Microwave measurements for planar circuits and components: State of the art and future directions. Dr. Uwe Arz PTB
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1 Microwave measurements for planar circuits and components: State of the art and future directions Dr. Uwe Arz PTB
2 Outline Previous work at PTB The EMPIR Initiative EMPIR Project 14IND02 PlanarCal 2
3 Why do we need planar microwave measurements? module: ~10 EUR end product: ~100 EUR component: ~1 EUR chip: ~10 Cent in case of failure enormous costs for redesigns and product recalls costs on the order of millions can be avoided via on-wafer measurements! 3
4 Characterization of planar circuits and components most important measurement quantity at higher frequencies: S-parameters on-wafer calibration: most frequently performed with commercial ISS source: Cascade Microtech, Inc. source: IHP Frankfurt (Oder) 4
5 On-wafer calibration methods Thru-Reflect-Line (TRL) Short-Open-Load-Thru (SOLT) G S G Thru Short Open Reflect Load Line Thru DUT DUT TRL calibration (on-chip): DUT embedded in same medium! SOLT calibration (off-chip): DUT-medium calibration medium! 5
6 Traceability of Scattering Parameter Measurements (almost) solved in coaxial and waveguide connectors planar transmission lines: no complete solution available yet Fundamental questions: How do we reduce uncertainties in calibration standards? Which path should we choose to achieve traceability? 6
7 Parasitic Modes (cooperation with FBH/NIST) Calibration W-band for different substrates configurations Thick ceramic backside (half-space) Thick ceramic on metal chuck Ceramics on teflon (half-space) How can we compensate for unwanted crosstalk? How can we reduce the influence of substrate configurations? 7
8 State of the Art: Crosstalk Correction (NIST/FBH/PTB) 2014 new 16-term crosstalk correction method for planar S-parameter measurements at sub-mm wavelengths (cooperation with NIST and FBH) allows for the first time correction of crosstalk between probes and embedding transmission lines! 8
9 Example: Transistor measurement at NIST Maximum Stable Gain (db) With coupling correction No coupling correction Frequency (GHz) Details: Crosstalk Corrections for Coplanar-Waveguide Scattering-Parameter Calibrations, IEEE Trans. Microw. Theory Techn., 62(8), pp ,
10 Towards Calculable Calibration Standards CPW Built in Membrane Technology silicon substrate membrane (0.3 1 µm thin insulating carrier) Details: U. Arz et al, Improving the Performance of 110 GHz Membrane-Based Interconnects on Silicon: Modeling, Measurements, and Uncertainty Analysis, IEEE Transactions on Components, Packaging and Manufacturing Technology, vol. 3, no. 11, pp , November
11 State of the Art: Calculable Calibration Standards (PTB) CPWs built in membrane technology on high-resistivity silicon substrates propagation constant measured with Multiline TRL accuracy of these calculable CPW standards is on par with high-precision coaxial airlines above 65 GHz! suitable candidates for traceable on-wafer calibration standards 11
12 State of the Art: Wideband dielectric measurements (PTB) 2011 New method for relative permittivity measurement of microwave substrates extraction from raw S-parameter measurements of CPWs of different lengths verification with split-cylinder resonator measurements AF45 GaAs Details: U. Arz, M. Janezic, W. Heinrich, Wideband Relative Permittivity Extraction Based on CPW Phase Constant Measurements, 77 th ARFTG Conf. Dig., pp 37-39,
13 State of the Art: Wideband dielectric measurements (PTB) 2014 New method for loss tangent measurement of microwave substrates measurement range of transmission-line techniques extended by a factor of ten for the first time loss tangents on the order of 10-4 successfully extracted! Al 2 O 3 GaAs Details: U. Arz, Loss Tangent Extraction Based on Equivalent Conductivity Derived from CPW Measurements, 18th IEEE Workshop on Signal and Power Integrity,
14 State of the Art: Estimation of Complex Residual Errors 2014 Cooperation with Tomsk University/Copper Mountain Technologies/MPI Residual Error Box Residual Error Box residual errors after calibration: D (directivity), M (match), TR (tracking) representation by set of reflectors nonlinear estimation tool: Unscented Kalman Filter (UKF) only one verification element needed three measurement conditions 3 measurements of one verification element (planar transmission line) Details: Adaptive Estimation of Complex Calibration Residual Errors of Wafer-Level S-Parameters Measurement System, 84 th ARFTG Conference,
