Angle Encoder Modules

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Angle Encoder Modules May 2015

Angle encoder modules Angle encoder modules from HEIDENHAIN are combinations of angle encoders and high-precision bearings that are optimally adjusted to each other. They are characterized by their high degree of measuring and bearing accuracy, their very high resolution, and the highest degree of repeatability. The low starting torque permits smooth motions. Due to their design as completely specified and tested composite components, handling and installation is very simple. Setup Since HEIDENHAIN manufactures the bearings as well as the encoders, the two functional assemblies are highly integrated. Fewer components are necessary than in conventional solutions, resulting in fewer joints. This permits a very compact and rigid design, with particularly low overall heights. Currently, angle encoder modules with hollow shafts of 35 mm and 100 mm are available. Properties The rolling bearings used are specifically adapted to the requirements of highprecision rotary axes. Distinguishing features are very high guideway accuracies, high rigidities, low starting torques, and constant continuous torques. At the same time, value was placed on compact dimensions and low mass where possible. High speeds and a high load rating are not of primary importance. The encoders fulfill the requirements for metrology applications. Their most important features are very high resolution, excellent signal quality and best repeatability, even when operating temperatures vary. Incremental or absolute encoders can be used as required. Comparison of the conventional setup of a precision axis and a solution with an angle encoder module from HEIDENHAIN 2

Advantages Angle encoder modules are a combination of bearing and encoder. HEIDENHAIN has already completed the necessary assembly and adjustments. This means that the properties of the angle encoder modules have already been defined and tested according to the customer s specifications. Simple mechanical interfaces eliminate all critical mounting processes. Not only does this significantly ease the installation, but it also ensures that the specified accuracy is attained in the application. The elaborate matching of all individual components to each other as well as to the machine environment is not necessary, nor is the time-consuming testing. Reproducible guideway accuracy: a decisive property of the bearing Without question, the absolute guideway accuracy of an unloaded air bearing is better than that of a rolling bearing in many cases. However, in many applications the highest possible reproducible guideway accuracy of the bearing is decisive. When this aspect is considered, angle encoder modules can truly be an alternative to axes with air bearings, since the repeatability of rolling bearings from HEIDENHAIN is comparable to the guideway accuracy of an air bearing. Furthermore, the rigidity of rolling bearings from HEIDENHAIN is greater than that of similar sized air bearings by at least a factor of 10. This means that they are actually the more exact solution for axes under load. In addition, rolling bearings are in general less sensitive to shock loads and do not require a regulated air supply so they are more robust and simpler to handle. Areas of application The angle encoder modules are designed for low to medium shaft speeds and medium loads, with high to very high bearing accuracies as well as the highest degree of repeatability. They are suited to the specific requirements of metrology applications. Typical applications therefore include laser trackers for metrology, highprecision rotary tables in measuring machines, and wafer-handling machines in the electronics industry. They can also be used on machine tools where only slight loads occur, such as on electrical discharge machines or in micro-precision manufacturing. Practical solutions The MRP 5000 and MRP 8000 series presented in this Product Overview can be adapted for customer-specific modifications. These include the mechanical mounting conditions, individual adjustments to the bearing regarding the demands of the application (pre-tensioning, lubrication, contact angle, materials, etc.), as well as the measuring standard and the electrical interface to the subsequent electronics. Wafer handling High-precision rotary tables Compact tilting units Laser trackers 3

