Advanced semiconductor lasers

Similar documents
Introduction Fundamentals of laser Types of lasers Semiconductor lasers

Review of Semiconductor Physics

Optodevice Data Book ODE I. Rev.9 Mar Opnext Japan, Inc.

Surface-Emitting Single-Mode Quantum Cascade Lasers

Semiconductor Optical Communication Components and Devices Lecture 18: Introduction to Diode Lasers - I

VERTICAL CAVITY SURFACE EMITTING LASER

Basic concepts. Optical Sources (b) Optical Sources (a) Requirements for light sources (b) Requirements for light sources (a)

Optoelectronics ELEC-E3210

High power and single frequency quantum. cascade lasers for gas sensing. Stéphane Blaser

Optical MEMS in Compound Semiconductors Advanced Engineering Materials, Cal Poly, SLO November 16, 2007

Lecture 6 Fiber Optical Communication Lecture 6, Slide 1

Design of InGaAs/InP 1.55μm vertical cavity surface emitting lasers (VCSEL)

Luminous Equivalent of Radiation

MBE Growth of Terahertz Quantum Cascade Lasers Harvey Beere

Introduction to Optoelectronic Devices

Continuous wave operation of quantum cascade lasers above room temperature

White Paper Laser Sources For Optical Transceivers. Giacomo Losio ProLabs Head of Technology

Vertical External Cavity Surface Emitting Laser

Examination Optoelectronic Communication Technology. April 11, Name: Student ID number: OCT1 1: OCT 2: OCT 3: OCT 4: Total: Grade:

Ph 77 ADVANCED PHYSICS LABORATORY ATOMIC AND OPTICAL PHYSICS

Novel Integrable Semiconductor Laser Diodes

InP-based Waveguide Photodetector with Integrated Photon Multiplication

Index. BaF 2 crystal 41 biochemical sensor 7, 316, ,

Chapter 1 Introduction

Figure 1. Schematic diagram of a Fabry-Perot laser.

Semiconductor Lasers Semiconductors were originally pumped by lasers or e-beams First diode types developed in 1962: Create a pn junction in

nd IEEE International Semiconductor Laser Conference (ISLC 2010) Kyoto, Japan September IEEE Catalog Number: ISBN:

Optoelectronics EE/OPE 451, OPT 444 Fall 2009 Section 1: T/Th 9:30-10:55 PM

VCSELs With Enhanced Single-Mode Power and Stabilized Polarization for Oxygen Sensing

64 Channel Flip-Chip Mounted Selectively Oxidized GaAs VCSEL Array

rd IEEE International Semiconductor Laser Conference (ISLC 2012) San Diego, California, USA 7 10 October IEEE Catalog Number: ISBN:

Long wavelength electrically pumped GaSb-based Buried Tunnel Junction VCSELs

Robert G. Hunsperger. Integrated Optics. Theory and Technology. Sixth Edition. 4ü Spri rineer g<

Physics of Waveguide Photodetectors with Integrated Amplification

Cavity QED with quantum dots in semiconductor microcavities

Implant Confined 1850nm VCSELs

Improved Output Performance of High-Power VCSELs

Laser Diode. Photonic Network By Dr. M H Zaidi

Vertical Cavity Surface Emitting Laser (VCSEL) Technology

Improved Output Performance of High-Power VCSELs

Semiconductor Lasers Semiconductors were originally pumped by lasers or e-beams First diode types developed in 1962: Create a pn junction in

InGaAsP photonic band gap crystal membrane microresonators*

Quantum-Well Semiconductor Saturable Absorber Mirror

High brightness semiconductor lasers M.L. Osowski, W. Hu, R.M. Lammert, T. Liu, Y. Ma, S.W. Oh, C. Panja, P.T. Rudy, T. Stakelon and J.E.

