MEMS Tunable Filter Products

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Optoplex TM C O R P O R A T I O N TM MEMS Tunable Filter Products MEMS Technology Optoplex s MEMS Tunable Optical Filter is based on a patented micro-optic design with MEMS tuning technology. It is an integrated module consisting of a MEMS chip, micro-optics and control electronics and interface. When receiving a stream of optical signals of a plurality of wavelengths from the Input-Port (IN), the 2-port tunable optical filter directs a selected channel to the Output-Port (OUT). Wavelength (frequency) tuning is achieved by changing driving voltage applied to the MEMS chip, via the control electronics and the built-in firmware. The MEMS tunable filter offers high optical filtering performance: low insertion loss and high adjacent and nonadjacent channel isolation. Moreover, the MEMS tunable filter provides high-speed tuning that is highly demanded in many applications. The standard optical tunable filter product family includes 50- and 100-GHz channel spacing. Optoplex s MEMS tunable filter is ideal for applications from wavelength locking, optical channel monitoring and optical add/drop in optical communications; optical filtering and wavelength management in fiber sensing and spectroscopic instrumentation. Gaussian Spectral Shape Figure 2a, Gaussian Spectral Shape (center wavelength at 1527nm) IN OUT Figure 1, Functional block diagram of a tunable filter Applications Wavelength selection in DWDM systems Optical performance monitoring Optical spectrum analyzer Tunable optical noise filtering Noise suppression for optical amplifiers Key Features and Benefits Athermal design Fast tuning speed Compact size Wide tuning range, covering entire C-band or L-band Low TDL and WDL Low & uniform insertion loss High channel isolation Low power consumption Telcordia GR-1221 qualified Figure 2b, Gaussian Spectral Shape (center wavelength at 1567nm) The tunable filter is based on optical grating and MEMS technology and the spectral shape is Gaussian-type. See Figure 2a and Figure 2b.

Compact Design The MEMS tunable filter is designed and assembled in a compact module. For instance, the optical engine of a 50GHz tunable filter is about 56x27x9.99m, while a 100GHz one (optical engine) is 35x25x8.5mm. The full function tunable filter module (including control electronics) is about 100x60x12mm. Figure 4a, Wavelength vs Voltage tuning curve of a 50GHz MEMS TF Figure 3a, Photo of a 100GHz MEMS TF (optical engine with analog control interface, no control electronics included). The size is 35 x 25 x 8.5mm. Figure 4b, Wavelength vs Voltage tuning curve of a 100GHz MEMS TF Figure 3a, Photo of a 50GHz MEMS TF full functional module with control electronics included. The size is 104 x52.5 x 12.5mm. Easy to Use The MEMS tunable is controlled with driving voltage. With the optical engine, a analog driving voltage is from -60 to +60VDC. In the tunable filter full function module, a voltage converter is built-in, and the driving voltage is from -5VDC to +5VDC. In manufacturing, the wavelength vs driving voltage is well calibrated (including the effect of operating temperature). With the calibration data, the user can easily tune the tunable filter to desired wavelength in an optical engine with analog interface. Or in a full function module, the user just needs to simply issue a command to tune the device to required wavelength.

Fast Tuning Speed The MEMS tunable filters are designed to have fast tuning speed. For a MEMS TF of 50GHz channel spacing operating in C- band, the fastest tuning speed from channel-1 to channel-88 is less than 3 ms. With optimized design and control, the tunable filter s tuning speed is rated as less than 20ms from any channel to any other channel in the C-band for 50GHz channel spacing MEMS TF. Engineered Spectral Profiles As standard offers, a 100GHz (channels spacing) MEMS TF has a typical 3dB BW of 60GHz while the standard 50GHz one has a 3dB BW of 30GHz. For 50GHz, we have a narrower BW version with a 3dB BW, typically, of 20GHz. The spectral profile can be custom-engineered to meet special requirements. Contact Optoplex for details. Figure 5a, Tuning from CH-1 to CH-88 Wavelength Coverage For 50GHz channel spacing (3dB BW of 30GHz or 20GHz), we offer C-band or L-band wavelength coverage. For 100GHz, we can cover C, L-, C+L or O-band (1260 ~ 1360nm). Figure 5b, Tuning from CH-88 to CH-1 Figure 7, a 100GHz MEMS Tunable Filter with C+L Band Coverage A full-band version with wavelength coverage from 1250 ~ 1650nm is available with FWHM of 4nm. Contact Optoplex for details. Figure 6, Tuning speed (time) from CH-1 to CH-88 and then to CH-1.

