..5..5 -.5 -. -.5 -. 4 6 8..5..5 -.5 -. -.5 -. 4 6 8 E s with singlemode polarization-maintaining fiber s 5nanoM-... 5nanoTE-FI-... 5nanoTE-... 5nanoFI-... Characteristics of s 5nano-...: Coherence length μm <.% RMS (<MHz) Spectral range 45 to 55 nm Laser output power up to mw Output power adjustable using potentiometer or voltage Modulation inputs for analog TTL control ( khz) fiber, polarization-maintaining or stard, optional DIN VIO, ST or E eam profile with rotational sym metry Gaussian intensity distri bution Title_5nanoM_E _temp.indd age 59 accuracy metrology Characteristics of laser diode beam source of type 5nano-......8.4 6 min noise peak value in % RF results in constant mean laser power with noise <.% RMS (<MHz) Disadvantages of conventional laser diode sources...8.4 6 min noise peak value in % noise resulting from laser diode which generates an cavity with the fiber coupling. 5%.5 nm (~.5 nm ) with reduced coherence length (~. mm) as a result of RF. No mode hopping occurs. Mode hopping: tem poral shifts between modes. The coherence length changes over time. It can be > m. Low speckle contrast from reduced co he rence length: uniform illumination of 4-quadrant diodes for FM with improved edge detection 5nanoTE-FI-...NEW control (<-%) of center wavelength Integrated Faraday Iso lator (optical diode) Temperature control: 5nanoTE / 5nanoTE-FI Drift nm for T= K.5 nm Diodes show a drift by.- nm (GaS) for a temperature range of - C. This can also be observed for the center wavelength of the laser diode beam sources of type 5nano (in white: T low, in red: T higher). The integrated temperature control for the 5nanoTE 5nanoTE-FI stabilizes the center wavelength. s of Type 5nano Features 5nanoM-... 5nanoFI-... 5nanoTE-... 5nanoTE-FI-... Reduced coherence x x x x Reduced noise x x x x Low speckle contrast x x x x Faraday Isolator x x Temperature control x x range [nm] 45-55 45-55 45-55 45-55 Vacuum feed-through x x x x C-Interface x x age 6 6 6 6 Further pplications Optical Tweezers 5nanoM-... The laser spot produced by a stard laser diode beam has a speckle pattern, increasing the sta tistical uncer tainty in position deter mi na tions. for djustment Laser lignment Laser diode beam sources of type 5nanoM-..., 5nanoFI-..., 5nanoTE-... 5nanoTE-FI-... have reduced power noise, reduced coherence length low speckle contrast. These characteristics make these laser diode beam sources highly suitable for atomic force microscopy (FM), particle measurements for LID measurements (laser-induced deflections). pplications: Laser beam source 5nanoFI-... fiber C Fiber-optical beam splitter (p. ) D Fiber collimator with micro-focus (p.7ff) E article flow F Detector Kieler Str., 55 Hamburg, Germany Tel: +49 4 85 9 97- Fax: +49 4 85 9 97-79 info@sukhamburg.de www.sukhamburg.com Signal Signal D E time ack-reflection article Measurement C.9.8.7.6.5.4... 4 6 8.9.8.7.6.5.4... 4 6 8 Graphene D time Scratch Detector F Stard noisy signal 5nanoFI-... much less noise Fabry erot Interferometry Nanotube F tomic orce icroscopy M Scheme of a fiber-optic interferometer Laser beam source 5nanoFI-... fiber C Fiber-optical beam splitter (p. ) D -C fiber E Cantilever F Detector E C Oscillogram Stard Interferences disturb the signal 5nanoFI-...: No disturbing interferences With singlemode fibers, it is possible to create a compact interferometer. The light emanating from the fiber is partially backreflected at the fiber end facette (approx. 