Femtosecond laser microfabrication in. Prof. Dr. Cleber R. Mendonca
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1 Femtosecond laser microfabrication in polymers Prof. Dr. Cleber R. Mendonca
2 laser microfabrication focus laser beam on material s surface
3 laser microfabrication
4 laser microfabrication
5 laser microfabrication surface microstructuring
6 fs-micromachining photon energy < bandgap nonlinear interaction
7 fs-micromachining nonlinear interaction E gap E f = hν
8 fs-micromachining nonlinear interaction E gap E f = hν multiphoton absorption
9 introduction short pulse duration ö high intensity (even at low energy)
10 introduction how short is a femtosecond pulse? 1fs= s
11 introduction how short is a femtosecond pulse?
12 introduction Ti:Sapphire lasers 100 fs 50 fs 20 fs Very intense light Laser intensities ~ 100 GW/cm 2 1x W/cm 2 Laser pointer: 1 mw/cm 2 (1 x10-3 W/ cm 2 )
13 introduction Ti:Sapphire lasers 100 fs 50 fs 20 fs Very intense light
14 fs-laser microfabrication focus laser beam inside material
15 Two-photon absorption Nonlinear interaction provides spatial confinement of the excitation fs-microfabrication α = α 0 α = α 0 + βi
16 Two-photon absorption spatial confinement of excitation
17 femtosecond pulses Ti:Sapphire lasers 1fs= s 100 fs 50 fs 20 fs Repetition rate 1KHz 1 ms Energy mj 100 fs 12 ns 86 MHz nj 100 fs
18 femtosecond pulses amplified laser oscillator repetitive cumulative
19 fs-micromachining the longer the irradiation the longer the radius silica E. Mazur Harvard University
20 fs-micromachining: focusing NA = 0.12 μ = 7 o NA = 0.34 μ = 20 o NA = 0.87 μ = 60 o
21 what is the difference? w λ 0 = 1 NA πna 2
22 very different confocal lenght/interaction length
23 fs-micromachining microfabrication can be controlled by objective NA number of pulses scanning speed pulse energy
24 two main techniques fs-laser micromachining microfabrication via two-photon polymerization
25 fs-laser micromaching Surface Volume
26 fs-pulses for micromachining polymers Oscillator: 80 MHz, 5 nj heat diffusion time: t diff ~ 1 μs cumulative
27 Micromachining the conductive polymer MEH-PPV optical microscopy a: 0.07 nj b: 0.14 nj c: 0.34 nj d: 0.68 nj
28 Micromachining the conductive polymer MEH-PPV a 0.3 nj atomic force microscopy b 20nJ 2.0
29 Micromachining the conductive polymer MEH-PPV
30 Waveguides in azo-polymers H 2 N N N NO 2 DO3 Cl HO H 2 C H 3 C H 2 C H 2 C N N N NO 2 DR13 HO H 2 C H 2 C H 3 C H 2 C 3 2 N N N NO 2 DR1
31 Waveguides in azo-polymers (a) Optical microscope image of the waveguides micromachined (PMMA/DR1) (b) Cross-sectional view of the waveguides
32 waveguides in azo-polymers (c) Output image of the mode profile of nm light coupled through the waveguide
33 Subcellular surgery I. Maxwell, E. Mazur Harvard University
34 Subcellular surgery I. Maxwell, E. Mazur Harvard University
35 microstructuring polymer: super hydrophobic surface CCD lens mirror Pockels cell ps-laser objective 0.65 NA sample
36 microstructuring polymer: super hydrophobic surface
37 laser microfabrication: super hydrophobic surface examples of fabricated surfaces 20 μm 40 μm
38 laser microfabrication: super hydrophobic surface laser microfabrication Superhydrophobic surfaces flat surface microstructured surface
39 microstructuring polymer flat surface θ = 118º microstructured t surface θ = 160º
40 Microfabrication Novel concept: build microstructures using fs-laser and nonlinear optical processes
41 two-photon polymerization applications micromechanics waveguides microfluidics biology optical devices
42 Two-photon polymerization Monomer + Photoinitiator Polymer light Photoinitiator is excited by two-photon absorption R2 PA I The polymerization is confined to the focal volume. 2 High spatial resolution
43 Two-photon polymerization bellow the diffraction limit
44 Two-photon polymerization even higher spatial resolution
45 Two-photon polymerization setup Beam Expansion y x Scanning Mirror Laser Ti:sapphire laser oscillator 130 fs 800 nm 76 MHz 20 mw CCD camera glass (150 micron) Objective Objective z spacer resin glass (150 micron) 40 x 0.65 NA Illumination
46 Two-photon polymerization
47 Resin preparation Monomers Monomer A Monomer B reduces the shrinkage upon polymerization gives hardness to the polymeric structure Photoinitiator iti t Lucirin TPO-L Appl. Phys. A, 90, (2008)
48 Two-photon polymerization 30 µm x 30 µm x 12 µm cube polymer glass
49 Two-photon polymerization After the fabrication, the sample is immersed in ethanol to wash away any unsolidified resin and then dried
