MMC328xMS. Ultra Small 3-axis Magnetic Sensor, With I 2 C Interface. Signal Path X. Signal Path Y. Signal Path Z FEATURES

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Ultra Small 3-axis Magnetic Sensor, With I 2 C Interface MMC328xMS FEATUES Full integration of 3-axis magnetic sensors and electronics circuits resulting in less external components needed Flexible output resolution available, up to 14bits Small Low profile package 3.0x3.0x1.0mm Low power consumption Power up/down function available through I 2 C interface With continuous operation mode, frequency selectable I 2 C Slave, FAST ( 400 KHz) mode 1.8V compatible IO 1.62V~3.6V wide power supply operation supported ohs compliant APPLICATIONS : Bridge bias X-axis Sensor Y-axis Sensor Z-axis Sensor Bridge egulator Bandgap eference Timing Generation Magnetize Controller Fuses, Control Logic, Factory Interface Signal Path X Signal Path Y Signal Path Z ADC eference Generator I 2 C Interface Measured Data Electronic Compass GPS Navigation Position Sensing Magnetometry FUNCTIONAL BLOCK DIAGAM DESCIPTIONS : The MMC328xMS is a 3-axis magnetic sensor, it is a complete sensing system with on-chip signal processing and integrated I 2 C bus, allowing the device to be connected directly to a microprocessor eliminating the need for A/D converters or timing resources. It can measure magnetic field with a full range of ±8 gausses. The MMC328xMS is packaged in an ultra small low profile LGA package (3.0 x 3.0 x 1.0 mm) and is available in operating temperature ranges of -40 C to +85 C. The MMC328xMS provides an I 2 C digital output with 400 KHz, fast mode operation. Information furnished by MEMSIC is believed to be accurate and reliable. However, no responsibility is assumed by MEMSIC for its use, or for any infringements of patents or other rights of third parties which may result from its use. No license is granted by implication or otherwise under any patent or patent rights of MEMSIC. MEMSIC, Inc. One Technology Drive, Suite 325, Andover, MA01810, USA Tel: +1 978 738 0900 Fax: +1 978 738 0196 www.memsic.com MEMSIC MMC328xMS Preliminary Page 1 of 13 9/9/2010

SPECIFICATION: (Measurements @ 25 C, unless otherwise noted; V DA = V DD = 3.0V unless otherwise specified) Parameter Conditions Min Typ Max Units Field ange Total applied field -8.0 +8.0 gauss (Each Axis) Supply Voltage V DA 1.62 1 3.0 3.6 V V DD (I 2 C interface) 1.62 1 3.0 3.6 V Supply Current 50 measurements/second 0.55 ma Power Down Current 1.0 µa Operating Temperature -40 85 C Storage Temperature -55 125 C Linearity Error ±1 gauss 0.1 %FS (Best fit straight line) ±4 gauss 1.0 %FS +4~+8guass 5.0 %FS -4~-8guass Hysteresis 3 sweeps across ±4 gauss 0.1 %FS epeatability Error 3 sweeps across ±4 gauss 0.1 %FS Alignment Error ±1.0 ±3.0 degrees Transverse Sensitivity ±2.0 ±5.0 % Total MS Noise 1~25Hz, MS 600 µgauss Accuracy 2 ±2.0 ±5.0 degrees Bandwidth 25 Hz Sensitivity ±4 gauss -10 +10 % 461 512 563 counts/gauss Sensitivity Change Over -40~85 C ±1100 ppm/ C Temperature ±4 gauss Null Field Output ±4 gauss -0.2 +0.2 gauss Null Field Output Change Over Delta from 25 C ±0.4 mgauss/ C Temperature 3 ±4 gauss Disturbing Field 10 gauss Maximum Exposed Field 10000 gauss Note: 1 : 1.62V is the minimum operation voltage, or V DA / V DD should not be lower than 1.62V. 2 : Accuracy is dependent on system design, calibration and compensation algorithms used. The specification is based upon using the MEMSIC evaluation board and associate software. 3 : It can be significantly improved when using MEMSIC s proprietary software or algorithm. MEMSIC MMC328xMS Preliminary Page 2 of 13 9/9/2010

