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Preliminary Product Overview Features DC to > 3 GHz Frequency Range 25 Watt (CW), 200W (Pulsed) Max Power Handling Low On-State Insertion Loss, typical 0.3 db @ 3 GHz Low On-State Resistance < 0.75 Ω 25dB Isolation @ 3 GHz Maximum voltage (AC or DC): +150 Volts on RF Input < 10us On/Off Switching Time High Reliability > 3 Billion Switching Operations Integrated SPI Bus Gate Control Hermetic 6mm x 6mm x 1.3mm BGA Package Applications High-Power Tunable Resonators and Filters Broadband Power Amplifier Impedance Matching Electronically Steerable Antennas and Phase Shifters Automated Test and Measurement Systems Markets Defense and Aerospace Scientific and Medical Wireless Infrastructure Description The MM3100 device is a high power 6-channel SPST micro-mechanical switch offered by Menlo Micro, which has developed a new Digital-Micro-Switch (DMS) fabrication process and applied it to DC and wideband RF/microwave switch applications. This innovative DMS technology enables robust and highly reliable switches capable of > 25 watts. Each switch provides ultra-low on-state insertion loss and high off-state isolation from DC to > 3 GHz with greater than 3 billion switching cycles at elevated +85ºC temperatures. Each switch is individually controlled by a standard Serial Peripheral Interface (SPI) synchronous bus. An external +5 VDC logic supply and high voltage +70 VDC bias source is required for operation of the internal switch driver. 8/17/2018 MM3100 Datasheet Preliminary Page 1

Available Options Part Number Package Temperature Range MM3100-00 6mm x 6mm 49 ball BGA -40 C to +85 C MM3100-00-E 6mm x 6mm 49 ball BGA -40 C to +100 C Operating Characteristics Absolute Maximum Ratings Exceeding the maximum ratings as listed in Table 1 below may reduce the reliability of the device or cause permanent damage. Operation of the MM3100 should be restricted to the limits indicated in Table 2 and Table 3 recommended operating conditions listed below. Electrostatic Discharge (ESD) Safeguards When handling the MM3100, observe the same precautions as with any other ESD sensitive devices. Even though the MM3100 is protected from ESD damage, precautions must be taken to avoid exceeding the ratings specified in Table 1 below. Susceptibility to Latch-Up The MM3100 digital micro switch device is generally not susceptible to switch latch-up condition, which can occur in some semiconductor or MMIC type switch devices. Table 1 Maximum Ratings 1 Parameter Minimum Maximum Unit Logic Supply Voltage (VDD) 7.5 VDC High Voltage Bias Supply (VBB) 72.5 VDC Serial Input Voltage, Low / High -0.3 VDD + 0.3 V Total CW Input Power / Switch 25 W DC Voltage Rating / Switch +/-150 V DC Current Rating / Switch 1000 ma Operating Temperature Range -40 +85 (MM3100-00) +100 (MM3100-00-E) C ESD Voltage All Pins 2 250 V Storage Temperature Range -70 +150 ºC 1 All parameters must be within recommended operating conditions. Maximum DC and RF power can only be applied during the on-state condition (cold-switched condition). 2 Per Human-body model 8/17/2018 MM3100 Datasheet Preliminary Page 2

Electrical Characteristics Table 2 Recommended Operating Conditions, DC and AC Electrical Characteristics Parameter Minimum Typical Maximum Unit Operating Temperature Range -40 +85 (MM3100-00) +100 (MM3100-00-E) ºC Operating Frequency Range DC 3 GHz CW Power / Channel 3 25 W Peak Power / Channel @ 10% Duty Cycle 4 200 W Insertion Loss @ 3 GHz 0.30 db Input / Output Return Loss @ 3 GHz 15 db Input to Output Isolation @ 3 GHz 18 db Channel to Channel Isolation @ 3 GHz 25 db Off / Open State Switch Rated Voltage (Input to Output) 5 On / Closed State Switch Rated Voltage (Input to Output) 6 +/- 150 VDC +/- 45 VDC Third-Order Output Intercept (OIP3) > 85 dbm Second-Order Output Intercept (OIP2) > 125 dbm On / Off Switching Time 8 10 sec Full Cycle Frequency 10 khz 3 Maximum allowable Continuous Wave Power below 2MHz is 1W. For higher power capability see MM3130 with Tracking Circuit Application. 4 Duty Cycle based on 10 us period. 5 The voltage difference between RF Output (Beam) pin and Supply Voltage Return (VSS) pin must be ±2.5V. 6 This rating applies for Frequencies below 10MHz. For frequencies above 10MHz, see CW Power / Channel and Peak Power / Channel specifications. 8/17/2018 MM3100 Datasheet Preliminary Page 3

