nano Motion Technology ANT130XY Series Two-Axis XY Direct-Drive Nanopositioning Stages ANT130XY Series NANO Technology Introduction

Size: px
Start display at page:

Download "nano Motion Technology ANT130XY Series Two-Axis XY Direct-Drive Nanopositioning Stages ANT130XY Series NANO Technology Introduction"

Transcription

1 ANTXY Series NANO Technology ANTXY Series Two-Axis XY Direct-Drive Nanopositioning Stages Integrated low-profile XY linear motor stage Nanometer-level performance in a large travel format High resolution ( nm), repeatability (75 nm), and accuracy (5 nm) In-position stability of < nm nano Motion Technology AWARDS Anti-creep crossed-roller bearings High dynamic performance with direct-drive technology ULTRA performance grade option Introduction The ANTXY series stages offer nanometer-level performance in XY travels up to 6 mm. The integrated, sleek design provides an extremely low profile of only 85 mm. The stage comes with proprietary direct-drive motor technology, noncontact linear encoders, limits, integrated cable management system, and three performance grades. Ultra-Precise Stage Design The ANTXY design allows critical elements such as orthogonality, straightness, and flatness to be optimized, resulting in a stage with exceptional geometric tolerances. Aerotech s direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion in both the X and Y dimensions. All travel options (6 mm x 6 mm, mm x mm, 6 mm x 6 mm) come with the 85 mm profile height. The integrated cable management system is designed for long life and to minimize drag forces. Noncontact Direct-Drive Only noncontact direct-drive technology offers the robust, accurate, and high-speed positioning necessary for mass production of precision devices. ANTXY stages utilize advanced direct-drive technology pioneered by Aerotech to achieve the highest level of positioning performance. This direct-drive technology is high-performance, non-cogging, noncontact, high speed, high resolution, and high accuracy. This unique drive and bearing combination, packaged in an extremely small-profile and footprint, offers tangible advantages in many applications such as high-precision positioning, disk-drive fabrication, fiber alignment, optical delay element actuation, sensor testing, and scanning processes that demand smooth and precise motion. Multi-Axis Configurations The ANTXY can be combined with other Aerotech ANT series products (vertical lift stages, direct-drive rotaries, and goniometers) to create unique, high performance, multi-axis systems. ULTRA Performance Grade Option In order to achieve the highest possible system accuracy from our multi-axis nanopositioning systems, Aerotech has developed an advanced, dynamic trajectory calibration system. To take advantage of this sophisticated calibration system, the mechanical system has to be completely assembled, functionally tested, and calibrated in our best-inclass metrology labs. Nanometer-level system accuracy can only be achieved under stringent environmental conditions, calibrating with the best test equipment, using the highestprecision mechanical elements, and utilizing the ULTRA software capabilities of Aerotech s industry-leading controls. By implementing ULTRA dynamic trajectory calibration with the ANTXY, we are able to produce guaranteed two-dimensional accuracies of ±5 nm or better. The plots provided in the specifications illustrate performance differences between a standard ANTXY and the ULTRA version. Straightness errors, orthogonality errors, and accuracy errors caused by stage yawing are virtually eliminated.

