Lexel QUANTUM SHG DUV Lasers Power and Wavelength Specifications

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1 Lexel QUNTUM SHG Lasers TM Power and Wavelength Specifications eep Visible and eep Output Power1 (mw) Visible Wavelengths SHG Single Line Krypton 8.2 nm Single Line rgon 28.7 nm 14. nm 1.7 nm 4. nm 488. nm 47. nm 47. nm Wavelengths eam Parameters nm SHG TEM Horizontal ±.2% Mode eam iameter(mm) eam ivergence(mrad) eam Polarization Power Stability SHG nm 27 nm 2 nm 8 nm 4 nm 28 nm 22 nm vailable Wavelengths 2 SHG TEM. x.7. x 1..7 x.. x. Vertical ±.1% kw 4kW 2.2 gpm 1.8 gpm - -7 psi nm 27 nm 2 nm 8 nm 4 nm 28 nm 22 nm The Lexel SHG uses the simplest, most stable three mirror folded cavity design for frequency doubling, providing unprecedented stability for truly hands off laser operation in the deep ultraviolet wavelengths. n actively stabilized resonator decreases the cold start time and enhances the overall stability. Scientific Grade (>.%) N2 1 liter/min.-. psi Nitrogen 8.2 nm 28.7 nm 14. nm 1.7 nm 4. nm 488. nm 47. nm 47. nm The Lexel QUNTUM SHG an intracavity frequency doubled ion laser system equipped with a non-linear O crystal (beta barium borate: a2o4) to produce deep ultraviolet output through second harmonic generation. The system configurations are based on the proven Lexel model 8/ ion lasers which produce TEM multi-line visible output at argon wavelengths from 47.nm to 28.7nm, and krypton wavelengths from 8.2nm to 7.4nm. SHG 8V 2V Φ 1Φ / Hz ooling Flow (gpm) Temperature Pressure Product escription: Facilities Requirements Electrical Voltage urrent Phase Frequency Visible Tube: 2Warranty Years / Hours rystal: ays 1. Guaranteed power at specified wavelength. Standard Features: 2. One SHG wavelength per O crystal. Some wavelengths require special optics.. eam parameters measured one meter from aperture ambridge Lasers pursues a policy of continuous product improvement. Specifications are subject to change. POWER SUPPLY LSER HE (). (8) 4.8 ().4 () 1. (8) IMENSIONS (inches/mm) LSER HE SHG. (1) 41. (4) (47) () VIS () 1. (422).4 () 2. (4) - 2. (2 - ) WEIGHT POWER SUPPLY WEIGHTS IMENSIONS (inches/mm) (lbs/kg) (). (82) 4.4 (111) 8 () 1. (48) 8. (211) 1. (4) 4. (2) () 8. (4) (lbs/kg).8 (274).1 (11) (7) 8. () NO HNLES (41) Lexel Lasers are manufactured by 8 rown Road Polytec GmbH Schwarzschildstr. Fremont, 4 1 Tel: +4 ( ) Fax: +4 () () erlin wl@polytec.de GERMNY True hands-free operation in the X/Y adjustable O mount for long crystal life Temperature regulated O crystal High efficiency folded cavity stigmatic compensation for clean focus ctively stabilized resonator Pinned optics mounts for precise alignment Temperature compensated prism wavelength selector Easy conversion between visible and operation year / 2 hour tube warranty pplications: Raman spectroscopy Manufacture of arrayed waveguide grating Semiconductor surface inspection Semiconductor photolithography apillary electrophoresis Interferometric optics testing Microscopy light source Protein Science

2 Standard Features Optical Properties QuickSwitchTM is unique intracavity device allows easy and immediate access to either eep or Visible wavelengths using a quick manual adjustment. hanging between and Visible takes a few seconds with no need for additional tuning. This adjustment is accessible from outside the optical cavity. The and Visible wavelengths emit from separate shuttered apertures in parallel. Quick-SwitchTM Wavelength Selector Ion Laser Plasma Tube M Vis. Output NLOtal rys Prism OPTIL ONFIGURTION The laser head consists of an ultra-stable solid Invar optical Resonator that holds the plasma tube and mirrors in precise alignment. The key to the LEXEL QUTUM SHG reliability has been a simple and durable plasma tube design. LEXEL s solid ceramic plasma tube design has been proven since 172, many of the more than 11, plasma tubes sold by LEXEL still operate today, Output eam Shaper Feedback Photocells MOEL TYPIL POWER TYPIL EM PROFILE HORIZONTL iontroller Remote, Spend more time on your 1 cm cm cm 8 22 nm Laser Power (mw) M1 application with user friendly control. Utilizing the latest 2bit embedded RM ortex processors, L touchscreen running embedded Linux and a flexible meter usb cable, full control and critical monitoring of your laser can easily be done where ever is convenient in your lab. M M2 8 cm Laser urrent (mperes) cm eam Position (mm) 2. cm MOEL SHG TYPIL POWER 8 cm 8 cm 4 cm cm eam Position (mm) 2. cm 27 1 cm Laser urrent (mperes) nm Laser Power (mw) VERTIL utomatic display of calibrated or Visible output screens Select light regulation or current regulation operation with a touch of the screen nalog style power readout for easy laser tuning Large digital power readout for accurate power setting Laser water flow readout in gpm to insure reliable operation from facility water ll laser system interlocks displayed at a glance Large digital laser current readout for setting tube current System information screen with detailed voltages and current readouts Laser on key switch, push button start and course / fine output adjust 27

