RGH34 encoder system. Data sheet L A. RGH34 readhead and RGI34 interface: RGS40 scale:

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L-9517-978-01-A The Renishaw RGH34 series is a non-contact optical encoder system, providing highly-reliable positional feedback. This modular miniaturised encoder consists of an RGH34 readhead that reads a graduated scale; and an RGI34 interface that outputs a choice of industry standard 1Vpp analogue or RS4 digital signals with a wide range of resolutions. It offers the benefits of Renishaw s established encoder series, such as a set-up LED indicator for easy installation, and unique filtering optics for excellent dirt immunity. In addition to those popular features, the RGH34 adds higher speeds for improved productivity, increased setup tolerances, and reduced size enabling greater installation flexibility. The RGH34 reads the 40 µm pitch RGS40 gold tape-scale. RGS40 is suitable for mounting to most common engineering materials including metals, granites, ceramics and composites. The scale can be mastered to the axis substrate by means of specially formulated pre-applied adhesive and epoxy fastened end clamps. This method ensures the differential movement between the scale and the substrate is close to zero, even with significant temperature swings. With a modular construction and industry proven reliability, RGH34 is designed for OEM applications where a conventional enclosed encoder cannot be fitted. It brings robust performance to size sensitive precision linear and rotary motion applications such as ultra-small linear actuators, microscopes and microstages. RGH34 readhead and RGI34 interface: Compact component style readhead Non-contact open optical system Industry standard digital and analogue output options Resolutions from 10 µm to 50 nm Optional reference or limit sensor Integral set-up LED RGS40 scale: Cut-to-length flexibility Lengths from 100 mm to over 50 m Protective lacquer or tough polyester coating option for applications using harsh solvents Efficient, accurate installation Affixes to most common engineering materials Self-adhesive backing tape Applicator tool allows scale to be installed using the motion of the axis

RGH34 readhead installation drawing Dimensions and tolerances in mm (Roll tol. ±1 ) 0.09 10.5 1.5 Component area Forward direction of readhead relative to scale 90 vee (Yaw tol. ±1 ) 0. Ø1 FPC cable 4 Optical centreline 15 7.5 6 5.5 10.5.55 14.1 Optional magnetic 1.6 7 reference or 1.3-0.1 limit switch sensor Limit actuator +0. (A-9531-051) lower edge to be 0.8 ±0.5* positioned.7 ±0.5 above scale substrate 10 4.6 15 7.5 Reference mark actuator (A-9531-050) (Pitch tol. ±1 ) 0. Scale surface 3.9 max. depth of mounting surface.7 ±0.5 Component area 7.1 FPC cable *Dimension measured from scale surface. Rideheight 1.5 ±0.15* RGI34 interface drawing Dimensions and tolerances in mm 35 Bracket omitted from this view 8.5 1 8 5.5 Ground connection to case for optimum EMC performance (hole dia. 1 mm) FPC cable to RGH34 readhead. Available in 50, 100 and 150 mm lengths 36.5 9.6 9 1 Component area 30 0.5 Mounting bracket (M-9537-0193) supplied with interface 7 7 0.5 14 4.75 1.5 Set-up LED Ø3.5 mounting holes off Ø3.5 alternative mounting holes off

General specifications Power supply 5 V ± 5% 10 ma NOTE: Current consumption figures refer to unterminated RGI34 interfaces. Ripple For digital outputs a further 5 ma per channel pair (e.g. A+, A-) will be drawn when terminated with 10 Ω. For analogue outputs a further 0 ma will be drawn when terminated with 10 Ω. Power from a 5 V dc supply complying with the requirements for SELV of standard IEC BS EN 60950-1. 00 mvpp @ frequency up to 500 khz maximium Temperature Storage -0 C to +70 C Operating 0 C to +55 C Humidity 95 % relative humidity (non-condensing) to EN 60068--78 Acceleration Operating 500 m/s, 3 axes Shock Non-operating 1000 m/s², 6 ms, ½ sine, 3 axes Vibration Operating 100 m/s² max @ 55 Hz to 000 Hz, 3 axes Mass Readhead g Interface 3 g Electrical integration Readhead to interface connections FPC cables The RGH34 and RGI34 have been designed as system components and to be compliant with EMC regulations for products of their type. Care must be taken with shielding and grounding arrangements to ensure EMC performance once installed (refer to RGH34 RGS40 installation guide for full recommendations). It is the system integrator s responsibility to implement, test and prove EMC compatibility for the whole machine. Very low profile zero insertion force micro-connector for 10 way Flexible Printed Circuit (FPC) cable. Cable flex life minimum 10 x 10 3 cycles at 5 mm bend radius. FPC (flexible printed circuit) cables should be ordered separately from your local Renishaw representative. The part numbers for the standard lengths are listed below. Part Part number 50 mm FPC A-9537-018 100 mm FPC A-9537-0183 150 mm FPC A-9537-0184 3