Angle encoder modules Measuring and bearing accuracies The accuracy of angle encoder modules from HEIDENHAIN as composite components results from the measuring accuracy of the integrated angle encoders and the bearing accuracy of the rolling bearings. As already described on the previous page, the reproducible accuracy of an angle encoder module as a composite component can be on par with that of an air bearing. HEIDENHAIN considers the following measuring and bearing accuracies when evaluating the quality of an angle encoder module: Measuring accuracies The measuring accuracies of the integrated angle encoder that are most decisive for the specification of the angle encoder module are its system accuracy and repeatability. The system accuracy of the angle encoder indicates the position error within one revolution. It applies to the entire range of the specified centered load. A distinction is made between single-sided and double-sided repeatability. Singlesided repeatability applies to any number of revolutions in which the direction is not changed while measuring. Specific points are approached multiple times, and the maximum deviation of the measured points from each other is determined. This evaluation is performed by using a reference encoder for comparison. In order to determine the double-sided repeatability the direction of measurement is switched while measuring. The points are then each approached alternately from one side and then the other. The maximum deviation of the measured points from each other is thus determined. A reference encoder is used for positioning. For neither specification is the absolute deviation from the reference of importance, nor is it the goal of the measurement. Bearing accuracies When evaluating the bearing accuracy, not the radial runout that is mentioned so often is most important, but rather the guideway accuracy of the bearing. It indicates the deviation of the actual rotational axis of the bearing from the nominal rotational axis. The radial and axial guideway accuracy of the bearing are determined, and also the wobble. The guideway accuracy is measured with a calibration standard, such as a ceramic sphere with a known roundness. The center point of the sphere is positioned at a defined distance vertically above the center of the bearing raceway. This distance usually equals the pitch diameter D pw of the bearing, so that the measurement can be standardized. Two length gauges are used to measure the radial guideway accuracy. They are positioned at the height of the sphere center, at a 90 angle to each other. When the bearing is rotated they measure the respective radial deviations of the sphere in the X and Y directions. The radial guideway accuracy depends on the distance to the bearing plane. For this reason it is advisable to perform the measurement at various distances to the bearing plane. Ideal rotational axis Guideway deviation in measuring plane 2 Wobble of the axis Position of the rotational axis at the rotation angle Guideway deviation in measuring plane 1 Precision sphere for measurement h Measurement of axial runout Measurement of radial runout D pw Z X Y Z D pw = Pitch diameter of rolling bearing X Y Measured variables and measuring points on a rolling bearing (schematic) 4 Measurement of the axial and radial guideway accuracy with five length gauges

A defined number of revolutions is used for the measurements. The result is a measure of the deviation of the actual rotational axis from the nominal rotational axis for every rotation angle of the bearing. Misalignment of the sphere to the ideal bearing axis as well as inaccuracies of the sphere itself are removed from the result mathematically. This analysis supplies values that contain repeated (reproducible) errors as well as random (non-reproducible) errors. Since these measurements are always performed with a defined number of revolutions, the reproducible errors can be separated from the non-reproducible errors. This permits a qualified statement regarding both components of the guideway accuracy as well as clear information, free of external influences, about the actual quality of the bearing. A length gauge is centered above the sphere in order to measure the axial guideway accuracy. The gauge records any up and down motions of the sphere in the Z direction while the bearing is rotating. The wobble describes the tilt angle of the rotor axis relative to the bearing axis when the bearing is rotated. The maximum value of the measurement is indicated. One possibility of determining the wobble is to measure the radial guideway accuracy in two planes. As opposed to the guideway accuracy, the radial runout is the value measured by a length gauge perpendicular to a surface. The value indicated thus contains both the guideway accuracy of the bearing as well as form errors in the roundness and concentricity of the surface being measured. This principle also applies to the axial runout. It is the value measured by a length gauge perpendicular to a surface, in the axis of the object. The axial runout also contains both the guideway accuracy of the bearing as well as form errors of the surface. t Measurement of axial runout Measurement of axial and radial runout t Measurement of radial runout Y Guideway accuracy Non-reproducible guideway accuracy X Radial guideway accuracy Radial guideway accuracy over five revolutions The value indicated for the nonreproducible guideway accuracy is the largest deviation noted at any position within the entire measuring range. Maximum value Non-reproducible guideway accuracy over five revolutions [deviation in µm] 5

