Superfast phase-shifting method for 3-D shape measurement

Similar documents
Ultrafast 3-D shape measurement with an off-theshelf DLP projector

This article appeared in a journal published by Elsevier. The attached copy is furnished to the author for internal non-commercial research and

Simultaneous geometry and color texture acquisition using a single-chip color camera

Pixel-by-pixel absolute three-dimensional shape measurement with modified Fourier transform profilometry

Design of Temporally Dithered Codes for Increased Depth of Field in Structured Light Systems

Optimized pulse width modulation pattern strategy for three-dimensional profilometry with projector defocusing

Method for out-of-focus camera calibration

Novel calibration method for structured-light system with an out-of-focus projector

Development of innovative fringe locking strategies for vibration-resistant white light vertical scanning interferometry (VSI)

This document is downloaded from DR-NTU, Nanyang Technological University Library, Singapore.

Optimized three-step phase-shifting profilometry using the third harmonic injection

Multi-frequency and multiple phase-shift sinusoidal fringe projection for 3D profilometry

Binarization Methods of Sinusoidal Pattern Based on Dithering 3-D Technique

Color electroholography by three colored reference lights simultaneously incident upon one hologram panel

New Phase Shifting Algorithms Insensitive to Linear Phase Shift Errors J. Novák

Selection of Temporally Dithered Codes for Increasing Virtual Depth of Field in Structured Light Systems

Development of a new multi-wavelength confocal surface profilometer for in-situ automatic optical inspection (AOI)

Double-pattern triangular pulse width modulation technique for high-accuracy high-speed 3D shape measurement

University of Huddersfield Repository

Improvement of terahertz imaging with a dynamic subtraction technique

Dynamic Phase-Shifting Microscopy Tracks Living Cells

Large Field of View, High Spatial Resolution, Surface Measurements

648. Measurement of trajectories of piezoelectric actuators with laser Doppler vibrometer

Information & Instructions

In-line digital holographic interferometry

ME 6406 MACHINE VISION. Georgia Institute of Technology

Dynamic Phase-Shifting Electronic Speckle Pattern Interferometer

Implementation of Adaptive Coded Aperture Imaging using a Digital Micro-Mirror Device for Defocus Deblurring

Parallel Digital Holography Three-Dimensional Image Measurement Technique for Moving Cells

SENSOR+TEST Conference SENSOR 2009 Proceedings II

PhD Thesis. Balázs Gombköt. New possibilities of comparative displacement measurement in coherent optical metrology

CLOSE RANGE PHOTOGRAMMETRY STRUCTURED LIGHT APPROACH FOR MACHINE VISION AIDED HARVESTING

MEASURING HEAD-UP DISPLAYS FROM 2D TO AR: SYSTEM BENEFITS & DEMONSTRATION Presented By Matt Scholz November 28, 2018

A Foveated Visual Tracking Chip

A 3D Profile Parallel Detecting System Based on Differential Confocal Microscopy. Y.H. Wang, X.F. Yu and Y.T. Fei

Digital Photographic Imaging Using MOEMS

MASSACHUSETTS INSTITUTE OF TECHNOLOGY LINCOLN LABORATORY 244 WOOD STREET LEXINGTON, MASSACHUSETTS

11Beamage-3. CMOS Beam Profiling Cameras

Elemental Image Generation Method with the Correction of Mismatch Error by Sub-pixel Sampling between Lens and Pixel in Integral Imaging

Spatial harmonic distortion: a test for focal plane nonlinearity

Noise Tolerance of Improved Max-min Scanning Method for Phase Determination

of surface microstructure

Advanced Technology and Manufacturing Institute. Zygo ZeScope

Speckle-free digital holographic recording of a diffusely reflecting object

Swept-Field User Guide

Contouring aspheric surfaces using two-wavelength phase-shifting interferometry

This document is downloaded from DR-NTU, Nanyang Technological University Library, Singapore.