SUPPLEMENTARY INFORMATION

Lecture 4 INTEGRATED PHOTONICS

Functional Materials. Optoelectronic devices

Nano electro-mechanical optoelectronic tunable VCSEL

Photonic Crystal Slot Waveguide Spectrometer for Detection of Methane

Optical Fibers p. 1 Basic Concepts p. 1 Step-Index Fibers p. 2 Graded-Index Fibers p. 4 Design and Fabrication p. 6 Silica Fibers p.

High-frequency tuning of high-powered DFB MOPA system with diffraction limited power up to 1.5W

Distributed-feedback quantum cascade laser emitting at 3.2 μm

InP-based Waveguide Photodetector with Integrated Photon Multiplication

Elements of Optical Networking

Tapered Amplifiers. For Amplification of Seed Sources or for External Cavity Laser Setups. 750 nm to 1070 nm COHERENT.COM DILAS.

A continuous-wave Raman silicon laser

Phase-locked array of quantum cascade lasers with an

Fabrication of High-Speed Resonant Cavity Enhanced Schottky Photodiodes

Broad area, high power CW operated InGaN laser diodes

Mode-locking and frequency beating in. compact semiconductor lasers. Michael J. Strain

Investigation of the tapered waveguide structures for terahertz quantum cascade lasers

ECE 340 Lecture 29 : LEDs and Lasers Class Outline:

Wavelength switching using multicavity semiconductor laser diodes

Novel Dual-mode locking semiconductor laser for millimetre-wave generation

Bistability in Bipolar Cascade VCSELs

Key Questions. What is an LED and how does it work? How does a laser work? How does a semiconductor laser work? ECE 340 Lecture 29 : LEDs and Lasers


A new picosecond Laser pulse generation method.

Polarization Control of VCSELs

Vertical-cavity surface-emitting lasers (VCSELs)

High-Power Semiconductor Laser Amplifier for Free-Space Communication Systems

Recent Progress of High Power Semiconductor Lasers for EDFA Pumping

GROUP III-ARSENIDE-NITRIDE LONG WAVELENGTH LASER DIODES

RECENTLY, using near-field scanning optical

Distribution Unlimited

Tutorial. Various Types of Laser Diodes. Low-Power Laser Diodes

Spatial Investigation of Transverse Mode Turn-On Dynamics in VCSELs

Lithographic Vertical-cavity Surface-emitting Lasers

Fabrication of antenna integrated UTC-PDs as THz sources

Optical Amplifiers (Chapter 6)

S Optical Networks Course Lecture 2: Essential Building Blocks

Safa O. Kasap Electrical Engineering Department, University of Saskatchewan, Saskatoon, S7N 5A9, Canada

DFB Quantum Cascade Laser Arrays

R. J. Jones Optical Sciences OPTI 511L Fall 2017

Photonic Crystals for Confining, Guiding, and Emitting Light

Copyright 2006 Crosslight Software Inc. Analysis of Resonant-Cavity Light-Emitting Diodes

About Omics Group conferences

Coupling terahertz radiation between sub-wavelength metal-metal waveguides and free space using monolithically integrated horn antennae

Vertical-Cavity Surface-Emitting Laser Technology

3550 Aberdeen Ave SE, Kirtland AFB, NM 87117, USA ABSTRACT 1. INTRODUCTION

NEW YORK CITY COLLEGE of TECHNOLOGY

Session 2: Silicon and Carbon Photonics (11:00 11:30, Huxley LT311)

MAHALAKSHMI ENGINEERING COLLEGE TIRUCHIRAPALLI

Integrated High Speed VCSELs for Bi-Directional Optical Interconnects

Lecture 9 External Modulators and Detectors

Chapter 4 O t p ica c l a So S u o r u ce c s

VCSELs and Optical Interconnects

The quantum cascade laser: a unifying concept for generating electromagnetic radiation from 3 to 300µm wavelength

THE PAST rapid emergence of optical microcavity devices,

Visible Superluminescent LEDs for Smart Lighting

Transcription:

Advanced semiconductor lasers Quantum cascade lasers Single mode lasers DFBs, VCSELs, etc.

