Data Sheet, V1.0, Aug SMM310. Silicon MEMS Microphone. Small Signal Discretes

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Data Sheet, V1.0, Aug. 2007 Small Signal Discretes

Edition 2007-08-31 Published by Infineon Technologies AG 81726 München, Germany Infineon Technologies AG 2007. All Rights Reserved. Legal Disclaimer The information given in this document shall in no event be regarded as a guarantee of conditions or characteristics ( Beschaffenheitsgarantie ). With respect to any examples or hints given herein, any typical values stated herein and/or any information regarding the application of the device, Infineon Technologies hereby disclaims any and all warranties and liabilities of any kind, including without limitation warranties of non-infringement of intellectual property rights of any third party. Information For further information on technology, delivery terms and conditions and prices please contact your nearest Infineon Technologies Office (www.infineon.com). Warnings Due to technical requirements components may contain dangerous substances. For information on the types in question please contact your nearest Infineon Technologies Office. Infineon Technologies Components may only be used in life-support devices or systems with the express written approval of Infineon Technologies, if a failure of such components can reasonably be expected to cause the failure of that life-support device or system, or to affect the safety or effectiveness of that device or system. Life support devices or systems are intended to be implanted in the human body, or to support and/or maintain and sustain and/or protect human life. If they fail, it is reasonable to assume that the health of the user or other persons may be endangered.

Revision History: 2007-08-31, V1.0 Previous Version: Page Subjects (major changes since last revision) Data Sheet 3 V1.0, 2007-08-31

Features SMD MEMS microphone for automated surface mount assembly Reflow soldering up to 260 C (lead free) High long-term temperature stability Stable sensitivity over power supply range of 1.5-3.3 V Low current consumption of 80 µa Excellent power supply rejection of -55 db High integrated immunity to EMI RoHS-compliant package with small footprint and low height of 1.25 mm Applications The is designed for Mobile Phones (Handsets, Headsets) Consumer (Game Consoles, PDA s) Computer (Personal Computers, Notebooks) Cameras (Digital Still Cameras, Video Cameras) Product Description Miniature Silicon MEMS (Micro Electro Mechanical System) omni-directional Microphone with single-ended analog interface designed for automated reflow soldering assembly as SMD (Surface Mounted Device) component. It is an alternative to conventional ECMs (Electret Condenser Microphones). Due to its robust design with a metallic lid and monolithic integrated EMI-blocking capacitors and utilization of Silicon MEMS technology, the shows high immunity to EMI (Electromagnetic Interference) and heat. The capped Chip-On-Board package solution contains the micromechanical sensor chip and an amplifier chip. The RoHS-compliant device has a size of 4.72 x 3.76 x 1.25 mm 3. VDD (4) OUT (1) GND (2,3) Figure 1 Block Diagram Type Package Marking HG-MMA-4-2 S310 Data Sheet 4 V1.0, 2007-08-31

Pin Definition and Function Table 1 Pin Definition and Function Pin No. Symbol Function 1 OUT Output 2 GND Ground 3 GND Ground 4 V DD Power Maximum Ratings Table 2 Maximum Ratings Storage Temperature T STG -40 C - 125 C Operating Temperature Range T A -40 C - 85 C Operating Voltage Range V DD 1.5 V - 3.3 V ESD robustness Table 3 Typical robustness to electrostatic discharge ESD capability all pins (HBM, JESD22-A114) V ESD_HBM ± 4 kv ESD capability all pins (MM, JESD22-A115) V ESD_MM ± 400 V Acoustical and Electrical Characteristics Table 4 Unless otherwise noted, typical test conditions are T A = 23 C, V DD = 2.1 V and R.H. = 50% measured in a pressure chamber test setup. All voltages refer to GND node Parameter Symbol Values Unit Note / Test Condition Min. Typ. Max. Sensitivity 1kHz S 1kHz -45-42 -39 db(v/pa) 1 khz, 94 db SPL Relative Sensitivity 4 khz S 4kHz -1 +4 db Relative to sensitivity 1 khz Relative Sensitivity 240 Hz S 240Hz -1 +1 db Relative to sensitivity 1 khz Equivalent Noise Level ENL 29.5 32.5 db(pso) CCITT-weighted 1) 35 db(a) A-weighted 2) Signal-to-Noise Ratio SNR 61.5 64.5 db(pso) CCITT-weighted 59 db(a) A-weighted Total Harmonic Distortion THD 0.1 0.5 % 104 db SPL, 1 khz Current Consumption I CC 80 140 µa V DD =2.1 V Power Supply Rejection Ratio PSRR -55-40 dbr 100 mv superimposed on V DD =2.1 V, 1 khz DC Output Voltage V OUT 1.2 V DC Voltage at Pin 1 Output Impedance Z OUT 7 Ω 1 khz 1) Psophometrically weighted noise measurement with CCITT-filter (ITU-T Rec. P.53) 2) Noise measurement with A-weighting filter (IEC 651) Data Sheet 5 V1.0, 2007-08-31