Table 3 Recommended Operating Conditions, DC and AC Electrical Characteristics (Continued) Parameter Minimum Typical Maximum Unit On / Off Switch Operations (Cold Switched) 3x10 9 Cycles Steady State Current 1000 ma Hot Switching Current @ 1 Volt 10 ma Off / Open State Leakage Current 7 < 19 pa On / Closed State Resistance (RON) 350 750 mω High Voltage Gate Bias (VBB) 67.5 70 72.5 VDC High Voltage Gate Bias (VBB) Supply Current 0.1 ma Low Voltage Supply (VDD) 4.5 5.0 5.5 VDC Low Voltage Supply (VDD) Current (standby) 50 ua SPI Clock Frequency (CLK) 0.5 5 MHz SPI Logic Level (High) 3.5 5.0 5.3 V SPI Logic Level (Low) -0.3 0.0 0.8 V SPI Pulse Duration clock high 100 ns SPI Pulse Duration latch enable high 100 ns SPI Setup Time data before clock 50 ns SPI Hold Time data after clock 50 ns SPI Delay Time clock to latch enable high 50 ns SPI Propagation Delay Time latch enable to output 300 ns 7 Leakage Current at Output / Beam with 150V incident on the Input / Contact with Switch Off / Open. 8/17/2018 MM3100 Datasheet Preliminary Page 4

Typical Performance Characteristics Note: All measurements performed on MM3100-EVK test and evaluation board Figure 1 Peak Input Power at +25⁰C Figure 2 Peak Power Insertion Loss at +25⁰C Figure 3 CW Input Power at +25⁰C Figure 4 CW Switch Insertion Loss at +25⁰C Figure 5 Switch Isolation at +25⁰C Figure 6 3-Channel CW Input Power at +25⁰C 8/17/2018 MM3100 Datasheet Preliminary Page 5

Note: All measurements performed on MM3100-EVK test and evaluation board Figure 7 CW Input Power at 0⁰C Figure 8 Switch Insertion Loss at 0⁰C Figure 9 Switch Isolation at 0⁰C Figure 10 CW Input Power at -40⁰C Figure 11 Switch Insertion Loss at -40⁰C Figure 12 Switch Isolation at -40⁰C 8/17/2018 MM3100 Datasheet Preliminary Page 6

Note: All measurements performed on MM3100-EVK test and evaluation board Figure 13 CW Input Power at +70⁰C Figure 14 Switch Insertion Loss at +70⁰C Figure 15 Switch Isolation at +70⁰C Figure 16 CW Input Power at +85⁰C Figure 17 Switch Insertion Loss at +85⁰C Figure 18 Switch Isolation at +85⁰C 8/17/2018 MM3100 Datasheet Preliminary Page 7

Note: All measurements performed on MM3100-EVK test and evaluation board Figure 19 Resistance vs Temperature Figure 20 Load Current vs Temperature Figure 21 Channel Insertion Loss vs Frequency ( S21 ) 8/17/2018 MM3100 Datasheet Preliminary Page 8

Figure 22 Return Loss vs Frequency, Blue is at Contact / Input (S11), Green is at Beam / Output (S22) Figure 23 Input to Output Isolation vs Frequency ( S21 with channel off / open ) 8/17/2018 MM3100 Datasheet Preliminary Page 9

49-Lead BGA Package Pin Out Top view / Bump side down Table 4 Detailed Pin Description Pin # Function Description Pin # Function Description A1, C1, J1, L1, L2, L4, L6, L8, L10, L11, J11, C11, A10, A11, A6, A8, A2, A4, E5, E6, E7, F5, F6, F7, G5, G6, G7 RFG RF Ground Reference L9 IN5 RF Input (Contact 5) B1 OUT1 RF Output (Beam 1) K11 IN6 RF Input (Contact 6) D1 BLNK All Channels Off H11 CLK SPI Clock Input E1 SDI SPI Serial Data Input G11 VSS Supply Voltage Return F1, D11 N/C Do Not Connect F11 VDD +5 VDC Logic Supply G1 VBB High Voltage Supply E11 LE SPI Strobe Input H1 SDO SPI Serial Data Output B11 OUT6 RF Output (Beam 6) K1 IN1 RF Input (Contact 1) A9 OUT5 RF Output (Beam 5) L3 IN2 RF Input (Contact 2) A7 OUT4 RF Output (Beam 4) L5 IN3 RF Input (Contact 3) A5 OUT3 RF Output (Beam 3) L7 IN4 RF Input (Contact 4) A3 OUT2 RF Output (Beam 2) 8/17/2018 MM3100 Datasheet Preliminary Page 10

SPI Interface Gate Drive Control Operating Description The SPI bus gate driver block diagram is shown in Figure 22 below. The driver contains a 10-bit shift register and 10-bit latch. This interface uses only registers and latches 6-1. Registers 10-7 are not connected. The high voltage driver is controlled by the Clock, Data In, Latch Enable, and Blanking lines as follows: A 6-bit data word is serially loaded into the shift register on the positive-going transition of the clock. First bit loaded ends up in register 6, last bit in register 1. Parallel data is transferred to the output buffers through a 10-bit D latch while the latch enable input is pulsed high. Only latches 6-1 are connected internally. Data is latched when the Latch Enable is low. If Latch Enable remains high, the latches operate in transparent mode. When the Blanking is high; all of the outputs are low. All inputs are compatible with 5V CMOS levels. Serial Data Out is available for cascading devices (extra clocks needed to pass data through registers 7-10) Figure 24 High Voltage Gate Driver Block Diagram 8/17/2018 MM3100 Datasheet Preliminary Page 11