Quantum cascade laser

Reminder: Semiconductor laser diodes Conventional semiconductor laser CB diode laser: material VB InSb

Intersubband transitions CB intersubband transitions E g VB AlGaAs GaAs AlGaAs Device applications: quantum cascade laser (QCL) and quantum well infrared photodetector (QWIP)

Quantum Cascade Laser CB V= Four-level laser E n n 2 2 2 * 2 2m L L = layer thickness layer thickness unipolar semiconductor laser using intersubband transitions

Schematic of charge transport in QCLs CB CB ph active region injector CB ph active region injector ph active region

Quantum cascade lasers: mid infrared InGaAs/InAlAs lattice matched to InP light sources 3 I top 3 e I bott 2 1 e I top 1 2 injector active region injector I bott active region Band engineering wavelength agility: InP range 5 20 m

QCL: compact, rugged light source Grown by Molecular Beam Epitaxy InGaAs/InAlAs lattice matched to InP

Semiconductor growth: Molecular Beam Epitaxy Prof. Manfra s GaN and GaAs MBE machines at Purdue Device fabrication at the Birck Nanotechnology Center

What makes the QC laser special? Wavelength agility: layer thicknesses determine emission wavelength High optical power: cascading re uses electrons Fabry Perot, single mode (DFB), or multi wavelength (dual wavelength, ultrabroadband) Temperature tunable Ultra fast carrier dynamics: no relaxation oscillations Active research field in semiconductor physics

What makes the QC laser special? Wavelength agility: layer thicknesses determine emission wavelength High optical power: cascading re uses electrons Fabry Perot, single mode (DFB), or multi wavelength (dual wavelength, ultrabroadband) Temperature tunable Ultra fast carrier dynamics: no relaxation oscillations Active research field in semiconductor physics

What makes the QC laser special? Wavelength agility: layer thicknesses determine emission wavelength High optical power: cascading re uses electrons Fabry Perot, single mode (DFB), or multi wavelength (dual wavelength, ultrabroadband) Temperature tunable Ultra fast carrier dynamics: no relaxation oscillations Active research field in semiconductor physics

QCL operating modes Fabry Perot mode Single mode DFB Dual wavelength 8.0 8.2 Wavelength ( m) 4.96 5.00 5.04 Nonlinear light generation: second harmonic 200 100 Intensity (arb. units) no grating 4.92 4.96 5.00 5.04 7.36 7.40 7.44 7.48 Wavelength ( m) Power (arb. units, log. scale) 10 1 0.1 Ultra broadband a 2, 3, 4 A 5... 13 A Intensity (a.u.) laser 150 100 50 0 8.6 8.8 9.0 9.2 9.4 9.6 pump wavelength ( m) Intensity (a.u.) SH 50 0 4.3 4.4 4.5 4.6 4.7 4.8 second-harmonic ( m) 5 6 7 8 9 Wavelength ( m)

What makes the QC laser special? Wavelength agility: layer thicknesses determine emission wavelength High optical power: cascading re uses electrons Fabry Perot, single mode (DFB), or multiwavelength (dual wavelength, ultrabroadband) Temperature tunable Ultra fast carrier dynamics: no relaxation oscillations Active research field in semiconductor physics

Single mode and tunable QC DFB lasers CO 2 H 2 O CO 2 4 5 6 7 8 10 12 14 18 H 2 O 0 100 T (%) CO NO CH 4 N 2 O CO 2 4.59 4.65 5.35 5.4 8.5 8.6 9.5 9.6 9.95 10.05 16.2 16.22 Wavelength ( m) NH 3 0 100 200 300 Temperature (K)

QCLs are ideal for sensing applications In situ trace gas sensing: NO, CO, NH 3, CH 4, H 2 O (isotopes), and more complex molecules ppm to ppb levels Chemical and biological sensing (air quality, chemical and biological weapons, breath monitoring) Remote sensing: LIDAR Non invasive medical diagnosis Free space optical telecommunications Pranalytica s optical nose http://www.pranalytica.com/core technologies/gas sensors.php

