Midaz Micro-Slab DPSS Lasers: Higher power & pulse rate for higher speed micromachining Professor Mike Damzen Midaz Laser Ltd 4 June 2008 AILU Meeting Industrial opportunities in laser micro and nano processing
Outline of Presentation Market need for Higher Yields + Higher Precision Midaz micro-slab DPSS technology Midaz core product family: Mega-pulse UV lasers (highest pulse rates >1MHz) for Si & thin film processing Flexi-pulse lasers (high pulse energy, flexible pulse rate 0-200kHz) for wide micromachining applications Conclusion
Laser as a machining tool Future Industrial requirements will almost certainly push laser tools towards higher precision and higher throughput (+lower $/W) Precision NANO MICRO MACRO 10W 100W 1000W Power
Explosion of high tech consumer products Laser market driven by decreasing feature size Drive towards ever decreasing feature sizes Dense functionality packaged into increasingly smaller platforms Higher Yield / Lower cost Higher pulse rate UV
Traditional markets requiring more sophisticated manufacture High value manufacturing markets (e.g. aerospace /automotive/ medical) also require more sophisticated components, composites, functionality. Lasers (& increasingly DPSS) are becoming the essential tools of choice to enable high precision cutting/drilling/marking at numerous stages in these complex products Higher power High beam quality Flexible pulse rates
Key high growth markets include... Laser microelectronics market Dicing & Scribing wafers currently dominated by the diamond saw market Micromachining vias (e.g. multi-layer PCB) - currently wet etch & non-uv/dpss lasers Thin film patterning of ITO/TO for displays, touch screens & solar cells...driven by thinner wafers, smaller design rules and new materials that require new approaches DPSS (inc. UV DPSS) is becoming the tool of choice for micromachining silicon, polymers, ceramics & glass minimum Heat Affected Zone high lateral resolution down to micron scale Absence of wet chemical processes reduces process steps and is cleaner Laser as replacement for diamond saw (thin silicon wafers, low-k dielectrics)
Industrial machining The cutting and processing of hard and thick materials benefits from high energy pulses (mj multi-mj) at low or moderate pulse rates (typically 10-100kHz) Metal cutting and drilling Diamond (gemstone and industrial) Glass scribing..
Midaz Micro-Slab DPSS Technology End-pumped DPSS rod Strong thermal lensing (+ end-facet fracture) cause serious limitations at average power P >10W Fibre Laser Small area core & end facets are vulnerable to damage at pulsed peak powers in LMA fibre amplifiers P p >10kW MIDAZ DPSS Micro-Slab Side-pumped slab structure distributes pump & spreads thermal load. Very high avg. power scaling (~100W) Excellent TEM 00 beam quality Compact / High gain / High Efficiency Industry-leading pulse rates (>1MHz) Very high peak power capability (P p ~1MW) Superior conversion to visible / UV
Micro-Slab in Bounce Amplifier Configuration Pump Laser Diode Bar Or Stack Micro-Slab Amplifier Input Beam High power High efficiency Simple, robust and efficient diode coupling Amplified Beam High beam quality
Midaz has broad DPSS laser capability Highest speed Flexi-Pulse Superior ablative processing quality Highest resolution Highest beam quality (TEM 00 M 2 <1.3) Highest peak power (100kW-1MW) Highest power (>100W) IR core engine Green >50W Mega-Pulse Highest scan rates Highest pulse rate (>1MHz) Integration and reliability Most Compact &Robust DPSS UV >20W
Two key product families: Mega- Pulse and Flexi-Pulse Lasers FLEXI-PULSE High pulse energy (multi-mj) + flexible pulse rates (0-200kHz) 100W Midaz High Pulse Energy IR Midaz High Pulse Rate IR Industrial micromachining 20W Competing DPSS (TEM 00 ) Midaz High Pulse Rate UV Silicon processing 300kHz >1MHz Solar cells MEGA-PULSE UV high scan speed processing of thin silicon wafers, solar cells, thin-film FPD FPDs
Mega-pulse UV (MP-15-355) - high scan speed processing High scan speed - delivering the required pulse energy without seeing the gaps between pulses High power UV micromachining of Silicon and thin film processing Model No. Wavelength Average power @500kHz Repetition rate Pulse duration @500kHz MP-15-355 355 nm 15 W Up to 1500 khz ~10 ns Pulse rates > 1MHz. One order of magnitude higher than standard DPSS systems Extraordinarily short pulses and pulse-to-pulse stability even at high pulse rate Compact Spatial Mode TEM 00, M 2 <1.3 Laser Head (LxWxH) Laser Controller 550x350x120mm 19, 4U Height MP-15-355 Power / Pulse Duration vs. Rep. Rate (typical) 20 20 100W IR Mega-Pulse (1064nm) 50W Green Mega-Pulse (532nm) Average Power [W] 10 10 Pulse duration [ns] 0 0 450 500 550 600 650 700 750 800 850 900 950 1000 Repetition Rate [khz]
Flexi-pulse Flexible high power and pulse rate High pulse energy (multi-mj) Short pulse, high peak power (multi-100kw) Model No. Wavelength Average power @50kHz Repetition rate FL-60-1064 1064 nm 60 W 0-200 khz Flexible pulse rates Pulse duration @50kHz ~15 ns Spatial Mode TEM 00, M 2 <1.3 Options: Higher power (100W) Higher pulse rates (500kHz) Longer pulse (40ns) High power 50W@532nm/30W@355nm Average Power [W] 70 60 50 40 30 20 FL-60-1064 Power / Pulse Duration vs. Rep. Rate 70 60 50 40 30 20 Pulse duration [ns] 10 10 0 0 50 100 150 200 Repetition Rate [khz] 0
Midaz offers new opportunities in manufacturing Midaz has a platform of DPSS capabilities enabling higher yield in precision laser manufacturing (micro + nano). MEGA-PULSE - highest pulse rates for high speed scanning applications esp. in microelectronics sectors (semicon, solar, displays) FLEXI-PULSE remarkably flexible pulse energy-pulse rate combination at high average power. PRODUCT FAMILIES IN IR, GREEN, UV
Midaz : Can we help your application? NEEDING HIGHER SPEED AND/OR INCREASED QUALITY IN CURRENT OR FUTURE APPLICATION? NEEDING A SOURCE TO DEVELOP/TRIAL INNOVATIVE NEW LASER SOLUTIONS? Midaz offers innovative new laser capabilities Higher throughput Increase in Quality Wavelength options Robust, compact laser sources THANK YOU FOR YOUR ATTENTION!