Figure 25 Switching Waveforms Figure 26 Timing Diagram 8/17/2018 MM3100 Datasheet Preliminary Page 12

Table 5 Digital Control Functions Figure 27 Simplified Functional Block Diagram Clocking and Data Options The driver section has a 10-bit shift register and latch. However, only registers 1-6 are connected to the 6 MM3100 channels in this device. Registers 7 to 10 are unused, except that data must be shifted through them if you wish to cascade devices. The MM3100 provides a Serial Data Output (SDO) pin, which enables cascading this device for additional switch channel applications. Other devices can be daisy-chained by connecting the SDO of one device to SDI of another. 8/17/2018 MM3100 Datasheet Preliminary Page 13

Typical Applications Circuit Ideas Various unique RF/microwave applications can be realized with the SPI bus controlled MM3100 such as the tunable filter circuit as shown in Figure 26 below, a high power transceiver antenna tuner as illustrated in the block diagram of Figure 27 below and high power wideband 4-bit delay line phase shifter using select lengths of micro coaxial cable as illustrated in the block diagram of Figure 28 below. Figure 28 Tunable Filter Circuit Figure 29 High Power Transceiver Antenna Tuner Figure 30 High Power 4-Bit Micro Coaxial Delay Line Phase Shifter 8/17/2018 MM3100 Datasheet Preliminary Page 14

Test and Evaluation Board Technical Description A test and evaluation board kit MM3100-EVK is available as shown in Figure 29 below to verify the performance of the MM3100, and is flexible enough to incorporate into various R&D experimental designs. The RF/microwave layer is 0.020 thick Rogers Corporation 4350B material, er = 2.94. The metal layers are 1.0 ounce copper with gold plated top and bottom layers with high frequency grounded coplanar wave guide launch cinch SMA connectors. Figure 30 MM3100-EVK Test and Evaluation Board Evaluation Board USB Interface Cable The USB interface cable pictured in Figure 30 below is used for connecting up the MM3100 test and evaluation board. This cable provides the virtual serial communications port to interface to the evaluation boards UART to SPI converter controlling the 6 SPST switches. Figure 31 MM3100-EVK USB Interface Cable 8/17/2018 MM3100 Datasheet Preliminary Page 15

Package Dimensions 49 Lead Ball Grid Array 0.30mm Ball, 0.50mm Pitch 8/17/2018 MM3100 Datasheet Preliminary Page 16

Recommended PCB Layout and SMT Parameters PCB lands should be as shown in the pad pattern diagram. Open space around the package can have grounded thru holes. Use ENIG pad surface finish. Use 100 micron thick Soldermask. Use Type 3 or higher Solder Paste with no clean Flux. Component placement force should not exceed 100 grams. Recommended PCB Pad Pattern Figure 32 Recommended PCB Pad Pattern 8/17/2018 MM3100 Datasheet Preliminary Page 17

Package Marking Information The MM3100 package marking and nomenclature is illustrated in Figure 33 below. Dot = Pin 1 Indicator Line 1 = 2D Bar Code Line 2 = Device Part Number Figure 33 Package Markings Ordering Information Part Number Package Packaging MM3100-00 6mm x 6mm x 1.3mm BGA Tape and Reel MM3100-00-E 6mm x 6mm x 1.3mm BGA Tape and Reel 8/17/2018 MM3100 Datasheet Preliminary Page 18

Important Information Disclaimer The data presented in this document is for informational purposes for engineering samples, which have not yet been qualified for production. It shall in no event be regarded as a guarantee of final specifications or characteristics. Any warranty or license for this product shall be specified and governed by the terms of a separate purchase agreement. Menlo Micro does not assume any liability arising out of the application or use of this product; neither does it convey any license under its patent rights, nor the rights of others. Menlo Micro reserves the right to make changes in these specifications and features shown herein to improve reliability, function and design, or discontinue of this product, at any time without notice or obligation. Contact our product representative for the most current information. Warning This product is not authorized for use: 1. In any life support systems. 2. Applications for implanting into the human body, without the express written approval from Menlo Micro. Trademark Notices All trademarks and product service marks is owned by Menlo Microsystems, Inc. Contact Information Please contact Menlo Micro for the latest specifications, additional product information, test and evaluation boards, product samples, worldwide sales and distribution locations: Internet: www.menlomicro.com Email: sales@menlomicro.com For product technical questions and application information: Email: support@menlomicro.com 8/17/2018 MM3100 Datasheet Preliminary Page 19