STUDY OF VIBRATION MODAL ESTIMATION FOR COMPOSITE BEAM WITH PZT THIN FILM SENSOR SYSTEM

Similar documents
Dome Shaped Touch Sensor Using PZT Thin Film. Made by Hydrothermal Method

Chapter 30: Principles of Active Vibration Control: Piezoelectric Accelerometers

DEVELOPMENT OF MINIATURE HYDROPHONE WITH HYDRO-THERMALLY SYNTHESIZED PZT POLY-CRYSTALLINE FILM

XYZ Stage. Surface Profile Image. Generator. Servo System. Driving Signal. Scanning Data. Contact Signal. Probe. Workpiece.

Piezoelectric accelerometer design. Piezoelectric transducers Quartz and piezoceramics Mechanical design Charge amplification Design trade-offs

Piezoelectric Sensors and Actuators

ULTRASONIC GUIDED WAVE ANNULAR ARRAY TRANSDUCERS FOR STRUCTURAL HEALTH MONITORING

Novel Approach to Make Low Cost, High Density PZT Phased Array and Its Application in Structural Health Monitoring

An Ultrasonic Motor Using Bending Cylindrical Transducer Based On PZT Thin Film

Modal Analysis of Microcantilever using Vibration Speaker

A novel piezoelectric energy harvester designed for singlesupply pre-biasing circuit

A ROD-SHAPED VIBRO TOUCH SENSOR USING PZT THIN FILM

Application Note: Precision Displacement Test Stand Rev A

A thin foil optical strain gage based on silicon-on-insulator microresonators

ABSTRACT 1. INTRODUCTION

1241. Efficiency improvement of energy harvester at higher frequencies

Integration of Piezoceramic Modules into Die Castings Procedure and Functionalities

Characterization of Silicon-based Ultrasonic Nozzles

Development of a Package for a Triaxial High-G Accelerometer Optimized for High Signal Fidelity

Advanced High-Density Interconnection Technology

EMBEDDED FBG SENSORS AND AWG-BASED WAVELENGTH INTERROGATOR FOR HEALTH MONITORING OF COMPOSITE MATERIALS

Investigation on Sensor Fault Effects of Piezoelectric Transducers on Wave Propagation and Impedance Measurements

ULTRASOUND IN CFRP DETECTED BY ADVANCED OPTICAL FIBER SENSOR FOR COMPOSITE STRUCTURAL HEALTH MONITORING

Response spectrum Time history Power Spectral Density, PSD

FLUTTER CONTROL OF WIND TUNNEL MODEL USING A SINGLE ELEMENT OF PIEZO-CERAMIC ACTUATOR

Vertically Aligned BaTiO 3 Nanowire Arrays for Energy Harvesting

Optimization of a Love Wave Surface Acoustic Device for Biosensing Application

DESIGN AND DEVELOPMENT OF ACTUATION PART OF PIEZOELECTRIC GENERATOR PROTOTYPING FOR ALTERNATIVE POWER GENERATION

Application of Ultrasonic Guided Waves for Characterization of Defects in Pipeline of Nuclear Power Plants. Younho Cho

CLAIMS 1. A suspension board with circuit, characterized in that, it comprises a metal support layer, an insulating layer formed on the metal support

Experimental and theoretical investigation of edge waves propagation and scattering in a thick plate with surface-breaking crack-like defect

SILICON BASED CAPACITIVE SENSORS FOR VIBRATION CONTROL

Liquid sensor probe using reflecting SH-SAW delay line

Supplementary Figure S1. Characterization using X-ray diffraction (XRD). (a) Starting titanium (Ti) foil used for the synthesis (JCPDS No ).