2 ANTXY Series SPECIFICATIONS Mechanical Specifications Travel ANTXY-6 Base PLUS (,) ULTRA (,) 6 mm Accuracy (,) ±.5 µm ±5 nm ±5 nm Resolution (Minimum Incremental Motion) nm Repeatability (Bidirectional) () ± nm ±75 nm ±75 nm Repeatability (Unidirectional) ±5 nm ±5 nm ±5 nm Straightness () ±.5 µm ±.5 µm ±5 nm Flatness () ±.5 µm ±.5 µm ±. µm Pitch 49 µrad ( arc sec) 49 µrad ( arc sec) 49 µrad ( arc sec) Roll 49 µrad ( arc sec) 49 µrad ( arc sec) 49 µrad ( arc sec) Yaw 4 µrad (5 arc sec) 4 µrad (5 arc sec) 4 µrad (5 arc sec) Orthogonality 49 µrad ( arc sec) 5 µrad ( arc sec) 4.8 µrad ( arc sec) Maximum Speed (4) 5 mm/s (Upper Axis) Maximum Acceleration (4) g - m/s (No Load) (Upper Axis) Speed Stability Settling Time In-Position Stability (5) < nm Maximum Force (Continuous) N Load Capacity (6) Horizontal. kg Moving Mass Upper.5 kg Lower 4. kg Stage Mass 5.5 kg Material Aluminum Body/Black Hardcoat Finish MTBF (Mean Time Between Failure), Hours NANO Technology ANTXY Series Notes:. -PLUS and -ULTRA require the use of an Aerotech controller.. Specifications for -BASE and -PLUS options are per axis measured 5 mm above the tabletop. Specifications for -ULTRA are XY measured 5 mm above the tabletop.. Certified with each stage. 4. Requires the selection of an appropriate amplifier with sufficient voltage and current. 5. In-position jitter listing is sigma value. 6. Axis orientation for on-axis loading is listed. Mechanical Specifications ANTXY- Base PLUS (,) ULTRA (,) Travel mm Accuracy (,) ±4. µm ± nm ± nm Resolution (Minimum Incremental Motion) nm Repeatability (Bidirectional) () ± nm ±75 nm ±75 nm Repeatability (Unidirectional) ±5 nm ±5 nm ±5 nm Straightness () ±.5 µm ±.5 µm ± nm Flatness () ±.5 µm ±.5 µm ±. µm Pitch 58 µrad ( arc sec) 58 µrad ( arc sec) 58 µrad ( arc sec) Roll 58 µrad ( arc sec) 58 µrad ( arc sec) 58 µrad ( arc sec) Yaw 9 µrad (6 arc sec) 9 µrad (6 arc sec) 9 µrad (6 arc sec) Orthogonality 49 µrad ( arc sec) 5 µrad ( arc sec).4 µrad (.5 arc sec) Maximum Speed (4) 5 mm/s (Upper Axis) Maximum Acceleration (4) g - m/s (No Load) (Upper Axis) Speed Stability Settling Time In-Position Stability (5) < nm Maximum Force (Continuous) N Load Capacity (6) Horizontal. kg Moving Mass Upper. kg Lower 5.7 kg Stage Mass 7.4 kg Material Aluminum Body/Black Hardcoat Finish MTBF (Mean Time Between Failure), Hours Notes:. -PLUS and -ULTRA require the use of an Aerotech controller.. Specifications for -BASE and -PLUS options are per axis measured 5 mm above the tabletop. Specifications for -ULTRA are XY measured 5 mm above the tabletop.. Certified with each stage. 4. Requires the selection of an appropriate amplifier with sufficient voltage and current. 5. In-position jitter listing is sigma value. 6. Axis orientation for on-axis loading is listed.

3 NANO Technology ANTXY Series ANTXY Series SPECIFICATIONS Mechanical Specifications Travel ANTXY-6 Base PLUS (,) ULTRA (,) 6 mm Accuracy (,) ±5. µm ± nm ± nm Resolution (Minimum Incremental Motion) nm Repeatability (Bidirectional) () ± nm ±75 nm ±75 nm Repeatability (Unidirectional) ±5 nm ±5 nm ±5 nm Straightness () ±. µm ±. µm ± nm Flatness () ±. µm ±. µm ±. µm Pitch 7 µrad (5 arc sec) 7 µrad (5 arc sec) 58 µrad ( arc sec) Roll 7 µrad (5 arc sec) 7 µrad (5 arc sec) 58 µrad ( arc sec) Yaw 9 µrad (8 arc sec) 9 µrad (8 arc sec) 9 µrad (6 arc sec) Orthogonality 49 µrad ( arc sec) 5 µrad ( arc sec).4 µrad (.5 arc sec) Maximum Speed (4) 5 mm/s (Upper Axis) Maximum Acceleration (4) g - m/s (No Load) (Upper Axis) Speed Stability Settling Time In-Position Stability (5) < nm Maximum Force (Continuous) N Load Capacity (6) Horizontal. kg Moving Mass Upper.4 kg Lower 6.9 kg Stage Mass 8.9 kg Material Aluminum Body/Black Hardcoat Finish MTBF (Mean Time Between Failure), Hours Notes:. -PLUS and -ULTRA require the use of an Aerotech controller.. Specifications for -BASE and -PLUS options are per axis measured 5 mm above the tabletop. Specifications for -ULTRA are XY measured 5 mm above the tabletop.. Certified with each stage. 4. Requires the selection of an appropriate amplifier with sufficient voltage and current. 5. In-position jitter listing is sigma value. 6. Axis orientation for on-axis loading is listed. Electrical Specifications Drive System Feedback Brushless Linear Servomotor Noncontact Linear Encoder Maximum Bus Voltage Limit Switches Home Switch VDC (-4DU-5DU), 8 VDC (-5DU) 5 V, Normally Closed Near Center Recommended Controller Multi-Axis A Ensemble Npaq MXR Npaq MR-MXH Ndrive ML-MXH Epaq MXH Epaq MR-MXH Ensemble ML-MXH Ensemble LAB Single Axis Soloist Soloist ML-MXH Note: Linear amplifiers are required to achieve the listed specifications. Other options are available. Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within.5 C/4 hours. If this is not possible, alternate products are available. Please consult Aerotech Application Engineering for more information.

