Munich Germany 11-13 September 2007 TUTORIAL on the Industrialization of MEMS Date: Monday, September 10 th, 2007 Venue: Organizer: TU München, Main Campus, Arcisstrasse 21, 80333 München Werner Weber, Infineon Technologies, Munich, Germany Micro-Electro-Mechanical Systems (MEMS) have been a research focus in academia and industry since many years. A few years ago a disillusionment occurred, caused by the difficulty in creating profitable businesses. As a consequence many industrial firms backed out of the field. More recently, however, several examples of successful industrializations of MEMS appeared and carried major encouragement into the research community. This shortcourse addresses some of those successful examples and elaborates on the methods for successful exploitation of MEMS developments. The first presentation by Werner Weber will introduce the field and give the general framework. The second presentation by Lüder Elbrecht talks about the Bulk Acoustic Wave devices for filters and resonators which is the story of a MEMS device made successful by the modern communication systems. The third presentation by Jiri Marek will talk about acceleration and gyro sensors which are used in most modern automobiles. Then Trond Westgaard will talk about the Tire Pressure Monitoring Sensor which became successful on the markets only recently. The fifth presentation by Michele Palmieri will depict the fluidic interaction with MEMS devices and span from inkjet printer heads to medical/bio applications. The last presentation is devoted to the famous Digital Light Projection device and will be presented by Mike Douglass.
Agenda: Time Topic Speaker 10:00 Introduction and Overview 10:30 Bulk Acoustic Wave Devices Werner Weber, Infineon Technologies, Munich, Germany Lüder Elbrecht, Infineon Technologies, Munich, Germany 11:15 Coffee Break 11:45 Tire Pressure Monitoring Systems Trond Westgaard, Infineon Technologies SensoNor, Horten, Norway 12:30 Lunch 14:00 Acceleration and Gyro Sensors for Automotive Applications Jiri Marek, U.-M. Gómez, Bosch GmbH, Reutlingen, Germany 14:45 Coffee Break 15:15 From inkjet printer heads to medical/bio applications Michele Palmieri, ST, Agrate, Italy 16:00 Development and Commercialization of DLP Technology Mike Douglass, TI, Plano, Tx, USA 16:45 Panel on the MEMS innovation process in the industry and possible future developments 18:00 Adjourn
Abstracts: Introduction and Overview Werner Weber, Infineon Technologies, Munich, Germany Micro-Electro-Mechanical Systems (MEMS) have been a research focus in academia and industry since many years. Recently several examples of successful industrializations of MEMS appeared and carried major encouragement into the research community. This presentation plans to give a short overview both on the technical concepts used today and provide information about important technical and economic trends in this field. Besides the topics discussed in this workshop also other important MEMS architectures such as Read/Write heads, and image sensors will be introduced. Bulk Acoustic Wave Devices Lüder Elbrecht, Infineon Technologies, Munich, Germany Although the basic ideas of the Bulk Acoustic Wave (BAW) device for radio frequency applications were formulated more than 50 years ago, the first highvolume commercialization of this technology was successful only at the beginning of this century. In this presentation, we review the enablers and inhibitors for the industrialization of these high-q vibrating MEMS devices. Tire Pressure Monitoring Systems Trond Westgaard, Infineon Technologies SensoNor, Horten, Norway MEMS based TPMS (Tire pressure monitoring systems) wheel modules provide direct and exact information on pressure and temperature from the tire to the vehicle s electronic systems. This service is provided over a wide temperature range and in the extreme mechanical conditions present in a tire, where static loads can exceed 2000 g. Direct wiring from the vehicle to the wheel assembly is impractical here. As a consequence data from the TPMS module have to be communicated through built-in RF functionality, which in turn demands minimal energy consumption of the electronic components. The presentation will address the features of MEMS-based TPMS modules that satisfy the automotive requirements of robustness and minimized energy consumption.
Acceleration and Gyro Sensors for Automotive Applications Jiri Marek, U.-M. Gómez, Bosch GmbH, Reutlingen, Germany Bosch has been a supplier for MEMS automotive sensors for more than a decade. After starting in the early 90s with some ground-lying basic technology development (the Bosch process for DRIE, release etch technology, and others), Bosch introduced pressure sensors, air mass flow sensors, accelerometers, and gyroscopes into the automotive industry. These MEMS products have become enablers for many advanced automotive systems that make cars safe, clean, and economical: advanced fuel injection systems for engine management, passive and active safety systems, climate control systems, navigation, and others. This talk reviews the key role of MEMS technology products specifically acceleration and gyro sensors for the progress of automotive electronics and gives an outlook for their use in a world of applications in the consumer electronics industry. From inkjet printer heads to medical/bio applications Michele Palmieri, ST, Agrate, Italy Since its birth in the late 70s early 80s the InkJet technology in its various forms and embodiments has been one of the most successful innovation story, disrupting established markets and enabling new applications and businesses that have become so pervasive in our everyday life. Undoubtedly a key element of success has been the ability of design and industrialize complex print-heads in a large manufacturing scale, at the heart of the head there is chip, whose ability of combining electronics with fluidics at the microscale, makes it one of the most pervasive MEMS device in the industry. These unique feature of combining in a highly controllable way electrical functions with fluidic, thermal and mechanical, has proven to be a solid ground on which many other applications may strive. Optical switching, liquid spray, drug delivery, lab-on-chip for biological application and molecular diagnostics are examples of this MEMS family potential. In the last decade ST has become a world leader in the microfluidics MEMS and is now pursuing new application developments in the medical field. By the introduction of In-Check TM platform ST in entering in the fast growing molecular diagnostics field, enabling an unprecedented level of integration of DNA manipulation, PCR and Microarray technologies. In this case a new set of challenges is being faced, namely the integration and interaction of the chip micro-system with biological molecules and functionalities. The speech will cover challenges and opportunities of microfluidics MEMS in this new sectors.
Development and Commercialization of DLP Technology Mike Douglass, TI, Plano, Tx, USA The Digital Micromirror Device (DMD) developed by Texas Instruments has made tremendous progress in both performance and reliability since it was first invented in 1987. From the first working concept of a bistable mirror, the DMD is now providing high-brightness, high-contrast, and high-reliability in over 10,000,000 projectors and televisions using DLP technology. In recent years, the DMD has achieved the status of being a commercially successful MEMS device. The knowledge we gained through our characterization and testing helped us achieve this success. The performance of our production DMD has achieved, and in some cases exceeded, our reliability and performance goals. This presentation will discuss the metrology developed for the DMD, accelerated stress testing techniques, environmental testing, unique DMD life tests, packaging, modeling, status of DLP Products as a business and future trends.