Simple interferometric fringe stabilization by CCD-based feedback control

Optical transfer function shaping and depth of focus by using a phase only filter

Diffractive optical elements for high gain lasers with arbitrary output beam profiles

Computer Vision. Howie Choset Introduction to Robotics

Nontranslational three-dimensional profilometry by chromatic confocal microscopy with dynamically configurable micromirror scanning

Exposure schedule for multiplexing holograms in photopolymer films

Characteristics of point-focus Simultaneous Spatial and temporal Focusing (SSTF) as a two-photon excited fluorescence microscopy

Design of null lenses for testing of elliptical surfaces

Analysis of phase sensitivity for binary computer-generated holograms

An Evaluation of MTF Determination Methods for 35mm Film Scanners

Aberrations and adaptive optics for biomedical microscopes

BEAMAGE-3.0 KEY FEATURES BEAM DIAGNOSTICS AVAILABLE MODELS MAIN FUNCTIONS SEE ALSO ACCESSORIES. CMOS Beam Profiling Cameras

Errors Caused by Nearly Parallel Optical Elements in a Laser Fizeau Interferometer Utilizing Strictly Coherent Imaging

A NOVEL VISION SYSTEM-ON-CHIP FOR EMBEDDED IMAGE ACQUISITION AND PROCESSING

Introduction to Computer Vision

ERS KEY FEATURES BEAM DIAGNOSTICS MAIN FUNCTIONS AVAILABLE MODEL. CMOS Beam Profiling Camera. 1 USB 3.0 for the Fastest Transfer Rates

Thales R&T Contribution to ICAN Highly scalable collective techniques for coherent fiber beam locking and combining

LENSLESS IMAGING BY COMPRESSIVE SENSING

Lab Report 3: Speckle Interferometry LIN PEI-YING, BAIG JOVERIA

On Using Off-the-Shelf Micro Projectors for 3D Metrology

Modifications of the coherence radar for in vivo profilometry in dermatology

Null Hartmann test for the fabrication of large aspheric surfaces

Computer Generated Holograms for Testing Optical Elements

Rotation/ scale invariant hybrid digital/optical correlator system for automatic target recognition

Laser Doppler sensing in acoustic detection of buried landmines

Images and Displays. Lecture Steve Marschner 1

GRENOUILLE.

Super High Vertical Resolution Non-Contact 3D Surface Profiler BW-S500/BW-D500 Series

Manufacturing Metrology Team

Profile Measurement of Resist Surface Using Multi-Array-Probe System

Dynamic beam shaping with programmable diffractive optics

Three-dimensional quantitative phase measurement by Commonpath Digital Holographic Microscopy

Deep Horizontal Atmospheric Turbulence Modeling and Simulation with a Liquid Crystal Spatial Light Modulator. *Corresponding author:

A high-resolution fringe printer for studying synthetic holograms

pco.edge 4.2 LT 0.8 electrons 2048 x 2048 pixel 40 fps up to :1 up to 82 % pco. low noise high resolution high speed high dynamic range

APPLICATION NOTE

SYSTEMATIC NOISE CHARACTERIZATION OF A CCD CAMERA: APPLICATION TO A MULTISPECTRAL IMAGING SYSTEM

Sensors and Sensing Cameras and Camera Calibration

Be aware that there is no universal notation for the various quantities.

Technology offer. Low cost system for measuring vibrations through cameras

Imaging obscured subsurface inhomogeneity using laser speckle

Module 5: Experimental Modal Analysis for SHM Lecture 36: Laser doppler vibrometry. The Lecture Contains: Laser Doppler Vibrometry

Multi Focus Structured Light for Recovering Scene Shape and Global Illumination

NOVA S12. Compact and versatile high performance camera system. 1-Megapixel CMOS Image Sensor: 1024 x 1024 pixels at 12,800fps

Analysis of retinal images for retinal projection type super multiview 3D head-mounted display

Coded Aperture for Projector and Camera for Robust 3D measurement

Displacement Measurement of Burr Arch-Truss Under Dynamic Loading Based on Image Processing Technology

3D Optical Motion Analysis of Micro Systems. Heinrich Steger, Polytec GmbH, Waldbronn

1.6 Beam Wander vs. Image Jitter

ADAPTIVE CORRECTION FOR ACOUSTIC IMAGING IN DIFFICULT MATERIALS

PROCEEDINGS OF SPIE. Measurement of low-order aberrations with an autostigmatic microscope

Digital micro-mirror device based modulator for microscope illumination

APPLICATION OF COMPUTER VISION FOR DETERMINATION OF SYMMETRICAL OBJECT POSITION IN THREE DIMENSIONAL SPACE

Transcription:

