2003 ANNUAL REPORT TOOLS FOR NANOTECH

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1 2003 ANNUAL REPORT TOOLS FOR NANOTECH

2 FEI REVENUES In Millions of Dollars OPERATING INCOME In Millions of Dollars SHAREHOLDERS EQUITY In Millions of Dollars SEGMENT REVENUE MicroElectronics Electron Optics Service Components REVENUE BY MARKET Semiconductor Data Storage Industry and Institute REVENUE BY REGION North America Europe Asia Pacific CORPORATE PROFILE FEI Company provides advanced Tools for Nanotech to a range of nanotechnology markets including materials science, life science, semiconductors, and data storage. Our ion beam and electron beam products, market-leading DualBeam systems, and productivityenhancing automation software packages enable researchers and manufacturers to fabricate and modify nanoscale structures and to view and to characterize them in three dimensions down to the atomic level. FEI and its predecessors have been paving the way for nanoscale exploration and discovery since FEI Company had more than $360 million in annual revenue in 2003, has had consistent operating profitability, and has manufacturing and development facilities in North America and Europe and service operations in more than 40 countries worldwide. For more information visit: SELECTED CONSOLIDATED FINANCIAL DATA The selected consolidated financial data below should be read in conjunction with Management s Discussion and Analysis of Financial Condition and Results of Operations and the consolidated financial statements and notes thereto included in our Annual Report on Form 10-K provided with this annual report. YEAR ENDED DECEMBER 31, Statement of Operations Data (000, except per share): Net sales $360,977 $341,381 $376,004 $320,300 $216,152 Gross profit 145, , , ,122 85,009 Operating income (loss) 13,549 18,614 59,074 36,520 (2,515) Income (loss) before taxes and cumulative effect of change in accounting principle 10,737 13,668 55,000 34,883 (2,580) Income (loss) before cumulative effect of change in accounting principle $ 7,194 $ 8,678 $ 32,506 $ 20,810 $ (7,380) Income (loss) before cumulative effect of change in accounting principle per share: Basic $ 0.22 $ 0.27 $ 1.06 $ 0.74 $ (0.34) Diluted $ 0.21 $ 0.26 $ 1.02 $ 0.70 $ (0.34) Weighted average shares outstanding: Basic 32,930 32,493 30,563 28,091 21,745 Diluted 33,821 33,460 31,986 29,827 21,745 AS OF DECEMBER 31, Balance Sheet Data (000): Cash and marketable securities $322,036 $273,630 $295,676 $ 24,031 $ 11,124 Working capital 422, , ,024 91,175 84,957 Total assets 749, , , , ,100 Long-term debt 295, , ,000 25,674 36,012 Shareholders equity 336, , , , ,577

3 SUCCESSFUL GROWTH We are at the dawn of the nanotechnology era. In 2003 FEI continued moving forward to capitalize on our growing opportunities as a leading supplier of tools for nanotechnology research, development and manufacturing. We built the foundation to take advantage of those opportunities. While we made investments which we believe will ensure an exciting and prosperous future, we managed our business to remain profitable. Our business model is designed to provide growth in the upturns and buoyancy in the downturns. In 2003 we again demonstrated our model s effectiveness. Our 2003 revenues increased to $361 million, compared with $341 million in Earnings for 2003 were $0.21 per share, compared with $0.26 per share in the prior year. We achieved these results despite intense competition in some key product lines and sluggish recovery in some markets. At the end of 2002 we announced our intent to reduce costs by $9 to $10 million. We have done that, but the reductions were offset by cost increases due to the decline in the U.S. dollar compared with the euro during The dollar/euro exchange rate reduced our 2003 gross profit by approximately $6.7 million and increased our operating expenses by approximately $8.4 million compared with To minimize the impact of currency fluctuations on our financial results, we have put a disciplined currency hedging strategy in place. In our Research and Industry market, which accounted for half of our 2003 sales, we have seen increased global funding for nanotechnology research which we believe will drive increased demand in In addition to materials research applications, we see important opportunities for our tools in life sciences. A key step in this market for FEI was the mid-year introduction of a new family of small DualBeam systems, which have proved popular with customers. This family expands the applications base and lowers the price points for DualBeam products, holding the potential for increased market share and expanded margins. We participated in the recovery in the Semiconductor market, with four straight quarters of increasing orders. Most of the strength was in our traditional laboratory market where we provide root cause analysis of defects in the development and manufacture of semiconductors. During the year we expanded our installed base of defect

