Microcontact printing on metallic surfaces for optical deformation measurements

Similar documents
Nanoscale Lithography. NA & Immersion. Trends in λ, NA, k 1. Pushing The Limits of Photolithography Introduction to Nanotechnology

ADDITIVE MANUFACTURING WITH UV LIGHT CURED RESIN. Vuorio, J.; Nikkilä, V.; Teivastenaho, V.; Peltola, J.; Partanen, J.; Kiviluoma, P. & Kuosmanen P.

Multi-spectral acoustical imaging

Dicing Through Hard and Brittle Materials in the Micro Electronic Industry By Gideon Levinson, Dicing Tools Product Manager

A NEW INNOVATIVE METHOD FOR THE FABRICATION OF SMALL LENS ARRAY MOLD INSERTS

AESOP 3D Imaging Workshop Educational 3D Models

23 rd International Enamel Congress Monday May 25 th 2015

Capabilities of Flip Chip Defects Inspection Method by Using Laser Techniques

Inkjet printing of Durethan Polyamide and Pocan PBT

Part 5-1: Lithography

LINEAR MODULAR CALIBRATION RIG FOR SAR PANEL

Development of a Vibration Measurement Method for Cryocoolers

Supporting Information. Soft Robotic Actuators and Robots that Are Resistant to Mechanical Damage

Lecture 7. Lithography and Pattern Transfer. Reading: Chapter 7

Investigations on specimen design and mounting for Split Hopkinson Tension Bar (SHTB) experiments

THE EFFECTS OF MINITUARISATION OF PROJECTION STEREOLITHOGRAPHY EQUIPMENT ON PRINTING QUALITY

i- Line Photoresist Development: Replacement Evaluation of OiR

Inkjet Printing of Ag Nanoparticles using Dimatix Inkjet Printer, No 1

A New Profile Measurement Method for Thin Film Surface

attosnom I: Topography and Force Images NANOSCOPY APPLICATION NOTE M06 RELATED PRODUCTS G

Benchtop Nanoscale Patterning Using Soft Lithography. V. Meenakshi, Y. Babayan, and T. W. Odom, Department of Chemistry, Northwestern University

Droplets Generation with 3D Printed Chip

Just where it s needed

Supplementary information for Stretchable photonic crystal cavity with

Module 3 Selection of Manufacturing Processes

Fabrication of PDMS (polydimethylsiloxane) microlens and diffuser using replica molding

Tech Tip 8 Controlling Photopolymer Plate Gauge

POLYMER MICROSTRUCTURE WITH TILTED MICROPILLAR ARRAY AND METHOD OF FABRICATING THE SAME

MultiPrep Procedure. Backside Thinning of a Flip-Chip Device G. D. Liechty, C. A. Smith, Allied High Tech Products, Inc.

Rapid and inexpensive fabrication of polymeric microfluidic devices via toner transfer masking

SUSS MA/BA Gen4 Series COMPACT MASK ALIGNER PLATFORM FOR RESEARCH AND LOW-VOLUME PRODUCTION

Rapid fabrication of ultraviolet-cured polymer microlens arrays by soft roller stamping process

1272. Phase-controlled vibrational laser percussion drilling

Bringing Answers to the Surface

Coating of Si Nanowire Array by Flexible Polymer

Measurement of Microscopic Three-dimensional Profiles with High Accuracy and Simple Operation

Manufacturing Metrology Team

Snapshot Mask-less fabrication of embedded monolithic SU-8 microstructures with arbitrary topologies

Electronic Supplementary Information

International Research Journal of Engineering and Technology (IRJET) e-issn: Volume: 02 Issue: 06 Sep p-issn:

Micro Automation- Model 1006 Dicing Saw Instructions. Serial # Rev 2 ( R.DeVito) Location Chase 1

Two step process for the fabrication of diffraction limited concave microlens arrays

NEW COATINGS FOR THE FUNCTIONALIZATION OF ENAMELLED SURFACES

Precise hardening with high power diode lasers using beam shaping mirror optics

The Original Formula Metrology Casting Material

Quantized patterning using nanoimprinted blanks

DESIGN OF AN AUTOMATIC COIL LATH BONDING MACHINE FOR DISTRIBUTON TRANSFORMERS

DOE Project: Resist Characterization

Applications of Piezoelectric Actuator

Comparison of FRD (Focal Ratio Degradation) for Optical Fibres with Different Core Sizes By Neil Barrie