DYNAMIC CHARACTERISTICS OF A BRIDGE ESTIMATED WITH NEW BOLT-TYPE SENSOR, AMBIENT VIBRATION MEASUREMENTS AND FINITE ELEMENT ANALYSIS

2D Asymmetric Silicon Micro-Mirrors for Ranging Measurements

Magnetic Micro Testing System Microservo MMT Series C225-E014A

Active Vibration Control in Ultrasonic Wire Bonding Improving Bondability on Demanding Surfaces

plasmonic nanoblock pair

DAMAGE-TYPE IDENTIFICATION IN A CFRP CROSS-PLY LAMINATE FROM ACOUSTIC EMISSION SIGNALS DETECTED BY A FIBER-OPTIC SENSOR IN A NEW REMOTE CONFIGURATION

DEVELOPMENT OF STABILIZED AND HIGH SENSITIVE OPTICAL FI- BER ACOUSTIC EMISSION SYSTEM AND ITS APPLICATION

Nonlinear Ultrasonic Damage Detection for Fatigue Crack Using Subharmonic Component

In-Situ Damage Detection of Composites Structures using Lamb Wave Methods

OPTI510R: Photonics. Khanh Kieu College of Optical Sciences, University of Arizona Meinel building R.626

High-yield Fabrication Methods for MEMS Tilt Mirror Array for Optical Switches

2007-Novel structures of a MEMS-based pressure sensor

THE DEVELOPMENT OF A MULTIFUNCTIONAL EMBEDDED COMPOSITE SMART SKIN ANTENNA STRUCTURE

High-speed wavefront control using MEMS micromirrors T. G. Bifano and J. B. Stewart, Boston University [ ] Introduction

Measurement of Microscopic Three-dimensional Profiles with High Accuracy and Simple Operation

PIEZOELECTRIC TRANSFORMER FOR INTEGRATED MOSFET AND IGBT GATE DRIVER

Completely Rewrite Industry s Understanding of Transmitting. High Quality Laser Processing Light over Long Distances

Body-Biased Complementary Logic Implemented Using AlN Piezoelectric MEMS Switches

Bend Sensor Technology Mechanical Application Design Guide

Journal of Advanced Mechanical Design, Systems, and Manufacturing

A large-area wireless power transmission sheet using printed organic. transistors and plastic MEMS switches

Piezoelectric Generator for Powering Remote Sensing Networks

Piezoelectric Fiber Composite Ultrasonic Transducers for Guided Wave Structural Health Monitoring

Long-distance propagation of short-wavelength spin waves. Liu et al.

Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 34141, Republic of Korea

CMP for More Than Moore

INFLUENCE OF SENSOR STATISTICS ON PIEZOELECTRIC AND MAGNETO- ELASTIC DAMAGE DETECTION

Keywords: piezoelectric, micro gyroscope, reference vibration, finite element

Partial Discharge Signal Detection by Piezoelectric Ceramic Sensor and The Signal Processing

Ink Jet Printing with Focused Ultrasonic Beams

ADVANCES IN USING A POLYMERIC TAPE FOR LASER-INDUCED DEPOSITION AND ABLATION

Piezoelectric actuators and sensors

A Laser-Based Thin-Film Growth Monitor

Properties of Interdigital Transducers for Lamb-Wave Based SHM Systems

Wearable PZT sensors for distributed soft contact sensing (Design and Signal Conditioning Manual)

MECHANICAL PROPERTY OF CARBON NANOTUBE YARN REINFORCED EPOXY

Context Development Details Anticipated Effects

ELASTIC WAVE EMISSION DURING DELAMINATION GROWTH OF CARBON/EPOXY MONITORED WITH FIBER-OPTIC DEFEW STRAIN RATE SENSOR

Comparison of natural frequencies of vibration for a bridge obtained from measurements with new sensor systeme

Piezo-electric Thick Films for Sensing

A New Lamb-Wave Based NDT System for Detection and Identification of Defects in Composites

PIEZOELECTRIC WAFER ACTIVE SENSORS FOR STRUCTURAL HEALTH MONITORING STATE OF THE ART AND FUTURE DIRECTIONS

Qualitative Measurement of Moisture Absorption in GFRP Utilizing Electromagnetic Induction

EFFECT OF YARN CROSS-SECTIONAL SHAPES AND CRIMP ON THE MECHANICAL PROPERTIES OF 3D WOVEN COMPOSITES

A SHEAR WAVE TRANSDUCER ARRAY FOR REAL-TIME IMAGING. R.L. Baer and G.S. Kino. Edward L. Ginzton Laboratory Stanford University Stanford, CA 94305