4 TO OUR SHAREHOLDERS analysis systems inside semiconductor fabs. In July, we introduced the CLM-3D DualBeam system for three-dimensional metrology in semiconductor manufacturing. As line widths continue to shrink with each new generation of chips, we expect the demand for process monitoring equipment that provides three dimensional data to increase. Revenue from data storage customers more than doubled in 2003 over Our tools are an industry standard for in-line metrology applications. As the number of applications for disk drives continues to expand and manufacturers increase disk density and adopt new technology, we expect further growth in 2004, fueled by the Certus-3D Dualbeam product that we introduced in We expanded our technology base and potential markets in 2003 with several acquisitions. FEI- Knights, acquired from Electroglas, provides software that links all aspects of the semiconductor design process, including electronic design automation software and our tools for circuit edit, mask repair and defect analysis. We also added laser etching technology by purchasing Revise, Inc., to augment our circuit edit capabilities. In addition, we purchased the assets of Emispec Systems, Inc., a software company that will add to the product differentiation of our transmission electron microscopes. We aim to grow future earnings through increased revenue and expanded gross margins. We believe that our markets provide us with attractive revenue growth opportunities. Our goal is to increase revenues while expanding gross margins with an improved product mix and lower costs. The flow of recently introduced DualBeam products and our increased emphasis on software and applications development are directed at improving our product mix. To lower costs, we are continuing to transition manufacturing of our laboratory products from the Netherlands to the Czech Republic. The first phase of the transition NANOSCALE VISION FEI TOOLS PROVIDE USERS WITH RESO- LUTION BELOW 100NM, DOWN TO ATOMIC-SCALE IMAGING. was completed in We have also focused on moving the supply chain for our products to lower-cost countries. We added to FEI s financial foundation with the completion in June of a $150 million, zero-coupon convertible subordinated debt financing. This financing adds to our capital base and financial flexibility and lowers our overall cost of capital. During the year we made important additions to our management team and the board of directors. In April, Steven Berger was named Executive Vice President and Chief Operating Officer. He is focusing on improving our business processes across the company, from development through manufacturing to delivery of quality products to our customers. In January 2004, Bob Gregg joined FEI as Executive Vice President and Chief Financial Officer. Bob brings a breadth of expertise in financial and general management in the technology industry that greatly enhances our management team. Jim Richardson and Tom Kelly also joined our board of directors. Both of them have extensive management and financial expertise with technology companies, and we welcome their perspective and counsel. The race to find future nanotechnology breakthroughs is on. FEI s core competencies, investment in new products and focus on growing markets are all aimed at building our leadership in tools for this exciting future. Thank you for your continued support, Vahé A. Sarkissian Chairman of the Board, President and CEO

5 CORPORATE INFORMATION BOARD OF DIRECTORS Vahé A. Sarkissian (1998) Chairman, President and Dr. Michael J. Attardo (1999) Retired General Manager Microelectronics Division IBM Corporation Wilfred J. Corrigan (2002) Chairman and LSI Logic Corporation Thomas F. Kelly (2003) Chairman, President and BlueStar Solutions, Inc. Dr. William W. Lattin (1999) Retired Executive Vice President Synopsys, Inc. Jan C. Lobbezoo (1999) Executive Vice President and Chief Financial Officer Philips Semiconductors International B.V. Dr. Gerhard H. Parker (2001) Retired Executive Vice President Intel Corporation James T. Richardson (2003) Former and Chief Financial Officer WebTrends Corporation Donald R. VanLuvanee (1995) Retired President and Electro Scientific Industries, Inc. EXECUTIVE MANAGEMENT TEAM Vahé A. Sarkissian Chairman, President and Dr. Steven D. Berger Executive Vice President Chief Operating Officer John A. Doherty Worldwide Sales Michel Epsztein, General Manager Circuit Edit and Mask Repair Dr. Rob H. J. Fastenau General Manager Electron Optics Product Division Senior Executive, Europe Robert S. Gregg Executive Vice President and Chief Financial Officer Jim D. Higgs Human Resources Bruno Janssens Global Electron Optics Sales and European Sales Dr. John M. Lindquist Corporate Marketing and Strategic Development Stephen F. Loughlin Vice President of Finance Dr. David Narum Vice President, Chief Technology Officer General Manager Beam Technology Division David M. O Brien Chief Information Officer Paul J. O Mara Global Operations and Service Bradley J. Thies Vice President, General Counsel and Secretary REGIONAL SALES EXECUTIVES Ken Daidohji Vice President of Sales Japan Daniel Ma Vice President of Sales Asia Pacific James Pouquette Vice President of Sales North America and Korea Semiconductor and Data Storage SHAREHOLDERS MEETING The Annual Shareholders Meeting will be held at 9:00 AM PDT on Thursday, May 20, 2004 at FEI s World Campus located at 5350 NE Dawson Creek Drive, Hillsboro, Oregon. EXCHANGE AND STOCK MARKET LISTING Nasdaq Stock Market Stock Symbol: FEIC TRANSFER AGENT AND REGISTRAR Mellon Investor Services LLC 85 Challenger Road Ridgefield Park, NJ LEGAL COUNSEL Wilson Sonsini Goodrich & Rosati 650 Page Mill Road Palo Alto, CA INDEPENDENT AUDITORS Deloitte & Touche, LLP 111 S.W. Fifth Avenue Suite 3900 Portland, OR CONTACT INFORMATION FEI Company 5350 NE Dawson Creek Drive Hillsboro, OR Phone: Website:

6 WORLD HEADQUARTERS HILLSBORO, OREGON USA PHONE / FAX /

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