MEMS Real-Time Clocks: small footprint timekeeping. Paolo Frigerio November 15 th, 2018

Similar documents
MEMS Clocks: the next big little thing? Giorgio Mussi November 14 th, 2017

6.776 High Speed Communication Circuits and Systems Lecture 14 Voltage Controlled Oscillators

Oscillators. An oscillator may be described as a source of alternating voltage. It is different than amplifier.

E06 Oscillator Design

MEMS Oscillators: Enabling Smaller, Lower Power IoT & Wearables

PROBLEM SET #7. EEC247B / ME C218 INTRODUCTION TO MEMS DESIGN SPRING 2015 C. Nguyen. Issued: Monday, April 27, 2015

SiNANO-NEREID Workshop:

Chapter 13 Oscillators and Data Converters

Design of a Temperature-Compensated Crystal Oscillator Using the New Digital Trimming Method

SG2525A SG3525A REGULATING PULSE WIDTH MODULATORS

BAKISS HIYANA BT ABU BAKAR JKE,POLISAS

Design Choice: Crystal vs. Crystal Oscillator

Digitally Tuned Low Power Gyroscope

sensors ISSN by MDPI

Low-Power Ovenization of Fused Silica Resonators for Temperature-Stable Oscillators

High-speed wavefront control using MEMS micromirrors T. G. Bifano and J. B. Stewart, Boston University [ ] Introduction

Low voltage LNA, mixer and VCO 1GHz

1GHz low voltage LNA, mixer and VCO

Design of a Regenerative Receiver for the Short-Wave Bands A Tutorial and Design Guide for Experimental Work. Part I

GM6155 GM6155V1.01. Description. Features. Application. Typical Application Circuits. 150mA LOW NOISE CMOS LDO WITH ENABLE FUNCTION

Guest Editorial: Low-Voltage Integrated Circuits and Systems

Integrated Circuit Design for High-Speed Frequency Synthesis

Test Your Understanding

Communication Circuit Lab Manual

LM13600 Dual Operational Transconductance Amplifiers with Linearizing Diodes and Buffers

Clocking the Data ABSTRACT INTRODUCTION KEY WORDS

Due to the absence of internal nodes, inverter-based Gm-C filters [1,2] allow achieving bandwidths beyond what is possible

MEMS. Platform. Solutions for Microsystems. Characterization

Electronic Circuits EE359A

Summary 185. Chapter 4

We can utilize the power flow control ability of a TCSC to assist the system in the following tasks:

shunt (parallel series

Expect to be successful, expect to be liked,

Pb-free lead plating; RoHS compliant

A Self-Sustaining Ultra High Frequency Nanoelectromechanical Oscillator

Oscillator Principles

Micropower, Single-Supply, Rail-to-Rail, Precision Instrumentation Amplifiers MAX4194 MAX4197

Index. bias current, 61, 145 critical, 61, 64, 108, 161 start-up, 109 bilinear function, 11, 43, 167

A 3-10GHz Ultra-Wideband Pulser

ST755 ADJUSTABLE INVERTING NEGATIVE OUTPUT CURRENT MODE PWM REGULATORS

Lecture 2: Non-Ideal Amps and Op-Amps

There are four possible reasons that justify directional or horizontal drilling:

CHAPTER 4 ULTRA WIDE BAND LOW NOISE AMPLIFIER DESIGN

Figure 1: Closed Loop System

Frequency Management Product Short Form

Feedback (and control) systems

HA7210, HA kHz to 10MHz, Low Power Crystal Oscillator. Description. Features. Ordering Information. Applications. Typical Application Circuits

HIGH RIPPLE-REJECTION LOW DROPOUT MIDDLE OUTPUT CURRENT CMOS VOLTAGE REGULATOR

Lecture 10: Accelerometers (Part I)

Last Name Girosco Given Name Pio ID Number

Long Range Passive RF-ID Tag With UWB Transmitter

Q-TECH CORPORATION. Description. Features. Applications

MEAS Silicon MEMS Piezoresistive Accelerometer and its Benefits

Application Specification Accelerometer ACH AUG 98 Rev A

O C X O Oven Controlled Crystal Oscillators

SA620 Low voltage LNA, mixer and VCO 1GHz

300 ma very low quiescent current linear regulator IC with automatic green mode

Type Ordering Code Package TDA Q67000-A5168 P-DIP-18-5

The steeper the phase shift as a function of frequency φ(ω) the more stable the frequency of oscillation

ACTR Features: ACTR DCC6C v1.1

MP A, 500KHz Synchronous Rectified Step-up Converter

A Real-Time kHz Clock Oscillator Using a mm 2 Micromechanical Resonator Frequency-Setting Element

SP 22.3: A 12mW Wide Dynamic Range CMOS Front-End for a Portable GPS Receiver

Crystal Oscillators and Circuits

An Oscillator Scheme for Quartz Crystal Characterization.

