~1mm Table mm Table Side-Mount, Aluminum Body, Slide Guide 88 mm Table Side-Mount, Aluminum Body, Slide Guide 88 mm Table Side-Mount, Aluminum Body, Cross-Roller or Slide Guide 9 mm Table Side-Mount, Aluminum Body, Cross-Roller or Slide Guide 92 1mm Table Side-Mount, Aluminum Body, Cross-Roller or Slide Guide 94 1mm Table Side-Mount, Aluminum Body, Cross-Roller or Slide Guide 96
Understanding Rotation Stage Specifications RM7A-C1 Specifications Model Number RM7A-C1 Mirror Model Number RM7A-C1-R Table Size 68mm Guide Mechanism Crossed-Roller Bearing Coarse Motion Range 3 Fine Motion Range 3 Eccentricity 1m / 3 Surface Runout 1m / 3 Minimum Readout (Table) 1 Minimum Readout (Micrometor).13 Load Capacity (Horizontal) kg Moment Load Stiffness 3 arcsec / kgf-cm Material Aluminum Alloy Finish Clear-Matte Anodizing Weight 4g Actuator Center hole size Description 1. Kohzu's significant alpha-numeric model numbers offer quick product insight. 2. Mirror symmetry of standard stage. 3. Table size refers to the stage's upper-most mounting surface. 4. Type of guide mechanism used on this stage.. Stage travel range (coarse). 6. Stage travel range (fine) in the positive and negative directions from it's centered or neutral position. 7. Difference of rotation center while stage is rotating. See page 1 for detail. 8. Deviation of mounting stage surface while stage is rotating. See page 1 for detail. 9. Minimum readout of Table is the smallest measurable actuator motion increment at stage table.. Minimum readout of is the smallest measurable actuator motion increment at or vernier scale. 11. Maximum load capacity is for a horizontally orientated stage with load centered on top-plate. 12. Moment load stiffness is measured in a direction perpendicular to the motion axis. See page 298 for details. 13. Material specification is for stage's main body components only. 14. Surface finish type and color. 1. Stage weight includes all components depicted in product photograph. 16. Actuator model number and travel range. 17. Hole size of table surface center. Coarse Clamping Torque Recommendation: ~mm Table Size: 1.kg-cm ~1mm Table Size: 2kg-cm Caution: Over-tightening of coarse clamp will result in restricted movement. 86
Guide Mechanism Type Cross-Roller Bearing In cross-roller bearing guides quench hardened and precision ground bearing surfaces move upon loose hardened steel cylinders (rollers) with rotation axes oriented in alternating 9 degree angles (Ref. Fig.1). Having rollers arranged in an alternating cross pattern allows preloading and operation at any angle. The roller bearings are held apart from one another by a bearing cage, which prevents adjacent rollers from touching. Since cross-roller bearing have little difference between static and dynamic friction they minimize start-to-stop slip-motion typical of other bearing types. The line contact of roller bearings along with precise roller-to-race gap management provide larger load-bearing surfaces, higher preloads and meet very tight runout and stiffness specifications. Slide Guide Slide guide is guidance mechanism which is build from contiguous two face (Ref. Fig.2). In other words, that of guidance mechanism is built from fixed part and movement part only. That is efficient of dust reduction from the parts slit. In addition, this type of stage have high load capacity and mechanical chock, because supportable touch field is large. On the other