81 131 B 3 4 4 5 5 6 6 7 7 8 8 9 9 10 10 11 11 12 12 13 13 C 8 10 10 12 12 14 14 16 16 18 18 20 20 22 22 24 24 26 26 28 28 D 650 750 850 950 1050 1150 1250 1350 1450 1550 1650 1750 1850 1950 2050 2150 2250 2350 2450 2550 2650 Weight (kg) Note 7 35 37 39 41 43 45 47 48 50 52 54 56 58 60 62 64 66 68 70 72 74 N18D 5-45

Dimensions (Horizontal installation / Optional Cable carrier specification 168 (Beteen knocks φ6h7 ±0.02) 181±3 (Note 1) Effective stroke 78 (Note 2) 190 150 98 2-φ6H7 Depth10 8-M8 1.25 Depth25 L (250: Minimum distance beteen carrier) Effective stroke 181±3 (Note 1) 190 78 2-φ6H7 Depth10 150 (Note 2) 8-M8 1.25 Depth25 98 168 (Beteen knocks φ6h7 ±0.02) 179 156 Ground terminal for user (M4) K 115 22 36 F 180 7 2.5 3.7 86 165 113 A B 200 (A) E 200 C-φ9 Depth30 See cross-section E-E. (Note 3) 5 (30) 2-M5 0.8 Depth11 50 12 73 57 35 25 7.2 4.5 R1 R0.3 Detail of section F φ14 (φ9) 149 E 106 2-φ10H7 Depth15 See cross-section E-E. (Note 5) D ±0.02 Specifications Use hex socket-head bolt (M8 1.25) ith under-head length of 40mm or more. (φ10h7) Cross-section E-E VIEW K φ6.5 φ8.2 Cross-section of cable carrier Dimensions (Wall installation / Standard Cable carrier specification) φ14 (30) (φ9) E A 200 B 200 (A) C-φ9 Depth30 See cross-section E-E. (Note 3) 23506-AB-00 (Diameter or roller: φ20) (Note 7) 300 180 72 7 149 14 F 22 3.7 Use hex socket-head bolt (M8 1.25) ith under-head length of 40mm or more. 100 36 115 156 179 R0.3 (φ10h7) Cross-section E-E 168 (Beteen knocks φ6h7 ±0.02) E 106 2-M5 0.8 Depth11 50 12 Ground terminal for user (M4) L (250: Minimum distance beteen carrier) Effective stroke 181±3 (Note 1) 181±3 (Note 1) Effective stroke 55 105 78 (Note 2) 2-φ10H7 Depth15 See cross-section E-E. (Note 5) 98 150 190 8-M8 1.25 Depth25 2-φ6H7 Depth10 Note 7 40 D ±0.02 8-M8 1.25 Depth25 2-φ6H7 Depth10 98 150 190 78 (Note 2) 168 (Beteen knocks φ6h7 ±0.02) 2.5 R1 5-46 4.5 7.2 Detail of section F VIEW K 14 φ6.5 φ8.2 Cross-section of cable carrier 23507-AB-00 N18D

Dimensions (Wall installation / Optional Cable carrier specification) A B 200 E 200 C-φ9 Depth30 See cross-section E-E. (Note 3) (A) Use hex socket-head bolt (M8 1.25) ith under-head length of 40mm or more. 345 180 F 22 2-M5 0.8 Depth11 50 12 73 57 5 7 149 Cross-section E-E 3.7 114 36 115 156 179 R0.3 113 168 (Beteen knocks φ6h7 ±0.02) E 106 78 (Note 1) 2-φ10H7 Depth15 See cross-section E-E. (Note 5) 98 150 190 Ground terminal for user use (M4) (250: Minimum distance beteen carrier) 181±3 (Note 1) Effective stroke 8-M8 1.25 Depth25 2-φ6H7 Depth10 L D ±0.02 Effective stroke 181±3 (Note 1) 55 105 8-M8 1.25 Depth25 2-φ6H7 Depth10 98 150 190 78 (Note 1) 168 (Beteen knocks φ6h7 ±0.02) 2.5 R1 4.5 7.2 Detail of section F VIEW K 35 25 φ6.5 φ8.2 Cross-section of cable carrier 23508-AB-00 Specifications N18D 5-47

