GHW-12A RF Generator 1.25 kw, MHz 25 Pin Analog Interface

Transcription

1 GHW-12 RF Generator 1.25 kw, MHz 25 Pin nalog Interface PROPRIETRY T NOTICE PROJ. ENG.: J. Kopalek 05/21/98 MKS INSTRUMENTS, INC. 100 HIGHPOWER RO ROCHESTER, NEW YORK THIS RWING MY INCLUE UNPUBLISHE PROPRIETRY MTERIL EVELOPE BY MKS, ENI PROUCTS, N S SUCH IS NOT TO BE COPIE, REPROUCE, ISCLOSE OR USE IN NY WY OR FORM WITHOUT PRIOR WRITTEN UTHORIZTION FROM MKS, ENI PROUCTS. PROG. MGR.: J. ndrews 05/20/98 IR. OF ENG.:. Harris 05/19/98 MKT. MGR.: OC. CONTROL: RELESE TE: N/ O NOT SCLE TITLE: SCLE: NONE GHW12 WG. NO.: GHW12 with nalog Interface. SHEET 1 OF 10

2 1.0 INTROUCTION 1.1 Scope The scope of this document defines the technical definition of a 1.25kW, MHz ENI Genesis RF generator. 1.2 Change Management ll amendments to this specification will require the approval of all individual signatories on Page 1 of this document. 2.0 Safety/Protection Features 2.1 Mismatch Protection Continuous operation into any impedance mismatch condition without damage or malfunction; forward power foldback shall occur as required by the RF generator protection circuits. 2.2 C Line Protection manually resettable circuit breaker on the rear panel opens upon C overcurrent conditions. 2.3 RF Output Power Connection Interlock hard-wired interlock that disables the input C power contactor upon removal of the RF output cable cover. This uses the same interlock loop as in the control I/O Interlock. 2.4 Control I/O Interlock isables the input C power contactor via the control I/O signal; open between pins 11 & 12 on the control I/O connector. This uses the same interlock loop as the RF Output Power Connection Interlock. 2.5 Over-Temperature Fault Outputs disabled on high internal temperature. 2.6 Control Signal Protection Unit not to be damaged if a short circuit or up to 30V C or C is placed between any input signal, return signal, and ground. WG. NO. GHW12 with nalog Interface SCLE SHEET 2 of 10

3 3.0 Technical Specifications Unless otherwise indicated, the performance parameters shall remain within the specified limits over the specified operating ambient conditions. 3.1 Frequency MHz 3.2 Frequency stability...<+/ % 3.3 Load VSWR at any phase...up to 1.1:1 ref to 50 Ω 3.4 Nominal Output impedance...50 Ω 3.5 Rated output power range w/ ref to 50Ω w 1.5:1 VSWR w 2.0:1 VSWR...800w 3.0:1 VSWR...500w 3.6 Output filtering (for full power into 50 Ω) Harmonics... < -40 dbc (50 Ω dummy load) Spurious... < -40 dbc (except harmonics) 3.7 Input C power, nominal Voltage... Rated 208± 10%VC Frequency Hz ± 3Hz Phase...3 w/ ground, no neutral Current... max 15/phase 3.8 Control Signals Input Impedance... 10KΩ, min Input Isolation VC min to the C supply line 3.9 Operational ambient conditions...5 to 40 C, 0-80% RH 80% RH (max) at up to 31 C derated linearly to 50% RH (max)at 40 C 3.10 Ground benign environment... Per MIL-HBK-217F 3.11 Output Power read back accuracy...126w-1250w ± 2.0% w ± 2.5w igital Interface (RS-232 interface or Front panel) referenced to actual output power. nalog Interface referenced to actual output power Commanded output power accuracy...126w-1250w ± 2.0% w ± 2.5w igital Interface (RS-232 interface or Front panel) referenced to actual output power. nalog Interface referenced to actual output power Output power repeatability... Same generator...±2.0% Generator to generator...±4.0% 3.14 Short term stability... ±1.0% for any given output power setpoint during one continuous hour of output from a cold start WG. NO. GHW12 with nalog Interface SCLE SHEET 3 of 10

