Design of THz Signal Generation Circuits Using 65nm CMOS Technologies

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Design of THz Signal Generation Circuits Using 65nm CMOS Technologies Hyeong-Jin Kim, Wonseok Choe, and Jinho Jeong Department of Electronics Engineering, Sogang University E-mail: jjeong@sogang.ac.kr Abstract - In this paper, we present THz signal generation circuits in 65 nm CMOS technologies. All the designed circuits are verified by simulations. A push-push oscillator is designed for a THz signal generation, which has output frequency of 3 GHz and output power of -7.4 dbm. THz on-chip antennas are designed to radiate the signal generated by the oscillators.. The simulation results of the designed CMOS loop antenna show the gain of 4.19 db and radiation efficiency of 7 % at 26 GHz. In order to couple the oscillator to the waveguide, E-plane probe waveguide-to-microstrip transition is designed to have the simulated insertion loss of 2.1 db and bandwidth of 118 GHz around 28 GHz. I. INTRODUCTION Recently, integrated circuits (ICs) operating in terahertz (THz) frequencies such as amplifiers, mixers, oscillators, and detectors have been successfully reported using heterojunction transistors (HBTs) or high-electron mobility transistors (HEMTs) [1] [5]. The frequencies above 275 GHz have the potential to achieve ultrahigh-speed wireless communication because a wide unallocated frequency band is available. It is challenging to realize a CMOS transmitter or source modules operating above 275 GHz because the maximum operating frequency f max of an NMOSFET of a recent bulk CMOS process is comparable to or below that frequency. However, the rapid progress of CMOS technology by geometry scaling and traditional performance improvements have made circuits operating above 1 GHz feasible. Therefore, sub-harmonically designed circuits can be used in THz systems or modules. THz antenna is an essential component for composing THz source module. In THz bands, horn antenna or on-chip antenna is widely used. Horn antennas can have broad bandwidth and high gain, but need machining process for fabrication and need waveguide-to-microstrip transition to connect to ICs. On-chip antennas have advantages that it is easy to fabricate and don t need bondwire and waveguide-tomicrostrip transitions for connecting to THz ICs. However, most of the THz on-chip antennas have problems of low radiation efficiency and narrow bandwidth, which are caused by increased losses from conductors and very thin thickness of substrate between antenna and ground plane. Standard rectangular CMOS on-chip patch antennas have shown fractional bandwidth and radiation efficiency less than 1% [6]. THz ICs are generally fabricated using planar transmission lines such as microstrip lines or grounded coplanar waveguides (GCPWs). In THz system, waveguide in/output flanges are widely used, because they are easy to fabricate and have low loss. Therefore, transitions from waveguide-tomicrostrip or GCPWs are essential to package THz ICs in the waveguides for module and system applications. Various types of waveguide-to-microstrip transitions, such as E-plane probe, dipole antenna, fin-line, SIW, are reported [7] [12]. E- plane probe transition is widely used because of its small circuit size and broad band characteristics. In this paper, we designed new E-plane probe transitions which solve the problems that conventional one has. In this paper, the designs of THz oscillator, broad-band onchip antennas, and on-chip waveguide-to-microstrip transition are presented. In addition, THz source modules are designed by combining these circuits. The proposed circuits are designed using 65-nm CMOS technologies, and verified by simulations. II. DESIGN OF THz CIRCUITS A. 3 GHz Push-push oscillator For designing oscillators have its fundamental oscillation frequency of 3 GHz, proper selection of the topology is required, because of the oscillation frequency is higher than the f T/f max of the device. At first, we consider designing a fundamental oscillator, because of its high output power. a. Corresponding author; jjeong@sogang.ac.kr Copyright 218 IDEC All rights reserved. This is an Open-Access article distributed under the terms of the Creative Commons Attribution Non-Commercial License (http://creativecommons.org/licenses/by-nc/3.) which permits unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.

