Silicon nitride based TriPleX Photonic Integrated Circuits for sensing applications Arne Leinse a.leinse@lionix-int.com 2 Our chips drive your business 2
What are Photonic ICs (PICs)? Photonic Integrated Circuits (PICs) are devices on which several optical components are integrated; PICs are usually fabricated using a wafer-scale technology using substrates of silicon, silica or InP; Most PICs use waveguides to allow the realization of couplers, filters, power splitters, combiners and active elements with optical gain or attenuation; A PIC by itself is not a product! Interfacing with fibers or free-space Interfacing with electronics Thermal interfacing Mechanical support 11-Dec-18 Micronano Conference 2018 Our chips drive your business 3
4 TriPleX TM : some geometries... Adjustable polarization properties (sensors telecom) Low optical attenuation Small bend radii (small footprint!) Design by geometry Silicon and glass compatible Spot size converters Our chips drive your business 4
Optical Coherence Tomography (OCT) Forensics/biometrics fingerprint identification Dermal imaging optical biopsies Our chips drive your business 5
Optical Coherence Tomography (OCT) Common path interferometer Arrayed Waveguide Grating based spectrometer Optical power (a.u.) 800 nm In- and output CCD 850 nm 900 nm First stage AWG Second stage AWG Our chips drive your business 6
Optical Coherence Tomography (OCT) system response 1.0 mirror distance ( m): 0 30 50 100 150 200 250 300 350 400 OCT signal (a.u.) 0.5 0.0 0 200 400 600 800 depth( m) Our chips drive your business 7
Evanescent field sensing Our chips drive your business 8
Signal amplitude Signal amplitude Evanescent field sensing Shift of resonance peak of phase shift induced by change in refractive index or adsorbed layer thickness SHIFT FSR MRR 1/Wavelenght SHIFT FSR amzi 1/Wavelenght Our chips drive your business 9
Evanescent field sensing Our chips drive your business 10
Evanescent field sensing 25000 4500 PBS 20000 amzis Shift (picometer) Shift (picometer) 4000 15000 10000 5000 MRRs 100 200 300 400 500 600 700 Time (s) Response of sensors to different sucrose concentrations Micronano Conference 2018 2500 2000 1500 Thrombin 1000 MRR 0 0 11-Dec-18 3000 500 0 Prototype sensor chip with MRRs and amzis in one chip amzi 3500 0 300 600 900 1500 Time (s) Binding of thrombin onto aptamer modified sensor in demi Difference in signal yield: amzi/mrr 10.5 amzi sensitivity can be tuned by design Our chips drive your business 1200 11
Narrow linewidth laser - Gas Sensing Accurate wavelength control enables accurate readout of absorption spectra of gasses. In adddition to 1550 range other wavelength ranges possible by using different gain sections Our chips drive your business 12
Narrow linewidth laser Double ring reflector, attached to Gain Heating 1 ring Causes spectrum to hop across wavelengths Input and reflected light Laser output Our chips drive your business 13
Narrow linewidth laser Our chips drive your business 14
Narrow linewidth laser - Gas Sensing Photodiode Tunable Laser Sensor Our chips drive your business 15
Micronano 16 Conference 2018 PIC access Application specific design area Laser 11-Dec-18 Our chips drive your business 16
17 Micronano Conference 2018 16 th run 17 th run 18 th run Tape out 28 Feb 2019 31 July 2019 30 Nov 2019 Devices ready 30 June 2019 20 Dec 2019 30 Apr 2020 https://photonics.lionix-international.com/mpw-service/ Special academic discount 11-Dec-18 Our chips drive your business 17
Micronano 18 Conference 2018 Q&A 11-Dec-18 Our chips drive your business 18