Superfast phase-shifting method for 3-D shape measurement Song Zhang 1,, Daniel Van Der Weide 2, and James Oliver 1 1 Department of Mechanical Engineering, Iowa State University, Ames, IA 50011, USA 2 Department of Electric and Computer Engineering, University of Wisconsin, Madison, WI, USA *song@iastate.edu Abstract: Recently introduced DLP Discovery technology allows for tens of khz binary image switching, which has great potential for superfast 3-D shape measurement. This paper presents a system that realizes 3-D shape measurement by using a DLP Discovery technology to switch binary structured patterns at very high frame rates. The sinusoidal fringe patterns are generated by properly defocusing the projector. Combining this approach with a phase-shifting method, we achieve an unprecedented rate for 3-D shape measurement: 667 Hz. This technology can be applied to numerous applications including medical science, biometrics, and entertainment. 2010 Optical Society of America OCIS codes: (110.6880) Three-dimensional image acquisition; (320.7100) Ultrafast measurements; (120.5050) Phase measurement. References and links 1. S. Zhang, Recent Progresses on Real-time 3-D Shape Measurement Using Digital Fringe Projection Techniques, Opt. Laser Eng. 48, 149 158 (2010). 2. R. Höfling and P. Aswendt, Real time 3D Shape Recording by DLP-based All-digital Surface Encoding, in Proc. SPIE, vol. 7210, pp. 72,100E1 8 (2009). 3. R. Höfling, High-speed 3D Imaging by DMD Technology, in Proc. SPIE, vol. 5303, pp. 188 194 (2004). 4. R. Höfling and E. Ahl, ALP: Universal DMD Controller for Metrology and Testing, in Proc. SPIE, vol. 5289, pp. 322 329 (2004). 5. S. Lei and S. Zhang, Flexible 3-D Shape Measurement Using Projector Defocusing, Opt. Lett. 34, 3080 3082 (2009). 6. S. Lei and S. Zhang, Digital Sinusoidal Fringe Pattern Generation: Defocusing Binary Patterns VS Focusing Sinusoidal Patterns, Opt. Laser Eng. 48, 561 569 (2010). 7. D. Malacara, ed., Optical Shop Testing, 3rd ed. (John Wiley and Sons, New York, 2007). 8. D. C. Ghiglia and M. D. Pritt, Two-Dimensional Phase Unwrapping: Theory, Algorithms, and Software (John Wiley and Sons, Inc, 1998). 9. C. Zhang, P. S. Huang, and F.-P. Chiang, Microscopic Phase-shifting Profilometry Based on Digital Micromirror Device Technology, Appl. Opt. 41(8), 5896 5904 (2002). 10. S. Zhang and P. S. Huang, Novel Method for Structured Light System Calibration, Opt. Eng. 45(8), 083601 (2006). 1. Introduction With recent advancement of digital video projection technology, 3-D shape measurement techniques based on digital fringe projection and phase-shifting methods have improved drastically. Among these efforts, dynamic real-time 3-D shape measurement has becomes a core subject because of its importance in numerous fields. However, if a digital video projector is used, its (C) 2010 OSA 26 April 2010 / Vol. 18, No. 9 / OPTICS EXPRESS 9684

measurement speed is limited to 120 Hz [1]. This is because the fringe pattern switching rate is usually limited to 120 Hz for a digital-light-processing (DLP) projector. The most recently developed DLP Discovery technology has enabled 1-bit image switching rate at tens of khz. This innovation shows great potential for 3-D optical metrology because of its flexibility to control the projected light accurately [2 4]. However, a digital fringe projection and phase-shifting method requires sinusoidal fringe patterns that usually require 8-bit images. Furthermore, 3-D shape measurement using a sinusoidal phase-shifting method has numerous advantages over other techniques because of its speed and accuracy. This research verifies the feasibility of using the DLP Discovery technology for superfast 3-D shape measurement with a digital fringe projection and sinusoidal phase-shifting method. In particular, we use our recently developed 3-D shape measurement technique that generates sinusoidal phase-shifted fringe patterns by properly defocusing binary structured patterns [5]. Compared to a conventional phase-shifting method in which 255 grayscale values are used, this technique requires only binary (0 s, and 255 s) grayscale values. It has the following advantages: (1) superfast 3-D shape measurement with this DLP Discovery technology; (2) no precise synchronization between the projector and the camera; (3) no nonlinear projector gamma corrections [6]; and (4) high spatial and temporal resolution. Because the DLP Discovery can switch binary images at tens of khz rate, if a three-step phase-shifting algorithm is used, the 3-D shape measurement speed can theoretically reach khz, and even tens of khz. In this research, we use a DLP Discovery D4100 with a 0.55 digital micro-mirror device (DMD) chip. It can switch binary images up to 32,550 frame per second with a resolution of 1,024 768. However, due to the optical module used, the light intensity is too low to perform any measurement at the full speed. With a Phantom V9.1 digital camera, we successfully developed a system that can achieve fringe image acquisition at 2000 Hz rate with decent quality. Because a three-step phase-shifting algorithm is used, the 3-D shape measurement speed is actually 667 Hz. 2. Principle Phase-shifting methods are widely used in optical metrology because of their numerous advantageous features: (1) point-by-point measurement. They can reach pixel-level measurement resolution; (2) Less sensitive to surface reflectivity variations, therefore they can be used to measure very complex surfaces; (3) less sensitive to ambient light. They have less strict requirements for measurement conditions. A variety of phase-shifting algorithms have been developed, that include three-step, four-step, and least-square algorithms [7]. To achieve high-speed 3-D shape measurement, a three-step phase-shifting algorithm with a phase shift of 2π/3 is used. Three fringe images can be described as: I 1 (x,y) = I (x,y)+i (x,y)cos(φ 2π/3), (1) I 2 (x,y) = I (x,y)+i (x,y)cos(φ), (2) I 3 (x,y) = I (x,y)+i (x,y)cos(φ + 2π/3). (3) Where I (x,y) is the average intensity, I (x,y) the intensity modulation, and φ(x,y) the phase to be solved for. Simultaneously solving Eq. (1) (3), the phase can be obtained as: [ φ(x,y)=tan 1 ] 3(I1 I 3 )/(2I 2 I 1 I 3 ). (4) This equation provides the wrapped phase with 2π discontinuities. A spatial phase unwrapping algorithm can be applied to obtain continuous phase [8]. The phase unwrapping is essential to detect the 2π discontinuities and remove them by adding or subtracting multiples of 2π point (C) 2010 OSA 26 April 2010 / Vol. 18, No. 9 / OPTICS EXPRESS 9685