4 ANTXY Series PERFORMANCE Position (nm) Time (s) ANTXY-6-PLUS lower axis nm step plot with Hz filter. Best-in-class resolution and exceptional in-position stability for large travel stages. NANO Technology ANTXY Series Accuracy Error (μm) Accuracy Error (µm) ANTXY-6 D accuracy plot showing planar accuracy error including straightness, orthogonality, and stage yawing. ANTXY-6-ULTRA exceptional D system accuracy with Aerotech s ULTRA version..5 Velocity (mm/s) Position Error (nm) ms Move and Settle Step Size: 6 mm Speed: 5 mm/s Settle Spec: ± nm Move Time (ms) ANTXY-6-PLUS velocity performance at mm/s and kg payload for the X (lower) axis. This outstanding speed stability enhances most scanning or laser machining applications. ANTXY-6-PLUS step and settle performance at full travel and kg payload for the X (lower) axis. Industry-best settling times significantly improve throughput for most applications. 4

5 ANTXY Series NANO Technology ANTXY Series PERFORMANCE Position Error (nm) ANTXY-6-PLUS accuracy and repeatability, five runs, bidirectional for the Y (upper) axis. The total accuracy of ±75 nm over 6 mm travel is significantly better than other offerings. Straightness Error (nm) Standard Ultra ANTXY-6 straightness error comparison between the BASE and ULTRA models shows a dramatic improvement in this specification. Y Orthogonality ( ) = -. arc-sec,x Magnification X Yaw (arc sec) ANTXY-6-ULTRA orthogonality. The inset is magnified,x for clarity. The ULTRA model orthogonality is a twentyfold improvement over the BASE model orthogonality. ANTXY-6-PLUS Y (upper) axis yaw, five runs, bi-directional. Highly repeatable, lowest angular error over full travel. 5

6 ANTXY DIMENSIONS NANO Technology RAD. F CABLE BEND RADIUS ANTXY Series.7 5 D/ C/ X M6X. 7. CENTER ON CARRIAGE DETAIL A SCALE : 5 MOUNTING HOLE TYP. D/ B/ 5 75 B/ 9 C/ D/ 5 D/ TRAVEL OPTION A = STAGE LENGTH B = NOMINAL TRAVEL C = LIMIT TRAVEL D = HARDSTOP TRAVEL X 6 66 X X 75 4 ~ X 6 X 6 5 X 5 67 ~ X 6 66 X X 75 9 ~.5 E F A 85 A E 9. A. ANTXY- AND ANTXY-6 ONLY DIMENSIONS: MILLIMETERS 6

7 ANTXY Series NANO Technology ANTXY Mounting Plate DIMENSIONS STAGE MOUNTING M6 x. THRU B D E F G H A C BREADBOARD MOUNTING M6 OR /4- BOLT C'BORE SLOT 9 5 DIMENSIONS: MILLIMETERS 7

8 ANTXY Post DIMENSIONS 45 CENTER POST ADJUS TME NT NANO Technology 8.6 SQ 5 SQ AIR FITTING FOR 4 [ 5/"] VACUUM LINE (ALTERNATE ATTACHMENT METHOD) ANTXY Series 5.8 SQ 4X 6.8 S LOT THR U ALL. S LOT CABLE TIE MOUNTS (BOTH SIDES) REF..8 QTY (4) MAGNE TS (ALTE R NATE ATTACHME NT ME THOD) ACP: INCLUDED WITH "-XY Z-C MS " OP TION NOTE : DIME NS IONS NOT S HOWN AR E THE S AME AS ACP ACP: INCLUDED WITH "-XY -C MS " OP TION DIME NS IONS : MILLIME TE R S 8