EUV Micro-Exposure Tool (MET) for Near-Term Development Using a High NA Projection System

Design and Optimization of Ultrasonic Vibration Mechanism using PZT for Precision Laser Machining

Measurements of Droplets Spatial Distribution in Spray by Combining Focus and Defocus Images

Introduction To Robotics (Kinematics, Dynamics, and Design)

HD Flexo Quality on Qualified Plates

ANALYSIS OF MEASUREMENT ACCURACY OF CONTACTLESS 3D OPTICAL SCANNERS

Measurement of channel depth by using a general microscope based on depth of focus

Major Fabrication Steps in MOS Process Flow

Inkjet Printing of Biomedical Adhesives

Of light, of MEMS: Optical MEMS in telecommunications and beyond

Virtual input device with diffractive optical element

2. Pulsed Acoustic Microscopy and Picosecond Ultrasonics

Radial Coupling Method for Orthogonal Concentration within Planar Micro-Optic Solar Collectors

1. Storage and transportation. Care Instruction

Outline. 1 Introduction. 2 Basic IC fabrication processes. 3 Fabrication techniques for MEMS. 4 Applications. 5 Mechanics issues on MEMS MDL NTHU

Significance of Paper Properties on Print Quality in CIJ Printing

PRINTED CIRCUIT BOARD (PCB) MICRO-SECTIONING FOR QUALITY CONTROL

Polyjet technology applications for rapid tooling

Obducat NIL 6. Nanoimprinting with NRF s NIL 6

Switchable reflective lens based on cholesteric liquid crystal

Ink Jet Printing with Focused Ultrasonic Beams

Supplementary Figure S1. Schematic representation of different functionalities that could be

Introduction to Microfluidics. C. Fütterer, Institut Curie & Fluigent SA, Paris

Supporting Information for. Stretchable Microfluidic Radio Frequency Antenna

ADVANCES IN USING A POLYMERIC TAPE FOR LASER-INDUCED DEPOSITION AND ABLATION

Vibration based condition monitoring of rotating machinery

Understanding Optical Specifications

Rear Side Processing of Soda-Lime Glass Using DPSS Nanosecond Laser

Study on micro extra deep drawing process with ultrahigh fluid pressure and press motion controls

Electrohydrodynamic Direct-Writing for Flexible Electronic Manufacturing

Impact of Screen Ruling on the Formation of the Printing Elements on the Flexographic Printing Plate

Caterpillar Locomotion inspired Valveless Pneumatic Micropump using Single Teardrop-shaped Elastomeric Membrane

PICO MASTER 200. UV direct laser writer for maskless lithography

Printing Processes and their Potential for RFID Printing

OPTOFLUIDIC ULTRAHIGH-THROUGHPUT DETECTION OF FLUORESCENT DROPS. Electronic Supplementary Information

DetectionofMicrostrctureofRoughnessbyOpticalMethod

Vacuum Casting in the Loughborough Design School

DEVICE FOR CONTINUOUS CELLULOSE YARN DRYING AND FORMING

SENSOR+TEST Conference SENSOR 2009 Proceedings II

Lab-level and low-cost fabrication technique for polymer based micro-optical elements and holographic structures

TESTING EQUIPMENT SHEAR STRENGTH PARAMETERS SOIL. established in 1972

SUPPLEMENTARY INFORMATION

Application Note #548 AcuityXR Technology Significantly Enhances Lateral Resolution of White-Light Optical Profilers

Fabrication of Silicon Master Using Dry and Wet Etching for Optical Waveguide by Thermal Embossing Technique

61.32 C C C

Special Print Quality Problems of Ink Jet Printers

Photolithography with transparent reflective photomasks*

ANALYSIS OF ELASTOMER TURNING UNDER DIFFERENT RAKE ANGLES

Application Research on Hydraulic Coke Cutting Monitoring System Based on Optical Fiber Sensing Technology

How an ink jet printer works

Transcription:

Proceedings of the Estonian Academy of Sciences, 2015, 64, 3, 1 9 Proceedings of the Estonian Academy of Sciences, 2017, 66, 2, 184 188 https://doi.org/10.3176/proc.2017.2.07 Available online at www.eap.ee/proceedings Microcontact printing on metallic surfaces for optical deformation measurements Federico Coren*, Cesare Palestini, Mikko Lehto, Sven Bossuyt, Panu Kiviluoma, Aku Korhonen, and Petri Kuosmanen Department of Mechanical Engineering, School of Engineering, Aalto University, P.O. Box 14100, FI-00076 Aalto, Finland Received 1 January 2016, revised 6 March 2017, accepted 7 March 2017, available online 17 April 2017 2017 Authors. This is an Open Access article distributed under the terms and conditions of the Creative Commons Attribution- NonCommercial 4.0 International License (http://creativecommons.org/licenses/by-nc/4.0/). Abstract. The measurement of the properties and behaviour of material is of fundamental importance in modern engineering. In recent years a breakthrough method for measuring surface deformation has been represented by digital image correlation. To determine local deformations in a material, an optical pattern is usually reproduced on the material surface. The reproduction of such patterns, especially at microscopic scale, is usually a slow and expensive procedure. A semi-automated device, able to print a suitable optical pattern on the metallic surface using micro-contact printing, was manufactured. Precision placing of the stamping head on the surface in order to avoid smearing of the pattern was reached. Specifically the stamp was placed with tolerances of some micrometres. Despite posing challenges in the handling of the ink and in the consistency of the patterns, this method proved viable for effective and fast creation of optical patterns. Key words: microimprint, digital image correlation. 1. INTRODUCTION * Modern materials require the study of their behaviour under stress with high precision to locally determine the properties of the material [1]. There are several ways of measuring the deformation of a material, whereas the most used ones are strain gauges and interferometry. For a more detailed analysis of small-scale strains it is possible to attach an optical pattern on the surface (Fig. 1). When stress is applied, the pattern attached to the material surface will move according to the deformation of the specimen. A camera observing the surface is able to observe the movement of the pattern allowing the calculation of local stresses [2]. The pattern (Fig. 1) allows the camera to precisely estimate distances. Due to pixel dimensions the best accuracy of measurement is achieved when the size distribution of features is limited. The largest features should not exceed twice the size of the smallest ones. Since phenomena at different length * Corresponding author, federico.coren@aalto.fi Fig. 1. A sample optical pattern. Actual feature dimension: 1 10 µm. The base of small features creates wave-like patterns at higher length scales [2]. scales are observed, it is important to have a procedure that allows of several pattern choices. For optical measurements, the pattern should present clear edges and no smearing of features.

F. Coren et al.: Microcontact printing on metallic surfaces 185 Among the many possible methods for optical pattern production, the easiest method is to create small droplets and to apply them to the desired surface. This can be achieved through the use of a simple nozzle, ultrasound excitements or electrically charging a capillary tube and accelerating droplets via an electric potential [3,4]. The problem lying in these methods is that the size distribution of droplets is not optimal. As a matter of fact, the droplets might merge together, forming a black spot. Where this happens, the displacement data result in an averaged value of a large surface. On the other hand, the areas left empty by ink will cause a local loss of information. Various lithography methods allow the creation of virtually any kind of pattern with any feature size down to hundreds of nanometres. Lithography methods can be used to print a desired pattern directly on the substrate but these processes have low productivity and a high cost [5,6]. The method adopted in this work is microcontact printing. Microcontact printing can roughly be divided into four steps. First the master stamp is made. Various methods can be used, but lithography provides a reliable method for the creation of high-quality master stamps with virtually any pattern (Fig. 2). A polydimethyl- siloxane (PDMS) silicone rubber stamp is then created using the master stamp as a mould (Fig. 2). Ink is applied to the PDMS surface and dried. Finally, the inked PDMS and the specimen surface are put into contact, resulting in the ink transfer to the desired surface. Our research focused on microcontact printing as a part of optical measurements of strain deformation. The aim was to create a device capable of microcontact printing with adequate accuracy. For optical purposes a resolution from 0.5 to 10 µm is sufficient, being close to optical limits of cameras. Accuracy is achieved when the pattern has sharp features. 2. METHODS 2.1. Printing device The printing device is built around a three-axis linear stage that has been automated through the use of three stepper motors, a microcontroller, a power source, and a stepper control module (Fig. 3). The stamp is located on a support anchored to a pneumatic piston (z 2 -axis) attached to a vertical arm standing over the moving platform (Fig. 4). The parallelism between the stamp and the print surface is granted by an alignment mechanism located between the pneumatic piston and the vertical arm (Fig. 4). In detail the angle σ adjusts the angle around the x-axis and θ around the y-axis. Fig. 3. Schematic representation of the printing device. Fig. 2. Creation of Si and polydimethylsiloxane (PDMS) stamps. The silicon stamp is created with traditional photolithography methods. PDMS rubber is then poured on the master stamp, providing an exact negative of the silicon stamp. The printing force and speed of the stamp can be controlled through a control unit (Fig. 5). The force is regulated acting on a pressure relief valve that limits the maximum pressure in the system. The lower side of the piston is always under pressure, so that in case of the failure of the system, the stamp is lifted and the speed of the piston is adjusted with a flow valve acting on the inlet of the upper side of the piston. The stamping head is bolted at the end of the piston (Fig. 5). The head supporting structure is attached to the main piston body via a linear bearing rail to increase accuracy.