What makes the QC laser special? Wavelength agility: layer thicknesses determine emission wavelength High optical power: cascading re uses electrons Fabry Perot, single mode (DFB), or multiwavelength (dual wavelength, ultrabroadband) Temperature tunable Ultra fast carrier dynamics: no relaxation oscillations Active research field in semiconductor physics

Lasers Pump source Gain medium Optical resonator Four-level laser Reminder: lasers Population inversion Stimulated emission

Gain medium 3 I top 3 e I bott 2 1 e I top I bott injector active region 1 2 injector J th w g g active region m 2 3 1 32 2 4 ez32 0n ef L p 1 2 32

QCL research directions Design of high gain active region IB Understanding mid infrared waveguide losses e 3 4 IB injector 2 1 e Growth of high purity materials active injector Heat extraction from active region Ti/Au top contact ninp, 8 10 18 cm -3 ninp, 10 17 cm -3 InP substrate electroplated Au n InGaAs, 3-5 10 16 cm -3 Waveguide core: Active regions and injectors 30-50 stages n InGaAs, 3-5 10 16 cm -3 In solder waveguide core ninp, 1-2 10 17 cm -3, substrate

Room temperature, continuouswave operation MBE or MOCVD InP overgrowth Metal electroplating Plated gold Laser core cw output power (mw) 40 30 20 10 200 K 220 K 240 K 260 K cw mode 280 K 300 K 320 K Voltage (V) 14 12 10 8 6 4 2 300 K pulsed mode 220 K 240 K 260 K 280 K 300 K 320 K 450 400 350 300 250 200 150 100 50 Peak output power (mw) 0 1.0 1.5 2.0 2.5 3.0 3.5 4.0 0 0 0 2 4 6 8 current density (ka/cm 2 ) current density (ka/cm 2 ) J. Chen, et.al., J. Vac. Sci. Tech. 25 (2007), 913.

Highlights of recent results Room temperature high power cw operation (M. Razeghi et al.)

Highlights of recent results Terahertz QCLs Highest operating temperature ~ 175 K in pulsed regime Narrow tunability Q. Hu (MIT), F. Capasso (Harvard), J. Faist (ETH), A. Tredicucci (Pisa)

Other fun stuff: Monolithic integration of QCLs with resonant optical nonlinearities energy 5 I 4 4 3 g 3 2 1 z 2 1 active region 5 I. II. (2) ~ 10 5 pm/v Difference frequency generation in QCLs cladding ω q 3 Laser1 section Side contact layer Laser 2 section ω p 2 P (2) * ( p q EpEq substrate 1 M. Belkin, F. Capasso, A. Belyanin et al. Nature photonics 1, 288 (2007). M. Belkin, F. Xie et al., 2008

Single mode lasers

Laser modes: longitudinal and transverse 4.0 QCL 2743 DR1-3 ridge B, 77K cw Longitudinal modes 3.5 3.0 Light intensity [a.u.] 2.5 2.0 1.5 1.0 0.5 400 ma 300 ma 200mA 150 ma 0 1230 1240 1250 1260 1270 1280 Transverse modes Wavenumber [cm -1 ]

Single Mode Laser Single mode laser is mostly based on the index guided structure that supports only the fundamental transverse mode and the fundamental longitudinal mode. In order to make single mode laser we have four options: 1 Reducing the length of the cavity to the point where the frequency separation of the adjacent modes is larger than the laser transition line width. This is hard to handle for fabrication and results in low output power. 2 Vertical Cavity Surface Emitting laser (VCSEL) 3 Structures with built in frequency selective grating

Single Frequency Semiconductor Lasers: Distributed Bragg reflector (DBR) laser Frequency selective dielectric mirrors a cleaved surfaces. Only allow a single mode to exist Periodic corrugated structure that interfere constructively when the wavelength corresponds to twice the corrugation periodicity (Bragg wavelengths) Distributed Bragg reflector A B q( B /2n) = (a) Active layer Corrugated dielectric structure (b) (a) Distributed Bragg reflection (DBR) laser principle. (b) Partially reflected waves at the corrugations can only constitute a reflected wave when the wavelength satisfies the Bragg condition. Reflected waves A and B interfere constructive when q( B /2n) =. 1999 S.O. Kasap, Optoelectronics (Prentice Hall) q=integer, B = Bragg wavelength of the mirror output