9 ANTXY Series NANO Technology ANTXY Series ORDERING INFORMATION Travel (Required) -6 6 mm travel - mm travel -6 6 mm travel Connector (Required) -CN Single 5-pin D connector, 5DU -CN Two connectors, 4-pin HPD and 5-pin D, 4DU-5DU Note: -CN option not valid for systems using bus voltages greater than 8 V Cable Management(Required) -CMS Post for two-axis cable support -CMS Post for three-axis cable support Mounting Plate (Optional) -MP Mounting plate Performance Grade (Required) -PL Base performance -PL High-accuracy performance, PLUS -PL4 Ultra high-accuracy performance, ULTRA Integration (Required) Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system. Integration - Test as system -TAS Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration. Integration - Test as components -TAC Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system. 9

ATX115SL/SLE Series Mechanical-Bearing, Screw-Driven Linear Stage

ATX115SL/SLE Series Mechanical-Bearing, Screw-Driven Linear Stage ATX115/E Series Mechanical-Bearing, Screw-Driven Linear Stage Travel lengths up to 150 mm with anti-creep crossed-roller bearings Optional center-mounted linear encoder for direct position feedback Versatile

More information

HexGen HEX HL Hexapod Six-DOF Positioning System

HexGen HEX HL Hexapod Six-DOF Positioning System HexGen HE300-230HL Hexapods and Robotics HexGen HE300-230HL Hexapod Six-DOF Positioning System Six degree-of-freedom positioning with linear travels to 60 mm and angular travels to 30 Precision design

More information

AMG-GR Series Gear-Driven Gimbals

AMG-GR Series Gear-Driven Gimbals AMG-GR Series Gear-Driven Gimbals Economical, high-accuracy, two-axis gimbal design Travels from 90 degrees to continuous rotation available Circular (100 to 300 mm) and custom cells available Front surface

More information

Fiber Optic Device Manufacturing

Fiber Optic Device Manufacturing Precision Motion Control for Fiber Optic Device Manufacturing Aerotech Overview Accuracy Error (µm) 3 2 1 0-1 -2 80-3 40 0-40 Position (mm) -80-80 80 40 0-40 Position (mm) Single-source supplier for precision

More information

ART50/100 Series. Mechanical-Bearing, Worm-Driven Rotary Stage. Low profile and small footprint. Ultra-fine resolution

ART50/100 Series. Mechanical-Bearing, Worm-Driven Rotary Stage. Low profile and small footprint. Ultra-fine resolution / Series Rotary Stages /100 Series Mechanical-Bearing, Worm-Driven Rotary Stage Low profile and small footprint Ultra-fine resolution Integral brushless servomotor or microstepping motor Optional aperture

More information

HexGen HEX HL Hexapod Six-DOF Positioning System

HexGen HEX HL Hexapod Six-DOF Positioning System HexGen HE300-230HL Hexapods and Robotics HexGen HE300-230HL Hexapod Six-DOF Positioning System Six degree-of-freedom positioning with linear travels to 60 mm and angular travels to 30 Precision design

More information

HexGen HEX HL Hexapod Six-DOF Positioning System

HexGen HEX HL Hexapod Six-DOF Positioning System HexGen HE300-230HL Hexapods and Robotics HexGen HE300-230HL Hexapod Six-DOF Positioning System Six degree-of-freedom positioning with linear travels to 60 mm and angular travels to 30 Precision design

More information

AMG-GR Series. Gear-Drive Motorized Gimbal Mount. Economical, high-accuracy, two-axis gimbal design

AMG-GR Series. Gear-Drive Motorized Gimbal Mount. Economical, high-accuracy, two-axis gimbal design AMG-GR Series Optical Mounts AMG-GR Series Gear-Drive Motorized Gimbal Mount Economical, high-accuracy, two-axis gimbal design Travels from 90 degrees to continuous rotation available Circular (100 to