1.18 B10 Specifications Static loading moment AC servo motor output (W) 100 Repeatability (mm) Note 1 ±0.04 M Y Belt (mm) Equivalent to lead 25 Maximum speed (mm/sec) 1875 Maximum payload (kg) 10 Stroke (mm) 150 to 2550 (100mm pitch) M R M P Overall length (mm) Motor installation L/R type Another Maximum dimensions of cross section of main unit (mm) Stroke+397.5 Stroke+310 W100 H81 MY MP MR 188 188 165 (Unit: N m) 5 Cable length (m) Standard: 3.5 / Option: 5,10 Controller SR1-X, TS-X, RCX222, RCX240 Robot driver RDX-05 Linear guide type 4 ros of circular arc grooves 1 rail Position detector Resolvers Note 2 Resolution (Pulse/rotation) 16384 Note 1. Positioning repeatability in one direction. Note 2. Position detectors (resolvers) are common to incremental and absolute specifications. If the controller has a backup function then it ill be absolute specifications. Specifications Alloable overhang Note. Distance from center of slider top to center of gravity of object being carried at a guide servicelife of 10,000km. Note. Stroke is 600mm hen calculating the service life. Horizontal installation Wall installation A B C A B C A B C A B C 3kg 1800 1392 1084 3kg 1144 1005 1734 5kg 1574 826 696 5kg 724 576 1199 8kg 1221 509 474 8kg 493 333 918 10kg 1171 403 407 10kg 414 254 869 (Unit: mm) 5-48 B10

Dimensions (R type) 272.5±3 215 (Note 1) 90 70 Effective stroke 2-φ5H7 Depth8 4-M5 0.8 Depth8 (125) 67.5 (Note 1) 7.3 4.3 2 1 3.5 Detail of section G 167 50 20 5 4-M5 0.8 Depth10 (The same position on the opposite surface at 2 locations) 86 (Beteen knocks ±0.02) (M5, φ5h7 position) 100 78 73.5 81 16 35.5 85.5 175 89.5 1 L+87.5 G 100 172.5 40 100 M 200 200 N-M5 0.8 Depth10 E A (φ10h7) Grounding terminal VIEW H D-φ10H7: See cross-section E-E. H E 5 57 B C (13) Cross-section E-E 80 23501-AC-00 5 Note 1. Distance from both ends to the mechanical stopper. Note 2. Motor can be installed in upard, donard or horizontal positions versus the robot movement axis. (This figure shos the horizontal direction.) Note 3. Motor can be installed on the right or left side of the robot movement axis. (This figure shos the rightard direction) Note 4. Cables can be extracted in upard, donard, forard or rearard directions. (This figure shos the forard direction.) Effective stroke 150 250 350 450 550 650 750 850 950 1050 1150 1250 1350 1450 1550 1650 1750 1850 1950 2050 2150 2250 2350 2450 2550 L 460 560 660 760 860 960 1060 1160 1260 1360 1460 1560 1660 1760 1860 1960 2060 2160 2260 2360 2460 2560 2660 2760 2860 A 200 100 200 100 200 100 200 100 200 100 200 100 200 100 200 100 200 100 200 100 200 100 200 100 200 B 240 240 420 600 600 780 780 960 960 1140 1140 1320 1320 1320 1320 1320 1320 1320 1320 1320 1320 1320 1320 1320 1320 C 240 240 420 420 600 780 780 960 960 1140 1140 1320 D 2 2 2 2 2 2 2 2 2 2 2 2 2 3 3 3 3 3 3 3 3 3 3 3 3 M 1 1 2 2 3 3 4 4 5 5 6 6 7 7 8 8 9 9 10 10 11 11 12 12 N 6 8 8 10 10 12 12 14 14 16 16 18 18 20 20 22 22 24 24 26 26 28 28 30 30 Weight (kg) 7.4 8.2 9.0 9.8 10.5 11.3 12.1 12.9 13.7 14.5 15.3 16.1 16.9 17.7 18.4 19.2 20.0 20.8 21.6 22.4 23.2 24.0 24.8 25.6 26.3 Specifications B10 5-49