RGS40 scale installation drawing Dimensions and tolerances in mm Measuring length (ML) >5 >5 Bolted reference mark actuator shown (A-9541-0037) >15 Reference mark/limit switch actuator position range <10 30 0.5 0./100 F F = axis of motion 13 6 (RGS40-S) 6.3 (RGS40-P) Scale length (ML + 40) Overall length (ML + 70) NOTE: The surface roughness of the scale mounting surface must be 3. Ra. The parallelism of the scale surface to the axis of motion (readhead rideheight variation) must be within 0.05 mm. Scale specifications Scale type RGS40-S Reflective gold plated steel tape with protective lacquer coating. Adhesive backing tape allows direct mounting to the machine substrate. RGS40-P Reflective gold plated steel tape with tough polyester coating for applications using harsh solvents. Adhesive backing tape allows direct mounting to the machine substrate. Scale period 40 µm Linearity RGS40-S ±3 µm/m RGS40-P ±5 µm/m Scale length Up to 50 m (>50 m by special order) Form (H x W) RGS40-S 0. mm x 6 mm (includes adhesive) RGS40-P 0.3 mm x 6.3 mm (includes adhesive) Substrate materials Expansion coefficient End fixing Metals, ceramics and composites with expansion coefficients between 0 and µm/m/ C (steel, aluminium, Invar, granite, ceramic etc.) Matches that of substrate material when scale ends are fixed by epoxy mounted end clamps Epoxy mounted end clamps (A-953-4015) using part epoxy adhesive (A-9531-034) Scale end movement <1 µm over temperature range -0 C to +50 C Temperature Operating -10 C to +10 C. Minimum installation 10 C Storage -0 C to +70 C. Humidity 95% relative humidity (non-condensing) to EN 60068--78 4

Speed performance Digital interfaces Non-clocked output interfaces. Interface type Maximum speed (m/s) Lowest recommended counter input frequency (MHz) T (10 μm) 8 D (5 μm) 8 G ( μm) 7.5 X (1 μm) 6 Encoder velocity (m/s) Resolution (µm) Clocked output interfaces The RGI34N, W, Y and H interfaces are available with a variety of different clocked outputs. Customers must ensure they comply with the lowest recommended counter input frequency. x 4 safety factor Clocked output code Maximum speed (m/s) Interface type N (0.4 μm) W (0. μm) Y (0.1 μm) H (50 nm) Lowest recommended counter input frequency (MHz) 30 1.3 0.6 0.3 1 31 0.9 0.45 0. 8 3 1.3 6 33 0.9 0.45 0. 0.1 4 Analogue interfaces RGI34B 6 m/s (-3dB) 8 m/s (-6dB) Output signals Connections FPC connector 9 1 10 1 10 RGI34 input Signal FPC connector pin 0 V 1, A phase 3 B phase 4 C phase 5 V mid 6 Hall 7 5 V 8, 9, 10 Analogue 1 Vpp outputs - RGI34B Analogue Output signal Through hole Digital RS4A outputs - RGI34T, D, G, X, N, W, Y and H Digital Output signal Through hole Power 5 V 9 0 V 10 Power 5 V 9 0 V 10 V 1 + 8 A+ 8 Incremental signals V 1-7 V + 6 Incremental signals A- 7 B+ V - 5 B- 1 Reference mark (if fitted) V 0 + V 0-1 Reference mark (Z) or Limit switch (Q) (if fitted) Z-/Q+ 6 Z+/Q- 5 External LED driver Red 4 Green 3 5