Environmental Stability Figure 8a, Optical spectral stability of a 50GHz MEMS TF in -5 o C to +65 o C. Center wavelength at 1528nm. Table 1, Mechanical shock and vibration test results of a MEMS TF Figure 8b, Optical spectral stability of a 50GHz MEMS TF in -5 o C to +65 o C. Center wavelength at 1528nm. #8 200TC 0-10 1542 1543 1544 1545 1546 1547 1548 1549 1550 1551 1552-20 IL (db) -30-40 200TC 0TC -50-60 Figure 11, insertion loss change of a MEMS tunable filter at different wavelengths after 10 billion cycle toggling test -70 wavelength (nm) Figure 9, Optical spectral stability of a MEMS TF before and after 200 temperature cycling test. #2 500 hours of damp heat 0-10 1542 1543 1544 1545 1546 1547 1548 1549 1550 1551 1552-20 IL (db) -30-40 500hours 0hour -50-60 -70 wavelength (nm) Figure 10, Optical spectral stability of a MEMS TF before and after 500 hour damp-heat test. Figure 12, insertion loss change of a MEMS tunable filter at different wavelengths after 10 billion cycle toggling test

Table 2. Performance Specifications of MEMS Tunable Filters Parameter 1) Unit 50 GHz Std. 50 GHz NB 2) 100 GHz Wavelength Tuning Range nm C - band: 1528 ~ 1562; L - band: 1567 ~ 1603 Wavelength Tuning Resolution pm ~ 10 pm or Calibrated to ITU grids Passband Width @ 1.0 db GHz > 16 - > 25 Passband Width @ 3.0 db GHz 30 (typical) 16.5 to 23.0 60 Passband Width @ 20 db GHz <85 < 75 < 185 Peak Insertion Loss (without connector) db < 5.0 < 6.0 < 4.0 Polarization Dependent Loss db < 0.5 < 0.5 < 0.3 Chromatic Dispersion ps/nm ± 5 ± 5 ± 5 Wavelength Setting Error GHz < ±4 < ±4 < ±5 Wavelength Repeatability GHz 1 1 1 Return Loss db > 40 Maximum Input Optical Power mw 500 Tuning Speed (channel to channel) ms < 20 Tuning Voltage V < 65 < 85 < 38 Operating Temperature C -5 to 75 Storage Temperature C - 40 to 85 Dimension (L W H) (Optical Engine) Dimension (L X W X H) (Full Functional Module) mm 57 26 9.9 85 45 15 35 25 8.5 104 x 52.5 x 12.5 104 x 52.5 x 12.5 Notes: 1) Unless Otherwise indicated, all performances are specified in the operating conditions: optical power, wavelength and temperature ranges 2) NB: Narrow-Band 50GHz MEMS Tunable Filter

MEMS Tunable Filter Products Optical Engines Optoplex can supply either the optical engines of the MEMS tunable filters with analog control interface. Full Function Modules Full functional MEMS tunable filter module in which driving and control electronics are built-in together with firmware are commercially available. 100GHz 100GHz Module 100GHz Figure 13, Optical engine of a 100GHz MEMS tunable filter 35x25x8.5mm 50GHz 35x25x8.5mm 104x52.5x12.9mm Figure 17, 100GHz MEMS tunable filter module 56x25x9.9mm 104x52.5x12.9mm Figure 14, Optical engine of a std 500GHz MEMS tunable filter 50GHz 50GHz 56x25x9mm Figure 15, Optical engine of a std 500GHz MEMS tunable filter Figure 18, 50GHz (std.) MEMS tunable filter module 50GHz Module 50GHz NB (18GHz FWHM) 68x32x9mm Figure 16, Optical engine of a narrow bandwidth 500GHz MEMS tunable filter Calibration tables (refer to Figures 4a and 4b) of wavelength vs driving voltage at different temperatures will be provided by Optoplex. With this info, the user can build their own control electronics and algorithm to control the MEMS tunable filters. Figure 18, 50GHz (narrow bandwidth version) MEMS tunable filter module With the full-function MEMS tunable filter, the user just needs to follow the electrical communication interface definition and control the MEMS tunable filter with FW command from a host. Optoplex also supplies an evaluation kit (including a software program and a USB cable). With the evaluation kit, the user can run the program in a computer to control the MEMS TF directly.

Ordering Information Below is the general information for ordering for Optoplex s standard MEMS tunable filters. Table 3, Ordering info of standard MEMS tunable filters Channel Spacing Operating Wavelength Range Optical TF Engine, P/N Full Function TF Module, P/N 100GHz C-Band OT-2C2NM300 OT-2C2CM500 L-Band OT-2L2NM310 OT-2L2CM510 C+L Band OT-2T2NM320 OT-2T2CM520 Contact Information Optoplex Corporation 3374 Gate Boulevard Fremont, CA 94538 USA Tel: (510) 490-9930 Fax: (510) 490-9330 www.optoplex.com info@optoplex.com O-Band OT-2O2NM330 OT-2O2CM530 Sales sales@optoplex.com 50GHz C-Band OT-1C2NM400 OT-1C2CM600 L-Band OT-1L2NM410 OT-1L2CM610 Technical Support support@optoplex.com C+L Band OT-1T2NM420 OT-1T2CM620 O-Band OT-1O2NM430 OT-1O2CM630 Custom design and manufacturing are available upon request. Contact Optoplex for details.