Typical Measurements Results Sensitivity relative to 1kHz [db] 10 8 6 4 2 0-2 -4-6 -8 +1-1 -10 100 1000 10000 Frequency [Hz] +4-1 Figure 2 Typical frequency response curve relative to the sensitivity at a frequency of 1 khz 5 5 Sensitivity relative to TA=23 C [db] 4 3 2 1 0-1 -2-3 -4 Equivalent Noise Level relative to T A=23 C [db] 4 3 2 1 0-1 -2-3 -4-5 -40-20 0 20 40 60 80 100 Temperature / C -5-40 -20 0 20 40 60 80 100 Temperature / C Figure 3 Typical change of sensitivity at 1 khz and equivalent noise level over temperature relative to T A = 23 C Data Sheet 6 V1.0, 2007-08-31

S [dbv/pa] -39-40 -41-42 -43-44 -45 Equivalent Noise Sensitivity 1.4 1.7 2 2.3 2.6 2.9 3.2 32.5 31.5 30.5 29.5 28.5 27.5 26.5 ENL [db(pso)] ICC [µa] 90 85 80 75 70 65 60 DC Output Voltage Current Consumption 1.4 1.7 2 2.3 2.6 2.9 3.2 3.5 1.5 1.4 1.3 1.2 1.1 1 0.9 0.8 0.7 0.6 0.5 Vout [V] V DD [V] V DD [V] Figure 4 Typical measurement of sensitivity, equivalent noise level, current consumption and DC output voltage over power supply V DD 2 1.8 1.6 1.4 THD [%] 1.2 1 0.8 0.6 0.4 0.2 0 90 100 110 120 130 Sound Pressure [db SPL] Figure 5 Typical total harmonic distortion over sound pressure level (1 khz, V DD =2.1 V) Data Sheet 7 V1.0, 2007-08-31

1000 Noise densitiy (nv/hz 0.5 ) 100 10 CCITT-weighted A-weighted 1 100 1000 10000 Frequency [Hz] Figure 6 Typical noise density measurement with A-weighting and CCITT-weighting filter -30-35 -40 PSRR [dbr] -45-50 -55-60 -65-70 10 100 1000 10000 100000 Frequency [Hz] Figure 7 Typical power supply rejection ratio (relative to 100 mv sinewave superimposed on the supply voltage V DD ) Data Sheet 8 V1.0, 2007-08-31

-10 Demodulated RF-signal relative to acoustical sensitivity [db] -20-30 -40-50 -60 WCDMA -70 GSM850/900 GSM1800/1900-80 100 300 500 700 900 1100 1300 1500 1700 1900 2100 2300 2500 Frequency of RF disturbance [MHz] Figure 8 Typical RF demodulation relative to the microphone signal (1 khz, 1 Pa). RF disturbance (100 MHz - 2.5 GHz, 80%-AM-modulated with 1 khz) is directly injected in the power supply Data Sheet 9 V1.0, 2007-08-31

Package Outline 0.1 4x 1.88 ±0.2 0.84 ±0.1 4 3 3 4 3.76 ±0.1 0.15 TYP. 1.25 ±0.1 1) 1.24 TYP. (2.22) 1 2 1.32±0.2 2 1 4.72±0.1 0.15 TYP. (2.97) 1.45 TYP. 1) Area for acoustic seal diam. 1.64 mm typ. GHG01248 Figure 9 Package outline Table 5 Dimensions Item Dimension (mm) Tolerance (mm) Height 1.25 ±0.1 Length 4.72 ±0.1 Width 3.76 ±0.1 Sound Port Diameter 0.84 ±0.1 Recommended Customer Land Pattern 1.45 1.24 2.22 3.45 Figure 10 Recommended customer land pattern 2.97 4.42 HLGF1250 Data Sheet 10 V1.0, 2007-08-31

Marking Layout Example Figure 11 Marking Layout Example: 1) S310 type code for, 2) Infineon logo, 3) assembly lot code Solder Reflow Table 6 Solder Reflow Conditions Solder Reflow Profile Compliant to J-STD-020-C Maximum Peak Temperature 260 C Number of Reflow 3 times reflow soldering Board washing after Reflow Board washing can damage the microphone if the sound inlet hole is uncovered Moisture Sensitivity Level MSL 2 classified Recommended Vacuum Handling 0.5 mm MIN Figure 12 Recommended minimum distance between sound port hole and vacuum pick tool opening is 0.50 mm Data Sheet 11 V1.0, 2007-08-31

Tape Outline Figure 13 Table 7 Tape Outline, 1) Cumulative tolerance of 10 sprocket holes is ±0.2 mm Tape Dimensions (mm) W P 0 P 1 P 2 D 0 A 0 B 0 E 1 12±0.3 4±0.1 8±0.1 2±0.05 1.5±0.1 4.1±0.1 5±0.1 1.75±0.1 E 2 F D 1 T T 1 T 2 G K 0 10.25 MIN 5.5±0.05 1.5 MIN 0.3±0.05 0.05±0.015 2.1±0.2 1.95 NOM 1.75±0.1 Data Sheet 12 V1.0, 2007-08-31

Reel Outline Figure 14 Table 8 Reel Dimension (mm) and Quantity per Reel A W 1 W 2 N Quantity per Reel Ø 330 12.4±1.5 18.4 MAX Ø 100 4000 Data Sheet 13 V1.0, 2007-08-31