Dimensions (RU type) 185±3 127.5 (Note 1) 90 70 Effective stroke 2-φ5H7 Depth8 4-M5 0.8 Depth8 (125) 67.5 (Note 1) 7.3 4.3 2 1 3.5 Detail of section G 168 50 20 5 4-M5 0.8 Depth10 (The same position on the opposite surface at 2 locations) 86 (Beteen knocks ±0.02) (M5, φ5h7 position) 35.5 100 73.5 81 16 85.5 89.5 1.5 78 175 L G 100 85 40 100 M 200 200 N-M5 0.8 Depth10 E A 5 Grounding terminal 57 D-φ10H7: See cross-section E-E. B E C 80 (φ10h7) 5 (13) Cross-section E-E 23502-AC-00 Specifications 85.5 Dimensions (RD type) Grounding terminal 89.5 185±3 127.5 (Note 1) 90 70 50 20 5 Effective stroke 2-φ5H7 Depth8 4-M5 0.8 Depth8 (125) 67.5 (Note 1) 7.3 4.3 4-M5 0.8 Depth10 86 (Beteen knocks ±0.02) (The same position on the opposite surface at 2 locations) (M5, φ5h7 position) 35.5 2 1 3.5 Detail of section G 100 79 73.5 167 81 16 G 100 88 1.5 78 L 85 40 100 M 200 200 N-M5 0.8 Depth10 E A 80 (φ10h7) 57 D-φ10H7: See cross-section E-E. B E C 5 (13) Cross-section E-E 23503-AC-00 5-50 B10

Dimensions (LU type) 185±3 127.5 (Note 1) 90 70 Effective stroke 2-φ5H7 Depth8 4-M5 0.8 Depth8 (125) 67.5 (Note 1) 7.3 4.3 2 1 3.5 Detail of section G 168 50 20 5 4-M5 0.8 Depth10 (The same position on the opposite surface at 2 locations) 86 (Beteen knocks ±0.02) (M5, φ5h7 position) 35.5 100 73.5 81 16 89.5 175 85.5 1.5 78 L G 100 Grounding terminal 85 40 100 57 M 200 200 N-M5 0.8 Depth10 D-φ10H7: See cross-section E-E. B E E C A 80 (φ10h7) 5 (13) Cross-section E-E 5 23504-AC-00 Specifications B10 5-51

1.19 B14 Specifications Static loading moment AC servo motor output (W) 100 Repeatability (mm) Note 1 ±0.04 M Y Belt (mm) Equivalent to lead 25mm Maximum speed (mm/sec) 1875 Maximum payload (kg) 20 Stroke (mm) 150 to 3050 (100mm pitch) M R M P Overall length (mm) Motor installation L/R type Another Maximum dimensions of cross section of main unit (mm) Stroke+425.5 Stroke+338 W146 H94 MY MP MR 226 227 199 (Unit: N m) 5 Cable length (m) Standard: 3.5 / Option: 5,10 Controller SR1-X, TS-X, RCX222, RCX240 Robot driver RDX-05 Linear guide type 4 ros of circular arc grooves 2 rail Position detector Resolvers Note 2 Resolution (Pulse/rotation) 16384 Note 1. Positioning repeatability in one direction. Note 2. Position detectors (resolvers) are common to incremental and absolute specifications. If the controller has a backup function then it ill be absolute specifications. Specifications Alloable overhang Note. Distance from center of slider top to center of gravity of object being carried at a guide servicelife of 10,000km. Note. Stroke is 600mm hen calculating the service life. Horizontal installation Wall installation A B C A B C A B C A B C 5kg 2159 1228 943 5kg 1064 816 1468 10kg 1389 623 548 10kg 564 377 888 20kg 1102 320 348 20kg 305 156 615 (Unit: mm) 5-52 B14

