Effects of Source Field Plate and Pt- gate Metalliza8on on AlGaN/GaN HEMTs Reliability
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1 Effects of Source Field Plate and Pt- gate Metalliza8on on AlGaN/GaN HEMTs Reliability Robert Finch, Lu Liu, Chien- Fong Lo, Tsung- Sheng Kang, David A. Cullen, Jinhyung Kim, David. J. Smith, S. J. Pearton and Fan Ren April 12, 211
2 Effects of Source Field Plate and Pt- gate Metalliza8on on AlGaN/GaN HEMTs Reliability FLOORS Pt- gated HEMT S Pt AlGaN/GaN D VDS SiNx Field Plate N i/a u g a te P t/t i/a u g a te F o rw ard B ias Stressed device NFP FP Vcri VGS - N i/a u g a te P t/t i/a u g a te V g (V ) t=, As Built I D S (m A /m m ) IG (A) 75-3 R evers e B ias IG (ma/mm) 5 Ig (m A /m m ) 25-2 Ig (A ) Ig (m A /m m ) NFP FP 2 IDS (ma/mm) G Step =.5V 3 Stressed device Ig (A ) Source- Field Plate HEMT 4 V = V Fresh device 5 P t- g ated H E MT s Ni- g ated H E MT s 4 V G = V, s tep = - 1V F res h S tres s ed V D S ( V ) V D S ( V ) t>, Degrada4on V G = V, s tep = - 1V F res h S tres s ed 2 4
3 Proposed Degradation Mechanisms Ø Hot- electron- induced trap degrada8on (Meneghesso, 28); Ø Crystallographic- defects through the inverse piezoelectric effect (del Alamo, 28); Ø Electric- field driven mechanism; Ø Gate sinking; Ø Ohmic contact degrada8on (Meneghesso, 1998). 3
4 Micrographs With Field Plate: Without Field Plate: G G D S D S 4
5 Device Schematic & TEM result Pt deposition Field Plate Ohmic source contact Gate SiN x passivation Ohmic drain conta ield Plate GaN Phase nucleating at interface 1µm S Pt SiNx D AlGaN/GaN 5
6 Drain I-V Characteristics (ma) V G = V Step =.5V NFP FP (ma/mm) V DS 6
7 Off-state Stress Result I G (ma/mm) NFP FP I G (A) V GS V cri -7 7
8 Electric Field Simulation 2- D simula8on of the electric field distribu8on between Source and Drain. ATLAS/BLAZE (AutomaGcally tuned linear algebra sohware) Electric Field (MV/cm) S G No F ield P late F ield P late Vg=- 5V V DS =3V Position (µm) D 8
9 I G, I GS and I GD as a function of V GS I G - 4 I GS Ig (ma/mm) I GD Vcrit Ig (A) V GS - 8 9
10 TEM Result Fresh device Stressed device Source side of gate edge Drain side of gate edge Dr. Smith, ASU
11 TEM Result Au Ni AlGaN Metal diffusion GaN TD 11
12 STEM-EELS Line Scan a a Distance (nm) b Ni N O Ni c Counts ( 5 ) b Distance (nm) N O Ni Counts ( 5 ) c N O Ni nm AlGaN Distance (nm) 12
13 Field-plate Conclusions By employing Source field plate the device s cri8cal voltage has been improved from - 4 to - 65V, and breakdown voltage from 5 to 15V. 13
14 DC characteristics of Pt- and Ni-gated HEMTs (ma/mm) Ni/Au gate Pt/Ti/Au gate V DS (ma) Ig (ma/mm) Ig (ma/mm) -2 Reverse Bias Pt/Ti/Au gate Ni/Au gate Forward Bias Vg Ni/Au gate P t/ti/au gate Ig (A) Ig (A) 14
15 Comparison of V cri I G (ma/mm) Ni- gated HEMTs V DS = +5V I G (A) I G (ma/mm) 3 Pt- gated HEMTs 1 V DS = +5V V GS V GS 15
16 Comparison of Drain I-V (ma/mm) Ni- g ated H E MT s F resh S tressed V G = V, step = - 1V (ma) (ma/mm) P t- g ated H E MT s F resh S tressed V G = V, step = - 1V V DS V DS 16
17 omparison of Gate leakage current Ig (ma/mm) Reverse Bias Pt- gate Ni- gate F resh S tressed V G Ig (A) Ig (ma/mm) Pt- gate V G Forward Bias Ni- gate F resh S tressed
18 omparison of sub-threshold leakage current (ma/mm) V DS = V 2V 3V 4V Ni- g ated H E MT s V GS (A) (ma/mm) V DS = V 2V 3V 4V Pt- gated HEMTs V GS
19 omparison of ON/OFF ratio, I G (ma/mm) 6 Fresh Stressed I G V DS = +4V Ni- gated HEMTs V G , I G (A), I G (ma/mm) 6 Fresh Stressed P t- g ated H E MT s I G V DS = +4V V G , I G (A) 19
20 ummary of parameters before/after stress Pt/Ti/Au Ni/Au Subthreshold slope (mv/dec) On/Off ra8o Ideality factor Scho]ky barrier height Fresh Stressed Fresh Stressed
21 XPS results As deposit Post annealed 5 Pt on GaN As deposit 1.Pt 4f 7/2 5 Pt on GaN 4 Post-anneal 1.Pt 4f 7/2 Intensity N(E) Pt 4f 5/2 Intensity N(E) Pt 4f 5/ Binding Energy (ev) Binding Energy (ev) 21
22 XPS results As deposit Post annealed Intensity N(E) Ni on GaN As deposit 1.Ni-O 2.Ni satellite 3.Ni metal Intensity N(E) Ni on GaN 1 Post-anneal 1.Ni-O 2.Ni satellite 3.Ni metal Binding Energy (ev) Binding Energy (ev) 22
23 XPS results As deposit Post annealed Intensity N(E) Ni on GaN 2 1 As deposit 1.Ga-O 2.Ni-O (e) Ni on GaN 2 1 Post-anneal 1.Ga-O 2.Ni-O (f) Binding Energy (ev) Binding Energy (ev) 23
24 Pt gate Conclusion Using Pt gate metalliza8on, the cri8cal voltage of electrical stress has been enhanced from - 55V with Ni gate to greater than - V with Pt gate. The reliability of AlGaN/GaN HEMTs have been enhanced significantly. 24
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