Vibration Fundamentals Training System

Conference Paper Cantilever Beam Metal-Contact MEMS Switch

Atomristor: Non-Volatile Resistance Switching in Atomic Sheets of

PROBLEM SET #7. EEC247B / ME C218 INTRODUCTION TO MEMS DESIGN SPRING 2015 C. Nguyen. Issued: Monday, April 27, 2015

A Review of MEMS Based Piezoelectric Energy Harvester for Low Frequency Applications

Micro-sensors - what happens when you make "classical" devices "small": MEMS devices and integrated bolometric IR detectors

SUPPLEMENTARY INFORMATION

Wojciech BATKO, Michał KOZUPA

ELECTRICAL PROPERTIES AND POWER CONSIDERATIONS OF A PIEZOELECTRIC ACTUATOR

Dicing Through Hard and Brittle Materials in the Micro Electronic Industry By Gideon Levinson, Dicing Tools Product Manager

MICRO-INTEGRATED DOUBLE AXIS PLANAR FLUXGATE

EXPERIMENTAL ANALYSIS OF BOLT LOOSENING DYNAMICS CHARACTERISTIC IN A BEAM BY IMPACT TESTING

Vibrational Energy Scavenging Via Thin Film Piezoelectric Ceramics

Flexible Substrates and SCB-Technology

Conductance switching in Ag 2 S devices fabricated by sulphurization

UVISEL. Spectroscopic Phase Modulated Ellipsometer. The Ideal Tool for Thin Film and Material Characterization

Cutting Process Monitoring by Means of Acoustic Emission Method Part I New Approach of Acoustic Emission Sensor

Kissing bonds monitoring using nonlinear vibro-acoustic wave modulations

Introduction to Microeletromechanical Systems (MEMS) Lecture 12 Topics. MEMS Overview

648. Measurement of trajectories of piezoelectric actuators with laser Doppler vibrometer

Supplementary Materials for

Transcription:

STUDY OF VIBRATION MODAL ESTIMATION FOR COMPOSITE BEAM WITH PZT THIN FILM SENSOR SYSTEM Nobuo Oshima, Takehito Fukuda and Shinya Motogi Faculty of Engineering, Osaka City University 3-3-38, Sugimoto, Sumiyoshi-ku, Osaka, 558-8585, Japan SUMMARY: In the present paper, a lead zirconate titanates (PZT) thin film is adopted as a vibration sensor. The PZT thin film sensor is made by the hydrothermal method. A set of these firms is sandwiched between flexible electric circuit sheets to build the smart layer. Two types of point sensors systems (PSS) are selected as the sensor system for vibration modal estimation of composite beams. One is an array of point sensors system (APSS) and another is a distributed point sensors system (DPSS). The experiment is conducted by sinusoidal forced vibration tests. The capabilities of PSSs for modal estimation of the composite beam are experimentally demonstrated. KEYWORDS: PZT thin film sensor, point sensors system (PSS), Array of point sensors system (APSS), distributed point sensors system (DPSS), modal estimation, smart composites, hydrothermal method. INTRODUCTION Recently, much attention has been paid to studies of smart materials and structures. The smart materials and structures have sensors and actuators in order to adapt external stimuli. The smart materials and structures will be adopted as space structures, airplanes and huge constructions to improve their reliabilities. Host materials of the smart materials and structure are ceramics, metals, composite materials and so on. In those host materials, the composites is most suitable for constructing the smart materials and structures in its manufacturing process. The smart materials and structures which are adopted the composite materials as host material are called smart composites. On the other hands, a new device called a smart layer has been proposed[]. The smart layer consists of dielectric films, sensors, actuators and embedded electric circuits. The smart layer not only looks like the composites lamina, but also it can be handed like the composite lamina. Thus, the smart layer is more ease to construct the smart materials and structures than conventional devices. Mostly smart layers use piezoelectric materials as sensors and actuators. The piezoelectric material is one of the most attractive devices to construct the smart

