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L957970B TONiC encoder system Renishaw s TONiC series represents a new generation of supercompact encoders, designed for highlydynamic precision motion systems, bringing higher accuracy, speed and greater reliability to a wide variety of demanding industry sectors. The readhead is complemented by the latest evolution of RGSZ20 gold tape scale, REXM ultrahigh accuracy angle encoder and FASTRACK /RTLC scale system with bidirectional optical INTRAC reference marks, in addition to established RSLM stainless steel scale, RELM high accuracy low expansion, high stability scale and RESM rotary rings. For ultimate reliability and high dirt immunity, TONiC readheads incorporate thirdgeneration filtering optics, tuned for even lower noise (jitter), further enhanced by dynamic signal processing including Auto Gain Control and Auto Offset Control. The result is low subdivisional error (SDE) giving smoother velocity control for improved scanning performance and increased positional stability. TONiC readheads also feature a detachable analogue or digital interface in the form of a robust, convenient connector that can be located up to m from the readhead. The interface offers digital interpolation to nm resolution, with clocked outputs for optimised speed performance at all resolutions for industrystandard controllers. Compact readhead (5 x.5 x mm) Compatible with RGSZ20 gold tape scale, FASTRACK/RTLC scale system, RSLM, RELM, RESM, RESD and REXM with customerselectable INTRAC autophase optical reference mark (datum) Thirdgeneration filtering optics optimised for even lower noise (jitter) Dynamic signal processing provides ultralow cyclic error of typically ±0 nm Auto Gain Control ensures consistent signal strength for longterm reliability Increased ride height tolerance and integral setup LED for ease of installation Maximum speed to m/s (.2 m/s at 0. µm resolution) Detachable analogue or digital connector with integral interpolation to nm resolution (0.00075 arc seconds) Integral dual limits (linear only) Operating temperature to 70 C Dual resolution version available

TONiC readhead installation drawing (on RGSZ scale) Dimensions and tolerances in mm 2 off mounting holes M2.5 through, counterbored Ø x 2.75 deep from alternative mounting face 8 Optical centreline (incremental and reference mark) INTRAC reference mark selector = (A950) (Dimensions as P limit) 7.8 7.8.75 ±0.5 (Yaw tol. ±0. ) 0.25 (Roll tol. ±0.5 ) 0.08 8.75*.7.5 * Q limit magnet = (A9509) (Dimensions as P limit) 5 22 Recommended Q limit trigger point mounting faces 29 P limit trigger point P limit magnet = (A9508) selector sensor position R>20 Dynamic bend radius R> Static bend radius Ø.25 ±0.25 min.5 5 2 P and Q limit switch sensor position Setup LED CAL/AGC LED 2 off mounting holes M2.5 through, counterbored Ø x 2. deep both sides (Pitch tol. ± ) A 0..25 Alternative mounting face.5 Detail A Scale reading surface 2. Scale thickness 0.2.5.8 Optical centreline marker Readhead to scale clearance Rideheight 2. ±0.5 9 Connects to Ti interface *Extent of mounting faces. = Bolted reference mark selector magnet and limit magnet available. See relevant TONiC Installation guide for details. NOTE: RGSZ20 only shown. For detailed installation drawings, refer to relevant TONiC Installation guide or Data sheet. Ti/TD interface dimension drawing Dimensions and tolerances in mm 7 Diagnostic LED (Ti000 Ti20KD and TD000 TD000) CAL/AGC push switch access hole Ø2. 2 Requires 2 mm hex key 8 5 8. 0 9 >R20 Dynamic bend radius >R Static bend radius min Cover plate 0 UNC x 2 2