Dimensions (R type) 297.5±3 240 (Note 1) Effective stroke (128) 90 70.5 70 2-φ6H7 Depth10 (Note 1) 32 8-M6 1.0 Depth16 3.5 1.5 1.5 8.3 5.5 Detail of section G 167 4-M5 0.8 Depth12 (The same position on the opposite surface at 2 locations) 50 20 12.5 134 (Beteen knocks ±0.02) (M6, φ6h7 position) 146 34.5 83 175 92 11 78 90 172.5 60 100 L+87.5 200 B 200 A M-M6 1.0 Depth10 J 90.5 94 22.5 G (φ10h7) 136 Grounding terminal VIEW H H F-φ10H7 See cross-section J-J. J 85 C D E 100 5.5 18.5 Cross-section J-J 5 23501-AD-00 Note 1. Distance from both ends to the mechanical stopper. Note 2. Motor can be installed in upard, donard or horizontal positions versus the robot movement axis. (This figure shos the horizontal direction.) Note 3. Motor can be installed on the right or left side of the robot movement axis. (This figure shos the rightard direction) Note 4. Cables can be extracted in upard, donard, forard or rearard di. (This figure shos the forard direction.) Note 5. As the carriage is made of extracted aluminum, its idth dimension may slightly differ from the value above. Effective stroke 150 250 350 450 550 650 750 850 950 1050 1150 1250 1350 1450 1550 1650 1750 1850 1950 2050 2150 2250 2350 2450 2550 2650 2750 2850 2950 3050 L 488 588 688 788 888 988 1088 1188 1288 1388 1488 1588 1688 1788 1888 1988 2088 2188 2288 2388 2488 2588 2688 2788 2888 2988 3088 3188 3288 3388 M 6 8 8 10 10 12 12 14 14 16 16 18 18 20 20 22 22 24 24 26 26 28 28 30 30 32 32 34 34 36 A 100 200 100 200 100 200 100 200 100 200 100 200 100 200 100 200 100 200 100 200 100 200 100 200 100 200 100 200 100 B 1 1 1 2 2 3 3 4 4 5 5 6 6 7 7 8 8 9 9 10 10 11 11 12 12 13 13 14 14 15 C 240 420 420 600 600 780 780 960 960 1140 1140 1140 1140 1140 1140 1140 1140 1140 1140 1140 1140 1140 1140 1140 1140 1140 1140 1140 1140 1140 D 240 240 420 420 600 600 780 780 960 960 1140 1140 1140 1140 1140 1140 1140 1140 1140 E 240 240 420 600 600 780 780 F 2 2 2 2 2 2 2 2 2 2 2 3 3 3 3 3 3 3 3 3 3 3 3 4 4 4 4 4 4 4 Weight (kg) 9.6 10.8 12 13.1 14.3 15.5 16.6 17.8 19 20.2 21.3 22.5 23.7 24.8 26 27.2 28.3 29.5 30.7 31.9 33 34.2 35.4 36.5 37.7 38.9 40 41.2 42.4 43.6 Specifications B14 5-53

Dimensions (RU type) 210±3 152.5 (Note 1) 90 70 32 2-φ6H7 Depth10 8-M6 1.0 Depth16 Effective stroke (128) 70.5 (Note 1) 3.5 1.5 1.5 8.3 5.5 Detail of section G 167 178 50 20 4-M5 0.8 Depth12 (The same position on the opposite surface at 2 locations) 12.5 134 (Beteen knocks ±0.02) (M6, φ6h7 position) 34.5 146 83 175 92 11 1.5 78 L 90.5 94 G22.5 136 5 Grounding terminal 85 60 100 B 200 A 200 M-M6 1.0 Depth10 H F-φ10H7: See cross-section H-H. H 85 C D E 100 (φ10h7) 5.5 18.5 Cross-section H-H Specifications Dimensions (RD type) 210±3 Effective stroke (128) 152.5 (Note 1) 90 2-φ6H7 Depth10 70.5 (Note 1) Grounding 70 terminal 32 8-M6 1.0 Depth16 8.3 5.5 3.5 1.5 1.5 Detail of section G 23502-AD-00 83 92 (5) 50 20 12.5 4-M5 0.8 Depth12 (The same position on the opposite surface at 2 locations) 134 (Beteen knocks ±0.02) (M6, φ6h7 position) 34.5 146 89 78 167 90.5 94 22.5 G 136 1.5 78 L 85 60 100 200 B 200 A M-M6 1.0 Depth10 H 100 (φ10h7) 85 F-φ10H7: See cross-section H-H. C D H E 5.5 18.5 Cross-section H-H 23503-AD-00 5-54 B14

Dimensions (LU type) 1.5 210±3 Effective stroke (128) 90 2-φ6H7 Depth10 70 32 8-M6 1.0 Depth16 152.5 (Note 1) 78 70.5 (Note 1) 3.5 1.5 1.5 178 167 50 20 90.5 8.3 5.5 Detail of section G 12.5 4-M5 0.8 Depth12 (The same position on the opposite surface at 2 locations) 134 (Beteen knocks ±0.02) (M6, φ6h7 position) 34.5 146 94 22.5 11 92 83 175 L G 136 Grounding terminal 85 60 100 B 200 A 200 M-M6 1.0 Depth10 H F-φ10H7: See cross-section H-H. H 85 C D E 100 (φ10h7) 5.5 18.5 Cross-section H-H 5 23504-AD-00 Specifications B14 5-55

