PXIe-6570 DEVICE SPECIFICATIONS. 32-Channel Digital Pattern Instrument

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DEVICE SPECIFICATIONS PXIe-6570 32-Channel Digital Pattern Instrument This document lists the specifications for the PXIe-6570. When using the PXIe-6570 in the Semiconductor Test System, refer to the Semiconductor Test System Specifications. Specifications are subject to change without notice. Refer to ni.com/manuals for the most recent specifications. NI defines the capabilities and performance of its Test & Measurement instruments as Warranted specifications, Typical specifications, and Characteristics. Warranted specifications describe the warranted, traceable product performance, including the effects of temperature and uncertainty unless otherwise noted. Typical specifications are unwarranted values that are representative of a majority of units, including the effects of temperature and uncertainty unless otherwise noted. Characteristics are unwarranted values that are relevant to the use of the product and convey the expected performance of the product. Specifications in this document are Characteristics unless otherwise noted. Specifications are valid under the following conditions unless otherwise noted: 0 C to 45 C operating temperature. Accuracy specifications are valid within ±5 ºC of the last self-calibration temperature. The PXIe-6570 is within the 1 year recommended calibration interval. The DUT Ground Sense (DGS) is the same potential as the Ground (GND) pins. Note The DGS feature is only available on PXIe-6570 module revisions 158234C-xxL or later. Chassis fans are set to the highest setting if the PXI Express chassis supports multiple fans speeds. Allow a 30 minute warm-up time. Caution Do not operate the PXIe-6570 in a manner not specified in the user documentation. Product misuse can result in a hazard. You can compromise the safety protection built into the product if the product is damaged in any way. If the product is damaged, return it to NI for repair.

Contents Note When the pin electronics on the PXIe-6570 are in the disconnect state, some I/O protection and sensing circuitry remain connected. Do not subject the PXIe-6570 to voltages beyond the supported measurement range. General... 3 Timing... 3 Vector Timing...3 Clock Generation... 3 Drive and Compare Formats... 4 Pin Data States... 4 Edge Timing...5 Driver, Comparator, Load... 6 Driver... 6 Comparator...6 Active Load...6 PPMU...7 PPMU Force Voltage...7 PPMU Measure Voltage...7 PPMU Force Current... 7 PPMU Measure Current...8 PPMU Programmable Aperture Time...9 Pattern Control... 10 Opcodes...10 Pipeline Latencies... 11 Source and Capture... 12 Frequency Measurements... 12 Calculating Frequency Counter Error... 12 Calibration Interval... 13 Physical Characteristics... 14 Power Requirements... 14 Environment...14 Operating Environment...14 Storage Environment...15 Shock and Vibration...15 Safety Voltages...15 Compliance and Certifications...15 Safety... 15 Electromagnetic Compatibility... 16 CE Compliance... 16 Online Product Certification... 16 Environmental Management... 16 2 ni.com PXIe-6570 Specifications

General Channel count 32 Multi-site resources per instrument 8 System channel count 1 256 Large Vector Memory (LVM) History RAM (HRAM) Maximum allowable offset 2 (DGS minus GND) Supported measurement range 128M vectors 1,023 cycles ±300 mv -2 V to 6 V Timing Vector Timing Maximum vector rate Vector period range Vector period resolution Timing control Vector period Edge timing Drive formats Clock Generation 100 MHz 10 ns to 40 µs (100 MHz to 25 khz) 38 fs Vector-by-vector on the fly Master clock source PXIe_CLK100 3 Clock domains Per channel, vector-by-vector on the fly Per channel, vector-by-vector on the fly One (independent clock domains on a single instrument not supported) 1 The system channel count is the maximum number of channels available when using multiple PXIe-6570 instruments in a single chassis as a digital subsystem. Some functionality described in this document requires that a PXIe-6674T synchronization module be used in conjunction with each digital subsystem. 2 If the total voltage sourced or driven on any pin relative to GND exceeds the supported measurement range, instrument performance may be degraded. 3 Sourced from chassis 100 MHz backplane reference clock, external 10 MHz reference, or PXIe-6674T. PXIe-6570 Specifications National Instruments 3

Drive and Compare Formats Drive formats 100 MHz maximum vector rate Non-Return (NR), Return to Low (RL), Return to High (RH) 50 MHz maximum vector rate Surround by Complement (SBC) Compare formats Edge strobe Figure 1. Drive Formats Vector Cycle Pin State 0 1 2 3 4 5 1 1 0 X 0 1 Non-Return (NR) Return to Low (RL) Return to High (RH) Surround by Complement (SBC) Drive On Drive Data Drive Return Drive Data Drive Return Drive On Drive Data Drive Return Drive Off Drive On Drive Data Drive Return Drive On Drive Data Drive Return Indeterminate State Pin Data States Pin States - Repeat previous cycle. Do not use a dash (-) for the pin state on the first vector of a pattern file unless the file is used only as a target of a jump or call operation. 0 Drive zero. 1 Drive one. L Compare low. H Compare high. X Do not drive; mask compare. 4 ni.com PXIe-6570 Specifications