More information

Nmark AGV-HP(O) High Accuracy, Thermally Stable Galvo Scanner

Nmark AGV-HP(O) High Accuracy, Thermally Stable Galvo Scanner Nmark AGV-HP(O) Galvanometer Nmark AGV-HP(O) High Accuracy, Thermally Stable Galvo Scanner Highest accuracy scanner available attains single-digit, micron-level accuracy over the field of view Optical

More information

Nmark AGV-HP(O) High Accuracy, Thermally Stable Galvo Scanner

Nmark AGV-HP(O) High Accuracy, Thermally Stable Galvo Scanner Nmark AGV-HP(O) High Accuracy, Thermally Stable Galvo Scanner Highest accuracy scanner available attains single-digit, micron-level accuracy over the field of view Optical feedback technology significantly

More information

ATS50 Series. Mechanical Bearing, Lead-Screw Stage. Low profile, small footprint. Ultra-fine resolution

ATS50 Series. Mechanical Bearing, Lead-Screw Stage. Low profile, small footprint. Ultra-fine resolution Linear Stages Mechanical Bearing, Lead-Screw Stage Low profile, small footprint Ultra-fine resolution Integral brushless servo or microstepping motor Available with vacuum preparation Precision ground

More information

PIMag Precision Linear Stage

PIMag Precision Linear Stage PIMag Precision Linear Stage High Velocity and Precision due to Magnetic Direct Drive V-551 Travel ranges to 230 mm Velocity up to 0.5 m/s Absolute encoder with 1 nm resolution Highest precision with PIOne

More information

PIglide AT3 Linear Stage with Air Bearings

PIglide AT3 Linear Stage with Air Bearings PIglide AT3 Linear Stage with Air Bearings High Performance Nanopositioning Stage A-123 Ideal for scanning applications or highprecision positioning Cleanroom compatible Size of the motion platform 210

More information

Nmark AGV-HP. High Accuracy, Thermally Stable Galvo Scanner

Nmark AGV-HP. High Accuracy, Thermally Stable Galvo Scanner Nmark AGV-HP Galvanometer Nmark AGV-HP High Accuracy, Thermally Stable Galvo Scanner Highest accuracy scanner available attains single-digit, micron-level accuracy over the field of view Optical feedback

More information

Compact Nanopositioning System Family with Long Travel Ranges

Compact Nanopositioning System Family with Long Travel Ranges P-620.1 P-629.1 PIHera Piezo Linear Stage Compact Nanopositioning System Family with Long Travel Ranges Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded

More information

Nmark AGV-HP. High Accuracy, Thermally Stable Galvo Scanner

Nmark AGV-HP. High Accuracy, Thermally Stable Galvo Scanner Nmark AGV-HP High Accuracy, Thermally Stable Galvo Scanner Highest accuracy scanner available attains single-digit, micron-level accuracy over the field of view Optical feedback technology significantly

More information

Mini-MAG Positioning Products

Mini-MAG Positioning Products Mini-MAG Positioning Products Miniature Linear Stage The Mini-MAG (MMG and MMX) line of miniature linear stages blends the ultimate in performance, reliability, and value, delivering nearly twice the accuracy

More information

Q-Motion Miniature Linear Stage

Q-Motion Miniature Linear Stage Q-Motion Miniature Stage Piezo Motors for Small Dimensions, High Resolution, and a Favorable Price Q-522 Only 22 mm in width and 10 mm in height Direct position measurement with incremental with up to

More information

Nmark AGV-HPO. High Accuracy, Open Frame, Thermally Stable Galvo Scanner. Highest accuracy scanner available attains singledigit,

Nmark AGV-HPO. High Accuracy, Open Frame, Thermally Stable Galvo Scanner. Highest accuracy scanner available attains singledigit, Nmark AGV-HPO Galvanometer Nmark AGV-HPO High Accuracy, Open Frame, Thermally Stable Galvo Scanner Highest accuracy scanner available attains singledigit, micron-level accuracy over the field of view Optical

More information

Q-Motion Miniature Linear Stage

Q-Motion Miniature Linear Stage Q-Motion Miniature Stage Smallest linear stage with position control, high resolution and affordable price Q-521 Only 21 mm wide and 10 mm high Direct position measurement with integrated incremental,

More information

M-041 M-044 Tip/Tilt Stage

M-041 M-044 Tip/Tilt Stage M-041 M-044 Tip/Tilt Stage Piezo Drive Option for Nanometer Precision Ordering Information Linear Actuators & Motors M-041.00 Small Tilt Stage, Manual Micrometer Drive M-041.D01 Small Tilt Stage, DC-Motor