MRP 5000 series Angle encoder modules with integrated encoder and bearing Compact dimensions High measuring and bearing accuracy Hollow shaft 35 mm Incremental MRP 5080 Absolute MRP 5010 Measuring standard SUPRADUR circular scale DIADUR circular scale Signal periods 30 000 16 384 System accuracy* ± 2.5 or ± 5 Position error per signal period ± 0.5 % (± 0.23 ) ± 0.5 % (± 0.40 ) Repeatability From one direction: ± 1 From both directions: ± 0.6 From one direction: ± 1 From both directions: ± 1.2 Position noise per signal period RMS 0.015 % (0.007 ) 0.025 % (0.020 ) Interface 1 V PP EnDat 2.2 Ordering designation EnDat22 Position values/revolution 28 bits Clock frequency 16 MHz Calculation time t cal 5 µs Reference marks 80 (distance-coded) Cutoff frequency 3 db 500 khz Electrical connection Cable length Cable 1.5 m with D-sub connector (15-pin), interface electronics integrated in the connector 30 m (with HEIDENHAIN cable) Ribbon cable 0.09 m with M12 mounted coupling; adapter cable with quick disconnect as accessory Power supply 5 V DC ± 0.25 V 3.6 V to 14 V DC Power consumption (max.) Current consumption (typical) 5.25 V: 950 mw 3.6 V: 1.1 W 14 V: 1.3 W 175 ma (without load) 5 V: 140 ma (without load) MRP 5080 MRP 5010 6

Incremental MRP 5080 Absolute MRP 5010 Shaft Axial load capacity Contact stiffness Resistance to tilt Hollow through shaft D = 35 mm 200 N (load centered, system accuracy is maintained) Axial: 303 N/µm Radial: 181 N/µm (values calculated; without load) 102 Nm/mrad (values calculated; without load) Mechanically perm. speed 300 min -1 Frictional moment 0.015 Nm (without load) Moment of inertia of rotor 0.13 10-3 kgm 2 Radial guideway accuracy Non-reproducible radial guideway accuracy Axial guideway accuracy Axial runout of the surface Measured at the distance h = D pw from the race: 0.20 µm (without load) Measured at the distance h = D pw from the race: 0.35 µm (without load) ± 0.2 µm (without load) 5 µm (without load) Wobble of the axis 0.7 Vibration 55 to 2000 Hz Shock 6 ms 200 m/s 2 (EN 60 068-2-6) 100 m/s 2 (EN 60 068-2-27) (without load) Protection EN 60 529 IP 00 1) Operating temperature Storage temperature Relative air humidity Weight 0 C to 50 C 0 C to 50 C 75 % without condensation 0.5 kg (without cable or connector) * Please select when ordering 1) CE compliance of the complete system must be ensured by taking the correct measures during installation 7

MRP 5000 series MRP 5010 = Bearing axis 1 = All views show the protective cap, which can be removed by the customer 2 = Tightening torque of the M3 8.8 screws: 1.3±0.1 Nm 3 = Mark for 0 position ±5 4 = Do not use edge as fixed stop! 5 = Maintain the distance to the cover 6 = Direction of shaft rotation for output signals as per the interface description 8

MRP 5080 = Bearing axis 1 = All views show the protective cap, which can be removed by the customer 2 = Tightening torque of the M3 8.8 screws: 1.3±0.1 Nm 3 = Mark for 0 position ±5 4 = Do not use edge as fixed stop! 5 = Direction of shaft rotation for output signals as per the interface description 9

MRP 8000 series Angle encoder modules with integrated encoder and bearing Compact dimensions High measuring and bearing accuracy Hollow shaft 100 mm Incremental MRP 8080 Absolute MRP 8010 Measuring standard SUPRADUR circular scale DIADUR circular scale Signal periods 63 000 32 768 System accuracy* ± 1 or ± 2 Position error per signal period ± 0.5 % (± 0.10 ) ± 0.5 % (± 0.20 ) Repeatability From one direction: ± 0.7 From both directions: ± 0.4 From one direction: ± 0.7 From both directions: ± 0.7 Position noise per signal period RMS 0.015 % (0.003 ) 0.025 % (0.010 ) Interface 1 V PP EnDat 2.2 Ordering designation EnDat22 Position values/revolution 29 bits Clock frequency 16 MHz Calculation time t cal 5 µs Reference marks 150 (distance-coded) Cutoff frequency 3 db 500 khz Electrical connection Cable length Cable 1.5 m with D-sub connector (15-pin), interface electronics integrated in the connector 30 m (with HEIDENHAIN cable) Ribbon cable 0.09 m with M12 mounted coupling; adapter cable with quick disconnect as accessory Power supply 5 V DC ± 0.25 V 3.6 V to 14 V DC Power consumption (max.) Current consumption (typical) 5.25 V: 950 mw 3.6 V: 1.1 W 14 V: 1.3 W 175 ma (without load) 5 V: 140 ma (without load) 10 MRP 8080