V Compare high or low, not midband; store results from capture functionality if configured. D Drive data from source functionality if configured. M Compare midband, not high or low. Note Termination mode settings affect the termination applied to all non-driving pin states. Non-drive states include L, H, M, V, X and potentially -. Refer to the Programmable input termination mode specification for more information. Edge Timing Edge Types Drive edges Compare edge Number of time sets 4 31 Edge Generation Timing Edge placement range Minimum Maximum Minimum required edge separation Between any driven data change Between any Drive On and Drive Off edges Between Compare Strobes Edge placement resolution Edge placement accuracy 5 Drive Compare Overall timing accuracy 5 TDR deskew adjustment resolution 4; drive on, drive data, drive return, drive off 1; strobe Start of vector period (0 ns) 5 vector periods or 40 µs, whichever is smaller 5 ns 5 ns 5 ns 39.0625 ps ±500 ps, warranted ±500 ps, warranted ±1.5 ns, warranted 39.0625 ps 4 31 time sets can be configured. One additional time set, represented by a -, repeats the previous time set. 5 For specifications across multiple instruments in a Semiconductor Test System, refer to the Semiconductor Test System Specifications. PXIe-6570 Specifications National Instruments 5

Driver, Comparator, Load Driver Signal type Programmable levels Voltage levels Range (V IH, V IL, V TERM ) Minimum swing (V IH minus V IL ) Single-ended, referenced to the DGS pin when connected. Otherwise referenced to GND. V IH, V IL, V TERM -2 V to 6 V Resolution (V IH, V IL, V TERM ) 122 µv Accuracy (V IH, V IL, V TERM ) Maximum DC drive current Output impedance Rise/fall time, 20% to 80% Comparator Signal type Programmable levels Voltage levels Range (V OH, V OL ) 400 mv, into a 1 MΩ load ±15 mv, 1 MΩ load, warranted ±32 ma 50 Ω 1.2 ns, up to 5 V Single-ended, referenced to the DGS pin when connected. Otherwise referenced to GND. V OH, V OL -2 V to 6 V Resolution (V OH, V OL ) 122 µv Accuracy (V OH, V OL ) Programmable input termination modes Leakage current Active Load Programmable levels Commutating voltage (V COM ) Range ±25 mv, between -1.5 V to 5.8 V, warranted High Z, 50 Ω to V TERM, Active Load <15 na, in the High Z termination mode I OH, I OL -2 V to 6 V Resolution 122 µv 6 ni.com PXIe-6570 Specifications

Current levels Range Resolution Accuracy 1.5 ma to 24 ma 488 na 1 ma, 3 V over/under drive, typical PPMU PPMU Force Voltage Signal type Voltage levels Range Resolution Accuracy PPMU Measure Voltage Signal type Voltage levels Range Resolution Accuracy PPMU Force Current Single-ended, referenced to the DGS pin when connected. Otherwise referenced to GND. -2 V to 6 V 122 μv ±15 mv, 1 MΩ load, warranted Single-ended, referenced to the DGS pin when connected. Otherwise referenced to GND. -2 V to 6 V 228 μv ±5 mv, warranted Table 1. PPMU Force Current Accuracy Range Resolution Accuracy ±2 µa 60 pa ±1% of range for Zone 1 of Figure 2. on page 8, warranted ±32 µa 980 pa ±128 μa 3.9 na ±2 ma 60 na ±32 ma 980 na PXIe-6570 Specifications National Instruments 7

Figure 2. Warranted Current Accuracy Zone for PPMU Force Current 100 Percent of Current Range Forced (%) 75 50 25 0-25 -50-75 -100-2 Zone 1-1 0 1 1.25 2 3 4 5 6 Voltage (V) PPMU voltage clamps Range Resolution Accuracy PPMU Measure Current -2 V to 6 V 122 μv ±100 mv, typical Table 2. PPMU Measure Current Accuracy Range Resolution Accuracy ±2 μa 460 pa ±1% of range for Zone 1 of Figure 3. on page 9, warranted ±32 μa 7.3 na ±1.5% of range for Zone 2 of Figure 3. on page 9, warranted ±128 μa 30 na ±2 ma 460 na ±32 ma 7.3 μa 8 ni.com PXIe-6570 Specifications

Figure 3. Warranted Current Accuracy Zones for PPMU Measure Current 100 Percent of Current Range Measured (%) 75 50 25 0-25 -50-75 Zone 1 Zone 2-100 -1.75 1.25-2 -1 0 1 2 3 4 5 Voltage (V) 6 PPMU Programmable Aperture Time Aperture time Minimum 4 μs Maximum 65 ms Resolution 4 μs PXIe-6570 Specifications National Instruments 9