More information

Screw Driven automation tables

Screw Driven automation tables automation tables Precise multi-axis positioning systems play an integral part in today s semiconductor, computer peripheral, solar power, flat panel, life sciences, lab automation, biomedical and electronics

More information

Ndrive Series. Digital Servo Amplifiers PWM. Wide output power range from 10 A peak to 200 A peak at 320 VDC. 2- or 3-phase AC line input or DC input

Ndrive Series. Digital Servo Amplifiers PWM. Wide output power range from 10 A peak to 200 A peak at 320 VDC. 2- or 3-phase AC line input or DC input Ndrive PWM Amplifiers/Drives Ndrive Series Digital Servo Amplifiers PWM Wide output power range from 10 A peak to 200 A peak at 320 VDC 2- or 3-phase AC line input or DC input CE approved and NRTL safety

More information

P-611.Z Piezo Z-Stage

P-611.Z Piezo Z-Stage Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release. The newest release for data sheets is available for download at www.pi.ws. Cat120E

More information

Magnetic Direct Drives and Air Bearing Technology PRECISION ENGINEERING AND MOTION CONTROL EXPERTISE

Magnetic Direct Drives and Air Bearing Technology PRECISION ENGINEERING AND MOTION CONTROL EXPERTISE Magnetic Direct Drives and Air Bearing Technology PRECISION ENGINEERING AND MOTION CONTROL EXPERTISE WWW.PI.WS PIMag Core Technologies MAGNETIC DIRECT DRIVE TECHNOLOGY Drive technology and regulation know-how

More information

PIHera Piezo Linear Precision Positioner

PIHera Piezo Linear Precision Positioner PIHera Piezo Linear Precision Positioner Variable Travel Ranges and Axis Configuration P-620.1 P-629.1 Travel ranges 50 to 1800 µm Resolution to 0.1 nm Linearity error 0.02 % X, XY, Z versions; XYZ combination

More information

Npaq Series Drive Racks

Npaq Series Drive Racks Npaq Series Drive Racks 3U plug-in drives 19 inch rack-mount design Flexible design provides the ability to drive brush, brushless, or stepper motors with the same amplifier 5 A to 30 A peak output current

More information

How to Configure IFOV. Revision: 1.01

How to Configure IFOV. Revision: 1.01 How to Configure IFOV Revision: 1.01 Global Technical Support Go to www.aerotech.com/global-technical-support for information and support about your Aerotech products. The website provides downloadable

More information

Ndrive Series. Digital Servo Amplifiers PWM. Wide output power range from 10 A peak to 200 A peak at 320 VDC. 2- or 3-phase AC line input or DC input

Ndrive Series. Digital Servo Amplifiers PWM. Wide output power range from 10 A peak to 200 A peak at 320 VDC. 2- or 3-phase AC line input or DC input Ndrive PWM Amplifiers/Drives Ndrive Series Digital Servo Amplifiers PWM Wide output power range from 10 A peak to 200 A peak at 320 VDC 2- or 3-phase AC line input or DC input CE approved and NRTL safety

More information

Motion Solutions for Digital Pathology. White Paper

Motion Solutions for Digital Pathology. White Paper Motion Solutions for Digital Pathology White Paper Design Considerations for Digital Pathology Instruments With an ever increasing demand on throughput, pathology scanning applications are some of the

More information

3U High, 19" Drive Rack

3U High, 19 Drive Rack 3U High, 19" Drive Rack 3U plug-in amplifiers Dedicated control card for each amplifier 19 inch rack-mount design Flexible design provides the ability to drive brush, brushless, or stepper motors with

More information

Motion Solutions for Digital Pathology

Motion Solutions for Digital Pathology Parker Hannifin Electromechanical Dvision N. A. 1140 Sandy Hill Road Irwin, PA 1564203049 724-861-8200 www.parkermotion.com Motion Solutions for Digital Pathology By: Brian Handerhan and Jim Monnich Design

More information

SGL Series. Single Guide Linear Motor Stage. Zero cogging and backlash ironless linear motor actuator. High speed and high acceleration