materials and structures. The principal commercially available industrial piezoelectric materials are the piezoceramics, such as the PZT. They are available in broad range of properties to suit diverse applications. In addition, PZT thin films have been developed by a variety of methods such as RF sputtering, metal-organic decomposition and sol-gel processing. Since these methods generally require a high temperature treatment above 5 C to crystallize the films during or after the processing, it often results in cracking or peeling of the films, because of the shrinkage due to the crystallization of deposited amorphous films. On the other hands, the hydrothermal method which was proposed by UBE Industries, Ltd. is a new attractive fabrication process for preparing the PZT thin films. Advantages of the hydrothermal method are relatively low preparing temperature and film uniformity over large areas. Besides, the PZT thin films fabricated by the hydrothermal method are thin and flexible. Thus, this device is more suitable for constructing the smart layer. In this paper, the smart layer which uses the PZT thin film sensor system is constructed. Two types of PSSs are chosen. One is the array of point sensors system and another is the distributed point sensors system. The smart layer is attached on the surface of a composite beam. The vibration modal estimation for the composite beam with a smart layer is experimentally demonstrated. PZT THIN FILM[],[3] The fabrication process of PZT thin films by hydrothermal method is summarized as shown in Fig.. Aqueous solution of lead nitrate, zirconium chloride oxide octahydrate, titanium tetrachloride and potassium hydroxide were used as starting materials. Some pieces of titanium foil were placed in Teflon beaker containing the 7ml aqueous solution in an autoclave as schematically shown in Fig.. As the first process, some pieces of titanium foil as substrates were reacted with the mixed solution containing lead nitrate, zirconium chloride oxide octahydrate, titanium tetrachloride and potassium hydroxide to nucleate crystals on the substrate. They were poured into the autoclave and then heated to 5 C for hr. As the second process, the PZT thin films prepared by the first process on some pieces of titanium foil were also used as substrates. These substrates were also reacted with mixed solution containing lead nitrate, zirconium chloride oxide octahydrate, titanium tetrachloride and potassium hydroxide as -5 C for hr. Film thickness was increased by repeating the second process. Nucleating process of PZT crystals Aqueous solutions of Pb and Zr Increasing process of PZT films Aqueous solutions of Pb, Zr and Ti Ti substrate PZT film Hydrothermal treatment Hydrothermal treatment repeating PZT film PZT film Fig.: Flow diagram for the fabrication process of PZT thin film sensor.

Thermocouple Ti substrate Aqueous solut Au electrode PZT film Ti substrate PZT film Au electrode Fig.: Schematic illustration of PZT thin film fabrication equipment using an autoclave. Fig.3: Configuration of PZT thin film s. The cross-section of the PZT thin film is schematically shown in Fig.3. The PZT thin film of which the film thickness of PZT is 6.5µm and that of Ti substrate is 5µm is adopted as test specimens. Au electrodes with electrical stability are sputtered on the surfaces of PZT thin films. The thickness is 5Å. The hydrothermal method permits one to easily fabricate large sided PZT thin films having not only a flat surface, but also curved one. In fact, they can be cut with a scissors so as to obtain the arbitrary geometry. That is, they are flexible and have a possibility to give a designer more freedom for constructing actual structures. POINT SENSORS SYSTEM (PSS) A point sensor is defined as one whose size is smaller than the wavelength of structural motion.[4] There are two types of point sensors systems. Distributed Point Sensors System (DPSS) The DPSS is shown in Fig.4. It has several point sensors, but the signals from the sensors are not combined. The DPSS can be used to estimate an absolute amplitude and phase at each point. However, this system requires a multi-channel data processing system. Point sensor Sensor output Sensor output Sensor output Sensor output Fig.4: Configuration of distributed point sensors system.