I 2 C INTEFACE I/O CHAACTEISTICS (V DD =3.0V) Parameter Symbol Test Condition Min. Typ. Max. Unit Logic Input Low Level V IL -0.5 0.3* V DD V Logic Input High Level V IH 0.7*V DD V DD V Hysteresis of Schmitt input V hys 0.2 V Logic Output Low Level V OL 0.4 V Input Leakage Current I i 0.1V DD <V in <0.9V DD -10 10 µa SCL Clock Frequency f SCL 0 400 khz STAT Hold Time t HD;STA 0.6 µs STAT Setup Time t SU;STA 0.6 µs LOW period of SCL t LOW 1.3 µs HIGH period of SCL t HIGH 0.6 µs Data Hold Time t HD;DAT 0 0.9 µs Data Setup Time t SU;DAT 0.1 µs ise Time t r From V IL to V IH 0.3 µs Fall Time t f From V IH to V IL 0.3 µs Bus Free Time Between STOP and t BUF 1.3 µs STAT STOP Setup Time t SU;STO 0.6 µs SDA t f t LOW t r t SU;DAT t f t t SP HD;STA t r t BUF SCL S t HD;STA t HD;DAT t HIGH t SU;STA Sr t SU;STO P S Timing Definition MEMSIC MMC328xMS Preliminary Page 3 of 13 9/9/2010

ABSOLUTE MAXIMUM ATINGS* Supply Voltage (V DD )...-0.5 to +5.0V Storage Temperature. -55 C to +125 C Maximum Exposed Field..10000 gauss *Stresses above those listed under Absolute Maximum atings may cause permanent damage to the device. This is a stress rating only; the functional operation of the device at these or any other conditions above those indicated in the operational sections of this specification is not implied. Exposure to absolute maximum rating conditions for extended periods may affect device reliability. Pin Description: LGA-10 (3x3x1mm) Package Pin Name Description I/O 1 GND Connect to Ground P 2 Vpp Factory Use Only, Leave NC Open 3 V DA Power Supply P 4 CAP Connect to External Capacitor I 5 TEST Factory Use Only, Leave NC Open/No Connect 6 V DD Power Supply for I 2 C bus P 7 SDA Serial Data Line for I 2 C bus I/O 8 SCL Serial Clock Line for I 2 C bus I 9 NC No Connection NC 10 NC No Connection NC All parts are shipped in tape and reel packaging with 5000pcs per 13 reel. Caution: ESD (electrostatic discharge) sensitive device. Ordering Guide: MMC328xMS Package type: Code S Type LGA10 5050 pad arrangement ohs compliant Performance Grade: Code Performance Grade M Temp compensated Address code: 0~7 Code 7bit I 2 C Address 0 0110000b 1 0110001b 2 0110010b 3 0110011b 4 0110100b 5 0110101b 6 0110110b 7 0110111b Marking illustration: 4 5 1 2 3 34X 012 6 7 Number Part number 34X 340 MMC3280MS 341 MMC3281MS 342 MMC3282MS 343 MMC3283MS 344 MMC3284MS 345 MMC3285MS 346 MMC3286MS 347 MMC3287MS Small circle indicates pin one (1). 8 9 10 THEOY: The anisotropic magnetoresistive (AM) sensors are special resistors made of permalloy thin film deposited on a silicon wafer. During manufacturing, a strong magnetic field is applied to the film to orient its magnetic domains in the same direction, establishing a magnetization vector. Subsequently, an external magnetic field applied perpendicularly to the sides of the film causes the magnetization to rotate and change angle. This in turn causes the film s resistance to vary. The MEMSIC AM sensor is included in a Wheatstone bridge, so that the change in resistance is detected as a change in differential voltage and the strength of the applied magnetic field may be inferred. However, the influence of a strong magnetic field (more than 10 gausses) along the magnetization axis could upset, or flip, the polarity of the film, thus changing the sensor characteristics. The MEMSIC magnetic sensor can provide an electrically-generated strong magnetic field to restore the sensor characteristics. + + + MEMSIC MMC328xMS Preliminary Page 4 of 13 9/9/2010

