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1 Tips, Tricks, and Traps of High Power Semiconductor Device Testing 张卫华 KEITHLEY INSTRUMENTS 1 8/20/ Keithley Instruments, Inc Keithley Instruments, Inc.

2 Overview The goal of this seminar is to familiarize you with techniques to resolve common problems / issues in power semiconductor discrete devices testing, including Proper instrument configuration for tests that require up to 100A pulsed current Verification of instrument setup for pulsed IV measurements Methods to ensure personnel safety, and instrument and device protection during high voltage testing Detection and suppression of device oscillation Proper instrument grounding and measurement reference with multiple bench or rack-mounted instruments This seminar will focus on the testing of single devices. You can apply ppy techniques discussed to testing MOSFETs, BJT, IGBTs, diodes, and thyristors. 2 8/20/ Keithley Instruments, Inc.

3 On-State Characterization Commonly performed with pulsed stimulus to limit the maximum power applied to the device. Devices designed to target low conduction loss, which will result in lower voltages across the device. Test equipment must be capable of generating high current and measuring low voltages in short time periods. Variety of tests dictates both voltage and current source control 3 8/20/ Keithley Instruments, Inc.

4 Keithley solutions for on-state characterization Keithley Series 2600A System SourceMeter Instrument Keithley Model 2651A High Power System SourceMeter Instrument t Another solution for the lower voltage control is Keithley s Model 4200 Semiconductor Characterization System 4 8/20/ Keithley Instruments, Inc.

5 Common Configuration and Measurement Considerations for On-state Characterization 1. Improper cabling and connections 2. Improper source and measure delays lead to inconsistent results. 3. Device oscillation 4. Obtaining higher current using more than one instrument 5 8/20/ Keithley Instruments, Inc.

6 Why Cabling Matters for High Current Testing Devices that can carry a lot of current are typically low resistance in order to minimize conduction loss Will require sensitive voltage measurement. Must consider impact of cabling and connections Cable must be rated for the test current in order to avoid fire hazard Resistance of test leads / traces may be large relative to DUT resistance Large currents are more sensitive to test system inductance 6 8/20/ Keithley Instruments, Inc.

7 Consider Lead Resistance: 2-Wire vs. 4-Wire (Kelvin) Connections 2-Wire Connections Same leads are used to source current and sense voltage Voltage drops across the test leads will errors in the measured voltage, so that the measured voltage > actual device voltage 7 8/20/ Keithley Instruments, Inc.

8 Consider Lead Resistance: 2-Wire vs. 4-Wire (Kelvin) Connections 4-Wire Connections Separate leads are used to source current and sense voltage Because the sense current is zero, the measured voltage is the actual device voltage 8 8/20/ Keithley Instruments, Inc.

9 Consider Test Lead Inductance Inductor i-v relationship: di V = L dt Calculation of device voltages: V V B C = V = V A D di L dt di + L dt Inductance causes a time-dependent effect Resists change in current Requires more push (voltage) from the SMU Can result in ringing or overshoots at the rising and falling edges of the pulse Can also slow pulse rise time Inductance is largely l determined d by the loop area of the test t cables Large loop area results in large inductance Example: 1meter single conductor cables with spaced 6 (0.15m) apart can result in ~ 2uH of inductance. This requires an extra 5V from the SMU to achieve desired voltage. Use coaxial cable or twisted pair to minimize loop area 9 8/20/ Keithley Instruments, Inc.

10 Tips for Optimal Cabling Minimizing effects of lead resistance Always use wire of the appropriate gauge for required level of current Example: 20A DC requires 12 AWG or lower Minimize contact resistance Ensure contacts are clean Ensure connections are secure Ensure good solder joints Use 4-wire (Kelvin) connections Minimizing Inductance Minimize loop area by twisting test leads together to form a twisted pair Use coaxial cable The Keithley Model 2651A High Power SourceMeter instrument includes a low resistance, low inductance coaxial cable Cable is rated 3mΩ and 85nH per meter 10 8/20/ Keithley Instruments, Inc.

11 Establishing measurement common: Getting the right results by using the right connections 11 8/20/ Keithley Instruments, Inc.