Array of Point Sensors System (APSS)[4] The APSS is shown in Fig.5. The technique for using the APSS is summarized by C. R. Fuller et al. The APSS has several point sensors and combined signals from the sensors. It can be used to estimate the modal amplitude of known system. Point sensor Gain Σ Sensor output Fig.5: Configuration of array of point sensors system. When the system is defined by a series of response characteristics such as mode shapes Ψ mn. Then, the out-of-plane motion of the system is described by w ω, Amn () ( ) j t x y, t = ψ ( x, y) e m n mn where A mn are modal amplitudes. The above relation can easily be written for other variables such as velocity, acceleration, strain etc. It is necessary to sample the structural response at J positions and represent its values as a vector w s for measure or estimate a mode or state of the system. If the structural response is dominated by J modes and vector, then w s is related to the system modal amplitudes and known mode shape functions as follows, ws! ws J ψ = ψ J " ψ ψ MN J MN A! A MN () where the elements of w s comprise the measured complex displacements and M+N=J. The e jωt time factor has been omitted for convenience. By solving the above system of equations, we can obtain the modal amplitude as a =Ψ - w s (3)

where a=[a,a...a,...a MN ] T, w s =[w s,w s...w J s ] T and Ψ is a matrix of the modal contribution at the sample points. Thus if there is a an array of J sensors on structure, the output of sensors can be processed by using Eqn 3 in order to obtain information related to individual modes. SPECIMEN The smart layer which has the PZT thin film sensors system is schematically shown in Fig.6. The specimen consists of a glass fiber reinforced plastic (GFRP) composite beam and the smart layer. The fiber orientation of the GFRP composite beam is [+45 /-45 ] s. The smart layer consists of four thin film PZT sensors and two flexible electric circuit sheets. The flexible electric circuit sheet is made of polyimide film and etched copper circuits. The thin film PZT sensors are sandwitched between the flexible electric circuit sheets. The thin film PZT sensors and the electric circuits are connected by a conductive adhesive and space between the electric circuits sheets is filled by an acrylate resin. The specimen is 9mm in length and mm in width. The thickness of the GFRP beam is.5mm and that of the smart layer is.5mm. The sensor numbers are defined as in Fig.6. Electric circuit PZT thin film sensor Flexible electric circuit sheet Resin Sensor Sensor Sensor 3 Sensor 4 Fig. 6: Schematic view of smart layer. EXPERIMENT The experimental setup is shown in Fig.7. It consists of a signal generator, a vibrator, an A/D converter and a personal computer. The specimen is supported by clamped-clamped condition. The experiment is conducted by sinusoidal forced vibration tests. The signals from the sensors are sampled through the A/D converter. The signal processing and the modal estimation of the composite beam are carried out by a computer system. In case of the APSS, the sensor outputs are combined in the computer system for investigating its ability.

Specimen A/D converter Personal computer Vibrator Signal generator Fig.7: Experimental setup EXPERIMENTAL RESULTS AND DISCUSSION Characteristics of PZT Thin Film Sensor in Smart Layer Fig.8 shows a comparison of the PZT thin film sensor output in the smart layer and the strain gage output. From this figure, it is found that the PZT thin film sensor has enough capability to detect vibration response of the GFRP composite beam. However, the PZT thin film sensor output is a little different from the strain gage output. This difference is caused by a hysteresis of the PZT thin film sensor. PZT output(v).8.6.4. -. -.4 -.6 -.8 PZT Strain gage 6 4-4 -6 5 5 Strain gage output (micro strain) Fig.8: A comparison of vibration response measured by PZT thin film sensor in smart layer and strain gage (st mode, with Sensor ).

st mode nd mode 3rd mode Deflection (a) (c) (e) Strain on surface (b) (d) (f) Fig.9: Mode shape of deflection and strain on surface of composite beam. The first three natural frequencies of the composite beam are obtained by the under clampedclamped condition. First Mode (85Hz) The mode shape of deflection and the strain on the surface of the composite beam at the first mode are shown in Figs.9(a) and 9(b), respectively. The theoretical sensor outputs can be calculated by integrating of the strain on the surface of the composite beam along the gage length of the PZT thin film sensor. In case of the first mode, the ratio of each sensor output is :-.7:-.7: theoretically. The sensor outputs of the first mode are shown in Fig.. Those figures show that all of sensors can detect the vibrations of each location. Moreover, the ratio of experimental sensor outputs has good agreement with the theoretical one. - 5 5 (a) Sensor - 5 5 (c) Sensor 3-5 5-5 5 (b) Sensor (d) Sensor 4 Fig.: PZT thin film sensor outputs (st mode). Second Mode (475Hz) Figs.9(c) and 9(d) show the mode shape of deflection and the strain on the surface of the