PIN DESCIPTIONS: V DA This is the supply input for the circuits and the magnetic sensor. The DC voltage should be between 1.62 and 3.6 volts. efer to the section on PCB layout and fabrication suggestions for guidance on external parts and connections recommended. GND This is the ground pin for the magnetic sensor. SDA This pin is the I 2 C serial data line, and operates in FAST (400 KHz) mode. SCL This pin is the I 2 C serial clock line, and operates in FAST (400 KHz) mode. V DD This is the power supply input for the I 2 C bus, and is 1.8V compatible can be 1.62V to 3.6V. I 2 C INTEFACE DESCIPTION A slave mode I 2 C circuit has been implemented into the MEMSIC magnetic sensor as a standard interface for customer applications. The A/D converter and MCU functionality have been added to the MEMSIC sensor, thereby increasing ease-of-use, and lowering power consumption, footprint and total solution cost. The I 2 C (or Inter IC bus) is an industry standard bidirectional two-wire interface bus. A master I 2 C device can operate EAD/WITE controls to an unlimited number of devices by device addressing. The MEMSIC magnetic sensor operates only in a slave mode, i.e. only responding to calls by a master device. TEST Factory use only, Leave Open/No Connect. CAP Connect a 10uF low ES ceramic capacitor. Vpp Factory use only, Leave Open I 2 C BUS CHAACTEISTICS VDD EXTENAL CAPACITO CONNECTION p p Power I Power II SDA (Serial Data Line) SCL (Serial Clock Line) GND 1 NC 10 Vpp 2 +X axis NC 9 DEVICE 1 DEVICE 2 0.1u F V DA 3 CAP 4 +Z axis +Y axis SCL 8 SDA 7 I 2 C Bus 10uF TEST 5 (Top View) POWE CONSUMPTION The MEMSIC magnetic sensor consumes 0.55mA (typical) current at 3V with 50 measurements/second, but the current is proportional to the number of measurements carried out, for example, if only 20 measurements/second are performed, the current will be 0.55*20/50=0.22mA. V DD 6 0.1u F The two wires in I 2 C bus are called SDA (serial data line) and SCL (serial clock line). In order for a data transfer to start, the bus has to be free, which is defined by both wires in a HIGH output state. Due to the open-drain/pull-up resistor structure and wired Boolean AND operation, any device on the bus can pull lines low and overwrite a HIGH signal. The data on the SDA line has to be stable during the HIGH period of the SCL line. In other words, valid data can only change when the SCL line is LOW. Note: p selection guide: 4.7Kohm for a short I 2 C bus length (less than 4inches), and 10Kohm for less than 2inches I 2 C bus. MEMSIC MMC328xMS Preliminary Page 5 of 13 9/9/2010

EGISTE: egister Details: Xout High, Xout Low egister Name Address Description Xout Low 00H Xout LSB Xout High 01H Xout MSB Yout Low 02H Yout LSB Yout High 03H Yout MSB Zout Low 04H Zout LSB Zout High 05H Zout MSB Status 06H Device status Internal control 0 07H Control register 0 Internal control 1 08H Control register 1 esidual0 1CH esidual data after calibration esidual1 1DH esidual data after calibration esidual2 1EH esidual data after calibration esidual3 1FH esidual data after calibration esidual4 20H esidual data after calibration esidual5 21H esidual data after calibration Xout Low 7 6 5 4 3 2 1 0 Addr: 00H Xout[7:0] eset Value Xout[7:0] Xout High 7 6 5 4 3 2 1 0 Addr: 01H eserved Xout[13:8] eset Value 2 h0 Xout[13:8] 11 to 14bits X-axis output, 2 s complement format. Yout High, Yout Low Yout Low 7 6 5 4 3 2 1 0 Addr: 02H Yout[7:0] eset Value Yout[7:0] Yout High 7 6 5 4 3 2 1 0 Addr: 03H eserved Yout[13:8] eset Value 2 h0 Yout[13:8] 11 to 14bits Y-axis output, 2 s complement format. Zout High, Zout Low Zout Low 7 6 5 4 3 2 1 0 Addr: 04H Zout[7:0] eset Value Zout[7:0] MEMSIC MMC328xMS Preliminary Page 6 of 13 9/9/2010

Zout High 7 6 5 4 3 2 1 0 Addr: 05H eserved Zout[13:8] eset Value 2 h0 Zout[13:8] 11 to 14bits Z-axis output, 2 s complement format. Status: Device Status 7 6 5 4 3 2 1 0 Addr: 06H eserved NVM_ d Done Pump On eset Value 5 h0 0 0 0 Meas Done egister Name Meas Done Pump On NVW_d Done Description Indicates measurement event is completed, should be checked before reading output Indicates the charge pump status Indicates the chip was able to successfully read its NVW memory. Internal Control 0: Control egister 0 7 6 5 4 3 2 1 0 Addr: 07H eserved M No CM CM Cont TM Boost Freq1 Freq0 On eset Value 2 h0 0 0 0 0 0 0 W W W W W W W W egister Name TM Cont On CM Freq0 CM Freq1 No Boost M Description Take measurement, set 1 will initiate measurement. Set 1, the device will go into continuous operation mode Continuous operation mode frequency: 00: 50Hz, 01: 20Hz, 10: 10Hz; 11: 1Hz Set 1, the external capacitor will be charged directly from VDD (>2.5V). Set 1 will electrically magnetize the M. Internal Control 1: Control egister 1 7 6 5 4 3 2 1 0 Addr: 08H eserved Filt Filt es es FS1 FS0 Time Sel1 Time Sel0 Sel1 Sel0 eset Value 2 h0 0 0 0 0 0 0 W W W W W W W W MEMSIC MMC328xMS Preliminary Page 7 of 13 9/9/2010