SGL Series. Single Guide Linear Motor Stage. Zero cogging and backlash ironless linear motor actuator. High speed and high acceleration SGL Series Single Guide Linear Motor Stage Direct drive Zero cogging and backlash ironless linear motor actuator High speed and high acceleration Fast response and quick settling time Smooth motion at

More information

Glossary. Glossary Engineering Reference. 35

Glossary. Glossary Engineering Reference. 35 Glossary Engineering Reference Glossary Abbe error The positioning error resulting from angular motion and an offset between the measuring device and the point of interest. Abbe offset The value of the

More information

MODEL Sx SERVOTUBE MODULE

MODEL Sx SERVOTUBE MODULE Force» Peak: 156-780 N» Continuous: 42-102 N Maximum Velocity» Up to 8.5 m/s Feedback» Built-in position sensor» 1V pk-pk sin/cos» 12 micron repeatability» Optionally with high resolution encoder Range

More information

MODELS SM SERVOTUBE MODULE

MODELS SM SERVOTUBE MODULE Force» Peak: 46-92 N» Continuous: 6-27 N Maximum Velocity» Up to 10.8 m/s Feedback» Built-in position sensor» 1V pk-pk sin/cos» 6 micron repeatability» Optionally with high resolution encoder Range of

More information

QNPHDL Hardware Manual. Revision:

QNPHDL Hardware Manual. Revision: QNPHDL Hardware Manual Revision: 1.00.00 Global Technical Support Go to www.aerotech.com/global-technical-support for information and support about your Aerotech products. The website provides downloadable

More information

GUZIK V2002 Spinstand with XY-Positioning For Head, Headstack and Disk Testing

GUZIK V2002 Spinstand with XY-Positioning For Head, Headstack and Disk Testing GUZIK V2002 Spinstand with XY-Positioning For Head, Headstack and Disk Testing Crashproof XY-Positioning to protect spindle 1 Embedded Servo with 2 3 khz bandwidth 2 Servo Accuracy 3 0.4 nm (0.016 µinch),

More information

RELM20 high accuracy linear scale

RELM20 high accuracy linear scale L-9517-9219-06-B RELM20 ZeroMet scale is manufactured from near zero thermal expansion material, ensuring the high level of accuracy is maintained across the full temperature range. It can be mounted direct

More information

Mercury TM 1500 Digital Output Encoder Systems

Mercury TM 1500 Digital Output Encoder Systems Mercury TM 1500 Digital Output Encoder Systems Factory Set Resolution to 0.50μm Reflective Linear and Rotary Encoders Available with standard 15 pin D-sub connector or Micro connector Sensor the size of

More information

Mercury TM 1500V Vacuum Rated Digital Output Encoders

Mercury TM 1500V Vacuum Rated Digital Output Encoders Mercury TM 1500V Vacuum Rated Digital Output Encoders Factory Set Resolution to 0.50μm Reflective Linear and Rotary Vacuum Encoders Systems Customer Controller Typical Vacuum Encoder System Vacuum Wall

More information

Npaq 6U Series. High-Power Drive Racks. High-power 6U modular drive chassis. 19 inch rack-mount design

Npaq 6U Series. High-Power Drive Racks. High-power 6U modular drive chassis. 19 inch rack-mount design Npaq6U Series Drive Racks Npaq 6U Series High-Power Drive Racks High-power 6U modular drive chassis 19 inch rack-mount design Flexible design provides the ability to drive brush, brushless or stepper motors

More information

Fast Optical Form Measurements of Rough Cylindrical and Conical Surfaces in Diesel Fuel Injection Components

Fast Optical Form Measurements of Rough Cylindrical and Conical Surfaces in Diesel Fuel Injection Components Fast Optical Form Measurements of Rough Cylindrical and Conical Surfaces in Diesel Fuel Injection Components Thomas J. Dunn, Robert Michaels, Simon Lee, Mark Tronolone, and Andrew Kulawiec; Corning Tropel

More information

Keysight Technologies Optics and Laser Heads for Laser-Interferometer Positioning Systems

Keysight Technologies Optics and Laser Heads for Laser-Interferometer Positioning Systems Keysight Technologies Optics and Laser Heads for Laser-Interferometer Positioning Systems Technical Overview Choose from a large selection of optical components for system design flexibility Table of Contents