Figure 4. Voltage Measurement Noise for Given Aperture Times, Typical 200μ 190μ 180μ 170μ 160μ 150μ 140μ RMS Noise (V) 130μ 120μ 110μ 100μ 90μ 80μ 70μ 60μ 50μ 40μ 30μ 20μ 10μ 0 1μ 10μ 100μ 1m 10m 100m Aperture Time (s) Pattern Control Opcodes Refer to the following table for supported opcodes. Using matched and failed opcode parameters with multiple PXIe-6570 instruments requires the PXIe-6674T synchronization module. Other uses of flow-control opcodes with multiple PXIe-6570 instruments only require NI-TCLK synchronization. 10 ni.com PXIe-6570 Specifications

Category Supported Opcodes Flow Control repeat jump jump_if set_loop end_loop exit_loop exit_loop_if call return keep_alive match halt Sequencer Flags and Registers set_seqflag clear_seqflag write_reg Signal set_signal pulse_signal clear_signal Digital Source and Capture capture_start capture capture_stop source_start source Pipeline Latencies Minimum delay between source_start opcode and the first source opcode or subsequent source_start opcode Matched and failed condition pipeline latency 3 μs 80 cycles PXIe-6570 Specifications National Instruments 11

Source and Capture Digital Source 6 Operation modes Serial and parallel; broadcast and site-unique Source memory size 32 MB (256 Mbit) total Maximum waveforms 512 Digital Capture 6 Operation modes Serial and parallel; site-unique Capture memory size 1 million samples Maximum waveforms 512 Frequency Measurements Frequency counter measure frequency Range Accuracy 5 khz to 200 MHz, 2.5 ns minimum pulse width See Calculating Frequency Counter Error Calculating Frequency Counter Error Use the following equation to calculate the frequency counter error (ppm). 1 + 20 * 1, 000, 000 where MeasurementTime is the time, in seconds, over which the frequency counter measurement is configured to run UnknownClockPeriod is the time, in seconds, of the period of the signal being measured TB err is the error of the Clk100 timebase Refer to the following table for a few examples of common Clk100 timebase accuracies. 6 To learn how to calculate achievable data rates for Digital Source or Digital Capture, visit ni.com/ info and enter the info code DigitalSource or DigitalCapture to access the Calculating Digital Source Rate tutorial or the Calculating Digital Capture Rate tutorial. 12 ni.com PXIe-6570 Specifications

Table 3. TB err PXI Express Hardware Specification Revision 1.0 PXIe-1085 Chassis PXIe-6674T Override 100 µ (100 ppm) 25 µ (25 ppm) 80 n (80 ppb) Example 1: Calculating Error with a PXIe-1085 Chassis Calculate the error of performing a frequency measurement of a 10 MHz clock (100 ns period) with a 1 ms measurement time using the PXIe-Clk100 provided by the PXIe-1085 chassis as the timebase. Solution 25µ 1 25µ + 20 1 100 * 1, 000, 000 = 45 Example 2: Calculating Error when Overriding with the PXIe-6674T Calculate the error if you override the PXIe-Clk100 timebase with the PXIe-6674T and increase the measurement time to 10 ms. Solution 80 1 80 + 20 10 100 * 1, 000, 000 = 2 Calibration Interval Recommended calibration interval 1 year PXIe-6570 Specifications National Instruments 13

Physical Characteristics Clean the hardware with a soft, nonmetallic brush. Make sure that the hardware is completely dry and free from contaminants before returning it to service. PXIe slots 2 Dimensions 131 mm 42 mm 213 mm (5.16 in. 1.65 in. 8.39 in.) Weight 920 g (32.45 oz.) Power Requirements Caution The protection provided by the PXIe-6570 can be impaired if it is used in a manner not described in the user documentation. The PXIe-6570 draws current from a combination of the 3.3 V and 12 V power rails. The maximum current drawn from each of these rails can vary depending on the PXIe-6570 mode of operation. The total power consumption does not exceed the input power specification. Input power Current Draw 68 W 3.3 V 4.4 A 12 V 4.7 A Environment Maximum altitude Pollution Degree 2 2,000 m (800 mbar) (at 25 C ambient temperature) Indoor use only. Operating Environment Ambient temperature range Relative humidity range 0 C to 45 C (Tested in accordance with IEC 60068-2-1 and IEC 60068-2-2. Meets MIL-PRF-28800F Class 3 low temperature limit and MIL-PRF-28800F Class 4 high temperature limit.) 10% to 90%, noncondensing (Tested in accordance with IEC 60068-2-56.) 14 ni.com PXIe-6570 Specifications