hands, easy to occur the stick slip on contiguous part, because difference between coefficient of static and kinetic friction is big. Fig.1 Fig.2 Precision Positioning Stages Actuator Type See Common Features of Kohzu Manual Stages section on page 18. Minimum Readout Fine angle adjustment is achieved by micrometer pushing the bar which is mounted stage. Accurate travel angle is calculated based upon the distance from fulcrum to power point and action point of the lever, and shape of bar head. However, near center point can be calculated as below. t = tant/rr: -1 R distance from the rotation center to power point (mm) t: distance from medium point of micrometer. CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] info@kohzu.com [URL] www.kohzu.com 87
/ ~mm Table RM4A-D1 RMA-D1 Manual Rotary stages are fitted with precision Slide Guides. Stage body is made of Aluminum and finished with a clear-matte anodizing. Coarse Motion Range is 3, Fine Motion Range is 3. Standard micrometer actuator type is available. Specifications Model Number Mirror Model Number Table Size Guide Mechanism Coarse Motion Range Fine Motion Range Eccentricity Surface Runout Minimum Readout (Table) Minimum Readout () Load Capacity (Horizontal) Moment Load Stiffness Material Finish Weight Actuator Center Hole Size RM4A-D1 RM4A-D1-R 36mm.2 3kg 7 arcsec / kgf-cm 1g 4mm RMA-D1 RMA-D1-R 49mm Slide Guide 3 3 1m / 3 1m / 3 2.168 4kg 6 arcsec / kgf-cm Aluminum Alloy Clear-Matte Anodizing 19g 8mm We offer custom products such as vacuum stages, clean room stages, and many other modifications. Optional Lubricant Exchange Lubricant Type Vacuum 1 RM4A-D1-V Sample Model Number RM4A-D1-R-V Modification Cost 1. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed. 88
Side-Mount, Aluminum Body, Slide Guide 12 3 4 6 7 8 9 1112 1314116 8 7 6 4 3 2 1 1 2 3 4 6 78 RM4A-D1 8 9 111 111 RMA-D1 CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] info@kohzu.com [URL] www.kohzu.com 89
/ mm Table RM7A-C1 RM7A-C2 RM7A-C3 RM7A-C1 / C2 / C3 Manual Rotary stages are fitted with precision Cross-Roller Bearings. Stage body is made of Aluminum and finished with a clear-matte anodizing. Three (3) standard micrometer actuator types are available. The RM7A-C3 stage is fitted with a high-resolution actuator FPP3-13. The FPP3-13 actuator is a Kohzu proprietary sub-micron resolution, high-sensitivity, differential micrometer head (p282). Specifications Model Number Mirror Model Number Table Size Guide Mechanism Coarse Motion Range Fine Motion Range Eccentricity Surface Runout Minimum Readout (Table) Minimum Readout () Load Capacity (Horizontal) Moment Load Stiffness Material Finish Weight Actuator Center Hole Size RM7A-C1 RM7A-C1-R.13 4g RM7A-C2 RM7A-C2-R Cross-Roller Bearing 68mm RM7A-D1 RM7A-D1 Manual Rotary stages are fitted with precision Slide Guides. Stage body is made of Aluminum and finished with a clear-matte anodizing. Standard micrometer actuator type is available. RM7A-C3 RM7A-C3-R RM7A-D1 RM7A-D1-R Slide Guide 3 3 1m / 3 1m / 3 1 Coarse.13, fine.62 fine.62.13 kg kg 3 arcsec / kgf-cm 6 arcsec / kgf-cm Aluminum Alloy Clear-Matte Anodizing 49g 3g Differential MHF2-13 (13mm) Fine Pitch Positioner FPP3-13 (13mm) mm mm We offer custom products such as vacuum stages, clean room stages, and many other modifications. Optional Lubricant Exchange 1 Lubricant Type Clean Room 2 RM7A-C1-C Sample Model Number RM7A-C1-R-C Modification Cost Vacuum 3 RM7A-C1-V RM7A-C1-R-V 1. Lubricant Exchange is not available for actuators on stages that include the C2 or C3 model number. 2. Although clean room grease aids in the reduction of particulate output, a specific cleanliness level cannot be guaranteed. 3. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed. Vacuum grease exchange is only available on the RM7A-D1. 9