by point. Because 3-D information is carried on by the phase, 3-D shape can be retrieved from the phase after phase unwrapping using a phase-to-height conversion algorithm [9]. 3. Experiments Figure 1 shows a photograph of the hardware system developed. It is composed of a DLP Discovery projection system, a high-speed CMOS camera, and a self-developed synchronization circuit. The DLP Discovery projection system includes a DLP Discovery board (D4000) (Texas Instruments, Texas), an ALP High Speed (Digital Light Innovations, Texas) and an optical module (S3X) (Visitech, Norway). In addition, because of the low output light intensity of the optical module, a converging lens (focal length of 175 mm) is placed in front of the projection to reduce the focused image size and increase the image quality. With this projection system, the projected image size is approximately 68 mm 50 mm when the projector is properly defocused, so that high-quality sinusoidal fringe images can be generated when the projector is fed with binary structured patterns with 36 pixels per period. The camera used in this system is Phantom V9.1 (Vision Research, NJ), with a frame rate of 1,016 frames per second (fps) for 1,632 1,200 image resolution. In this test, we used only a 576 576 image resolution to reduce the amount of data acquired. The synchronization circuit takes the projection timing signal and sends the trigger signal to the camera for simultaneous image acquisition. DLP Discovery Projection System Conv. Lens Optical Engine Sync Circuit Discovery Board High-Speed CMOS Camera Fig. 1. Photograph of the superfast 3-D shape measurement system. Figure 2 shows a typical measurement result of a 3-D surface when the fringe image acquisition speed is set to 1,000 fps. The camera exposure time is 500 μs. The projector is properly defocused so that ideal sinusoidal fringe patterns are produced on the surface of the measured objects. Figure 2(a) shows the object to be measured. Figures 2(b) 2(d) shows three phaseshifted fringe images. These fringe images appear to be sinusoidal, a phase shifting algorithm can then be applied to compute the phase map. After applying Eq. (4), the phase is wrapped, as shown in Fig. 2(e). The phase can then be unwrapped to obtain the continuous phase map. Figure 2(f) shows the unwrapped phase map. The unwrapped phase map can be further converted to 3-D geometry by applying the calibration method introduced in reference [9]. Figure 4 shows the measurement results plotted in 3-D. It can be seen here that the 3-D surface profile is well captured, the reconstructed 3-D shape has very high quality. This experiment demonstrated that superfast 3-D shape measurement is feasible by using a DLP Discovery technology with its high speed binary structured (C) 2010 OSA 26 April 2010 / Vol. 18, No. 9 / OPTICS EXPRESS 9686