12 Understanding di the issue of the placement of measurement common 12 8/20/ Keithley Instruments, Inc.

13 Resolving the issue of the placement of measurement common 13 8/20/ Keithley Instruments, Inc.

14 Establishing measurement common for on-wafer configurations 14 8/20/ Keithley Instruments, Inc.

15 Summary: Getting the right results by using the right connections Use 4-Wire for connecting to the gate SMU to ensure that source lead resistance doesn t impact accuracy of Vgs Route the LO terminal of the high current SMU separately from the common terminal of the rest of the SMUs. Ensures that high current doesn t cause voltage errors. For on-wafer testing: If pad space is limited or pad lifetime is a concern, consider using quasi-kelvin approach where you tie Force and Sense terminals together as close as possible to the DUT 15 8/20/ Keithley Instruments, Inc.

16 System Validation Validate your system to ensure that the system is properly configured and to have confidence that you re getting correct measurements. Consider Connections Pulse Fidelity 16 8/20/ Keithley Instruments, Inc.

17 System Validation: Getting the desired results Make sure that all of the instrument terminals are connected to the device terminals The Model 2651A has contact check feature that enables user to verify that the both force and sense terminals are connected prior to a test Output a single pulse and measure the response at the DUT to configure appropriate p source and measure delays High speed digitizers are useful for measuring the pulse response In addition to two high resolution integrating ADCs, the Model 2651A has two 1MHz 18-bit digitizers (fast ADC) for measuring voltage and current simultaneously 17 8/20/ Keithley Instruments, Inc.

18 System Validation Example Voltage pulse settled here Time available for measurement 18 8/20/ Keithley Instruments, Inc.

19 Oscillation in High Power Semi Devices Commonly present in high gain and high switching speed transistors. Can destroy the device. Results in inconsistent and erroneous measurements Reasons for oscillation: Feedback-type oscillation when variation in device output voltage coupled to device input Large changes in impedance as device is switched from off-state to on-state result in variations in the output voltage Because the gate is coupled to output by the reverse transfer capacitance, the output voltage variations inject energy into gate terminal. This is fed back to output and results in oscillation. Resonant tank circuit created by parasitic inductances and capacitances of device, driver circuit, and connections to the device input terminal. Interactions between multiple instruments connected to different device terminals. 19 8/20/ Keithley Instruments, Inc.

20 Detecting oscillation Use high speed scope to monitor voltages and currents at input and output terminals Use fast ADC of Keithley Series 2650A to review waveforms. Provides high speed voltage and current measurements without addition of external probes 20 8/20/ Keithley Instruments, Inc.

21 Remedies for device oscillation A quick and simple technique is to add resistor in series with the device input terminal (gate or base) to suppress oscillation The resistor also slows the switching speed of the device Select a resistance that dampens oscillation without significant impact to switching time performance. Typically values of a few ohms to 100 ohms May be able to tolerate larger series resistance when characterizing only DC performance of device. Some cases require a simple delay to move measurement after the initial ringing of the pulse 21 8/20/ Keithley Instruments, Inc.

22 Remedies for device oscillation Other techniques include Establish local ground loop by tying cable shields together as close as possible to the DUT Use of ferrite beads around connections to device input terminal Use RC compensation circuits for parasitic capacitances and inductances at the device input terminal Use shunt capacitor across output of device Reduce response time of SMU connected to input terminal On some Keithley SMUs, this is done by enabling High-Capacitance ( Hi-C ) mode 22 8/20/ Keithley Instruments, Inc.

23 Inserting resistor in series with device input on Keithley Model 8010 High Power Test Fixture 23 8/20/ Keithley Instruments, Inc.

24 Testing with even higher h current, beyond the capability of a single SMU SMUs can be used in parallel to achieve higher currents or longer pulse widths or higher duty cycle pulse trains May be used for current sourcing or voltage sourcing test configurations Combining SMUs is an advanced topic. In order to achieve consistent and accurate results, you must take proper design considerations See Model 2651A-related apps note on Keithley website ( Keithley TSPExpress and ACS Basic Edition software packages simplify the SMU configuration and deliver precise measurements when using two SMUs in parallel Let s see how SMUs can be used in parallel for two common MOSFET tests 24 8/20/ Keithley Instruments, Inc.

25 RdsOn Measurement up to 100A Pulsed current source application Use two Model 2651As in parallel with each configured as a current source Both SMUs correctly measure the voltage at the device 25 8/20/ Keithley Instruments, Inc.