Incremental MRP 8080 Absolute MRP 8010 Shaft Axial load capacity Contact stiffness Resistance to tilt Hollow through shaft D = 100 mm 300 N (load centered, system accuracy is maintained) Axial: 684 N/µm Radial: 367 N/µm (values calculated; without load) 1250 Nm/mrad (values calculated; without load) Mechanically perm. speed 300 min -1 Frictional moment 0.200 Nm (without load) Moment of inertia of rotor 2.8 10-3 kgm 2 Radial guideway accuracy Non-reproducible radial guideway accuracy Axial guideway accuracy Axial runout of the surface Measured at the distance h = D pw from the race: 0.15 µm (without load) Measured at the distance h = D pw from the race: 0.20 µm (without load) ± 0.2 µm (without load) 4 µm (without load) Wobble of the axis 0.5 Vibration 55 to 2000 Hz Shock 6 ms 200 m/s 2 (EN 60 068-2-6) 100 m/s 2 (EN 60 068-2-27) (without load) Protection EN 60 529 IP 00 1) Operating temperature Storage temperature Relative air humidity Weight 0 C to 50 C 0 C to 50 C 75 % without condensation 1.96 kg (without cable or connector) * Please select when ordering 1) CE compliance of the complete system must be ensured by taking the correct measures during installation MRP 8010 11

MRP 8000 series MRP 8010 = Bearing axis 1 = All views show the protective cap, which can be removed by the customer 2 = Tightening torque of the M4 8.8 screws: 2.9±0.2 Nm 3 = Tightening torque of the M3 8.8 screws: 1.3±0.1 Nm 4 = Mark for 0 position ±5 5 = Do not use edge as fixed stop! 6 = Maintain the distance to the cover 7 = Direction of shaft rotation for output signals as per the interface description 12

MRP 8080 = Bearing axis 1 = All views show the protective cap, which can be removed by the customer 2 = Tightening torque of the M4 8.8 screws: 2.9±0.2 Nm 3 = Tightening torque of the M3 8.8 screws: 1.3±0.1 Nm 4 = Mark for 0 position ±5 5 = Do not use edge as fixed stop! 6 = Direction of shaft rotation for output signals as per the interface description 13

Interfaces Incremental signals 1 V PP HEIDENHAIN encoders with 1 V PP interface provide voltage signals that can be highly interpolated. Signal period 360 elec. The sinusoidal incremental signals A and B are phase-shifted by 90 elec. and have amplitudes of typically 1 V PP. The illustrated sequence of output signals with B lagging A applies for the direction of motion shown in the dimension drawing. The reference mark signal R has an unambiguous assignment to the incremental signals. The output signal might be somewhat lower next to the reference mark. The Interfaces of HEIDENHAIN Encoders brochure includes comprehensive descriptions of all available interfaces as well as general electrical information. (rated value) A, B, R measured with oscilloscope in differential mode Alternative signal shape Pin layout 15-pin D-sub connector Power supply Incremental signals Other signals 4 12 2 10 1 9 3 11 14 7 5/6/8/15 13 / U P Sensor 1) 0 V Sensor 1) U P 0 V A+ A B+ B R+ R Vacant Vacant Vacant Brown/ Green Blue White/ Green White Brown Green Gray Pink Red Black / Violet Yellow Cable shield connected to housing; U P = Power supply voltage Sensor: The sensor line is connected in the encoder with the corresponding power line. Vacant pins or wires must not be used! 14