Side-Mount, Aluminum Body, Cross-Roller or Slide Guide RM7A-C1 RM7A-C2 8 9 1 1 1 1 1 1 8 9 1 1 1 8 8 8 8 RM7A-C3 RM7A-D1 8 9 1 1 1 3 8 8 8 9 1 1 1 1 1 1 8 8 CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] info@kohzu.com [URL] www.kohzu.com 91
/ mm Table RMA-C1 RMA-C2 RMA-C3 RMA-C1 / C2 / C3 Manual Rotary stages are fitted with precision Cross-Roller Bearings. Stage body is made of Aluminum and finished with a clear-matte anodizing. Three (3) standard micrometer actuator types are available. The RMA-C3 stage is fitted with a high-resolution actuator FPP3-13. The FPP3-13 actuator is a Kohzu proprietary sub-micron resolution, high-sensitivity, differential micrometer head (p282). Specifications Model Number Mirror Model Number Table Size Guide Mechanism Coarse Motion Range Fine Motion Range Eccentricity Surface Runout Minimum Readout (Table) Minimum Readout () Load Capacity (Horizontal) Moment Load Stiffness Material Finish Weight Actuator Center Hole Size RMA-D1 RMA-D1 Manual Rotary stages are fitted with precision Slide Guides. Stage body is made of Aluminum and finished with a clear-matte anodizing. Standard micrometer actuator type is available. RMA-C1 RMA-C1-R RMA-C2 RMA-C2-R RMA-C3 RMA-C3-R RMA-D1 RMA-D1-R 98mm Cross-Roller Bearing Slide Guide 3 3 1m / 3 1m / 3 1.94 7g Coarse.94, fine.47 1kg 1. arcsec / kgf-cm Aluminum Alloy Clear-Matte Anodizing 8g fine.47.94 8kg 3 arcsec / kgf-cm 8g Differential MHF2-13 (13mm) Fine Pitch Positioner FPP3-13 (13mm) mm 36mm We offer custom products such as vacuum stages, clean room stages, and many other modifications. Optional Lubricant Exchange 1 Lubricant Type Clean Room 2 RMA-C1-C Sample Model Number RMA-C1-R-C Modification Cost Vacuum 3 RMA-C1-V RMA-C1-R-V 1. Lubricant Exchange is not available for actuators on stages that include the C2 or C3 model number. 2. Although clean room grease aids in the reduction of particulate output, a specific cleanliness level cannot be guaranteed. 3. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed. Vacuum grease exchange is only available on the RMA-D1. 92
Side-Mount, Aluminum Body, Cross-Roller or Slide Guide RMA-C1 8 9 1 1 1 1 1 1 RMA-C2 8 9 1 1 RMA-C3 RMA-D1 3 8 9 1 8 9 1 1 1 1 1 1 CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] info@kohzu.com [URL] www.kohzu.com 93
/ 1mm Table RM13A-C1 RM13A-C3 RM13A-C1 / C2 / C3 Manual Rotary stages are fitted with precision Cross-roller Bearings. Stage body is made of Aluminum and finished with a clear-matte anodizing. Three (3) standard micrometer actuator types are available. The RM13A-C3 stage is fitted with a high-resolution actuator FPP3-13. The FPP3-13 actuator is a Kohzu proprietary sub-micron resolution, high-sensitivity, differential micrometer head (p282). Specifications Model Number Mirror Model Number Table Size Guide Mechanism Coarse Motion Range Fine Motion Range Eccentricity Surface Runout Minimum Readout (Table) Minimum Readout () Load Capacity (Horizontal) Moment Load Stiffness Material Finish Weight Actuator Center Hole Size RM13A-C1 RM13A-C1-R.7 