Input Differential oscillation @ f In-phase power combiner Output Fig. 1. Designed push-push oscillator using two fundamental oscillators. Z s Z g 5 Ω Symmetry plane OMN OMN Output Virtual ground @ f Fig. 3. Structure of the designed CMOS loop antenna. Z g λ/4 Waveguide back-short Z L Microstrip OMN E-plane probe V dd Fig. 2. Schemetic of push-push oscillator using 65 nm CMOS process. However, oscillation condition can be hardly met at 3 GHz among the combinations of the values of gate and source impedances (Z g and Z s), and feedback network can be hardly implemented. To solve this problem, we decide to design push-push oscillator. The push-push oscillator is composed of two fundamental oscillators as shown in Fig. 1. The output ports of the two oscillators are connected and fundamental components(f ) are canceled out and second harmonic components (2f ), which is used as output frequency, are added constructively. Due to the its operation principles, oscillation condition of push-push oscillator should be met at f, and output networks are designed considering fundamental oscillation condition and output power combining. Push-push oscillator has the advantage that it can get output frequency over f T, but the output power of it is much lower than the fundamental oscillators have same output frequency. Fig. 2 shows the schematic of the proposed push-push oscillator. Two identical series feed-back oscillators are Waveguide Fig. 4. Structure of designed E-plane transition. designed to oscillate at 15 GHz. The gate and source impedances are swept to find its optimum values meeting the oscillation condition at 15 GHz. The values of Z g and Z s are chosen to be j65 Ω and j15 Ω, respectively. To implement these impedances at each ports, gate and source feedback networks were designed. The source feedback network is composed of λ g/4-long short stub for biasing and open stub for implementing Z s, and gate feedback network is designed using simple microstrip lines. The output matching network is designed to provide load impedance (Z L) of 35+j15 Ω at 15 GHz for meeting oscillating condition. The push-push oscillator is constructed by connecting two 15 GHz oscillators differentially, as shown in Fig. 2. B. THz on-chip antennas Fig. 3 shows the structure of the designed on-chip loop antenna. The main reasons for the high losses of the THz onchip patch antennas are metallic loss and thin substrate

6 μm 15 1 (a) (a) 57 μm Output (mv) 5-5 -1-15 2 4 6 8 1 Time (psec) (b) Fig. 5. Simulation results of the designed push-push oscillator. (a) Output power spectrum. (b) Output voltage waveform. thickness between patch and ground plane. However, loop antenna is known as one of the antenna has high efficiency, because its ground plane is removed and metallic losses and substrate loss can be reduced. It is almost impossible to measure the characteristics of the loop antenna with on-wafer probing because of its no-ground plane structure. To solve this problem, we decided to combine the loop antenna with push-push oscillator. C. THz on-chip waveguide-to-microstrip transition Among many kinds of waveguide-to-microstrip transition topologies, E-plane probe transition is widely used in THz band, because of its small size and the easy of fabrication. The probe is inserted into the waveguide through the channel which is at the side wall of the waveguide, and placed on the E-plane. The probe is placed at the point apart from approximately λg/4 from the waveguide backshort. Because of the direction of the channel is normal to the direction of the waveguide propagation, input and output ports of the waveguide are not aligned and input and output waveguides are needed to be bended for the port alignment. Fig. 6. Designed THz CMOS push-push oscillator. (a) Photograph. (b) Layout. (b) The E-plane probe transitions can be fabricated both on chip or off chip. By using on-chip transitions, there is no need to use bonding wire for connecting THz ICs to waveguide-tomicrostrip