Single Frequency Semiconductor Lasers: Distributed Feedback (DFB) laser The corrugated layer, called the guiding layer, is now next to the active layer In the DFB structure traveling wave are reflected partially and periodically as they propagate. 2 2 B m 1/ 2 B B Corrugated grating n q Ideal lasing emission Optical power 2nL Guiding layer Active layer 0.1 nm (a) (b) B (c) (nm) (a) Distributed feedback (DFB) laser structure. (b) Ideal lasing emission output. (c) Typical output spectrum from a DFB laser. 1999 S.O. Kasap, Optoelectronics (Prentice Hall)

DFB (Distributed Feed Back) Lasers In DFB lasers, the optical resonator structure is due to the incorporation of Bragg grating or periodic variations of the refractive index into multilayer structure along the length of the diode.

Thermal Properties of DFB Lasers Light output and slope efficiency decrease at high temperature Agrawal & Dutta 1986 Wavelength shifts with temperature The good: Lasers can be temperature tuned for WDM systems The bad: lasers must be temperature controlled, a problem for integration

Vertical cavity surface emitting lasers (VCSELs)

VCSEL

Edge emitting vs. surface emitting laser Ridge waveguide Laser Vertical Cavity Surface-Emitting Laser

/4n 2 /4n 1 Surface emission Contact Dielectric mirror Active layer Dielectric mirror Substrate Contact A simplified schematic illustration of a vertical cavity surface emitting laser (VCSEL). 1999 S.O. Kasap, Optoelectronics (Prentice Hall) Optical cavity axis along the direction of current flow rather than perpendicular to current flow Radiation emerges from the surface of the cavity rather than from its edge Reflectors at the edges of the cavity are dielectric mirrors 20-30 layers for mirror, MQW active region

Edge-emitting laser VCSEL Large distance between cavity modes: single-mode laser Circular beam shape Low threshold and power consumption 2D laser arrays Wafer-scale testing Ultrafast modulation

For long wavelength laser based on InGaAsP/InP: index contrast is too low, need too many layers, the device is too resistive as a result Current spreading, many transverse modes -> need confinement for current and for the EM field

Oxidized aperture VCSEL

Other advanced optical cavities Photonic crystal lasers Microlasers: microdisk, micro pillar, etc. semiconductor heterostructures (n=3.3) 5 µm (McCall et al., 1992) Phys. Rev. Lett. 98, 043906 (2007)

Light confinement in optical microresonators n=1.47 Maxwell s Eq. n=1 J. Wiersig, PRA 2003 MH and K. Richter, PRE 2002

QCL Microlaser Bow-tie (Gmachl et al.,1998) Quantum Cascade Laser (Faist, Capasso et al., 1994; Sirtori et al., 1998) resonator geometry mode characteristics active (lasing) material amplification small amplification devices defined direction changes upon coupling lasing varnishes (thresholdless)

Photonic Crystals: Opportunities Photonic Crystals complex dielectric environment that controls the flow of radiation designer vacuum for the emission and absorption of radiation Passive devices dielectric mirrors for antennas micro resonators and waveguides Active devices low threshold nonlinear devices microlasers and amplifiers efficient thermal sources of light Integrated optics controlled miniaturisation pulse sculpturing

Defect-Mode Photonic Crystal Microlaser Photonic Crystal Cavity formed by a point defect O. Painter et. al., Science (1999)

Photonic Crystal Applications:PBG Laser The smallest defect mode laser is shown ( Axel Scherer, California Institute of Technology). Periodic air holes in high index material forms a 2D photonic crystal. The center air hole is removed and forms a resonant cavity. Light is confined in the cavity. Spontaneous emission in the band gap is prohibitted, but for the defect mode is enhanced. This produces a microlaser with very low threshold. PBG Defect Laser