3 Optional ccessories OPTIONL - Extended Wavelength rystals: Laser tested doubling crystals are pre-mounted in vertically driven X/Y holders for ease of changing and installation. The O rystal is housed in a temperature controlled OFH copper block that is mounted on heat insulated guide rails. The crystal can be translated both vertically and horizontally to ensure full usage of the crystal face and longer lifetimes. OPTIONL - Etalon ssembly utilizes a solid fused-silica etalon in a precisely temperature-controlled oven to provide the ultimate in frequency stability and controlled mode tuning. The temperature stabilization circuit maintains the etalon frequency within ± MHz regardless of the change in ambient temperature, thus assuring virtually no mode hopping. The temperature tuning feature allows the selection of any single longitudinal resonant mode within the oppler-broadened gain bandwidth without the need to readjust the etalon tilt angle. The Etalon ssembly is kinematically mounted on the laser Invar resonator structure using the same stable suspension system as is used on the LEXEL mirror mounts. This effectively integrates the etalon assembly with the total optical resonator structure for maximum mechanical and thermal stability. Etalon frequency stability etter than ± MHz Single frequency stability Δv < ± MHz for T < 1 sec Typical single frequency linewidth MHz (-4 cm-1) Typical coherence length meters * visible wavelengths 1. Solid fused silica etalon 2. Etalon heater Provides precise temperature control of frequency and mode tuning.. Etalon tuning plate Holds etalon assembly in precise mechanical alignment. 4. Etalon tuning screws djusts etalon tilt angle for maximum efficiency (factory set).. Resonator end plate End support for Invar resonator.. Etalon and mirror mount springs Provides tension for the kinematic suspension system. 7. Mirror tuning plate Holds prism wavelength selector in precise mechanical alignment. 8. Tuning screws llow tuning and selection of the various ion laser wavelengths.. Prism wavelength selector. Etalon retainer Secures etalon in position. 11. ust cover Provides dust-free seals between the laser rewster window and the etalon retainer.. Solid Invar resonator rods Low thermal expansion structure provides a rigid, low-vibration optical cavity. 1. Flexible seal Provides movable seals between the etalon tuning plate and the mirror tuning plate. 14. O-ring ompletely seals the etalon into the optical cavity. 1. Thermistor Provides temperature feedback to the temperature control electronics. 1. Printed circuit card electronics ontains electronics for the advanced etalon control circuit.

4 Optical Properties Wavelength Selector Ion Laser Plasma Tube Quick-Switch TM M2 M M1 Prism M NLO rystal Vis. Output OPTIL ONFIGURTION eam Shaper Feedback Photocells Output TYPIL EM PROFILE QUNTUM 8 SHG TYPIL POWER HORIZONTL cm 1 cm nm Laser Power (mw) 8 cm cm cm Laser urrent (mperes) eam Position (mm) cm QUNTUM SHG TYPIL POWER 8 4 VERTIL cm cm 8 cm cm 1 cm nm Laser Power (mw) eam Position (mm) cm Laser urrent (mperes)

5 Power and Wavelength Specifications eep Output Power 1 (mw) Visible Wavelengths QUNTUM Wavelengths 2 QUNTUM Single Line Krypton SHG 8 SHG SHG 8 SHG 8.2 nm Single Line rgon 28.7 nm 14. nm 1.7 nm 4. nm 488. nm 47. nm 47. nm nm 27 nm 2 nm 8 nm 4 nm 28 nm 22 nm 2 eam Parameters Mode eam iameter(mm) eam ivergence(mrad) eam Polarization Power Stability Facilities Requirements Electrical Voltage urrent Phase Frequency ooling Flow (gpm) Temperature Pressure Nitrogen Warranty 14nm SHG 8 SHG SHG 8 SHG TEM TEM x.7. x x.. x. Horizontal Vertical ±.2% ±.1% i SHG 8i SHG 8V 2V Φ 1Φ / Hz kw 4kW 2.2 gpm 1.8 gpm - -7 psi Tube: Years / 2 Hours rystal: ays 1. Guaranteed power at specified wavelength. Scientific Grade (>.%) N2 ml/min.-. psi 2. One SHG wavelength per O crystal. Some wavelengths require special optics.. eam parameters measured one meter from aperture ambridge Lasers pursues a policy of continuous product improvement. Specifications are subject to change. LSER HE POWER SUPPLY (). (8) 1.8 (47) 2.4 () ().4 () 1. (422) 4.8 ().4 () 1. (8) VIS 2. (4) - 2. (2 - ) LSER HE SHG 8 SHG IMENSIONS (inches/mm). (1) (). (82) 4.4 (111) 8 () WEIGHT POWER IMENSIONS (inches/mm) WEIGHTS (lbs/kg) SUPPLY (lbs/kg) 41. (4) 8. (211) 1. (4) 4. (2) () 8i i 1. (48).8 (274).1 (11) (7). (4) 8. () NO HNLES (41) Lexel TM Lasers Products division of

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