ECEN 5014, Spring 2009 Special Topics: Active Microwave Circuits Zoya Popovic, University of Colorado, Boulder


Regulating Pulse Width Modulators

TLV4946K, TLV4946-2K. Datasheet. Sense and Control. Value Optimized Hall Effect Latches for Industrial and Consumer Applications. Rev1.

Leakage Power Minimization in Deep-Submicron CMOS circuits

Low-Power, Low-Drift, +2.5V/+5V/+10V Precision Voltage References

Experiment 6: Biasing Circuitry

200mA Low Power Consumption CMOS LDO Regulator CLZ6821/22

1.25 V Micropower, Precision Shunt Voltage Reference ADR1581

Comparison between Analog and Digital Current To PWM Converter for Optical Readout Systems

3 V/5 V Low Power, Synchronous Voltage-to-Frequency Converter AD7740*

Technical Introduction Crystal Oscillators. Oscillator. Figure 1 Block diagram crystal oscillator

(i) Determine the admittance parameters of the network of Fig 1 (f) and draw its - equivalent circuit.

300 ma very low quiescent current linear regulator IC with automatic green mode

MGM 3000X Q67000-A5179 P-DSO-20-1 (SMD) MGM 3000X Q67006-A5179 P-DSO-20-1 Tape & Reel (SMD)

DESIGN AND VERIFICATION OF ANALOG PHASE LOCKED LOOP CIRCUIT

SiTime University Turbo Seminar Series. December 2012 Reliability & Resilience

TS mA Low Noise LDO Voltage Regulator with Enable

Advanced Regulating Pulse Width Modulators

Lecture 8 ECEN 4517/5517

Owner. Dale Nelson. Design Team. Chief Scientist. Business Manager. Dale Nelson. Dale Nelson Dale Nelson. Dale Nelson. Dale Nelson

LD A very low dropout fast transient ultra-low noise linear regulator. Datasheet. Features. Applications. Description

MAX6126 Ultra-High-Precision, Ultra-Low-Noise, Series Voltage Reference

80mA Low Noise Ultra Low Dropout Voltage Regulator

RF MEMS for Low-Power Communications

BM6312 FEATURES GENERAL DESCRIPTION APPLICATIONS. High-performance current mode PWM Controller. Product Specification

ML4818 Phase Modulation/Soft Switching Controller

CA330 RTD Calibrator: High-speed Response and High-resolution Resistance Simulator

COMMON SENSE OSCILLATOR TECHNIQUES

EVALUATION KIT AVAILABLE 28V, PWM, Step-Up DC-DC Converter PART V IN 3V TO 28V

MEMS Reference Oscillators. EECS 242B Fall 2014 Prof. Ali M. Niknejad

UART CRYSTAL OSCILLATOR DESIGN GUIDE. 1. Frequently Asked Questions associated with UART Crystal Oscillators

MA1000 High Performance MEMS Capacitive Accelerometer

TLV4946-2L. Datasheet. Sense and Control. Value Optimized Hall Effect Latch for Industrial and Consumer Applications. Rev1.

A New Concept of Power Quality Monitoring

Transcription:

: small footprint timekeeping Paolo Frigerio paolo.frigerio@polimi.it November 15 th, 2018

Who? 2 Paolo Frigerio paolo.frigerio@polimi.it BSc & MSc in Electronics Engineering PhD with Prof. Langfelder Master Thesis on a project about MEMS-based Real-Time Clocks Collaboration with STMicroelectronics. Focus on temperature compensation of frequency drift

Outline 3 Context The MEMS Resonator The Electronic Oscillator System-Level Compensation

Clocks VS Real-Time Clocks 4 A Real-Time Clock (RTC) is a device that measures the flow of time. Similar to a computer clock, but different in scope CPU Clock Real-Time Clock A CPU Clock synchronizes digital blocks. Frequency stability is less of a concern. A RTC is basically a watch. Frequency stability is of the utmost importance in timekeeping.