transition. However, on-chip transitions suffer from its limitation of circuit size, because the circuit should be small enough to get into the channel, and the size of channel should be small enough to maintain propagation mode of the waveguide. Because of this, the circuit size can t be bigger than the channel size. To solve this problem, offchip transition or dry etching process can be used but it accompanies parasitic effects and additional expenses. To solve these problems, we proposed a new structures of the on-chip E-plane probe transition as shown in Fig. 4. The on-chip probe is placed at the corner of the ICs and the corner of the ICs is inserted into the waveguide. By this way, the

Radiation efficiency (db) IDEC Journal of Integrated Circuits and Systems, VOL 4, No.1, Jan. 218-5 S 11 (db) -1-15 -2 22 24 26 28 3 32 Frequency (GHz) Fig. 7. Simulated reflection coefficient of the designed loop antenna. 1 Fig. 9. Radiation pattern of the designed loop antenna at 26 GHz 1 um 8 6 4 2 22 24 26 28 3 32 Frequency (GHz) 3 um 4 um 15 um 6 um 16 um 2 um 65 um 22 um Fig. 1. Layout of the designed loop antenna. 185 um Fig. 8. Simulated radiation efficiency of the designed loop antenna channel size can be fixed regardless of the IC size. III. SIMULATION RESULTS AND FABRICATION A. 3 GHz Push-push oscillator Fig. 5. shows the simulation results of the designed pushpush oscillator. The simulation results show fundamental oscillation frequency of 15 GHz and -7.8 dbm of output power and transient of designed oscillator. Fig. 6 shows the layout of the designed oscillator and photograph of the fabricated circuit. The designed oscillator has size of 6 μm 57 μm. B. THz on-chip antennas Fig. 7 and Fig. 8 show the simulation results of the designed on-chip loop antenna. The simulation results showed radiation efficiency of 7 % (24 GHz) and 1-dB fractional bandwidth of 21.6 %. Fig. 9 show the radiation pattern of designed on-chip loop antenna. It radiates power in z direction. The peak directivity and gain are 6.59 dbi (26 GHz) and 4.41 dbi (24 GHz). Fig. 1. shows the layout of the designed on-chip loop antenna of the fabricated circuit. The designed loop antenna has size of 1 μm 1 μm. Fig. 11. Layout of the designed THz signal generation circuits with loop antenna and differential oscillator. Fig. 9 shows the gain pattern of the designed on-chip loop antenna. The loop antenna radiates power in the Z axis direction.

S 11 (db) -5-1 -15-2 -25 db(s(1,1)) db(s(1,2)) -3 22 24 26 28 3 32 Frequency (GHz) Fig. 12. Simulation results of the designed on-chip E-plane probe transition. V. CONCLUSIONS In this paper, we designed THz circuits using 65-nm CMOS technologies. Push-push oscillators are designed as a THz sources, and its simulation results show output power of dbm and output frequency of 3 GHz. High efficiency THz on-chip antenna was also designed. To improve the bandwidth and radiation efficiency of the on-chip antenna, we designed terahertz on-chip loop antenna. The simulation results show antenna gains of 4.41 db, and radiation efficiencies of 7 %. To mount THz circuits on waveguide module, THz on-chip waveguide-to-microstrip transitions were designed. The proposed waveguide-to-microstrip transitions have advantages of it can be used regardless of the size of the circuits which is connected to the transition. The simulation results show insertion loss of db and bandwidth of GHz. Finally, we designed CMOS THz source modules by combining each aforementioned THz circuits. ACKNOWLEDGMENT The chip fabrication and EDA tool were supported by the IC Design Education Center(IDEC), Korea. REFERENCES Fig. 13 Layout of the designed THz signal generation circuit with transition and oscillator. C. On-chip waveguide-to-microstrip transition Fig. 12 shows the simulation results of the designed onchip E-plane probe transition. The simulation results was back-to-back insertion loss of 2.56 db. Fig. 13 shows the layout of the designed on-chip E-plane probe transition of