Storage Environment Ambient temperature range Relative humidity range -40 C to 71 C (Tested in accordance with IEC 60068-2-1 and IEC 60068-2-2. Meets MIL-PRF-28800F Class 3 limits.) 5% to 95%, noncondensing (Tested in accordance with IEC 60068-2-56.) Shock and Vibration Operating shock Random vibration Operating Nonoperating 30 g peak, half-sine, 11 ms pulse (Tested in accordance with IEC 60068-2-27. Meets MIL-PRF-28800F Class 2 limits.) 5 Hz to 500 Hz, 0.3 g rms 5 Hz to 500 Hz, 2.4 g rms (Tested in accordance with IEC 60068-2-64. Nonoperating test profile exceeds the requirements of MIL-PRF-28800F, Class 3.) Safety Voltages Connect only voltages that are within these limits. Supported measurement range -2 V to 6 V Caution Do not connect the system to signals or use for measurements within Measurement Categories II, III, or IV. Compliance and Certifications Safety This product is designed to meet the requirements of the following electrical equipment safety standards for measurement, control, and laboratory use: IEC 61010-1, EN 61010-1 UL 61010-1, CSA 61010-1 Note For UL and other safety certifications, refer to the product label or the Online Product Certification section. PXIe-6570 Specifications National Instruments 15

Electromagnetic Compatibility This product meets the requirements of the following EMC standards for electrical equipment for measurement, control, and laboratory use: EN 61326-1 (IEC 61326-1): Class A emissions; Basic immunity EN 55011 (CISPR 11): Group 1, Class A emissions EN 55022 (CISPR 22): Class A emissions EN 55024 (CISPR 24): Immunity AS/NZS CISPR 11: Group 1, Class A emissions AS/NZS CISPR 22: Class A emissions FCC 47 CFR Part 15B: Class A emissions ICES-001: Class A emissions Note In the United States (per FCC 47 CFR), Class A equipment is intended for use in commercial, light-industrial, and heavy-industrial locations. In Europe, Canada, Australia, and New Zealand (per CISPR 11), Class A equipment is intended for use only in heavy-industrial locations. Note Group 1 equipment (per CISPR 11) is any industrial, scientific, or medical equipment that does not intentionally generate radio frequency energy for the treatment of material or inspection/analysis purposes. Note For EMC declarations, certifications, and additional information, refer to the Online Product Certification section. CE Compliance This product meets the essential requirements of applicable European Directives, as follows: 2014/35/EU; Low-Voltage Directive (safety) 2014/30/EU; Electromagnetic Compatibility Directive (EMC) Online Product Certification Refer to the product Declaration of Conformity (DoC) for additional regulatory compliance information. To obtain product certifications and the DoC for this product, visit ni.com/ certification, search by model number or product line, and click the appropriate link in the Certification column. Environmental Management NI is committed to designing and manufacturing products in an environmentally responsible manner. NI recognizes that eliminating certain hazardous substances from our products is beneficial to the environment and to NI customers. For additional environmental information, refer to the Minimize Our Environmental Impact web page at ni.com/environment. This page contains the environmental regulations and 16 ni.com PXIe-6570 Specifications

directives with which NI complies, as well as other environmental information not included in this document. Waste Electrical and Electronic Equipment (WEEE) EU Customers At the end of the product life cycle, all NI products must be disposed of according to local laws and regulations. For more information about how to recycle NI products in your region, visit ni.com/environment/weee. 电子信息产品污染控制管理办法 ( 中国 RoHS) 中国客户 National Instruments 符合中国电子信息产品中限制使用某些有害物质指令 (RoHS) 关于 National Instruments 中国 RoHS 合规性信息, 请登录 ni.com/environment/rohs_china (For information about China RoHS compliance, go to ni.com/environment/rohs_china.) PXIe-6570 Specifications National Instruments 17

Refer to the NI Trademarks and Logo Guidelines at ni.com/trademarks for information on NI trademarks. Other product and company names mentioned herein are trademarks or trade names of their respective companies. For patents covering NI products/technology, refer to the appropriate location: Help»Patents in your software, the patents.txt file on your media, or the National Instruments Patent Notice at ni.com/patents. You can find information about end-user license agreements (EULAs) and third-party legal notices in the readme file for your NI product. Refer to the Export Compliance Information at ni.com/ legal/export-compliance for the NI global trade compliance policy and how to obtain relevant HTS codes, ECCNs, and other import/export data. NI MAKES NO EXPRESS OR IMPLIED WARRANTIES AS TO THE ACCURACY OF THE INFORMATION CONTAINED HEREIN AND SHALL NOT BE LIABLE FOR ANY ERRORS. U.S. Government Customers: The data contained in this manual was developed at private expense and is subject to the applicable limited rights and restricted data rights as set forth in FAR 52.227-14, DFAR 252.227-7014, and DFAR 252.227-7015. 2015 2017 National Instruments. All rights reserved. 375726D-01 June 27, 2017