186 Proceedings of the Estonian Academy of Sciences, 2017, 66, 2, 184 188 Fig. 4. Detail of the stamping arm. The structure of the assembly leads to a containment of oscillations and to an accurate control of z velocity (from ca 0.1 mm to ca 50 mm per second) of the printing head (backlash between the base and the printing head less than 10 µm during the printing operation). The regulation system present over the stamping device allows of a 2-degree of freedom regulation in order to provide co-planarity between the specimen and the printing surface (Fig. 4). The parallelism between the printing surface and the surface to be printed was tested with a calibrated feeler of 0.05 mm, and this has been observed to be sufficient to get acceptable print (Fig. 6). The speed of the printing head was monitored as well, but it did not play a major role in the quality of the prints. Force on the other side has a two-sided behaviour. Too low force leads to an insufficient stamp deformation that does not guarantee complete adhesion between the two surfaces, thus resulting in unacceptable prints (Fig. 7). On the other hand, no upper limit has been observed for the force in order to guarantee sufficient printing quality. Fig. 5. Schematic representation of the pneumatic system. Fig. 6. The pattern successfully replicated on polished aluminium. The quality of this stamp is evaluated as acceptable. Fig. 7. Example of non-acceptable print, presenting excessive smear.

F. Coren et al.: Microcontact printing on metallic surfaces 187 2.2. Stamp The silicone rubber stamp used in the printing process is manufactured with the help of the master stamp. Several polymers can be used for replicating the stamps. PDMS rubber (Sylgard 184) has been chosen due to its ability to flow into sub-micrometric crevasses and trenches, thus providing a negative replica of the master stamp. The monomer is mixed with a curing agent and the resulting compound is poured on top of the master stamp. No bubbles or defects have been detected under a microscope on the stamp surface. Air bubbles develop inside PDMS during mixing of the curing agent and the bubbles are removed either with vacuum or by simply waiting. The stamp is then cured in an oven to decrease the curing time. Different temperatures of cooking lead to different consistency of PDMS. Once the PDMS has fully polymerized, it can be removed from the master stamp. 2.3. Measurement For testing purposes several stamp patterns were used. The initial stamps presented straight lines 50, 20, and 10 μm in width in order to assess the printing quality with different feature sizes. Eventually we used a multiscale pattern [2]. After being applied to a rigid support, the stamp was inked, dried with air in order to let part of the solvent evaporate, and put into contact with the surface. Prints were analysed under an optical microscope (Nikon Epiphot 200, Nikon E Plan 100x/0.90 and Nikon digital sight ds.u1). Printing quality was evaluated as positive if features from the stamp were present, their contrast was enough to be optically detected, and there was no smearing detectable with the optical microscope (Fig. 6). A print was evaluated successful if there was an area of at least 200 200 μm, where the pattern features were satisfying the quality level described above. 3. RESULTS The device was able to print several acceptable stampings on a specimen. The required accuracy of positioning the stamp was reached (±100 μm, partial overlap of the stamps allowed). Unacceptable stampings resulted mainly from inconsistency in the application of ink to the PDMS surface (Fig. 7). In the areas where the pattern was properly transferred, no smearing was present and defects in the print were small enough (2 orders of magnitude smaller than feature size) to be filtered out optically (Figs 6, 8). The print time of a typical print operation (inking, positioning, and stamping) was less than 2 min. The printing time Fig. 8. Dots of ink on polished aluminium. The print presents sharp features. Long lines are due to scratches on the aluminium. for a specimen including preparation (device set up, ink set up, ca 10 stampings) was estimated to be under 1 h. The dots of the pattern will work as reference points during digital image correlation measures. 4. CONCLUSION The printing device operated successfully in reproducing a micro-sized features pattern on metallic surfaces. The sharpness required for optical deformation measurement was achieved, revealing no defects detectable under an optical microscope. The smearing of the print with PDMS was revealed easier than expected, thanks to the elasticity of silicone. The inking of the PDMS stamp was challenging, and the capability of creating a replicated pattern was limited to small areas. The automatized inking procedure would likely result in more consistent stamping than the actual manual one. Pattern creation time has been reduced by an order of magnitude compared to traditional lithography methods. In order to fully substitute the traditional technology of printing at microscopic level, further refinement is required to improve process repeatability. ACKNOWLEDGEMENTS The authors thank Santtu Teerihalme for technical support, Kim Videll for mechanical testing, and Laura Tiainen for sample preparation. The publication costs of this article were covered by Tallinn University of Technology and the Estonian Academy of Sciences.