General specifications Power supply 5V ±% Readhead only <0 ma Txxx/T2xxx with Ti0000 <0 ma Txxx/T2xxx with Ti000 Ti20KD or TD000 TD000 <200 ma NOTE: Current consumption figures refer to unterminated systems. For digital outputs, a further 25 ma per channel pair (eg A, A) will be drawn when terminated with 20 R. For analogue outputs, a further 20 ma in total will be drawn when terminated with 20 R. Power from a 5 V dc supply complying with the requirements for SELV of standard IEC BS EN 0950. Ripple 200 mvpp maximum @ frequency up to 500 khz Temperature (system) Storage 20 C to 70 C Operating 0 C to 70 C Humidity (system) 95% relative humidity (noncondensing) to EN 008278 Sealing (readhead) (interface) IP0 IP20 Acceleration (readhead) Operating 500 m/s², axis Shock (system) Operating 500 m/s², ms, ½ sine, axis Vibration (system) Operating 0 m/s² max @ 55 Hz to 2000 Hz, axis Mass Readhead g Interface 0 g Cable 2 g/m EMC compliance (system) BS EN 2: 200 Readhead cable Doubleshielded, outside diameter.25 ±0.25 mm Flex life >20 x cycles at 20 mm bend radius UL recognised component Speed Clocked output Maximum speed (m/s) option (MHz) Ti000 5 µm Ti0020 µm Ti000 0.5 µm Ti00 0.2 µm Ti0200 0. µm Ti000 50 nm Ti00 20 nm Ti2000 nm Ti000 5 nm TiKD 2 nm Ti20KD nm 50.8.20.25 0.8 0.2 0.2 0.05 0.02 0 5.0 2.700.50 0.50 0.270 0.5 0.05 0.027 25 8..2.20 0.8 0.2 0.2 0.08 0.02 0.0 20.75 2.70.50 0.70 0.270 0.5 0.08 0.027 0.0 2 9.50.80 0.900 0.50 0.80 0.090 0.05 0.08 0.009 8..05.2 0.8 0.00 0.2 0.08 0.0 0.0 0.008 08.8.2.29 0.8 0.2 0.0 0.05 0.02 0.0 0.005 0.50 2.25 0.90 0.50 0.225 0.090 0.05 0.02 0.009 0.005 0.7.8 0.7 0.8 0.9 0.08 0.0 0.07 0.008 0.00 0.2 0.8 0.2 0. 0.08 0.02 0.07 0.008 0.00 0.007 0.0008 Analogue output (db) NOTE: TD interface maximum speeds are resolution dependent as defined above. Angular speed depends on ring diameter use the following equation to convert to rev/min. Angular speed (rev/min) = V x 00 x 0 p D Where V = maximum linear speed (m/s) and D = external diameter of RESM or REXM (mm)

System features Form INTRAC reference mark, directly in incremental track. Refer to RGSZ, FASTRACK/RTLC, RELM, RSLM, RESM, RESD or REXM Data sheets for reference mark location. Bidirectionally repeatable across full speed and temperature range. Electronically phased, requires no physical adjustment. Selection Txx0: Single reference mark selection by magnetic actuator (self adhesive A950 or bolted A950290), customer positioned. Txx and T2xx: No selector required, all reference marks output. Unit of resolution repeatability, over full operating temperature and speed. Dual limit switches (linear systems only, not available on TD interfaces) Form Magnetic actuators for P and Q limit switches Selfadhesive Bolted mm P limit A9508 A950292 mm Q limit A9509 A95029 20 mm P limit A95027 20 mm Q limit A95028 50 mm P limit A95025 50 mm Q limit A9502 Trigger point Leading edge of magnet from direction of travel. Trigger point tolerance Readhead direction of travel mm tolerance of trigger point (RGSZ scale shown) Mounting Position Selfadhesive or bolted. Customer placed at desired locations. <0. mm Nominal trigger point Dynamic signal processing Real time signal conditioning for optimized performance across a range of operating conditions. Automatic Gain Control (AGC) Automatic Offset Control (AOC) Ultra low cyclic error of typically ±0 nm. Calibration Simple calibration at the press of a button, no physical adjustment required. Optimization of incremental and reference mark signals. TD dual resolution interface Allows output to be switched between two resolutions. NOTE: It is recommended that movement should be halted before switching resolutions. See part number section for details of available resolutions. No limit outputs.

Output signals Digital outputs Power Incremental Limits Setup Alarm Resolution switching > Shield Function Signal Pin Pin A B Z E 5 V P Q > X Inner Outer Ti000 Ti20KD 7, 8 2, 9 5 2 Case Interface TD000 TD000 7, 8 2, 9 5 2 Case Analogue outputs Power Incremental Limits Setup Remote CAL Shield Readhead Txxx/2xxx Function Signal Colour Pin Cosine Sine 5 V V p V q V x CAL Inner Outer *Inner shield is connected to inside the Ti/TD interface. V V 2 V 0 Brown White Red Blue Yellow Green Violet Grey Pink Black Clear Orange Green/Yellow* Outer screen Interface Ti0000, 5 2, 9 2 7 8 Case Becomes alarm (E) for Ti options E, F, G, H. The alarm signal can be output as a line driver signal or state. Please select the preferred option at time of ordering. > On TD interfaces pin should be connected to to switch to lower resolution. 5 pin Dtype connector Electrical connections Grounding and shielding Readhead Inner shield Outer shield Ti/TD interface Customer electronics Output signals IMPORTANT: The outer shield should be connected to the machine earth (Field Ground). The inner shield should be connected to at receiving electronics only. Care should be taken to ensure that the inner and outer shields are insulated from each other. If the inner and outer shields are connected together, this will cause a short between and earth, which could cause electrical noise issues. 5 V Maximum cable length Readhead to interface: m Interface to controller: Clocked output option (MHz) 0 to 50 <0 analogue Dependent on clocked output option. See table below for details. Maximum cable length (m) 25 50 50 Recommended signal termination Digital outputs Interface A B Z E 220 pf Customer electronics Single ended alarm signal termination (Ti options A, B, C, D) Interface 5 V k7 Customer electronics Cable Z 0 = 20R 20R k8 E 0R A B Z E 220 pf k7 0nF Standard RS22A line receiver circuitry. Capacitors recommended for improved noise immunity. Limit outputs (Ti interface only) Analogue outputs 5 to 2 V V p V q P Q R* *Select R so max current does not exceed 20 ma Alternatively, use a suitable relay or optoisolator V 0 V V 2 V 0 V V 2 20R 5