egister Name FS0 FS1 es Sel0 es Sel1 Filt Time Sel0 Filt Time Sel1 Description Operation range selection, 00/11 +/-2Gausses; 01: +/-5 Gausses; 10: +/-4Gausses Output Data resolution selection, 00: 11bits; 01: 12bits; 10: 13bits; 11: 14bits Select the bandwidth and the time the device is averaging the signal before going into A/D conversion, 00: 0.8mS; 01: 1.6mS; 10: 2.4mS; 11: 3.2mS. esidual0, esidual1, esidual2, esidual3, esidual4, esidual5 esidual0 7 6 5 4 3 2 1 0 Addr: 1CH esidual0[7:0] eset Value esidual0[7:0] esidual1 7 6 5 4 3 2 1 0 Addr: 1DH esidual1[7:0] eset Value esidual1[7:0] esidual2 7 6 5 4 3 2 1 0 Addr: 1EH esidual2[7:0] eset Value esidual2[7:0] esidual3 7 6 5 4 3 2 1 0 Addr: 1FH esidual3[7:0] eset Value esidual3[7:0] esidual4 7 6 5 4 3 2 1 0 Addr: 20H esidual4[7:0] eset Value esidual4[7:0] esidual5 7 6 5 4 3 2 1 0 Addr: 21H esidual5[7:0] eset Value esidual5[7:0] MEMSIC MMC328xMS Preliminary Page 8 of 13 9/9/2010

DATA TANSFE A data transfer is started with a STAT condition and ended with a STOP condition. A STAT condition is defined by a HIGH to LOW transition on the SDA line while SCL line is HIGH. A STOP condition is defined by a LOW to HIGH transition on the SDA line while SCL line is HIGH. All data transfer in I 2 C system is 8-bits long. Each byte has to be followed by an acknowledge bit. Each data transfer involves a total of 9 clock cycles. Data is transferred starting with the most significant bit (MSB). After a STAT condition, master device calls specific slave device, in our case, a MEMSIC device with a 7-bit device address [0110xxx]. To avoid potential address conflict, either by ICs from other manufacturers or by other MEMSIC device on the same bus, a total of 8 different addresses can be pre-programmed into MEMSIC device by the factory. Following the 7-bit address, the 8 th bit determines the direction of data transfer: [1] for EAD and [0] for WITE. After being addressed, available MEMSIC device being called should respond by an Acknowledge signal, which is pulling SDA line LOW. In order to read sensor signal, master device should operate a WITE action with a code of [xxxxxxx1] into MEMSIC device 8-bit internal register. Note that this action also serves as a wake-up call. After writing code of [xxxxxxx1] into Internal Control 0, and the bit0 TM (Status egister, bit 0) is 1, also a EAD command is received, the MEMSIC device being called transfers 8-bit data to I 2 C bus. POWE DOWN MODE MEMSIC M sensor will enter power down mode automatically after data acquisition is finished. EXAMPLE OF TAKE MEASUEMENT First cycle: STAT followed by a calling to slave address [0110xxx] to WITE (8 th SCL, SDA keep low). [xxx] is determined by factory programming, total 8 different addresses are available. Second cycle: After an acknowledge signal is received by master device (MEMSIC device pulls SDA line low during 9 th SCL pulse), master device sends [00000111] as the target address to be written into. MEMSIC device should acknowledge at the end (9 th SCL pulse). Fourth cycle: Master device sends a STAT command followed by calling MEMSIC device address with a WITE (8 th SCL, SDA keep low). An acknowledge should be send by MEMSIC device at the end. Fifth cycle: Master device writes to MEMSIC device a [00000110] as the address to read. Sixth cycle: Master device calls MEMSIC device address with a EAD (8 th SCL cycle SDA line high). MEMSIC device should acknowledge at the end. Seventh cycle: Master device cycles SCL line, the Status egister data appears on SDA line. Continuous read till Meas Done bit was set to 1. Eighth cycle: Master device sends a STAT command followed by calling MEMSIC device address with a WITE (8 th SCL, SDA keep low). An acknowledge should be send by MEMSIC device at the end. Ninth cycle: Master device writes to MEMSIC device a [00000000] as the address to read. Tenth cycle: Master device calls MEMSIC device address with a EAD (8 th SCL cycle SDA line high). MEMSIC device should acknowledge at the end. Eleventh cycle: Master device continues to cycle the SCL line, next byte of internal memory should appear on SDA line (LSB of X channel). The internal memory address pointer automatically moves to the next byte. Master acknowledges. Twelfth cycle: MSB of X channel. Thirteenth cycle: LSB of Y channel. Fourteenth cycle: MSB of Y channel. Fifteenth cycle: LSB of Z channel. Sixteenth cycle: MSB of Z channel. Master ends communications by NOT sending Acknowledge and also followed by a STOP command. Third cycle: Master device writes to Internal Control egister 1 the code [00000001] as a wake-up call to initiate a data acquisition. MEMSIC device should send acknowledge. EXAMPLE OF MAGNETIZATION First cycle: STAT followed by a calling to slave address [0110xxx] to WITE (8 th SCL, SDA keep low). [xxx] is determined by factory programming, total 8 different addresses are available. A STOP command indicates the end of write operation. Second cycle: After an acknowledge signal is received by master device (MEMSIC device pulls SDA line low MEMSIC MMC328xMS Preliminary Page 9 of 13 9/9/2010