composite beam at the second mode, respectively. In case of the second mode, the theoretical ratio of the sensor outputs is : -.5:.5:-. The sensor outputs of the second mode is shown in Fig.. The results can explain characteristics of the second mode. However, the ratio of the experimental sensor outputs is different from the theoretical ratio. This is due to the reason why as the natural frequency of experimental setup is close to the second mode of the composite beam, some noises are involved in the vibration response..6.6.4. -. -.4 -.6 4 6 Time (msec) (a) Sensor.4. -. -.4 -.6 4 6 Time (msec) (c) Sensor 3.6.4. -. -.4 -.6 4 6 Time (msec).6.4. -. -.4 -.6 4 6 Time (msec) (b) Sensor (d) Sensor 4 Fig.: PZT thin film sensor outputs (nd mode). Third Mode (5Hz) The mode shape of deflection and the strain on the surface of the composite beam at the third mode are shown in Figs. 9(e) and 9(f), respectively. In case of the third mode, the theoretical ratio of the sensor outputs is :.58:.58:. The sensor outputs of the third mode is shown in Fig.. From those figures, it is found that the sensor outputs have distortions, however, the ratio of each sensor output agrees with the theoretical one. This result means that the PZT thin film sensor can detect high frequency vibration..5.5 -.5.5..5. (a) Sensor -.5.5..5. (c) Sensor 3.5.5 -.5.5..5. -.5.5..5. (b) Sensor (d) Sensor 4 Fig.: PZT thin film sensor outputs (3rd mode).

Array of Point Sensors System The ratios of the sensor outputs and the combined sensor output are summarized Table. The gain ratio of the sensor outputs is :-.5::.5 for Sensor :Sensor :Sensor 3:Sensor 4. In case of a simple beam, mode shapes are not so complicated. Thus, the gains of sensor outputs can be chosen easily referring to Eqn 3. However, if the mode shape of structure is complicated, the gains of the sensor outputs have to be decided carefully. Fig.3 shows the combined sensor output of the first mode as well as the calculated sensor outputs of each sensor. From those figures, it is shown that the APSS can detect the vibrations of each sensor location. However, sensor outputs of the APSS are different from those of the DPSS. In the process of the APSS, all of the sensor outputs are summed, thus the calculated sensor outputs are smoothed. Table : Ratio of sensor outputs and combined sensor output of array of point sensor. Sensor Sensor Sensor 3 Sensor 4 Combined sensor output st mode -.7 -.7.36 nd mode -.5.5 -.78 3rd mode.58.58. 3-3 5 5 Combined sensor output - 5 5 Sensor - 5 5 Sensor - 5 5 Sensor 3 -.5..5 Sensor 4 Fig.3: Combined sensor output and calculated sensor output of each sensor.

CONCLUSIONS In the present paper, the vibration modal estimation for the composite beam with the smart layer including PZT thin film sensors has been demonstrated. The results obtained here are summarized as follows; ) The PZT thin film sensor has enough capability to detect vibration responses of the composite beam. ) The PZT thin film sensor can detect high frequency vibration. 3) The distributed point sensors system can detect the absolute amplitudes and phases at all sensor points. 4) The array of point sensors system can estimate the amplitude, however the calculated signal outputs are averaged values. ACKNOWLEDGEMENTS The authors wish to thank Ube Industries, Ltd. for providing the PZT thin film sensor. REFERENCES. Fu-Kuo, C., «Smart layer: Built-In Diagnostics for Composite Structures», Proceedings of The 4th European and nd MIMR Conference, Harrogate, UK, July 6-8, 998, pp.777-78.. Takehito, T., «Application of PZT Thin Firms on Ti Substrate to Composite Structures», Proceedings of International Symposium on Smart Structural System, Tokyo, March 9, 997, pp. 65-7. 3. UBE Research Technical Report on Crystalline PZT Film Synthesized by Hydrothermal Method, UBE Research Laboratory Corporate Research and Development UBE Industries, Ltd., 996. (In Japanese). 4. Fuller, C. R., Elliott, S. J., Nelson, P. A., Active Control for Vibration, Academic Press Ltd., London, 996.