188 Proceedings of the Estonian Academy of Sciences, 2017, 66, 2, 184 188 REFERENCES 1. Kim, M., Park, S., Lee, K., and Lee, B. Comparison of fracture properties in SA508 Gr.3 and Gr.4N high strength low alloy steels for advanced pressure vessel materials. Int. J. Press. Vessels Pip., 2015 131, 60 66. 2. Bossuyt, S. Optimized patterns for digital image correlation. In Imaging Methods for Novel Materials and Challenging Applications, Vol. 3 (Jin, H., Sciammarella, C., Furlong, C., and Yoshida, S., eds). Conference Proceedings of the Society for Experimental Mechanics Series. Springer, New York, NY, 2013, 239 248. 3. Ruizab, S. and Chen, C. Microcontact printing: a tool to pattern. Soft Matter, 2007, 3, 168 177. 4. Briceño-Gutierreza, D., Salinas-Barreraa, V., Vargas- Hernándeza, Y., Gaete-Garretóna, L., and Zanelli- Iglesiasb, C. On the ultrasonic atomization of liquids. Phys. Procedia, 2015, 63, 37 41. 5. Xie, J., Jiang, J., Davoodi, P., Srinivasan, M. P., and Wang, C. Electrohydrodynamic atomization: a twodecade effort to produce and process micro- /nanoparticulate materials. Chem. Eng. Sci., 2015, 125, 32 57. 6. Chou, S. Y., Krauss, P. R., Zhang, W., Guo, L., and Zhuang, L. Sub-10 nm imprint lithography and applications. J. Vac. Sci. Technol. B, 1997, 15, 2897 2904. Mikrokontaktprintimine metallpindadele deformatsioonide optiliseks mõõtmiseks Federico Coren, Cesare Palestini, Mikko Lehto, Sven Bossuyt, Panu Kiviluoma, Aku Korhonen ja Petri Kuosmanen Nüüdistootmises on materjali omaduste ja käitumise mõõtmine olulise tähtsusega. Viimastel aastatel on pinnadeformatsioonide mõõtmisel läbimurdeliseks meetodiks kujutise digitaalne korrelatsioon (DIC). Kohtdeformatsioonide määramiseks materjalis kasutatakse tavaliselt materjali pinnale kantud optilist mustrit. Selliste mustrite reprodutseerimine, eriti mikroskoopilises mõõtkavas, on tavaliselt aeglane ja kulukas protseduur. On välja töötatud meetod ja poolautomaatne seade, millega on mikrokontaktprintimise meetodil võimalik metallpinnale printida sobiv optiline muster. Sellega saavutatakse templi pea täpne ja mustrite hägustumist vältiv paigutamine pinnale. Seejuures on templit võimalik paigutada mõnemikronilise tolerantsiga. Vaatamata tindi kasutamisest ja mustrite tihedusest tingitud väljakutsetele, on tõestatud meetodi efektiivsus ning kiirus optiliste mustrite loomisel.