4%) is reflected by a moving mirror or cantilever. These two waves interfere, depending on the distance between fiber end-face mirror. The back-coupled light is guided through a fiber-optic beam splitter, where F Optical scheme of particle measurement The radiation of the laser source 5nanoFI-... is guided via a singlemode fiber a fiber-optic beam splitter onto the particle flow. articles passing through the focussed beam cause the light to scatter some is back-reflected into the emitting fiber. This back-coupled light is redirected into a detector. recise measurements require low speckle contrast a constant laser power. y using RF-, the coherence length is reduced, the spectrum broadened the power averaged, resulting in a detected signal with much less noise. article Measurement Laser Deflection Measurement The deflection of the cantilever is measured sensitively using a laser spot reflected from the top surface of the cantilever onto a quadrant diode. The 5nanoM-... used as laser source avoids disturbing interferences from back-scattered light of the sample. Oscillogram Stard Interferences disturb the signal 5nanoM-... No disturbing interferences one portion is redirected onto a detector for the interference measurement the other is blocked by the Faraday Isolator. The reduced coherence length of the 5nanoFI-... offers an additional advantage because the disturbing interference is suppressed only interference between the surfaces of interest contribute to the signal. Lasers in Space 59
E accuracy metrology 4 5nanoM-... (Tab. ) fiber with -C Key switch: ON/OFF - LED ON 4 (for reduction of laser power output) Connector, interlock ttachments: Fiber collimator, focussable, 6-... Micro-focus optics 5M-... M-... 5nanoM-... control (<-%) 5nanoM-... with singlemode or polarization-maintaining singlemode fiber low noise reduced coherence length low speckle contrast Laser diode beam sources of type 5nanoM-... have reduced power noise, reduced coherence length low speckle contrast as a result of the internal RF. The laser diode beam source 5nanoM-... can be used for atomic force microscopy (FM) as a pilot laser during alignment applications. Spectral range 45 nm to 55 nm Laser output power up to mw <. % RMS (< MHz) Output power adjustable with potentiometer or voltage Modulation inputs for analog TTL control (up to khz) Coherence length μm pplications eam profile is rotationally symmetric with Gaussian intensity distribution fiber or polarization-maintaining singlemode fiber (polarization aligned to key index), optional DIN VIO, ST or E- Fiber with strain relief protective sleeving (Ø mm) Laser safety measures conforming to IEC 85 / EN 685-: Key switch Interlock connection otentiomenter for reduction of power output Option: laser diode beam source 5nanoM-N-... OEM version without key switch interlock, on request: does not meet requirements of EN 685-. Table 5nanoM... Row 4 5 6 7 8 9 LD Laser (nm) out (mw) Supply power Electric Fiber Fiber option (cm) type e Fiber length Case operation MFD diode code (V) connection type mode (μm) adjustment % 5nanoL S 45 5 M9........ L.9 < - 5nanoL S 54 5 X9........ L.6 < - 5nanoM S 67.5 H 5/........ M 4.5 < - 4 5nanoM S 64 H 5/........ M 4.5 < - 5 5nanoM S 6 M 5/........ M 4.7 < - 6 5nanoM S 5 5 5/........ M 4.7 < - 7 5nanoM S 685 H 5/........ M 4.8 < - 8 5nanoM S 78 H6 5/........ M 5.6 < - 9 5nanoM S 8 8 H9 5/........ M 5.9 < - 5nanoM S 6 Q5 5/........ M 7.5 < - 5nanoM S 8 EY 5/........ M 7.6 < - 5nanoM S.5 M4 5/........ M 9. < - 5nanoM S 55 M8 5/........ M.9 < - 5nanoM - S - - 6 - M - - 5 - - 8 - - 5 Order Code with key switch interlock............s without key switch interlock (OEM)....N 5 V DC (stard)...5 V DC (option)... Electrical :.5 m shielded x.4 mm............. as for, with SV (5 V)........ as for, with SV4 ( V).......4 Typical laser output power. The actual power output may differ by ±%. With fiber N =. in cm (stard = 5) = stard 8 = singlemode fiber, 8 = M singlemode fiber, optional: Fiber DIN-vio, ST, E-. M Connector SV (5 V) SV4 ( V) SV5 (for 5nanoM-N) Laser diode beam source 5nanoM-... fiber Ø mm 58 78 interlock Ø 6 4 Laser diode beam source 5nanoL-... L Connector SV (5 V) SV4 ( V) SV5 (for 5nanoM-N) fiber Ø mm 8 7 4 M interlock 5nanoM_ED.indd age 6 eam arameters advantages of the of type 5nano... 5%.5 nm Disadvantages of stard laser diode sources with conventional fiber coupling (~.5 nm ) with reduced coherence length (~. mm) as a result of using RF. Mode hopping: temporal shifts between modes. The short-term coherence of individual modes is > m, but effective cohe rence length is reduced..8 6 min noise peak value in % The RF results in a constant mean laser power. noise <.% RMS (<MHz). noise from a laser source coupled to a fiber. The fiber generates an cavi-.8 ty with the laser diode, 6 min resulting in stochastic noise peak value in % power jumps. improved worsened Low speckle contrast due to reduced coherence length: uniform illumination of 4-quadrant diodes for FM improved edge detection during position measure ments. The laser spot produced by a stard laser diode beam produces a speckle pattern, increasing the statistical uncertainty in position deter mi nations. Low Interference of the collimated laser beam at a CCD sensor. No interference patterns, despite the CCD sensor protection window. reduced coherence low noise low speckle contrast low interference High Interference The collimated laser beam recorded directly using a CCD sensor, with its protection window generating a disturbing pattern of interference. Kieler Str., 55 Hamburg, Germany Tel: +49 4 85 9 97- Fax: +49 4 85 9 97-79 info@sukhamburg.de www.sukhamburg.com 6
E accuracy metrology 4 5nanoFI-... control (<-%) Integrated Faraday Iso lator (optical diode) 5nanoFI-... (Tab. ) patch fiber with Key switch: ON/OFF - LED ON 4 (for reduction of laser power output) Connector, interlock Table 5nanoFI... Row 4 5 6 7 8 9 Type Version (nm) out (mw) Laser diode code LD operation Supply power mode (V) Electr. connection Fiber type Fiber option Fiber length (cm) Case type MFD e (μm) adjustment % 5nanoFI S 45 8 M9.........9 < - 5nanoFI S 54 4.5 X9.........6 < - 5nanoFI S 67. H 5/........ 4.5 < - 4 5nanoFI S 64.8 H 5/........ 4.5 < - 5 5nanoFI S 5.4 M 5/........ 4.7 < - 6 5nanoFI S.5 5 5/........ 4.7 < - 7 5nanoFI S 685 8 H 5/........ 4.8 < - 8 5nanoFI S 78 8 H6 5/........ C 5.6 < - 9 5nanoFI S 8 7. H9 5/........ D 5.9 < - 5nanoFI S 6 Q5 5/........ D 7.5 < - 5nanoFI S 8 EY 5/........ D 7.6 < - 5nanoFI S M4 5/........ D 9. < - 5nanoFI S 55 M8 5/........ D.9 < - 5nanoFI - S - - 6 - M - - 5 - - 8 - - 5 Order Code with key switch interlock............s without key switch interlock (OEM)....N 5 V DC (stard)...5 V DC (option)... Electrical :.5 m shielded x.4 mm............. as for, with SV (5 V)........ as for, with SV4 ( V).......4 Connector SV (5 V) 8 SV4 ( V) SV5 (for 5nanoFI-N) X fiber Ø mm L M L Laser diode beam source 5nanoFI-... 5nanoFI-... with singlemode or M fiber Faraday Isolator. Stable mode of operation for sensing applications with back-reflection In addition to the laser diode beam source 5nanoM-... features of reduced power noise, reduced coherence length low speckle contrast, the 5nanoFI... has an integrated Faraday Isolator to protect the laser source from back- reflection (optical diode). Radiation that couples back into a laser diode results in mode hopping, noise, frequency instability decreased lifetime. Spectral range 45 nm to 55 nm Laser output power up to 7 mw <. % RMS (< MHz) Integrated Faraday Isolator for feedback protection Output power adjustable with potentiometer or voltage Modulation inputs for analog TTL control (up to khz) Typical laser output power. The actual power output may differ by ±%. With fiber N =. interlock Case Type L L 4 95 65 C 6 8 D 8 7 Coherence length μm eam profile is rotationally symmetric with a fiber or polarization-maintaining singlemode fiber (polarization aligned with index pin), optional DIN VIO, ST or E- Fiber with strain relief protective sleeving (Ø mm) pplications