26 Generating Family of curves (Vds-Id) or Transfer Characteristics (Id-Vg) up to 100A Pulsed voltage source application Use two Model 2651A SMUs with one configured as a voltage source and one configured as a current source Sum of the current measurements from each SMU is the current through the device 26 8/20/ Keithley Instruments, Inc.

27 Off-State Characterization Commonly performed at DC to achieve high accuracy leakage measurements Very low leakage measurement capability required for new wide bandgap technologies (GaN, SiC) Test equipment must be capable of generating high voltages and measuring low currents Variety of tests dictates both voltage and current source control 27 8/20/ Keithley Instruments, Inc.

28 Keithley Solutions for Off-State Characterization Keithley Series 2600A System SourceMeter Instrument Keithley Model 2657A High Power System SourceMeter Instrument Another solution for the lower voltage control is Keithley s 28 Model 8/20/ Semiconductor Characterization System 2012 Keithley Instruments, Inc.

29 Common Considerations for Off-State Characterization 1. Safety a) Personnel b) Instrumentation c) Device 2. System capacitance and settling time 3. Cabling and connections to achieve optimal low current measurements 29 8/20/ Keithley Instruments, Inc.

30 Protecting yourself and others Protect operators from hazardous voltage using interlocks and safety enclosures Never defeat the interlock! Ensure that all instruments capable of generating hazardous voltages are disabled whenever a user attempts to access the DUT. Ensure that all conductive surfaces that are accessible to the operator are properly grounded to protective earth (safety ground) In some test systems, the measurement common is floating and can float to hazardous voltages. In such cases, you must take high voltage precautions at all terminals. 30 8/20/ Keithley Instruments, Inc.

31 Take precautions to protect your instrument investment Off state characterization involves testing near or at device limits Device breakdown can result in hazardous voltage being present at terminals that are typically connected to low power instruments. Carefully consider all potential modes of device failure 31 8/20/ Keithley Instruments, Inc.

32 Take precautions to protect your instrument investment Overvoltage protection modules ensure that the lower voltage instrument is protected if device failure results Model 2657A-PM-200 Protection Module 32 8/20/ Keithley Instruments, Inc.

33 Take precautions to protect your device Off-state characterization typically involves testing device at or beyond device limits. Non-destructive testing is preferred Unlike curve tracers and power supplies, Keithley SourceMeter instruments include built-in programmable features to precisely and quickly limit the maximum voltage and current to the device As with any protection device (e.g. fuse), the SMU s limit control has a finite response time (tens to hundreds of microseconds) Some high speed wide bandgap technology devices have extremely fast and hard breakdown Device impedance may change 5-7 orders of magnitude If the device breaks down faster than SMU has time to respond, then the current into the device may be higher than the programmed current limit 33 8/20/ Keithley Instruments, Inc.

34 Take precautions to protect your device To limit maximum possible current through device, use series resistor This is the most common reason that a resistor is inserted between the high voltage SMU and the DUT Use resistor that is rated for max voltage and max power Example: 100kOhm resistor in diagram will limit it current to 10mA at 1000V. Resistor must be rated for 10W. 34 8/20/ Keithley Instruments, Inc.

35 K E I T H L E Y C O N F I D E N T I A L P R O P R I E T A R Y Setting appropriate source and measure delays when testing with low current Low current tests (<1uA) require longer settling times in order to achieve accuracy and low noise. With source delay = 0 sec With source delay = AUTO 35 8/20/ Keithley Instruments, Inc.

36 Account for System Capacitance and Settling Time Source and measure delays need to account for time to charge system capacitance This is especially important in prober applications. Vertical devices require high voltage through chuck. Size of chuck and length of cabling results in large capacitance at this terminal Capacitive charging g times determine the minimum effective pulse width for the high voltage instrument Use high enough current limit to charge capacitance of system quickly 36 8/20/ Keithley Instruments, Inc.

37 K E I T H L E Y C O N F I D E N T I A L P R O P R I E T A R Y Example: V-source rise time examined as dependent upon current limit (Data taken with fast ADC of Model 2657A) When current limit is set too low, the V-source rise time is affected. Increasing current limit results in a fast rise time for the voltage source 37 8/20/ Keithley Instruments, Inc.