(a) (b) (c) (d) (e) (f) Fig. 2. Example of measuring a 3-D surface. (a) Photograph of the object; (b) I1 (2π /3); (c) I2 (0); (d) I3 (2π /3); (e) Wrapped phase map; (f) Unwrapped phase map. image switching mode. It should be noted that the 3-D shape is smoothed by a 5 5 Gaussian filter to reduce the most significant random noise. To verify the accuracy of the measurement system, we measured a trapezoidal shape object with a height of 6.35 mm. Figure 3 shows the measurement result. The measured height, depth from the top surface to the bottom surface, is 6.54 mm. The error is approximately 0.19 mm (or 3.0%). It should be noted that the calibration technique [9] used in this research is a linear approximation. This technique is essentially to measure a flat reference plane, find the phase difference point by point between the measured object phase the and the reference phase, and approximate the depth (z) by scaling the phase. The scaling factor is determined by measuring a known step height object. Because this is an approximation, the accuracy is not very high [10]. We cannot implement a high-accuracy structured light system calibration technique such as the one introduced in Reference [10]. This is because the existing techniques require the projector be in focus, which is not the case for our system. We are exploring a new method to accurately calibrate a defocused projector, and if successful, it will significantly improve the measurement accuracy. th 250 row cross section 2 z (mm) 0-2 -4-6 10 (a) (b) 20 x (mm) 30 (c) Fig. 3. Measurement results of a known height object. (a) Photograph of the object; (b) 3-D plot of the measured result; (c) Plot of one cross section. To investigate the maximum speed the system can reach, we tried a fringe acquisition speed of 2,000 fps. Because a three-step phase-shifting algorithm is used, the 3-D shape measurement speed is actually 667 fps. In this measurement, the camera exposure time is set to 497 μ s. Because the 3-D shape measurement speed is so fast, it can actually be used to measure the vibration of a cantilever beam. Figure 5 (Media 1) shows some frames of a sequence of 3-D data. Due to the camera memory limitation, the image resolution is reduced to 480 480 to capture a longer sequence of data. To visualize the motion process of vibration, a multimedia video is submitted. The video is played at 30 fps, which is more than 20 times slower than the actually motion. It clearly shows the geometry shape variations over time when the beam is vibrating. (C) 2010 OSA 26 April 2010 / Vol. 18, No. 9 / OPTICS EXPRESS 9687

Fig. 4. 3-D plot of the measurement. (a) (b) (c) (d) (e) (f) Fig. 5. Measurement results of a vibrating cantilever beam. The color of the image indicates depth, z, information (Media 1). The same set of data is then visualized in 3-D plot. Figure 6 shows the 3-D plot of the data shown in Fig. 5(a). Another multimedia file, Fig. 6 (Media 2), submitted along with this paper shows the 3-D plot video of the vibrating beam. This experiment clearly demonstrated that at 667 fps, it is possible to measure cantilever beam vibration by using a phase-shifting method. However, the results also indicate some stripes caused by the motion, which is primarily due to the fact that the vibration speed is faster than the camera can capture. But overall, the 3-D shape is well captured. 4. Summary This paper has presented a superfast 3-D shape measurement technique by integrating our recently proposed flexible 3-D shape measurement technique into the DLP Discovery technology. We have successfully reached an unprecedented 667 Hz 3-D shape measurement speed, albeit we have not achieved the maximum frame rate, which should be over 10,000 Hz because of the light intensity of the projection system. Because intrinsically, a DLP technology can switch binary images at MHz, it is potentially feasible to achieve MHz 3-D shape measurement rate by adapting this proposed 3-D shape measurement technology. Even though the speed of this proposed system could reach an unprecedentedly high level, it also presents new challenges that need to be addressed to overcome the associated limitations. Comparing a conventional fringe generation approach where a focused projector is used, the (C) 2010 OSA 26 April 2010 / Vol. 18, No. 9 / OPTICS EXPRESS 9688

Fig. 6. Measurement results of a vibrating cantilever beam and plotted in 3-D (Media 2). proposed technique has the following two main limitations: (1) accuracy is lower. This is because there is no existing technique to calibrate a defocused projector. The linear approximation cannot reach high accuracy if the measurement range is large; and (2) the measurement range is smaller. Unlike a conventional approach where the fringe patterns are always sinusoidal, the fringe patterns in this proposed system are not sinusoidal when the projector is close to be focused. The nonsinsuiodal fringe pattern will introduce additional measurement error. To over these limitations, we are developing new calibration technique for defocused projectors, and are exploring certain means to circumvent the problems induced by nonsinusoidal waveform when the projector is close to be focused. (C) 2010 OSA 26 April 2010 / Vol. 18, No. 9 / OPTICS EXPRESS 9689