Output specifications Digital output signals Interface models Ti000 Ti20KD and TD000 TD000 Form Square wave differential line driver to EIA RS22A (except limits P and Q) Incremental 2 channels A and B in quadrature (90 phase shifted) Analogue output signals Interface model Ti0000 and direct output from all readheads Incremental 2 channels V and V 2 differential sinusoids in quadrature, centred on.5 V (90 phase shifted) Model P (µm) S (µm) A B Signal period P Resolution S Ti000 Ti0020 Ti000 Ti00 Ti0200 Ti000 Ti00 Ti2000 20 2 0.8 0. 0.2 0.08 0.0 5 0.5 0.2 0. 0.05 0.02 0.0 (V )(V ) (V 2 )(V 2 ) 20 µm 0 0.7 to.5 Vpp with green LED indication (readhead) and 20R termination. NOTE: Ti0000A00V centred on 2.5 V Ti000 0.02 0.005 TiKD 0.008 0.002 Ti20KD 0.00 0.00 Reference Reference Z Synchronised pulse Z, duration as resolution 0.8 to.2 Vpp Wide reference = (V 0 )(V 0 ) 5 0 (nom) Bidirectionally repeatable Differential pulse V 0 centred on 5 Z Synchronised pulse Z, duration as signal period NOTE: Select standard or wide reference at time of ordering, to match the requirements of the controller being used. Wide reference mark not available on Ti000. Limits Open collector output, asynchronous pulse Digital Ti interfaces only Limits Open collector output, asynchronous pulse Ti0000 interface only Direct output from readhead Active high or Active low Active high Active low P Q <0. mm P Q <0. mm V p V q <0. mm V p V q <0. mm ~ Length of limit actuator NOTE: No limits on TD interfaces. P limit becomes E for Ti options E, F, G and H. Alarm Asynchronous pulse Line driven ~ Length of limit actuator ~ Length of limit actuator ~ Length of limit actuator NOTE: Ti0000 interface contains a transistor to invert the readhead s active low signal to give an active high output. Remote CAL operation (analogue versions only) E >5 ms E output only for Ti options A, B, C and D. Alarm asserted when signal level is less than 20% or greater than 5%. Alarm is also asserted if readhead speed is too high for reliable operation. or state alarm Differentially transmitted signals forced open circuit for >5 ms when alarm conditions valid. CAL All Ti and TD interfaces include a push button switch to enable CAL/AGC features. Remote operation of the CAL/AGC is possible via pin of analogue Ti0000 interfaces. For applications where no interface is used, remote operation of CAL/AGC is essential. Setup* Voltage at X Setup*. V (nom) Voltage at V X 0 0 Signal level 0% 0 0 50% Signal level 70% 0% Setup signal voltage proportional to incremental signal amplitude Between 50% and 70% signal level, V X is a duty cycle, 20 µm duration. Time spent at. V increases with incremental signal level. At >70% signal level V X is nominal. V. Inverse signals not shown for clarity * Setup signals as shown are not present during calibration routine