15 European Metrology Programme for Innovation and Research (EMPIR) EMPIR is the main programme for European research on metrology. EMPIR follows on from the successful European Metrology Research Programme (EMRP), which issued its final call for projects in There is an increased focus within EMPIR on innovation activities to target the needs of industry and accelerate the uptake of research outputs. EMPIR is jointly supported by the European Commission and the participating countries within the European Association of National Metrology Institutes (EURAMET e.v.) 15
16 EMPIR Project PlanarCal (14IND02) Microwave measurements for planar circuits and components Scientific goals Traceability for planar S-parameter measurements up to (at least) 110 GHz Characterisation and modelling for on-wafer measurements Extension to higher frequencies (at least 325 GHz) Measurement uncertainties and calibration algorithms Extension to smaller dimensions (e.g. for nanodevices) 16
17 14IND02 PlanarCal Project Project Partners National Metrology Institutes (NMIs) External Partners Industrial Partners PTB, Germany NPL, UK VSL, Netherlands METAS, Switzerland FBH, Germany FAU, Germany Fraunhofer IAF, Germany IEMN, France TU Delft, Netherlands ULE, UK EPCOS, Germany Rohde & Schwarz, Germany 17
18 14IND02 PlanarCal Project Project Work Packages No Title 1 Traceability for planar S-parameter measurements for industry 2 Characterisation and modelling for on-wafer measurements 3 Extension to higher frequencies 4 Measurement uncertainties and calibration algorithms 5 Extension to smaller dimensions 6 Creating Impact 7 Management and Coordination Person Months 33 (18%) 26 (15%) 39 (22%) 21 (12%) 28 (16%) 14 (8%) 14 (8%) 18
19 14IND02 PlanarCal WP1 WP Leader: PTB Traceability for planar S-parameter measurements for industry Tasks: Development of reference calibration substrates Comparison to electro-optic waveform measurements Transfer of uncertainties to conventional technology Transfer to industrial measurement 19
20 14IND02 PlanarCal WP1 EOS: Detection of Ultrashort Voltage Pulses Electrical field changes the refractive index (electro-optical effect) Polarization change of the probe beam 20
21 14IND02 PlanarCal WP2 WP Leader: FBH Characterisation and modelling for on-wafer measurements Tasks: Basic Characterisation Radiation and Dispersion Surface Roughness Impact of Microwave Probes 21
22 14IND02 PlanarCal WP3 WP Leader: NPL Extension to higher frequencies Tasks: Modelling and parasitic modes Calibration Substrates and Algorithms Comparison between on-wafer and split-block waveguide module Measurement uncertainty and intercomparison 22
23 14IND02 PlanarCal WP4 WP Leader: METAS Measurement uncertainties and calibration algorithms Tasks: The value of error terms The uncertainty of error terms 23
24 14IND02 PlanarCal WP5 WP Leader: VSL Extension to smaller dimensions Tasks: Probing and Access Structures Calibration Standards and Algorithms Nano-device Measurements and Uncertainty Transfer to industrial measurement 24
25 14IND02 PlanarCal WP6 WP Leader: PTB Creating Impact Participants: All project partners Tasks: Knowledge Transfer Training Uptake and Exploitation 25
26 14IND02 PlanarCal WP6 Training 2 IEEE-sponsored workshops 2 training courses with practical lab demos material available from the web-site Uptake and Exploitation new NMI measurement services calibration software available free of charge to European industry 26
27 14IND02 PlanarCal WP6 Knowledge Transfer Project Advisory Board (PAB) project web-page + LinkedIn group >= 6 papers in peer-reviewed journals (open access) >= 9 papers at international conferences 2 articles in trade journals 2 meetings with standards-related groups Guideline for the design of calibration substrates Best Practice Guide for planar S-parameter measurements 27
28 14IND02 PlanarCal Summary Project launched: October 2015 Web-page (planarcal.ptb.de) LinkedIn group PlanarCal Project Advisory Board 5 key industry representatives Many articles and papers to come Good progress to date Next meeting: March 2017 NPL, UK Project completes: September
29 Acknowledgement The authors acknowledge support by the European Metrology Programme for Innovation and Research (EMPIR) Project 14IND02 "Microwave measurements for planar circuits and components". The EMPIR programme is co-financed by the Participating States and from the European Union s Horizon 2020 research and innovation programme. 29
30 Thank you! Physikalisch-Technische Bundesanstalt Braunschweig und Berlin Bundesallee Braunschweig Dr. Uwe Arz Working Group 2.23 Fundamentals of Scattering Parameter Measurements Phone: ++49-(0)
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