ack-reflection article Measurement FIER OTIC FRY-EROT Interferometer Laser safety according IEC 85 / EN 685- by: Key switch Interlock connection for reduction of power output Option: laser diode beam source 5nanoFI-N-... OEM version without key switch interlock, on request: does not meet requirements of EN 685-. in cm (stard = 5) = stard 8 = singlemode fiber, 8 = M singlemode fiber, optional: Fiber DIN-vio, ST, E-. Faraday Isolator 48FI 5% The Faraday isolator (see also page 49) is used to protect laser sources from back-reflection (an optical diode). Radiation reflected back into a laser diode leads to mode hopping, noise, frequency instability decrease of lifetime. Spectrum of an undisturbed laser beam source 5nano ack-reflections disturb spectrum (mode hopping) 5nanoM_ED.indd age 6 Electronics cessories for Laser eam Sources Type 5nanoM-... 5nanoFI-... US Supplies Linear power, low noise, for laser diode beam sources, female 5-pin elec trically isolated,.5 m with KV5 (IEC6-9) series KV (female). cord for Supplies.5 m, IEC -pin line socket, Linear power Switching power, 5 V C with IEC (IEC-6) Input 5/ V C - 4 V C Output with 5V DC/.4 CF Laser Source with Multiple Fiber Outputs Fiber collimators 6-F-4-M4- V DC/.4 C4F 5V DC/.6 V DC/.5 CF C4F Order Code SL5 SL S5E S56E Switching power, (female 5-pin) KV5 for 5 V (pins compatible with KV) or 4-pin KV4 for V DC version Europe US/Canada Great tritain C5DE C5US C5 UK DE US UK 5nanoM-... with fiber-optic beam splitters to convert a laser input into to 6 fiber-coupled outputs, integrated in a compact housing. Fiber outputs: 6-4-M4- fiber collimator with angular adjustment. Order Code 5nanoC4-... Electrical Data Supply voltage stard 5 V DC (±.V) optional V DC (±.V) Laser diode operation mode constant power Max. operating current 6 m mbient temperature range 5-5 C Modulation frequency analog DC - khz TTL - khz Laser power output potentiometer < -% TTL logic TTL high nalog control voltage -.5V depending on laser diode: see Table -, col. Kieler Str., 55 Hamburg, Germany Tel: +49 4 85 9 97- Fax: +49 4 85 9 97-79 info@sukhamburg.de www.sukhamburg.com Connectors (female) according IEC 6-9 Order Code C 6 F Type KV 6 (6-pin) for connection to interlock chain for 6
E accuracy metrology 5nanoTE-... control (<-%) of central wavelength 5nanoTE-... (Tab. ) patch fiber with Key switch: ON/OFF - LED ON Connector, interlock Table 5nanoTE... Row 4 5 6 7 8 9 Laser LD operation Supply power Fiber Fiber Fiber Case (nm) out (mw) Electr. connection MFD diode code mode (V) type option length (cm) type e (μm) adjustment % 5nanoTE S 45 5 M9........ E.9 < - 5nanoTE S 54 5 X9........ E.6 < - 5nanoTE S 67.5 H........ E 4.5 < - 4 5nanoTE S 64 H........ E 4.5 < - 5 5nanoTE S 6 M........ E 4.7 < - 6 5nanoTE S 5 5........ E 4.7 < - 7 5nanoTE S 685 H........ E 4.8 < - 8 5nanoTE S 78 H6........ E 5.6 < - 9 5nanoTE S 8 8 H9........ E 5.9 < - 5nanoTE S 6 Q5........ E 7.5 < - 5nanoTE S 8 EY........ E 7.6 < - 5nanoTE S.5 M4........ E 9. < - 5nanoTE S 55 M8........ E.9 < - 5nanoTE - S - - 6 - M - - - 4-8 - - 5 Order Code with key switch interlock............s without key switch interlock (OEM)....N V DC (option)... Electrical :.5 m shielded x.4 mm............. as for, with SV4 ( V).......4 5nanoTE-... NEW with singlemode or M fiber with Temperature control. Stable mode of operation for wavelength/temperature sensitive applications longer diode life times In addition to the laser diode beam source 5nanoM-... features of reduced power noise, reduced coherence length low speckle contrast, the 5nanoTE... has an integrated temperature control that stabilizes the center wavelength. This makes this laser beam source ideally suited for wavelength sensitive applications. The 5nanoTE-FI... additionally has an integrated Faraday Isolator to protect the laser source from back- reflection. Spectral