RM13A-C2 RM13A-D1 RM13A-D1 Manual Rotary stages are fitted with precision Slide Guides. Stage body is made of Aluminum and finished with a clear-matte anodizing. Standard micrometer actuator type is available. RM13A-C2 RM13A-C2-R RM13A-C3 RM13A-C3-R RM13A-D1 RM13A-D1-R 128mm Cross-Roller Bearing Slide Guide 3 3 1m / 3 m / 3 Coarse.7, fine.38 fine.38.7 kg 8kg 1 arcsec / kgf-cm 2 arcsec / kgf-cm Aluminum Alloy Clear-Matte Anodizing 1.4kg 1.2kg Differential MHF2-13 (13mm) Fine Pitch Positioner FPP3-13 (13mm) mm mm We offer custom products such as vacuum stages, clean room stages, and many other modifications. Optional Lubricant Exchange 1 Lubricant Type Clean Room 2 RMA-C1-C Sample Model Number RMA-C1-R-C Modification Cost Vacuum 3 RMA-C1-V RMA-C1-R-V 1. Lubricant Exchange is not available for actuators on stages that include the C2 or C3 model number. 2. Although clean room grease aids in the reduction of particulate output, a specific cleanliness level cannot be guaranteed. 3. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed. Vacuum grease exchange is only available on the RM13A-D1. 94
Side-Mount, Aluminum Body, Cross-Roller or Slide Guide RM13A-C1 RM13A-C2 8 9 1 1 1 1 1 1 8 9 1 1 1 RM13A-C3 RM13A-D1 3 8 9 8 9 1 1 1 1 1 1 CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] info@kohzu.com [URL] www.kohzu.com 9
/ 1mm Table RM16A-C1 RM16A-C2 RM16A-C3 RM16A-C1 / C2 / C3 Manual Rotary stages are fitted with precision Cross-Roller Bearings. Stage body is made of Aluminum and finished with a clear-matte anodizing. Three (3) standard micrometer actuator types are available. The RMA-C3 stage is fitted with a high-resolution actuator FPP3-13. The FPP3-13 actuator is a Kohzu proprietary sub-micron resolution, high-sensitivity, differential micrometer head (p282). Specifications Model Number Mirror Model Number Table Size Guide Mechanism Coarse Motion Range Fine Motion Range Eccentricity Surface Runout Minimum Readout (Table) Minimum Readout () Load Capacity (Horizontal) Moment Load Stiffness Material Finish Weight Actuator Center Hole Size RM16A-C1 RM16A-C1-R.63 RM16A-D1 RM16A-D1 Manual Rotary stages are fitted with precision Slide Guides. Stage body is made of Aluminum and finished with a clear-matte anodizing. Standard micrometer actuator type is available. RM16A-C2 RM16A-C2-R RM16A-C3 RM16A-C3-R RM16A-D1 RM16A-D1-R 18mm Cross-Roller Bearing Slide Guide 3 3 1m / 3 m / 3 1 Coarse.63, fine.31 fine.31.63 kg 8kg. arcsec / kgf-cm 1. arcsec / kgf-cm Aluminum Alloy Clear-Matte Anodizing 1.9kg 2.1kg Differential MHF2-13 (13mm) Fine Pitch Positioner FPP3-13 (13mm) mm We offer custom products such as vacuum stages, clean room stages, and many other modifications. Optional Lubricant Exchange 1 Lubricant Type Clean Room 2 RM16A-C1-C Sample Model Number RM16A-C1-R-C Modification Cost Vacuum 3 RM16A-C1-V RM16A-C1-R-V 1. Lubricant Exchange is not available for actuators on stages that include the C2 or C3 model number. 2. Although clean room grease aids in the reduction of particulate output, a specific cleanliness level cannot be guaranteed. 3. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed. Vacuum grease exchange is only available on the RM16A-D1. 96
Side-Mount, Aluminum Body, Cross-Roller or Slide Guide RM16A-C1 1 1 1 1 1 1 9 RM16A-C2 8 1 1 1 1 1 1 9 8 RM16A-C3 RM16A-D1 8 9 3 1 1 1 1 1 1 8 9 CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] info@kohzu.com [URL] www.kohzu.com 97