Ordering Information. Specifications. RF MEMS Switch 2SMES-01. Contact Ratings. Terminal Arrangement. Actuator Ratings

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RF MEMS Switch Miniature, 10 GHz Band (typical) SPDT (transfer contacts) RF MEMS Switch Superior high-frequency characteristics at 10 GHz typical/8 GHz rated (50 Ω) Isolation of 30 db Insertion loss of 1 db Ultra-miniature 5.2 x 3.0 x 1.8 mm (L x W x H). Contact Reliability 100 million operations (0.5 ma at 0.5 VDC resistive load) Rated power consumption of 10 μw RoHS Compliant Application Examples Automatic test equipment RF measurement instrument RF component Ordering Information Standard Models with Surface-mounting Terminals Classification Structure Packaging Package quantity Model Single-side stable Plastic sealed JEDEC Tray 200 IC Pack 50 CT Note: 1. This RF MEMS Switch was developed on the assumption of cold switching. Do not exceed ratings by hot switching (greater than 0.5 ma at 0.5 VDC resistive load). 2. This RF MEMS Switch is easily damaged by static electricity. When handling the RF MEMS Switch, take countermeasures against static electricity. Contact OMRON for handling guidelines. Specifications Contact Ratings Load Rated load Rated carry current Maximum switching voltage Maximum switching current Maximum switching capacity Resistive load 0.5 ma at 0.5 VDC 100 ma at 10 VDC RF: 30 dbm 0.5 VDC 0.5 madc 0.25 mw Terminal Arrangement +V2 RF_1 RF_Com +V1 RF_2 Note: The ratings are for a V.S.W.R of 1.2 max. at the load. Actuator Ratings Rated voltage (VDC) Rated current (ma) Must operate voltage (V) DC 34±5% --- 90% max. of rated voltage Must release voltage (V) 10% min. of rated voltage Absolute maximum voltage (V) 40 10 Rated power consumption (μw) RF MEMS Switch 91

High Frequency Characteristics Item 2GHz 8GHz 10GHz 12GHz Isolation --- 30 db --- Insertion Loss --- 1dB 1dB (Typ.) 3dB Return Loss --- 10 db --- Maximum peak power 36 dbm --- --- Maximum carry power 30 dbm --- --- Note: 1. The impedance of the measurement system is 50 Ω. 2. The above values are initial values. 3. These values are for a V.S.W.R. of 1.2 max. at the load. Characteristics Item Single-side stable model Contact resistance 1500 mω max. Operating time 100 μs max. Release time 100 μs max. Insulation V- 100 MΩ (at 40 VDC) resistance others 100 MΩ (at 100 VDC) Vibration Destruction 10 Hz to 500 Hz 10 G resistance Malfunction 10 Hz to 500 Hz 10 G Shock Destruction 100 G resistance Malfunction 100 G Life Mechanical 100,000,000 Operations min. expectancy Electrical 100,000,000 Operations min. ESD 100 V (Human body model) Ambient temperature Operating: 20 C to 85 C (with no icing or condensation) Ambient humidity Operating: 5% to 85% Weight Approx. 0.1 g Note: 1. The above values are initial values. 2. The contact resistance was measured with 10 ma at 1 VDC with a voltage drop method. 92 RF MEMS Switch

Engineering Data (for reference) High Frequency Characteristics Insertion Loss Isolation 0.0 Average value (initial) 0 Average value (initial) 0.5 10 20 1.0 30 (db) 1.5 (db) 40 2.0 50 60 2.5 70 3.0 0 3 6 9 12 15 Frequency (GHz) Return Loss 80 0 3 6 9 12 15 Frequency (GHz) 0 Average value (initial) 10 20 (db) 30 40 50 0 3 6 9 12 15 Frequency (GHz) Note: 1. Ambient temperature condition: 23 C 2. These high-frequency characteristics are measured with RF probe (without a mounting board). 3. The high-frequency characteristics depend on the mounting board. Be sure to check operation including durability in actual equipment before use. RF MEMS Switch 93

Electrical Endurance (Contact Resistance Shift) Contact Resistance Shift (mω) 1000 800 0.5 ma at 0.5 mvdc, Hot switch 600 400 200 0 200 400 600 N = 125 Samples (250 contacts) 800 1000 0 10 20 30 40 50 60 70 80 90 100 Operating cycles (x 10 6 operations) Electrical Endurance (Pickup Voltage/Release Voltage) 35 Must Operate Voltage (30.6 V = 90%) 30 25 Voltage (V) 20 15 10 5 Operate Voltage (Ave): Release Voltage (Ave): Must Release Voltage (3.4 V = 10%) 0 0 10 20 30 40 50 60 70 80 90 100 Operating cycles (Million operations) N = 125 Samples (250 contacts) Ambient Temperature vs. Pickup voltage/release Voltage Pickup/Release Voltage (V) 34 32 30 28 26 24 22 20 18 N = 8 Samples 16 30 20 10 0 10 20 30 40 50 60 70 80 90 100 Ambient Temperature ( C) Pickup Voltage Release Voltage 94 RF MEMS Switch