Txxx linear readhead Compatible with RGSZ20, RTLC, RSLM or RELM scale Readhead part number Series T = TONiC Scale form = Linear Readhead type 0 = Standard Scale type compatibility 0 = RGSZ20/RGSN20 = RSLM/RELM = RTLC = RGSZ20P/RGSN20P 0 = Customer selectable reference mark = All reference marks are output Cable length 05 = 0.5 m = m 5 =.5 m 0 = m 50 = 5 m 99 = m T 0 0 0 5 A Cable termination A = Standard mini connector to mate with Ti/TD interface T2xxx rotary readhead Compatible with RESM, RESD and REXM rings Readhead part number Series T = TONiC Scale form 2 = Rotary Readhead type 0 = Standard Ring diameter 0 = RESM/REXM/RESD >5 mm = RESM/REXM/RESD 0 to 5 mm 2 = RESM/REXM/RESD <0 mm = RGSZ/RGSN partial arc >5 mm 5 = RGSZ/RGSN partial arc <5 mm 0 = Customer selectable reference mark = All reference marks are output (rotary standard) Cable length 05 = 0.5 m = m 5 =.5 m 0 = m 50 = 5 m 99 = m T 2 0 0 5 A Cable termination A = Standard mini connector to mate with Ti/TD interface Please contact your local Renishaw representative if you require a partial arc application Ti interface Compatible with all TONiC readheads Interface part number Analogue: Options A = dual active high limits V = 2V5 Vmid dual active high limits Digital: Series Ti = TONiC Interpolation factor/resolution* 000 = 5 µm 0020 = µm 000 = 0.5 µm 00 = 0.2 µm 0200 = 0. µm 000 = 50 nm 00 = 20 nm 2000 = nm 000 = 5 nm KD = 2 nm 20KD = nm Alarm format and conditions A = Line driven E output; All alarms B = Line driven E output; low signal, high signal E = state; All alarms F = state; low signal, high signal Clocked output option 50, 0, 25, 20, 2,, 08, 0, 0, 0 (MHz) Ti 0000 A 00 A Ti 0200 A 20 A Options A = P/Q limits active high, standard reference mark B = P/Q limits active low, standard reference mark C = P/Q limits active high, wide reference mark D = P/Q limits active low, wide reference mark E = Q limit only, differential alarm active high, standard reference mark F = Q limit only, differential alarm active low, standard reference mark G = Q limit only, differential alarm active high, wide reference mark H = Q limit only, differential alarm active low, wide reference mark Dual resolution: Series TD = TONiC dual resolution Interpolation factor/resolution* Pin open Pin = 000 = 5 nm nm 2000 = nm 20 nm 00 = 20 nm 0 nm 000 = 50 nm 0. µm 0200 = 0. µm 0.2 µm 000 = 0.5 µm µm Alarm format and conditions A = Line driven, differential output; All alarms B = Line driven, differential output; low signal, high signal E = state; All alarms F = state; low signal, high signal Clocked output option 50, 0, 25, 20, 2,, 08, 0, 0, 0 (MHz) Options A = Standard reference mark B = Wide reference mark * Contact Renishaw for other interpolation factors. TD 000 A 20 A When using with a DSi, the interface should be configured with line driven alarm outputs and a clocked output option of 0, 0, 0, 08,, 2 or 20. Wide reference mark not available on Ti000 (5 µm) interfaces. 7

Renishaw plc New Mills, WottonunderEdge, Gloucestershire GL2 8JR United Kingdom T (0)5 5252 F (0)5 5290 E uk@renishaw.com www.renishaw.com TONiC compatible products: RGSZ20 T0x RGSZ Installation guide M9595 Data sheet L95798 RELM Tx RSLM/RELM Installation guide M959225 Data sheet L957929 RSLM Tx RSLM/RELM Installation guide M959225 Data sheet L957905 FASTRACK/RTLC Tx FASTRACK/RTLC Installation guide M95899002 Data sheet L95797 TONiC RTLCS Tx RTLCS Installation guide M958990 Data sheet L95797 Txxx T2xxx RESM TONiC T20x RESM Installation guide M959 Data sheet L95795 DOP (dual output) encoder system Installation guide M959278 Data sheet L9579 REXM T20x REXM Installation guide M95928 Data sheet L95798 RGSZ20 Partial arc TONiC DSi DSi dual readhead rotary encoder system Installation guide M959298 Data sheet L9579 Contact your local Renishaw representative for more information RESD T20x RESD Installation guide M979000 Data sheet L957975 For worldwide contact details, please visit our main website at www.renishaw.com/contact RENISHAW HAS MADE CONSIDERABLE EFFORTS TO ENSURE THE CONTENT OF THIS DOCUMENT IS CORRECT AT THE DATE OF PUBLICATION BUT MAKES NO WARRANTIES OR REPRESENTATIONS REGARDING THE CONTENT. RENISHAW EXCLUDES LIABILITY, HOWSOEVER ARISING, FOR ANY INACCURACIES IN THIS DOCUMENT. RENISHAW and the probe symbol used in the RENISHAW logo are registered trade marks of Renishaw plc in the United Kingdom and other countries. apply innovation and names and designations of other Renishaw products and technologies are trade marks of Renishaw plc or its subsidiaries. 2009 207 Renishaw plc All rights reserved Issued 027 *L957970*