4 3.15 Long term stability... ±5.0% for any given output power setpoint during three years of continuous output 3.16 RF power response time From Rf on command to 1% of full power... < 200ms from leading edge of Rf on signal to 1% of rated maximum power Rf power risetime 1-81% of full power... < 30.0ms 3.17 Zero setpoint... < 1.0w actual output power and readback power when setpoint signal is at zero or at a negative voltage 3.18 Water cooling requirements Flow rate... 2 gpm Pressure psig Temperature to + 35 degrees C Connections... 1 ea inlet, 1 ea outlet; 1/4 male NPT 3.19 imensions (W) x 20 () x 3.5 (H) (2 EI units) (nominal) 3.20 Weight lbs, 16.8 kg WG. NO. GHW12 with nalog Interface SCLE SHEET 4 of 10

5 4.0 Mechanical Specifications 4.1 Mounting Standard 19 EI rack mount. 4.2 Color and Finish Front panel to be the only surface painted with standard ENI Genesis color pattern. ll other surfaces shall have a coated finish such as gold zinc chromate, gold chemical film or equivalent. 4.3 Water Connections The inlet and outlet connectors shall be separated enough to allow easy access to fittings. Label shall be attached to indicate water-cooling requirements. 4.4 Handles Two handles (left and right) to be mounted on the front panel exterior, evenly spaced on center. WG. NO. GHW12 with nalog Interface SCLE SHEET 5 of 10

6 4.5 Part Marking B C E F G ENI MOEL NO: PRT NO: SERILNO: SOFTWRE VERSION: WEIGHT: RF OUTPUT: CUST P/N: ENI : TE: MM//YY H I Label to be attached to rear panel.. ENI MOEL NUMBER: This model number uniquely identifies the unit. B. PRT NO: The assembly number which uniquely identifies product configuration is contained on this line. (See Section 1.4 for more information on the model number. C. SERIL NO: This line contains a number which is sequentially assigned as the product is manufactured.. SOFTWRE VERSION : The version number identifying Software configuration is contained on this line. F. RF OUTPUT: The output of the unit in Watts and its Operating frequency are listed on this line. G. CUSTOMER P/N: number that is specific to the customer who ordered the unit which contains their own part number and revision level. H. ENI.: Identifies the Revision level of the part number that appears in line B above I. TE: Proper identification of the date of manufacture, in MM//YY format, is contained on this line. E. WEIGHT: Identifies the weight of the unit bearing this label. WG. NO. GHW12 with nalog Interface SCLE SHEET 6 of 10

7 5.0 Interfaces/Connections, Rear Panel 5.1 RF output connector... Type N, female coax bulkhead 5.2 Serial interface... RS nalog interface pin sub-min type female, See Table C power in C connector... #10 Ring Lug C line cord Construction...14 WG, 4 conductor (3φ + GN) Jacket Material... STO gray Length...36 ± 2.0 (as measured from the rear panel exterior to the C linecord cover) 6.0 Indicators and Breaker, Front Panel 6.1 C On... Green 6.2 RF On... Green 6.3 Fault...Red (flashes to indicate interlock fault, solid for all other faults) 6.4 Fully Featured Front Panel...Standard 7.0 Software 7.1 Version or later 8.0 Standard ccessory Equipment ccessory kit, solenoid valve ENI P/N Stainless steel solenoid valve and fittings Solenoid bracket support, mounts solenoid to rear panel WG. NO. GHW12 with nalog Interface SCLE SHEET 7 of 10