Position values The EnDat interface is a digital, bidirectional interface for encoders. It is capable both of transmitting position values as well as transmitting or updating information stored in the encoder, or saving new information. Thanks to the serial transmission method, only four signal lines are required. The DATA data is transmitted in synchronism with the CLOCK signal from the subsequent electronics. The type of transmission (position values, parameters, diagnostics, etc.) is selected through mode commands that the subsequent electronics send to the encoder. Some functions are available only with EnDat 2.2 mode commands. The Interfaces of HEIDENHAIN Encoders brochure includes comprehensive descriptions of all available interfaces as well as general electrical information. Ordering designation Command set Incremental signals EnDat01 EnDat21 EnDat 2.1 or EnDat 2.2 With Without EnDat02 EnDat 2.2 With EnDat22 EnDat 2.2 Without Versions of the EnDat interface Operating parameters Operating status Absolute encoder Parameters of the OEM Incremental signals *) Absolute position value EnDat interface Parameters of the encoder manufacturer for EnDat 2.1 EnDat 2.2 Subsequent electronics 1 V PP A*) 1 V PP B*) *) Depends on encoder Pin layout 8-pin coupling, M12 Power supply Absolute position values 8 2 5 1 3 4 7 6 U P Sensor U P 0 V Sensor 0 V DATA DATA CLOCK CLOCK Brown/Green Blue White/Green White Gray Pink Violet Yellow 15-pin D-sub connector Voltage supply Absolute position values 1 9 2 11 13 5 8 14 15 3/4/6/7 U P Sensor 0 V Sensor U P 0 V Internal shield DATA DATA CLOCK CLOCK Vacant Brown/ Green Blue White/ Green White / Gray Pink Violet Yellow / Cable shield connected to housing; U P = power supply voltage Sensor: The sensor line is connected in the encoder with the corresponding power line. Vacant pins or wires must not be used! 15

Connecting cables 1 V PP connecting cables PUR connecting cable [6(2 x 0.19 mm 2 )] A P = 0.19 mm 2 PUR connecting cable [4(2 x 0.14 mm 2 ) + (4 x 0.5 mm 2 )] A P = 0.5 mm 2 8 mm 6 mm 1) Complete with D-sub connector (female, 15-pin) and M23 connector (male, 12-pin) With one connector with D-sub connector (female, 15-pin) Complete with D-sub connectors (female and male, 15-pin) 331693-xx 332433-xx 335074-xx 355215-xx 355209-xx 355186-xx Cable only 816317-xx 816323-xx 1) Cable length for 6 mm: max. 9 m AP : Cross section of power supply lines EnDat connecting cables PUR adapter cable [4(2 0.14 mm 2 )]; A P = 0.14 mm 2 Complete with D-sub connector (female, 15-pin) Complete with M12 coupling (male, 8-pin) 4.5 mm 4.5 mm 735987-xx 679671-xx PUR connecting cables [(4 0.14 mm 2 ) + (4 0.34 mm 2 )]; A P = 0.34 mm 2 Complete with M12 connector (female, 8-pin) and M12 coupling (male, 8-pin) With one connector with M12 connector (female, 8-pin) 6 mm 6 mm 368330-xx 634265-xx A P : Cross section of power supply lines : Cable diameter DR. JOHANNES HEIDENHAIN GmbH Dr.-Johannes-Heidenhain-Straße 5 83301 Traunreut, Germany { +49 8669 31-0 +49 8669 32-5061 E-mail: info@heidenhain.de www.heidenhain.de This Product Overview supersedes all previous editions, which thereby become invalid. The basis for ordering from HEIDENHAIN is always the Product Overview valid when the contract is made. Further Information Catalog: Angle Encoders with Integral Bearing Catalog: Interfaces of HEIDENHAIN Encoders *I_1102713* 1102713 01 A 02 5/2015 PDF