50 photonic crystal J. W. Perry two-photon polymerization 20 µm
51 Two-photon polymerization Microstructures fabricated by two-photon polymerization 50 μm 20 µm 20 μm 20 µm
52 Microstructures containing active compounds monomer monomer Optical active dye Active Polymer
53 Applications of two-photon polymerization Optics and Photonics Doping microstructures with organic molecules and metals fluorescence birefringence conductivity Bio-applications Fabrication using bio-compatible resins to biological applications tissue engineering scaffolds tissue engineering scaffolds fabrication of microneedle cell study
54 Other studies microstructures for optical storage birefringence p r dye p r dye φ N N E r Light Relax trans cis trans N N N N φ E r J. Appl. Phys., 102, (2007)
55 Other studies microstructures for optical storage birefringence Ar + ion laser irradiation nm one minute intensity it of 600 mw/cm 2
56 Other studies microstructures for optical storage birefringence The sample was placed under an optical microscope between crossed polarizers and its angle was varied with respect to the polarizer angle
57 Other studies microstructures for optical storage birefringence J. Appl. Phys., 102, (2007)
58 Microstructures containing MEH-PPV MEH-PPV Fluorescence Electro Luminescent Conductive
59 Microstructure containing MEH-PPV Appl. Phys. Lett., (2009)
60 Microstructure containing MEH-PPV
61 Microstructure containing MEH-PPV
62 Microstructure containing MEH-PPV
63 Microstructure containing MEH-PPV
64 Microstructure containing MEH-PPV (a) Scanning electron microscopy (b,c) Fluorescence microscopy of the microstructure t with the excitation ti OFF (b) and ON (c) (d) Emission of the microstructure (black line) and of a film with the same composition (red line) Appl. Phys. Lett., (2009)
65 Microstructure containing MEH-PPV Fluorescent confocal microscopy images in planes separated by 16 μm in the pyramidal microstructure.
66 Microstructure containing MEH-PPV Do we have waveguiding in the microstructure t?
67 Microstructure containing MEH-PPV Do we have waveguiding in the microstructure t?
68 Microstructure containing MEH-PPV
69 Microstructure containing MEH-PPV Appl. Phys. Lett., (2009)
70 Microstructure containing MEH-PPV
71 Microstructure containing MEH-PPV waveguiding of the microstructure fabricated on porous silica substrate (n= 1.185) Applications: micro-laser; fluorescent microstructures; conductive microstructures
72 3D cell migration 3D cell migration studies in micro-scaffolds SEM of the scaffolds 110 µm pore size 52 µm pore size Top view 110, 52, 25, 12 µm pore size Side view 25, 52 µm pore size
73 3D cell migration 50 μm pore size
74 3D cell migration 110 μm pore size
75 3D cell migration 12 μm pore size
76 3D cell migration 52 μm pore size
77 3D cell migration 3D cell migration studies in micro-scaffolds Advanced Materials, 20, (2008)
78 Optical circuit
79 Optical circuit microfabrication silica nanowires coupling microstructures 50 μm
80 Silica nanowires nanowires fabrication process
81 Silica nanowires nanowires fabrication process
82 Silica nanowires nanowires fabrication process
83 Silica nanowires
84 Silica nanowires 70 μm 1 μm
85 Silica nanowires
86 Silica nanowires
87 Silica nanowires coupling light into nanowires
88 Silica nanowires coupling light into nanowires
89 Silica nanowires coupling light into nanowires
90 Silica nanowires coupling light into nanowires
91 Silica nanowires coupling light into nanowires
92 Silica nanowires coupling light into nanowires
93 Silica nanowires Poynting vector for 800 nm nanowires Opt. Express 12, (2004)
94 Silica nanowires Poynting vector for 800 nm nanowires
95 Silica nanowires Manipulating the nanowires
96 Silica nanowires
97 Silica nanowires
98 Silica nanowires
99 Silica nanowires coupling light into nanowires
100 Silica nanowires coupling light into nanowires
101 Silica nanowires coupling light into nanowires
102 Outline microfabrication silica nanowires coupling microstructures 50 μm
103 Coupling microstructures
104 Coupling microstructures
105 Coupling microstructures
106 Coupling microstructures
107 Coupling microstructures
108 Coupling microstructures
109 Coupling microstructures
110 Silica nanowires
111 Coupling microstructures
112 Coupling microstructures
113 Coupling microstructures
114 Coupling microstructures
115 Coupling microstructures
116 Summary
117 Acknowledgments FAPESP CAPES CNPq NSF ARO
118 Thank you!
119 for a copy of this presentation presentations
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