during 9 th SCL pulse), master device sends [00000111] as the target address (Internal Control egister 0). MEMSIC device should acknowledge at the end (9 th SCL pulse). Third cycle: Master device writes to internal MEMSIC device memory the code [00100000] as a wake-up call to initiate a magnetization action. MEMSIC device should send acknowledge. A minimal of 50us wait should be given to MEMSIC device to finish magnetization action before taking a measurement. The M bit will be automatically clear to 0 after magnetization is done. And the device will go into sleep mode afterwards. MEMSIC MMC328xMS Preliminary Page 10 of 13 9/9/2010

OPEATING TIMING VDD I 2 C M T T T M T t op t FM t M t TM t TM t TM t M t TM M Magnetize T Take measurement ead data epeat T & Wait the device ready for next operation Operating Timing Diagram Parameter Symbol Min. Typ. Max. Unit Time to operate device after Vdd valid t op 20 µs Wait time from power on to M command t FM 10 ms Time to finish magnetization t M 50 µs Time to measure magnetic field t TM 7 ms MEMSIC MMC328xMS Preliminary Page 11 of 13 9/9/2010

STOAGE CONDITIONS Temperature: <30 Humidity: <60%H Period: 1 year (after delivery) Moisture Sensitivity Level: 2 Bake Prior to eflow: storage period more than 1 year, or humidity indicator card reads >60% at 23±5 Bake Procedure: refer to J-STD-033 Bake to Soldering: <1 week under 30 /60%H condition SOLDEING ECOMMENDATIONS MMC328xMS is capable of withstanding an MSL2 / 260 solder reflow. Following is the reflow profile: Note: eflow is limited by 2 times The second reflow cycle should be applied after device has cooled down to 25 (room temperature) This is the reflow profile for Pb free process The peak temperature on the sensor surface should be limited under 260 for 10 seconds. Solder paste s reflow recommendation can be followed to get the best SMT quality. If the part is mounted manually, please ensure the temperature could not exceed 260 for 10 seconds. MEMSIC MMC328xMS Preliminary Page 12 of 13 9/9/2010

PACKAGE DAWING (TOP VIEW) Pin 1 mark 0.5 (BOTTOM VIEW) Pin 1 mark (No connection) 1 2 3 4 5 34X 012 10 9 8 7 6 0.25 10 NC GND 1 0.6 9 NC Vpp 2 8 7 6 SCL SDA VDD GND VDA CAP TEST 3 4 5 0.6 0.525 0.5 0.5 0.5 0.5 3.05±0.1 0.05 (SIDE VIEW) 2.45 3.05±0.1 0.3 X+ Z+ 1.05±0.05 Y+ LAND PATTEN The recommended land pattern is the same as the sensor s solder pad. Please refer to the package drawing. MEMSIC MMC328xMS Preliminary Page 13 of 13 9/9/2010