Recommended Soldering Method Temperature ( C) T4 T3 T2 T1 The thickness of the solder paste is to be applied between 150 and 200 μm and the land pattern should be based on OMRON's recommended PCB pattern. To maintain the correct soldering joint shown in the following diagram, we recommend applying solder with the soldering conditions shown on the left. Check the soldering in the actual mounting conditions before use. When washing the product after soldering the RF MEMS Switch to a print circuit board, use a water-based solvent or alcohol-based solvent and keep the solvent temperature to less than 40 C. Do not put the RF MEMS Switch in a cold cleaning bath immediately after soldering. t 1 t 2 Preheating Soldering Time (s) Measuring position/item Preheating (T1 to T2, t 1 ) Soldering (T3, t 2 ) Peak value (T4) Terminal 150 C to 180 C 120 s max. 230 C min. 30 s max. 250 C max. Upper surface of case --- --- 255 C max. Example of Drive Circuit for RF MEMS Switch +Vcc INPUT 1 Gate Driver Vcont_1 R RF_1 RF_com INPUT 2 R RF_2 DRIVER IC Vcont_2 Note: 1. Operate the driving voltage with the high-side switch (Vcont_1 & Vcont_2, not ground). 2. It is necessary to discharge the charge that accumulates in the electrostatic actuator to turn off the RF MEMS Switch because this product is a MEMS Switch of an electrostatic drive type. Install the electrical discharge circuit in the drive circuit of the RF MEMS Switch with a resistance of 1 MΩ or less. Without an electrical discharge circuit, the RF MEMS Switch might not turn off, and the contacts could stick. For Reference Only High frequency characteristics - method and substrate for measurement Agilent N5230 Vector Network Analyzer Note: Substrate: t = 1.6 mm Rogers 4350B (Dielectric constant at 10 GHz: 3.48) RF MEMS Switch 95

Dimensions Note: All units are in millimeters unless otherwise indicated. 3±0.1 5.2±0.1 Mounting PAD Dimensions 12-Terminal Land Grid Array (LGA) (Top View) 0.7 3.6 0.7 2.65 1.35 No.11 0.45 No.7 1.85±0.15 1 pin mark 0.6 1.6 0.6 0.45 0.45 0.7 1.4 0.7 2.2 0.5 No.1 1.1 No.5 0.4 0.4 0.6 1.7 0.5 No.11 0.4 1.5 1.45 2.55 3.7 4.9 No.7 0.6 No.1 No. 1 2 3 4 5 6 7 8 9 10 11 12 1 2.3 Pin Arrangement RF_com RF_2 Vcont_2 Vcont_1 RF_1 0.45 No.5 Terminal Arrangement +V2 RF_1 RF_Com +V1 RF_2 Evaluation Board Model: -EVBA 48 13 6 12.5 25 2.54 2.54 20 25 12.5 11.5 20 67 23 12.5 Device mounting area Pattern for RF correction (open) Pattern for RF correction (thru) 96 RF MEMS Switch

Ground Plane Connections In case of Coplanar Waveguide In case of Microstrip Line Via to internal RF ground plane #11 #7 #11 #7 Via to Internal RF ground plane #1 #5 #1 #5 Surface RF ground plane Connect ALL RF ground pads to the surface RF ground plane directly. Connect EACH RF ground pad to the internal RF ground plane through the via placed to the RF ground pad. *RF Ground Pad is designated as Safety Precautions Precautions for Correct Use Turn off power when doing the exchange and the wiring work of the RF MEMS Switch. Do not touch the terminal of the RF MEMS Switch when energized. RF MEMS Switch Handling Use the RF MEMS Switch as soon as possible after opening the moisture-proof package (within one week). If the RF MEMS Switch is left for a long time after opening the moisture-proof package, the appearance may suffer and seal failure may occur after the solder mounting process. To store the RF MEMS Switch after opening the moisture-proof package, place it into the original package and seal the package with adhesive tape. When washing the product after soldering the RF MEMS Switch to a print circuit board, use a water-based solvent or alcohol-based solvent and keep the solvent temperature to less than 40 C. Do not put the RF MEMS Switch in a cold cleaning bath immediately after soldering. Do not use an Ultrasonic wash. This RF MEMS Switch is easily damaged by static electricity. When handling the RF MEMS Switch, take countermeasure against static electricity (100 V or less). Contact OMRON for additional guidelines. When handling the RF MEMS Switch, do not drop. Do not apply force resulting in the product to transform and change in quality. Long-term, Continuous ON Contacts Using the RF MEMS Switch in a circuit where the RF MEMS Switch will be ON continuously for long periods (more than 24 hours) (rather than switching) can lead to unstable contacts. If a singleside stable model must be used in this kind of circuit, we recommend adding fail-safe circuits in case the contact fails. Claw Securing Force During Automatic Mounting During automatic insertion of RF MEMS Switches, be sure to set the securing force of each claw to the following so that the RF MEMS Switch's characteristics will be maintained. Direction C: 2.0 N max. Environmental Conditions for Usage, Storage, and Transport Avoid direct sunlight when using, storing, or transporting the RF MEMS Switch and maintain normal temperature, humidity, and pressure conditions. Avoid caustic gases when using, storing, or transporting the RF MEMS Switch. Coating Do not coat the RF MEMS Switch when it is mounted to the print circuit board. Do not wash the print circuit board after the RF MEMS Switch is mounted using detergent containing silicone. Otherwise, the detergent may remain on the surface of the RF MEMS Switch. RF MEMS Switch 97

All sales are subject to Omron Electronic Components LLC standard terms and conditions of sale, which can be found at http://www.components.omron.com/components/web/webfiles.nsf/sales_terms.html ALL DIMENSIONS SHOWN ARE IN MILLIMETERS. To convert millimeters into inches, multiply by 0.03937. To convert grams into ounces, multiply by 0.03527. OMRON ELECTRONIC COMPONENTS LLC 55 E. Commerce Drive, Suite B Schaumburg, IL 60173 847-882-2288 Cat. No. X301-E-1b 09/11 Specifications subject to change without notice OMRON ON-LINE Global - http://www.omron.com USA - http://www.components.omron.com Printed in USA RF MEMS Switch

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