the fabricated circuits. The designed E-plane probe transitions have sizes of 1, μm 6 μm. IV. DESIGN OF THz SOURCE CIRCUITS THz source circuits were designed by combining designed THz ICs. Fig. 13 shows the layouts of circuits for THz source. Fig. 13 shows layouts of THz source circuits which is composed of push-push oscillator and on-chip E-plane probe waveguide-to-microstrip transition. The circuit size is 615 μm 675 μm, and WR-3 horn antenna will be combined with the waveguide source module. Fig. 11 shows another layout of THz source circuit. This circuit is composed of push-push oscillator and on-chip loop antenna. [1] K. B. Cooper, R. J. Dengler, N. Llombart, B. Thomas, G. Chattopadhyay and P. H. Siegel, "THz Imaging Radar for Standoff Personnel Screening," in IEEE Trans. THz Science and Techn., vol. 1, no. 1, pp. 169-182, Sept. 211. [2] S. Sarkozy et al., "Demonstration of a G-Band Transceiver for Future Space Crosslinks," in IEEE Trans. THz Science and Techn., vol. 3, no. 5, pp. 675-681, Sept. 213. [3] L. A. Samoska, "An Overview of Solid-State Integrated Circuit Amplifiers in the Submillimeter-Wave and THz Regime," in IEEE Trans. THz Science and Techn., vol. 1, no. 1, pp. 9-24, Sept. 211. [4] M. Seo et al., "InP HBT IC Technology for Terahertz Frequencies: Fundamental Oscillators Up to.57 THz," in IEEE Journal of Solid-State Circuits, vol. 46, no. 1, pp. 223-2214, Oct. 211. [5] R. Weber et al., "An H-band low-noise amplifier MMIC in 35 nm metamorphic HEMT technology," 212 7th European Microwave Integrated Circuit Conference, Amsterdam, 212, pp. 187-19. [6] M. Shafee, S. Nahar, A. M. E. Safwat, H. El-Hennawy and M. M. Hella, "Stacked resonator patch antenna for wide bandwidth THz detection," 214 IEEE International Conference on Ultra-WideBand (ICUWB), Paris, 214, pp. 24-244. [7] M. Varonen et al., "LNA modules for the WR4 (17 26 GHz) frequency range," 214 IEEE MTT-S International Microwave Symposium (IMS214), Tampa, FL, 214, pp. 1-4. [8] A. Tessmann et al., "A 3 GHz mhemt amplifier module," 29 IEEE International Conference on Indium Phosphide & Related Materials, Newport

Beach, CA, 29, pp. 196-199. [9] K. M. K. H. Leong et al., "A 34 38 GHz Integrated CB-CPW-to-Waveguide Transition for Sub Millimeter- Wave MMIC Packaging," in IEEE Microwave and Wireless Components Letters, vol. 19, no. 6, pp. 413-415, June 29. [1] V. Radisic et al., "22-GHz Solid-State Power Amplifier Modules," in IEEE Journal of Solid-State Circuits, vol. 47, no. 1, pp. 2291-2297, Oct. 212. [11] A. Tessmann et al., "A Broadband 22-32 GHz Medium Power Amplifier Module," 214 IEEE Compound Semiconductor Integrated Circuit Symposium (CSICS), La Jolla, CA, 214, pp. 1-4. [12] T. Tajima, H. J. Song and M. Yaita, "Design and Analysis of LTCC-Integrated Planar Microstrip-to- Waveguide Transition at 3 GHz," in IEEE Transactions on Microwave Theory and Techniques, vol. 64, no. 1, pp. 16-114, Jan. 216. THz antennas. Hyeong-jim Kim received the B.S. degree in electronics engineering from Sogang University, Seoul, Korea, in 216. He is working on his M.S. degree in electronics engineering at Sogang University, Seoul. His research interest include monolithic microwave integrated circuits, THz integrated circuits, and Jinho Jeong (S M 5) received the B.S., M.S.,and Ph.D. degrees in electrical engineering from eoul National University, Seoul, South Korea, in 997, 1999, and 24, respectively. From 24 to 7, he was in the University of California at San Diego, La Jolla, CA, USA, as a Postdoctoral Scholar, where he was involved with the design of highefficiency and high-linearity RF power amplifiers. In 27, he joined the Department of Electronics and Communications Engineering, Kwangwoon University, Seoul. Since 21, he has been with the Department of Electronic Engineering, Sogang University, Seoul. His research interests include monolithic microwave integrated circuits, THz integrated circuits, high-efficiency/highlinearity power amplifiers and oscillators, and wireless power transfers.