Electrical connections Grounding and shielding Conductive shield Output signals Double-shielded extension cable* Outer shield Inner shield FPC cable 0 V RGH34 readhead Conductive mounting plate Interface 'case' connected to ground Case *Maximum extension cable length RGI34B-100 m, RGI34T, D, G and X - 50 m, RGI34N, W, Y and H - 0 m For optimum performance, ensure 100% screening Ground the readhead mounting bracket Ensure continuity of all shields Use double shielded extension cable Connect interface CASE to ground Use shielded connector shells on all cable connections Terminate the inner shield to 0V power at the customer interface Maximise the distance between encoder and motor cables Recommended signal termination Digital outputs - RGI34T, D, G, X, N, W, Y and H Analogue output - RGI34B 0 V V 0 V 1 V + Interface A B Z Q+ 0 pf Customer electronics 10 Ω V 0 V 1 V - Cable Z 0 = 10 Ω 10 Ω A B Z Q- 0 pf 0 V Standard RS4A line receiver circuitry Capacitors recommended for improved noise immunity. Remote LED driver outputs The remote LED driver output allows remote monitoring of readhead installation. Green + 150 Ω Green Red/Green LED Red Red 6

Output specifications Digital output signals - type RGI34T, D, G, X, N, W, Y and H Form - Square wave differential line driver to EIA RS4A Incremental channels A and B in quadrature (90 phase shifted) A B Signal period P Resolution S Model P (µm) S (µm) RGI34T 40 10 RGI34D 0 5 RGI34G 8 RGI34X 4 1 RGI34N 1.6 0.4 RGI34W 0.8 0. RGI34Y 0.4 0.1 RGI34H 0. 0.05 Inverse signal not shown for clarity Limit Asynchronous pulse Q Repeatability <0.1 mm typical Length of actuating magnet NOTE: RGH34 readheads and RGI34 interfaces are available with reference mark or limit switch detection. Select output at order Actuation device: A-9531-051 or A-9541-0040 Inverse signal not shown for clarity. Reference Z Synchronised pulse Z, duration equal to the resolution. Repeatability of position (uni-directional) maintained within 0 C from installation temperature and for speed <0.5 m/s. Actuation device: A-9531-050 or A-9541-0037 Inverse signal not shown for clarity Alarm 3-state alarm Incremental channels forced open circuit for >0 ms when signal too low for reliable operation. For RGI34N, W, Y and H only, incremental channels forced open circuit for >10 ms when signal too low or speed too high for reliable operation. Analogue output signals type RGI34 (1Vpp) Incremental channels V 1 and V differential sinusoids in quadrature (90 phase shifted) 40 µm (V 1 +) - (V 1 -) 90 0.6 to 1. Vpp with green LED indication and 10 Ω termination. (V +) - (V -) Reference (V 0 +) - (V 0 -) -18 0 108 0.8 to 1. Vpp Differential pulse V 0-18 to 108. Duration 16 (electrical). Repeatability of position (uni-directional) maintained within ±0 C from installation temperature Actuation device: A-9531-050 or A-9541-0037 7

RGH34 system = readhead & interface + scale + accessories Readhead part numbers RGH34U 00A 00A Readhead series Scale type 00A - RGS40 tape scale compatible Reference mark / limit switch 00A - reference mark sensor 00B - limit switch sensor 00C - no sensor Interface part numbers RGI34 B 00 A 00 Interface series Output B - analogue 1 Vpp T - 10 µm digital D - 5 µm digital G - µm digital X - 1 µm digital N - 0.4 µm digital W - 0. µm digital Y - 0.1 µm digital H - 50 nm digital Option 00 - FPC Reference mark / limit switch A - reference mark sensor (choose A also if no sensor was chosen when configuring the RGH34U readhead) B - limit switch sensor (digital output only) Clocked output 00 - not clocked (RGI34B, D, G, T and X only) 30-1 MHz clocked output (RGI34W, Y and H only) 31-8 MHz clocked output (RGI34W, Y and H only) 3-6 MHz clocked output (RGI34N only) 33-4 MHz clocked output (RGI34N, W, Y and H only) NOTE: RGH34 readhead requires an RGI34 interface to function as a complete system NOTE: Not all combinations are valid. Check valid combinations and all available options online at www.renishaw.com/epc 8