1.20 B14H Specifications Static loading moment AC servo motor output (W) 200 Repeatability (mm) Note 1 ±0.04 M Y Belt (mm) Equivalent to lead 25mm Maximum speed (mm/sec) 1250 (1875 Note 2 ) Maximum payload (kg) 30 Stroke (mm) 150 to 3050 (100mm pitch) M R M P 5 Specifications Overall length Motor L/R type Stroke+475.5 MY MP MR (mm) installation Another Stroke+388 610 555 488 Maximum dimensions of cross section of main unit (mm) W146 H94 (Unit: N m) Cable length (m) Controller Robot driver Linear guide type Position detector Resolution (Pulse/rotation) Standard: 3.5 / Option: 5,10 SR1-X, TS-X, RCX222, RCX240 RDX-10 4 ros of circular arc grooves 2 rail Resolvers Note 3 16384 Note 1. Positioning repeatability in one direction. Note 2. A regenerative unit is needed if using the SR1-X, TS-X at maximum speeds exceeding 1250mm sec. If using the RDX, then the regenerative unit RBR1 is required regardless of the installation conditions. Note 3. Position detectors (resolvers) are common to incremental and absolute specifications. If the controller has a backup function then it ill be absolute specifications. Alloable overhang Note. Distance from center of slider top to center of gravity of object being carried at a guide servicelife of 10,000km. Note. Stroke is 600mm hen calculating the service life. Horizontal installation Wall installation A B C A B C A B C A B C 5kg 3000 3000 1941 5kg 2074 2585 3000 10kg 2742 1697 1064 10kg 1087 1236 2071 20kg 2158 867 651 20kg 604 561 1512 30kg 1708 590 466 30kg 397 336 1106 (Unit: mm) 5-56 B14H

Dimensions (R type) 322.5±3 240 (Note 1) 140 124 70 Effective stroke (153) 2-φ6H7 Depth10 70.5 (Note 1) 8-M6 1.0 Depth16 1.5 3.5 1.5 8.3 5.5 Detail of section G 167 4-M5 0.8 Depth12 (The same position on the opposite surface at 2 locations) 50 45 134 (Beteen knocks ±0.02) (M6, φ6h7 position) 146 78 90 90.5 94 22.5 12.5 34.5 103 195 92 11 172.5 108 100 L+87.5 200 B 200 J A M-M6 1.0 Depth10 G 136 (φ10h7) Grounding terminal VIEW H H F-φ10H7: See cross-section J-J. 85 C D J E 100 5.5 18.5 Cross-section J-J 23505-AD-00 5 Note 1. Distance from both ends to the mechanical stopper. Note 2. Motor can be installed in upard, donard or horizontal positions versus the robot movement axis. (This figure shos the horizontal direction.) Note 3. Motor can be installed on the right or left side of the robot movement axis. (This figure shos the rightard direction) Note 4. Cables can be extracted in upard, donard, forard or rearard direction. (This figure shos the forard direction.) Note 5. As the carriage is made of extracted aluminum, its idth dimension may slightly differ from the value above. Effective stroke 150 250 350 450 550 650 750 850 950 1050 1150 1250 1350 1450 1550 1650 1750 1850 1950 2050 2150 2250 2350 2450 2550 2650 2750 2850 2950 3050 L 538 638 738 838 938 1038 1138 1238 1338 1438 1538 1638 1738 1838 1938 2038 2138 2238 2338 2438 2538 2638 2738 2838 2938 3038 3138 3238 3338 3438 M 6 8 8 10 10 12 12 14 14 16 16 18 18 20 20 22 22 24 24 26 26 28 28 30 30 32 32 34 34 36 A 100 200 100 200 100 200 100 200 100 200 100 200 100 200 100 200 100 200 100 200 100 200 100 200 100 200 100 200 100 B 1 1 1 2 2 3 3 4 4 5 5 6 6 7 7 8 8 9 9 10 10 11 11 12 12 13 13 14 14 15 C 240 420 420 600 600 780 780 960 1140 1140 1140 1140 1140 1140 1140 1140 1140 1140 1140 1140 1140 1140 1140 1140 1140 1140 1140 1140 1140 1140 D 240 240 420 600 600 780 780 960 960 1140 1140 1140 1140 1140 1140 1140 1140 1140 1140 E 240 240 420 420 600 600 780 960 F 2 2 2 2 2 2 2 2 2 2 2 3 3 3 3 3 3 3 3 3 3 3 4 4 4 4 4 4 4 4 Weight (kg) 10.9 12.1 13.2 14.4 15.6 16.7 17.9 19.1 20.2 22.0 22.6 23.8 24.9 26.1 27.3 28.4 29.6 30.8 31.9 33.1 34.3 35.5 36.6 37.8 39.0 40.1 41.3 42.5 43.6 45.4 Specifications B14H 5-57