Where? 5 Smartphones GPS Modules Any embedded systems

Legacy RTCs 6 To produce an accurate and stable frequency, a frequency selective element is required, that is a narrow-band filter. Historically the resonance of quartz crystals has been exploited. Good thermal stability; Good power handling; Shows little aging. Standard output frequency = 32 768 Hz (2 15 Hz) Why should one want to replace quartz?

MEMS vs Quartz 7 Reduced fabrication costs. More resistant to: Aging; EM disturbances; Mechanical shocks. Smaller area occupation. System-in- Package XT AL Quartz C C MEMS IC MEMS ASIC package

Volume [mm 3 ] Why MEMS? 8 Miniaturization is a key requirement in some new fields: IoT Wearables Credit-card-sized applications Portable devices MEMS on the downside, MEMS require an electronic frequency compensation scheme Year

Key Requirements 9 Power consumption (< a few µw) Often employed in battery-operated systems. In operation even when the whole system is off. ±10 ppm Frequency Stability (< a few ppm) Temperature/process spread. Young modulus: TCE = 60 ppm/k. Frequency: TCf = 30 ppm/k.

Outline 10 Context The MEMS Resonator The Electronic Oscillator System-Level Compensation

Requirements 11 Resonance well above 32 khz but as small as possible! Compensation Consumption Large enough stiffness Good resistance to large mechanical shocks Motional resistance as small as possible

Scissor-Jack Structure 12 Ultra-small mass: the elastic beam itself is actuated at resonance. k tends to be quite large Large resonance frequency! Parameter Value Units k 3000 N/m m 0.24 nkg f 0 550 khz ROTOR PP DRIVE PP SENSE

Motional Resistance 13 η R m = b η 2 = ω 0m Q η 2 Gaps as small as possible Parallel-Plate Actuation Large displacement not a priority, hence no comb fingers Low-pressure sealing ( 70 ubar) to increase the quality factor Reduced fluid damping There is another different Q-limiting phenomenon b

TED: Thermo-Elastic Damping 14 Local compression/extension produce temperature gradients Compression heats up, extension cools down Temperature gradients produce heat flow across the spring, hence energy dissipation Energy dissipation Q reduction Slots along the rotor hinder heat flow, allowing an increase of Q!

Outline 15 Context The MEMS Resonator The Electronic Oscillator System-Level Compensation

From Resonators to Oscillators 16 IDEAL RESONATOR i t i t i t P diss P diss OSC i t Power exchanged between reactive elements. i t Oscillation is damped by power losses. i t P in Active circuit supplies power to compensate for losses t t t Stable oscillation!

Negative Resistance 17 R C m L m R m The oscillator circuit synthesizes a negative resistance. Ideal component that is able to provide power, instead of burning it. C m L m If R = R m then the series resistors cancel out, leaving an ideal LC-tank. Device losses are compensated.

Oscillation Condition 18 The MEMS and the circuit can be described by their corresponding impedances. The MEMS device will oscillate guaranteed that the oscillation condition is satisfied. Oscillation can be sustained if: Z m jω + Z c jω = 0 X m R m MEMS OSCILLATOR X c R c

Oscillation Condition 19 The condition can be re-written considering the real and imaginary parts: MEMS OSCILLATOR R Z m = R Z c R m = R c ω equivalent to Barkhausen s condition on the modulus X m X c R c I Z m = I Z c X m ω = X c ω equivalent to Barkhausen s condition on the phase This one provides the oscillation frequency R m

Oscillator Topology 20 Requirements: Low power: OTA-based oscillators (as the structure you know for gyros) require more than tens of μw; We want < 1 μa current, that is a few μw; Compact; Limited frequency pulling: Ideally no additional effects w.r.t. the drift caused by spread/temperature in the resonator. Pierce Oscillator

The Pierce Oscillator 21 Based on a single active component The equivalent impedance can be evaluated by simple network analysis C 2 Z C c Z c jω = 1 1 jω C 1C 2 C 1 + C 2 g m ω 2 C 1 C 2 C 1 C 2 Capacitance Negative Resistance