Scale part numbers RGS40-S 40 µm pitch lacquered tape scale with self-adhesive backing tape. Part number Available lengths Available in increments of Ordering instructions A-9537-3011 100 mm to 50,000 mm* 1 mm Ordering a quantity of 455 will result in a length of 455 mm (multiple orders are required for multiple lengths) A-9537-3010 1 m to 50 m* 1 m Ordering a quantity of 15 will result in a length of 15 metres (multiple orders are required for multiple lengths) A-9537-4xxx 10 cm to 999 cm 1 cm xxx is the length in cm (ordering A-9537-4450 for example will result in a length of 450 cm) A-9537-50xx 10 m to 50 m* 1 m xx is the length in metres (ordering A-9537-5033 for example will result in a length of 33 metres) RGS40-P 40 µm pitch polyester coated tape scale with self-adhesive backing tape. Part number Available lengths Available in increments of Ordering instructions A-9537-3030 100 mm to 50,000 mm* 1 mm Ordering a quantity of 455 will result in a length of 455 mm (multiple orders are required for multiple lengths) A-9537-308 1 m to 50 m* 1 m Ordering a quantity of 15 will result in a length of 15 metres (multiple orders are required for multiple lengths) *Lengths above 50 m are special order only. Please contact your local Renishaw representative. 9

Renishaw plc New Mills, Wotton-under-Edge, Gloucestershire GL1 8JR United Kingdom T +44 (0)1453 5454 F +44 (0)1453 54901 E uk@renishaw.com www.renishaw.com Accessory part numbers Part number Description Image A-9541-0037 RGM45S reference mark actuator magnet screw mounted. A reference sensor within the readhead is used to determine an absolute datum within an incremental measuring system. The sensor does this by detecting the external RGM45S reference mark actuator magnet as the readhead passes it. A-9531-050 RGMS reference mark actuator magnet epoxy mounted. A reference sensor within the readhead is used to determine an absolute datum within an incremental measuring system. The sensor does this by detecting the external RGMS reference mark actuator magnet as the readhead passes it. A-9541-0040 RGP45S 90 limit switch actuator magnet screw mounted. A limit sensor within the readhead detects end of travel by sensing the RGP45S limit switch actuator magnet. A-9531-051 RGPS limit switch actuator magnet 10 mm long epoxy mounted. A limit sensor within the readhead detects end of travel by sensing the RGPS limit switch actuator magnet. A-953-4015 RGC-F end clamp kit epoxy mounted. The RGC-F end clamps master the RGS scale to the substrate material to match its thermal expansion. A-9531-034 RGG- part epoxy adhesive. The RGG- epoxy is recommended for the mounting of reference marks, limit switches and end clamps. A-9537-0197 RGH34 scale applicator guide block kit (for RGS40-S lacquered scale). The applicator block enables efficient and accurate scale application. Fixed to the customers readhead bracket it allows the correct placement of scale relative to where the readhead will be set. A-9537-018 A-9537-0183 A-9537-0184 50 mm FPC flat flexible cable for connecting the RGH34 readhead to the RGI34 interface. 100 mm FPC flat flexible cable for connecting the RGH34 readhead to the RGI34 interface 150 mm FPC flat flexible cable for connecting the RGH34 readhead to the RGI34 interface For worldwide contact details, please visit our main website at www.renishaw.com/contact RENISHAW HAS MADE CONSIDERABLE EFFORTS TO ENSURE THE CONTENT OF THIS DOCUMENT IS CORRECT AT THE DATE OF PUBLICATION BUT MAKES NO WARRANTIES OR REPRESENTATIONS REGARDING THE CONTENT. RENISHAW EXCLUDES LIABILITY, HOWSOEVER ARISING, FOR ANY INACCURACIES IN THIS DOCUMENT. RENISHAW and the probe symbol used in the RENISHAW logo are registered trade marks of Renishaw plc in the United Kingdom and other countries. apply innovation and names and designations of other Renishaw products and technologies are trade marks of Renishaw plc or its subsidiaries. 000-018 Renishaw plc All rights reserved Issued 0718 *L-9517-978-01*