"SIMPLE MEASUREMENT, ADVANCED RESULTS"

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"SIMPLE MEASUREMENT, ADVANCED RESULTS" 1 Phasics offers the most innovative solutions for lens and objectives quality control in R&D and production. Relying on a unique wavefront technology, the quadriwave lateral shearing interferometry*, Phasics solutions provide a fast and complete characterization of your optics. Measured elements Lens Objective, Zoom Strongly aberrated subassembly Applications New product development Process optimization Cost-effective alignment of objectives *Licence ONERA & Patents, LULI-Ecole Polytechnique/CNRS/Paris VI/CEA This document is not contractual 6 GET THE MTF... Along any direction For any pupil size On and off-axis Up to cut-off frequency With various focusing methods... in a single acquisition... and wavefront quality EFL, F#, NA Aberrations: Zernike, Seidel Real time filtering of phase map (Zernike, Kernel ) Through focus MTF Comparison to design Chromatic aberrations

3 OEM solution 3 Fully integrated bench "A FULL RANGE OF SOLUTIONS FOR R&D AND PRODUCTION" Phasics provides OEM solutions combining the wavefront sensor and the software. Phasics also designs benches fully dedicated to your needs. With its strong expertise in metrology, the company works closely with your teams to analyze all your requirements (specification, throughput, budget ) and builds custom solutions mixing the right elements from its large collection of solutions (alignment tools, choice of configuration and measurement conditions, analysis tools ). Dedicated software packages are developed on demand for an easy insertion in your working environment with a special attention to safety standard compliance and ease of use for production. 6 Over the largest spectrum from UV to far IR UV HR Visible Visible-HR SID4 IR-MCT DWIR LWIR 640 Wavelength range 190 400 nm 350 1100 nm 350 1100 nm 1,2 5µm 3 5 & 8 14 µm 8 14 µm Aperture dimension (mm²) 8.0 x 8.0 3.6 x 4.8 8.9 x 11.8 9.6 x 7.68 13.44 x 10.08 16 x 12 Spatial resolution 32 µm 29.6 µm 29.6 µm 60 µm 140 µm 100 µm Phase and intensity sampling 250 x 250 160 x 120 300 x 400 160 x 128 96 x 72 160 x 120 Accuracy (Absolute) 75 nm RMS 75 nm RMS Sensitivity 0.5 nm RMS 3 nm RMS 2 nm RMS 3 nm RMS 25 nm RMS 25 nm RMS Acquisition rate 30 fps 60 fps 10 fps 140 fps 50 fps 24 fps Analysis rate (Full resolution) 1 fps > 10 fps > 3 fps 20 fps 20 fps < 10 fps Dimensions (W x H x L) (mm) 95 x 105 x 84 49 x 35 x 110 76 x 63 x 132 135 x 140 x 240 85 x 116 x 179 96 x 110 x 90 Weight 900 g 250 g 620 g 3.5 Kg 1.6 Kg 850 g Sensor technology CCD Cooled MCT Broadband Micro bolometer Micro bolometer

6 Direct measurement Measuring diverging and converging beams with no relay lens, Phasics sensor enables compact direct set-up: Simple alignment Same setup to cover your full optics range Characterization in working conditions Easy measurement interpretation 1 High resolution The unrivalled high resolution of Phasics sensor ensures reliability, by enabling robust calculations and small defects detection. Up to 300 x 400 measurement points Nanometer level axial resolution 1 High dynamics Phasics sensor measures strongly aberrated optics to detect non-compliant subassemblies before assembly. It also measures aspheric lenses in transmission. 1 Stability Phasics technology does not use reference beam, making it unsensitive to vibrations. Single pass set-up Infinite conjugation Up to F/1 optics - Entrance pupil up to 100 mm 1 2 3 Single pass set-up Point-to-point conjugation 1 2 3 Double-pass set-up 4 1- Source 2- Optics under test 3- PHASICS wavefront sensor 4- Reference sphere 2 "POWERFUL TECHNOLOGY" 1 Achromaticity Inherently achromatic, Phasics technology makes possible measurement at any wavelength without any calibration: Focus shift with wavelength MTF comparison at various wavelengths 3 1

Serving the ease of use of Phasics solution, it manages measurement from settings and acquisition to advanced calculations: Lens database - Alignment helpers - Automated reports "Expert analysis software" 2 easy and rigorous analysis Taking advantage of our technology, the software solution ensures reliable calculation and offers flexibility: focusing methods (best or paraxial focus, MTF autofocus) pupil size advanced filtering options Direct phase measurement makes possible advanced analysis while simplifying the result interpretation. DesignPro module 1 From the optical design file, this module simulates the nominal phase in the measurement plane and delivers the residual wavefront error (WFE) Measured phase PV=57.4λ Lambda 5,00 E+1 1,00 E+1 0,00 E+0 Lambda 5,00 E+1 4,00 E+1 4,00 E+1 3,00 E+1 3,00 E+1 = 2,00 E+1 2,00 E+1 1,00 E+1 0,00 E+0 Simulated wavefront from Zemax design Residual wavefront for a single CVX lens (PV=130 nm) Residual wavefront Lambda nm 1,20 E+2 1,00 E+2 8,00 E+1 6,00 E+1 4,00 E+1 2,00 E+1 0,00 E+0 RetroPro module 1 Direct measurement enables back propagating the measured wavefront to provide the OPD information in the exit pupil of the tested element. The measurement can then easily be compared to optical design. It is of real interest for off axis measurement interpretation. Z4 coefficient (mλ; λ=635nm) 1600 1400 1200 1000 800 600 400 200 Evolution of Astigmatism in the field RetroPro Measurement Zemax 0 0 2 4 6 8 10 12 Angle ( ) MTF and Zernike coefficients can be provided in the exit pupil of the optical element for on and off axis measurement, thus enabling an easy comparison to design data

PHASICS S.A. XTEC Bât. 404 Campus de l Ecole Polytechnique Route de Saclay 91128 Palaiseau - France Tel : +33(0)1 69 33 89 99 Fax : +33(0)1 69 33 89 88 E-Mail : contact@phasics.fr www.phasics.fr