Equivalent Impedance 22 Z c jω = 1 g m jω C 1C 2 ω 2 C 1 C 2 C 1 + C 2 I BIAS The capacitance "pulls" the resonance frequency ω osc = 1 L m C m C 1 C 2 p = ω osc ω m ω m C m 2C 1 C 2 The negative resistance compensates power losses allowing stable oscillation C 1 g m C 2

Stable Oscillation 23 Applying the condition on the real part: g m ω 2 = R m osc C 1 C 2 we conclude that oscillation can be sustained for a very precise ("critical") transconductance value: I BIAS g m = G m,crit = C 1 C 2 ω 2 osc R m C 2 hence a very precise "critical" bias current: g m = I BIAS I nv crit = nv th C 1 C 2 ω 2 osc R m th C 1 g m

Oscillation Start-up 24 Actually, in order to guarantee oscillation growth from electronic noise some margin is required gm ω 2 > R m osc C 1 C 2 I BIAS I BIAS > I crit = nv th C 1 C 2 ω 2 osc R m C 2 What happens if the critical value is exceeded? How can we set the required bias current? C 1 g m

Amplitude Limitation 25 Purposely set a current larger than necessary and rely on non-linearity V gate t I BIAS I BIAS t f m f m I D (f) I D (f) 0 f 0 f 0 f 0 2f 0 3f 0 f

Current Limitation by AGC 26 Different approach: Automatic Gain Control provides a voltage controlled bias current. I BIAS V osc Large enough current to guarantee start-up. V osc AGC senses oscillation amplitude and gradually reduces bias current. C Current close to the critical value I crit at steady state.

Low-Power Operation 27 Non-linearity AGC Χ Large enough margin required to guarantee oscillation start-up (e.g. 6 db gain margin). Χ Small effective transconductance value with a large bias current. Large margin required only at start-up. Amplitude limitation mechanism allows operation at minimum current more efficient! Very simple and compact area. Χ Design an auxiliary circuit

AGC Schematic 28 Different from the AGC you studied in previous classes. No direct amplitude control mechanism. Current generator that provides large bias at startup. It controls the oscillation amplitude by regulating the oscillator bias point. by exploiting the nonlinearity of MOS transistors. I BIAS AGC

Outline 29 Context The MEMS Resonator The Electronic Oscillator System-Level Compensation

Why Compensate? 30 The device resonance frequency drifts with temperature. Δf f = TCf 1 ΔT + TCf 2 ΔT2 Typically the linear contribution is dominant, with a coefficient almost equal to 30 ppm/k. Frequency stability within ±1800 ppm.

Building a Frequency Stable Clock 31 The idea is to start from a much larger frequency than required (e.g. 500 khz) and reduce it to the standard 32 khz by frequency division. f osc T 32768 Hz Such operation needs to track temperature variations and adapt to them: as the frequency drifts, the division factor changes accordingly. f osc N T T = 32 768 Hz

Frequency Division 32 Frequency division schemes are pretty straightforward if the modulus is an integer number. A simple flip-flop can be used as a divide-bytwo circuit. More generally, a digital counter can be used to implement any integer division factor. E ET How can we achieve any real division factor?

Fractional Division 33 V osc (t) A fractional division modulus is implemented "on average" by adopting more than one integer modulus. A digital logic determines the sequence of moduli according to temperature, which is monitored by a sensor in real-time (almost ). V osc V out T N(t) 3 3 3 V out (t)

A Jittery Timing Reference 34 V osc (t) N(t) V out (t) 3 3 3 The output waveform is made of cycles having two different durations, depending on the instantaneous division factor. E.g. if you divide 50% of the time by N, and the remaining 50% by N+1 you can implement a fractional modulus equal to the mean value N + 1 2 The resulting average frequency will be a function of how frequently you divide by one or the other modulus. The more frequently you divide by N, the closer the average frequency is to f osc N

A Jittery Timing Reference 35 This is not such a big deal If your clock is running 2 seconds fast, but stops for 2 seconds, then the accumulated error would be ideally zero. V osc (t) N(t) 3 3 3 3 3 3 The same concept applies here: accumulation of (N)-cycles (shorter than ideal) is compensated by injection of a number of (N+1)-cycles (longer than ideal). Accumulated error is limited, although the error on a single period is huge! V out (t) V ideal out (t) The clock runs fast for a few cycles but a longer cycle allows to compensate the accumulated lead!

Frequency Stable Reference 36 ±1800 ppm COMPENSATION ±10 ppm SYSTEM