range 45 nm to 55 nm Laser output power up to mw <. % RMS (< MHz) control (. C) for wavelength/temperature sensitive applications longer diode life times Output power adjustable with voltage Serial C-Interface (RS) for temperature power control Modulation inputs for analog TTL control (up to khz) Typical laser output power. The actual power output may differ by ±%. With fiber N =. Coherence length μm eam profile is rotationally symmetric with a fiber or polarization-maintaining singlemode fiber (polarization aligned with index pin), optional DIN VIO, ST or E- Fiber with strain relief protective sleeving (Ø mm) Laser safety according IEC 85 / EN 685- by: Key switch Interlock connection Option: laser diode beam source 5nanoTE-N-... OEM version without key switch interlock, on request: does not meet requirements of EN 685-. in cm (stard = 5) = stard 8 = singlemode fiber, 8 = M singlemode fiber, optional: Fiber DIN-vio, ST, E-. Connector SV4 ( V) SV5 (for 5nanoTE-N) fiber Ø mm Laser diode beam source 5nanoTE-... 58 L M L interlock Case Type E: L = L = 54.5 Integrated Temperature Control Common diodes show a drift by.- nm (GaS) for a temperature range of C. This temperature dependence of the center wavelength can also be observed for the laser diode beam sources of type 5nano (in blue: T low, in red: T higher). lthough the RF- leads to a broader spectrum with a of.5 nm the central wavelength still varies with temperature. n integrated temperature control stabilizes the Drift nm for T= K.5 nm center wavelength, making the 5nanoTE-... 5nanoTE-FI-... ideal for wavelength or temperature sensitive applications. nother positive effect is that the life time of the laser diode increases. eam arameters advantages of the of type 5nano... 5%.5 nm (~.5 nm ) with reduced coherence length (~. mm) as a result of using RF..8 6 min noise peak value in % The RF results in a constant mean laser power. noise <.% RMS (<MHz). improved Low speckle contrast due to reduced coherence length: uniform illumination of 4-quadrant diodes for FM improved edge detection during position measure ments. Low Interference of the collimated laser beam at a CCD sensor. No interference patterns, despite the CCD sensor protection window. reduced coherence low noise low speckle contrast low interference 5nanoM_ED.indd age 6 Disadvantages of stard laser diode sources with conventional fiber coupling Mode hopping: temporal shifts between modes. The short-term coherence of individual modes is > m, but effective cohe rence length is reduced. noise from a laser source coupled to a fiber. The fiber generates an cavi-.8 ty with the laser diode, 6 min resulting in stochastic noise peak value in % power jumps. worsened The laser spot produced by a stard laser diode beam produces a speckle pattern, increasing the statistical uncertainty in position deter mi nations. High Interference The collimated laser beam recorded directly using a CCD sensor, with its protection window generating a disturbing pattern of interference. Kieler Str., 55 Hamburg, Germany Tel: +49 4 85 9 97- Fax: +49 4 85 9 97-79 info@sukhamburg.de www.sukhamburg.com 6
E accuracy metrology 5nanoTE-FI-... control (<-%) of central wavelength Integrated Faraday Iso lator (optical diode) 5nanoTE-FI-... (Tab. 4) patch fiber with Key switch: ON/OFF - LED ON Connector, interlock NEW 5nanoTE-FI-... with singlemode or M fiber with Faraday Isolator Temperature control. Stable mode of operation for wavelength/temperature sensitive applications longer diode life times In addition to the laser diode beam source 5nanoM-... features of reduced power noise, reduced coherence length low speckle contrast, the 5nanoTE... has an integrated temperature control that stabilizes the central wavelength. This makes this laser beam source ideally suited for wavelength sensitive