Dimensions (RU type) 235±3 152.5 (Note 1) 140 2-φ6H7 Depth10 124 70 8-M6 1.0 Depth16 Effective stroke (153) 70.5 (Note 1) 3.5 1.5 1.5 8.3 5.5 Detail of section G 167 178 50 45 12.5 4-M5 0.8 Depth12 (The same position on the opposite surface at 2 locations) 134 (Beteen knocks ±0.02) (M6, φ6h7 position) 34.5 146 90.5 94 22.5 103 92 195 11 1.5 78 L G 136 5 Grounding terminal 85 108 100 200 F-φ10H7: See cross-section H-H. 85 C B 200 D H H E A M-M6 1.0 Depth10 100 (φ10h7) 5.5 18.5 Cross-section H-H Specifications Dimensions (RD type) Grounding terminal 235±3 152.5 (Note 1) Effective stroke (153) 140 2-φ6H7 Depth10 124 70.5 70 8-M6 1.0 Depth16 (Note 1) 8.3 5.5 3.5 1.5 1.5 Detail of section G 23506-AD-00 103 92 (5) 50 45 12.5 4-M5 0.8 Depth12 (The same position on the opposite surface at 2 locations) 134 (Beteen knocks ±0.02) (M6, φ6h7 position) 34.5 146 89 78 90.5 167 94 22.5 G 136 1.5 78 L 85 60 100 200 B 200 A M-M6 1.0 Depth10 H (φ10h7) 85 F-φ10H7: See cross-section H-H. C D H E 100 5.5 18.5 Cross-section H-H 23507-AD-00 5-58 B14H

Dimensions (LU type) 235±3 152.5 (Note 1) 140 124 70 Effective stroke (153) 2-φ6H7 Depth10 70.5 8-M6 1.0 Depth16 (Note 1) 5.5 3.5 1.5 1.5 8.3 Detail of section G 1.5 78 178 167 50 45 12.5 4-M5 0.8 Depth12 (The same position on the opposite surface at 2 locations) 134 (Beteen knocks ±0.02) (M6, φ6h7 position) 34.5 146 90.5 94 22.5 11 92 195 103 L G 136 Grounding terminal 85 108 100 B 200 A 200 H F-φ10H7: See cross-section H-H. H 85 C D E M-M6 1.0 Depth10 100 (φ10h7) 5.5 18.5 Cross-section H-H 5 23508-AD-00 Specifications B14H 5-59

1.21 R5 Specifications AC servo motor output (W) 50 Repeatability (sec) ±30 Maximum speed ( /sec) 360 Maximum alloable momentinertia (kgm 2 [kgfcmsec 2 ]) 0.12 [1.2] Rated torque (N m[kgf m]) 5.29 [0.54] Speed reduction ratio 1/50 Rotation range ( ) 360 Cable length (m) Standard: 3.5 / Option: 5,10 Controller Robot driver Speed reducer type Position detector SR1-X, TS-X, RCX222, RCX240 RDX-05 Harmonic drive Resolvers Resolution (Pulse/rotation) 16384 5 Maximum alloable moment inertia Payload parameters W (kg) 1 2 3 4 5 6 7 8 9 10 Maximum alloable moment inertia J (kgfcmsec 2 ) 0.12 0.24 0.36 0.48 0.60 0.72 0.84 0.96 1.08 1.20 J W Specifications Note. When the eight of a tool or orkpiece attached to the shaft R5 is W (kg), its moment of inertia (J) must be smaller than the values shon in the table above. (For example, enter 4kg if W is 3kg and J is 0.48kgfcmsec 2.) Enter the above mass parameter value for the controller, and optimum acceleration is automatically set based on this value. R5 Dimensions φ65h7 57 20 35 4-φ6 Through hole φ9.5 spot facing depth25 Approx. 150 (Cable length) M8 1.25 Depth20 4-M6 1.0 Depth16 13 Grounding terminal (M4) 37.5 22.5 56.6 76 MAX. 30 56.6 72 (77) 19 (Width across flat) 20 8 41 102 242 9.5 49 7 70 4-M6 1.0 Depth16 14 Note 1 60 φ20h7 φ22 Cable extraction direction B S 23502-AG-00 Weight (kg) 3.0 Note 1. The cable extraction port can be changed. 5-60 R5