8 Standard 25-pin nalog I/O Interface (ENI P/N ) TBLE 1: The nalog I/O Interface for the GHW-12 Genesis generator provides: Pin Name Type escription 1 Max. Power (E) O Emitter side of isolated transistor switch. (See Note 1) Transistor ON - Indicates a max. reverse power or max. current fault. Transistor OFF - No fault. 2 Reflected power (+) O linear C voltage that represents the reflected power output level. 0 V = 0 W and the max. value is adjustable between 0 and 12 VC. Typically calibrated to 10 VC = Maximum Reflected Power Limit. 3 Forward power (+) O linear C voltage that represents the forward power output level. 0 V = 0 W and the max. value is adjustable between 0 and 12 VC. Typically calibrated to 10 VC = Maximum Rated Power. 4 RF ON/OFF Control (+) I voltage between this and Pin 17 will turn RF power ON. Leaving it open or applying zero voltage will turn RF power OFF. The nominal voltage to turn RF ON is selectable between +5 V and +24 V via a jumper on the control board, however it should not exceed 30 VC. 5 Power set point (+) I linear C voltage to set the output power level. 0 V = 0 W and the max. value is adjustable between 0 and 12 VC. Input impedance is 100 k ohms balanced differential to ground VC User voltage for interface purposes. Rated 50 m max. 7 RF ON (E) O Emitter side of isolated transistor switch. (See Note 1) Transistor ON - RF ON. Transistor OFF - RF OFF. I = igital Input O = igital Output I = nalog Input O = nalog Output 25-pin nalog I/O Interface Pin Outs Table 1 WG. NO. GHW12 with nalog Interface SCLE SHEET 8 of 10

9 Pin Name Type escription 8 nalog remote enable I Ground referenced logic input. (See Note 2) LOW - Selects analog remote control mode. HIGH - isables analog remote control mode. Leaving this pin disconnected will ensure a HIGH state. Note: If the generator is in digital remote mode, it cannot switch to analog remote mode until the digital remote mode is disabled. Therefore setting this pin low will have no effect until the digital remote mode is disabled. 9 Overheat (E) O Emitter side of isolated transistor switch. (See Note 1) Transistor ON - Overheat fault. Transistor OFF - No fault. 10 Interlock This pin should connect to Pin 23 to complete the interlock chain. If the interlock chain is broken the C contactor will open. External circuit should be capable of switching 100 m at 24 VC. 11 Leveling select I Ground referenced logic input. (See Note 2) LOW - Selects forward-power leveling. HIGH - Selects an alternative power-leveling mode. Leaving this pin disconnected will ensure a LOW state. Note: The alternate power-leveling mode is selected via a software switch in a CLIBRTION menu. Either load-power leveling or an external source such as C Bias may be selected. The default is Load Power Leveling 12 Load power (+) O linear C voltage that represents the load power output level. 0 V = 0 W and the max. value is adjustable between 0 and 12 VC. Typically calibrated to 10 VC = Maximum Rated Power. I = igital Input O = igital Output I = nalog Input O = nalog Output 25-pin nalog I/O Interface Pin Outs (Cont d) Table 1 WG. NO. GHW12 with nalog Interface SCLE SHEET 9 of 10

10 Pin Name Type escription VC User voltage for interface purposes. Rated 10 m max. 14 Max. power (C) O Collector side of isolated transistor switch for Pin 1 15 Reflected power return (-) 16 Forward power return (-) 17 RF ON/OFF Control (-) 18 Power set point return (-) O Signal return for Pin 2 O Signal return for Pin 3 I Signal return for Pin 4 I Signal return for Pin 5 19 GN Signal / Chassis ground. 20 RF ON (C) O Collector side of isolated transistor switch for Pin 7 21 GN Signal / Chassis ground. 22 Overheat (C) O Collector side of isolated transistor switch for Pin 9 23 Interlock This pin should connect to Pin 10 to complete the interlock chain. If the interlock chain is broken the C contactor will open. 24 Option V User voltage for interface purposes. This voltage is configurable for +5 VC or -15 VC via a jumper on the control board. Rated 10m max. 25 Load power return (-) O Signal return for Pin 12 I = igital Input O = igital Output I = nalog Input O = nalog Output Note 1: Note 2: For all isolated transistor outputs. Transistor OFF (switch open) - VCEmax = 40 VC (IC < 500 µ) Transistor ON (switch closed) - ICmax = 10 m (VCE < 1 V) For all ground referenced logic level inputs. HIGH = 2 VC min to 30 VC max. LOW = -0.2 VC min to 1 VC max. 25-pin nalog I/O Interface Pin Outs (continued) Table 1 WG. NO. GHW12 with nalog Interface SCLE SHEET 10 of 10