38 K E I T H L E Y C O N F I D E N T I A L P R O P R I E T A R Y Example: Effect of Ig on Id on commercially available Cree MOSFET The drain pulse rise time is affected by the current limit of the SMU connected to the gate. The gate SMU must have enough current to charge the device capacitances fast enough so that the device can turn on. 38 8/20/ Keithley Instruments, Inc.

39 Use guarding to reduce system capacitive charge time Capacitance spec of a typical triaxial cable is 40pF / foot. This can result in several hundreds of pf for a 2-3m cable Guard is at the same potential as the HI terminal Use triaxial cabling to carry guard and protect users from electric shock Use guarding to eliminate need to charge cable capacitance 39 8/20/ Keithley Instruments, Inc.

40 K E I T H L E Y C O N F I D E N T I A L P R O P R I E T A R Y Guarding improves low current measurement performance Without Guarding 40 8/20/ Keithley Instruments, Inc.

41 K E I T H L E Y C O N F I D E N T I A L P R O P R I E T A R Y Guarding improves low current measurement performance With Guarding 41 8/20/ Keithley Instruments, Inc.

42 200 Watts of DC Power Up to 2000 Watts of pulsed power Single unit capable of up to 50A at 40V pulse Two units can be combined to generate 100A pulses <1µs multi unit synchronization Flexible digital I/O for triggering other instrumentation t ti Includes separate integrating and high speed ADCs for both voltage and current User selectable ADC allows use to achieve desired balance in speed and accuracy Keithley Model 2651A High Power System SourceMeter Instrument 42 8/20/ Keithley Instruments, Inc.

43 Keithley Model 2657A High Power System SourceMeter Instrument Up to 180 Watts of DC Power Continues Keithley s legacy of high voltage products that have been utilized for many years in high voltage testing of semiconductors Low current measurement Conditioned for production or characterization environments: TSP, digital I/O interfaces, can be integrated into dedicated systems as well as used for benchtop characterization systems 43 8/20/ Keithley Instruments, Inc.

44 For More information Building and configuring systems for power semiconductor device testing App Note: Creating Multi-SMU Systems with High Power System SourceMeter Instruments Website: p p p Combining SMUs in parallel for testing higher current devices App Note: Testing to 100 A by Combining Keithley Model 2651A High Power SMU Instruments Validating system using high speed ADC of Series 2650A instruments App Note: Measuring Pulsed Waveforms with the High Speed Analog-to-Digital Converter in the Model 2651A High Power System SourceMeter Instruments Understanding challenges of low current source and measurement and optimizing the setup: Low Level Measurements Handbook, 6th Edition For help with application-specific or test-specific questions Keithley Web Forums: Daily monitored by factory and field applications engineers Your local Keithley Field Applications Engineer Contact information for worldwide sales offices available at /20/ Keithley Instruments, Inc.

45 References Keithley Application Note #3163 Creating Multi-SMU Systems with High Power System SourceMeter Instruments Keithley s Low Level Measurements Handbook, 6th Edition Fairchild Semiconductor Application Bulletin AB-9 Suppressing MOSFET Gate Ringing in Converters: Selection of a Gate Resistor. Available from Advanced d Power Technology Application Note APT-0402 Rev. A Eliminating i Parasitic Oscillation Between Parallel MOSFETs by Jonathan Dodge. Available from /20/ Keithley Instruments, Inc.

46 Keithley High Power System SourceMeter SMU Instruments Unmatched Performance for Testing Higher Power Devices Model 2657A High Voltage SMU Instrument Up to 3,000V and up to 180W of power 1fA resolution Model 2651A High Current SMU Instrument Up to 50A (or 100A with 2 units) and up to 2000W pulse / 200W DC power 1pA resolution 46 8/20/ Keithley Instruments, Inc.

47 Contact and Q&A 全国免费电话 : , 吉时利 ( 北京 ) 测量仪器有限公司 : 北京市朝阳区霄云路 36 号国航大厦 室邮编 : 全国免费电话 : , 电话 : 传真 : 电子邮件 : china@keithley.com 上海代表处 : 上海市徐汇区宜山路 900 号 C 楼 7 楼电话 : 电子邮件 : shanghai@keithley.com 深圳代表处 : 深圳市福田区南园路 68 号上步大厦 21 层 H 室电话 : 传真 : 电子邮件 : shenzhen@keithley.com 47 8/20/ Keithley Instruments, Inc.

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