1.22 R10 Specifications AC servo motor output (W) 100 Repeatability (sec) ±30 Maximum speed ( /sec) 360 Maximum alloable momentinertia (kgm 2 [kgfcmsec 2 ]) 0.36 [3.71] Rated torque (N m[kgf m]) 10.78 [1.10] Speed reduction ratio 1/50 Rotation range ( ) 360 Cable length (m) Standard: 3.5 / Option: 5,10 Controller Robot driver Speed reducer type Position detector SR1-X, TS-X, RCX222, RCX240 RDX-05 Harmonic drive Resolvers Resolution (Pulse/rotation) 16384 Maximum alloable moment inertia Payload parameters W (kg) 1 2 3 4 5 6 7 8 9 10 Maximum alloable moment inertia J (kgfcmsec 2 ) 0.25 0.49 0.74 0.99 1.24 1.48 1.73 1.98 2.23 2.47 Payload parameters W (kg) 11 12 13 14 15 J W 5 Maximum alloable moment inertia J (kgfcmsec 2 ) 2.72 2.97 3.22 3.46 3.71 Note. When the eight of a tool or orkpiece attached to the shaft R10 is W (kg), its moment of inertia (J) must be smaller than the values shon in the table above. (For example, enter 4kg if W is 3kg and J is 0.99kgfcmsec 2.) Enter the above mass parameter value for the controller, and optimum acceleration is automatically set based on this value. R10 Dimensions φ66h7 11 16 50 4-φ6.5 Through hole φ11 spot facing depth35 Approx. 150 (Cable length) Specifications 4-M6 1.0 Depth16 M8 1.25 Depth20 11 40 60 81 φ22 26.5 20 φ20h7 MAX. 30 50 80 (85) 20 (Width across flat) 20 8 39 106.5 262 11.5 Grounding terminal (M4) Cable extraction direction 6 70 4-M6 1.0 Depth16 20 16 66 (Note 1) B S 11.5 21501-AH-00 Weight (kg) 3.5 Note 1. The cable extraction port can be changed. R10 5-61

1.23 R20 Specifications AC servo motor output (W) 200 Repeatability (sec) ±30 Maximum speed ( /sec) 360 Maximum alloable momentinertia (kgm 2 [kgfcmsec 2 ]) 1.83 [18.7] Rated torque (N m[kgf m]) 21.46 [2.19] Speed reduction ratio 1/50 Rotation range ( ) 360 Cable length (m) Standard: 3.5 / Option: 5,10 Controller Robot driver Speed reducer type Position detector SR1-X, TS-X, RCX222, RCX240 RDX-10 Harmonic drive Resolvers Resolution (Pulse/rotation) 16384 Maximum alloable moment inertia 5 Payload parameters W (kg) 1 2 3 4 5 6 7 8 9 10 Maximum alloable moment inertia J (kgfcmsec 2 ) 0.93 1.8 2.8 3.7 4.6 5.6 6.5 7.4 8.4 9.3 J W Payload parameters W (kg) 11 12 13 14 15 16 17 18 19 20 Specifications Maximum alloable moment 10.2 11.2 12.1 13.1 14 14.9 15.9 16.8 17.7 18.7 inertia J (kgfcmsec 2 ) Note. When the eight of a tool or orkpiece attached to the shaft R20 is W (kg), its moment of inertia (J) must be smaller than the values shon in the table above. (For example, enter 4kg if W is 3kg and J is 3.7kgfcmsec 2.) Enter the above mass parameter value for the controller, and optimum acceleration is automatically set based on this value R20 Dimensions 5-M8 1.25 Depth20 (P.C.D.20) MAX. 30 Approx. 150 (Cable length) 50 80 101 80 20 35 4-φ6.5 Through hole φ11 spot facing depth40 Grounding terminal (M4) 16 39 22 80 100 (105) 4-M6 1.0 Depth15 30 3 50 60 111.5 275 11 20 65 4-M6 1.0 Depth20 11 80 φ98 0-0.2 φ75h8 φ38 φ35h7 Cable extraction direction B S (Note 1) 22 16 23501-AK-00 5-62 Weight (kg) 5.5 Note 1. The cable extraction port can be changed. R20