applications. The 5nanoTE-FI... additionally has an integrated Faraday Isolator to protect the laser source from back- reflection. Spectral range 45 nm to 55 nm Laser output power up to 7 mw <. % RMS (< MHz) control (. C) for wavelength/temperature sensitive applications longer diode life times Integrated Faraday Isolator Output power adjustable with voltage Serial C-Interface (RS) for temperature power control Modulation inputs for analog TTL control (up to khz) Coherence length μm eam profile is rotationally symmetric with a fiber or polarization-maintaining singlemode fiber (polarization aligned with index pin), optional DIN VIO, ST or E- Fiber with strain relief protective sleeving (Ø mm) Laser safety according IEC 85 / EN 685- by: Key switch Interlock connection Option: laser diode beam source 5nanoTE-FI-N-... OEM version without key switch interlock, on request: does not meet requirements of EN 685-. Table 4 5nanoTE-FI... Row 4 5 6 7 8 9 Laser LD operation Supply power Fiber Fiber Fiber length Case (nm) out (mw) Electr. connection MFD diode code mode (V) type option (cm) type e (μm) adjustment % 5nanoTE-FI S 45 8 M9........ F.9 < - 5nanoTE-FI S 54 4.5 X9........ F.6 < - 5nanoTE-FI S 67. H........ F 4.5 < - 4 5nanoTE-FI S 64.8 H........ F 4.5 < - 5 5nanoTE-FI S 5.4 M........ F 4.7 < - 6 5nanoTE-FI S.5 5........ F 4.7 < - 7 5nanoTE-FI S 685 8 H........ F 4.8 < - 8 5nanoTE-FI S 78 8 H6........ F 5.6 < - 9 5nanoTE-FI S 8 7. H9........ F 5.9 < - 5nanoTE-FI S 6 Q5........ F 7.5 < - 5nanoTE-FI S 8 EY........ F 7.6 < - 5nanoTE-FI S M4........ F 9. < - 5nanoTE-FI S 55 M8........ F.9 < - 5nanoTE-FI - S - - 6 - M - - - 4-8 - - 5 Order Code with key switch interlock............s without key switch interlock (OEM)....N V DC (option)... Electrical :.5 m shielded x.4 mm............. as for, with SV4 ( V).......4 Connector SV4 ( V) SV5 (for 5nanoTE-FI-N) Laser diode beam source 5nanoTE-FI-... fiber Ø mm 8 L Typical laser output power. The actual power output may differ by ±%. With fiber N =. M L interlock Case Type F: L = L = 54.5 in cm (stard = 5) = stard 8 = singlemode fiber, 8 = M singlemode fiber, optional: Fiber DIN-vio, ST, E-. Faraday Isolator 48FI for 5nanoTE-FI-... The Faraday isolator (see also page 49) is used to protect laser sources from back-reflection (an optical diode). Radiation reflected back into a laser diode leads to mode hopping, noise, frequency instability decrease of lifetime. 5% Spectrum of an undisturbed laser beam source 5nano ack-reflections disturb spectrum (mode hopping) Electronics cessories for Laser eam Sources Type 5nanoTE-... 5nanoTE-FI-... 5nanoM_ED.indd age 6 US Supplies for laser diode beam sources, elec trically isolated,.5 m with (IEC6-9) series KV (female). Input Output with Europe Fiber Collimators 6-... Micro-focus optic 5M-... Switching power - 4 V C V DC /.5 C4F S56E Vacuum Feed-throughs V-KF-... Switching power, (female 4-pin) KV4 for V Fiber-optic eam Splitters FS-... cord for Supplies.5 m, IEC -pin line socket,, 5 V C with IEC (IEC-6) Europe US/Canada Great ritain C5DE C5US C5 UK DE US UK s an option, the 5nano can be supplied directly coupled with vacuum feed-through V-... or fiber-optic beam splitter. Information order codes on pages ff. For fiber collimators 6-..., see from page or visit www.sukhamburg.com Electrical Data Supply voltage V DC (±.V) Laser diode operation mode constant power Max. operating current 5 m mbient temperature range 5-5 C ±.5 Modulation frequency analog DC - khz TTL - khz Laser power output potentiometer < -% TTL logic TTL high nalog control voltage -.5V depending on laser diode: see Table -4, col. Kieler Str., 55 Hamburg, Germany Tel: +49 4 85 9 97- Fax: +49 4 85 9 97-79 info@sukhamburg.de www.sukhamburg.com Connectors (female) according IEC 6-9 Order Code C 8 F Type KV 8 (8-pin) for connection to interlock chain for 6