More information

6-Axis Nanopositioning Systems

6-Axis Nanopositioning Systems 6-Axis Nanopositioning Systems Sophisticated Parallel-Kinematics Positioning Stages SOPHISTICATED PRECISE USER FRIENDLY W W W. P I. W S Click on the Images to Jump to Datasheet 6-Axis Nanopositioning Stages

More information

XC4e PWM Digital Drive

XC4e PWM Digital Drive PWM Digital Drive HyperWire fiber-optic interface Up to 30 A peak output current Integral power supply Amplifiers/Drives Drive brush, brushless, voice coil, or stepper motors Safe torque off (STO) safety

More information

RELA absolute high accuracy Invar scale

RELA absolute high accuracy Invar scale L-9517-9393-01-B RELA absolute high accuracy Invar scale System features Single track optical absolute scale ±1 µm guaranteed accuracy 30 µm scale pitch ensures exceptional motion control performance Robust

More information

Automatic Testing of Photonics Components

Automatic Testing of Photonics Components Automatic Testing of Photonics Components Fast, Accurate, and Suitable for Industry Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 1 of 5 Silicon photonics

More information

High-Bandwidth Force Control

High-Bandwidth Force Control High-Bandwidth Force Control How to use Aerotech linear motors to servo on a force input/output signal from a force gage. By Matt Davis, Traditionally linear stages are used with encoders to position to

More information

XC4e PWM Digital Drive

XC4e PWM Digital Drive XC4e PWM Digital Drive HyperWire fiber-optic interface Up to 30 A peak output current Integral power supply Drive brush, brushless, voice coil, or stepper motors Safe torque off (STO) safety circuit Drive

More information

RGH34 encoder system. Data sheet L A. RGH34 readhead and RGI34 interface: RGS40 scale:

RGH34 encoder system. Data sheet L A. RGH34 readhead and RGI34 interface: RGS40 scale: L-9517-978-01-A The Renishaw RGH34 series is a non-contact optical encoder system, providing highly-reliable positional feedback. This modular miniaturised encoder consists of an RGH34 readhead that reads

More information

Optics and Laser Heads for Laser-Interferometer Positioning Systems Product Overview

Optics and Laser Heads for Laser-Interferometer Positioning Systems Product Overview Optics and Laser Heads for Laser-Interferometer Positioning Systems Product Overview Choose from a large selection of optical components for system design flexibility Table of Contents 3 4 6 8 8 9 10 12

More information

Soloist. Position Controller and Servo Amplifier PWM. Single axis digital servo controller with integral power supply and amplifier

Soloist. Position Controller and Servo Amplifier PWM. Single axis digital servo controller with integral power supply and amplifier Soloist Position Controller and Servo Amplifier PWM Single axis digital servo controller with integral power supply and amplifier Advanced software architecture shortens customer development time; use

More information

hurryscan, hurryscan II

hurryscan, hurryscan II hurryscan, hurryscan II more Information at: universal and compatible These compact scan heads from SCANLAB provide optimal solutions for nearly all challenges found in industrial laser materials processing.

More information

XC4 PWM Digital Drive

XC4 PWM Digital Drive XC4 PWM Digital Drive HyperWire fiber-optic interface Up to 30 A peak output current Integral power supply Drive brush, brushless, voice coil, or stepper motors Safe torque off (STO) safety circuit Drive

More information

PiezoMike Linear Actuator

PiezoMike Linear Actuator PiezoMike Linear Actuator With Position Sensor for Closed-Loop Operation N-472 High stability and holding force >100 N Self-locking at rest even when closed-loop control is switched off Compact design

More information

Engineering Reference

Engineering Reference Engineering Reference Linear & Rotary Positioning Stages Table of Contents 1. Linear Positioning Stages...269 1.1 Precision Linear Angular Dynamic 1.2 Loading Accuracy Repeatability Resolution Straightness

More information

Ensemble HPe/CP/MP. Networked, Panel-Mount Drives PWM. Network drives through a high-speed serial interface to coordinate up to ten axes of motion

Ensemble HPe/CP/MP. Networked, Panel-Mount Drives PWM. Network drives through a high-speed serial interface to coordinate up to ten axes of motion Ensemble PWM Motion Controllers Ensemble HPe/CP/MP Networked, Panel-Mount Drives PWM Network drives through a high-speed serial interface to coordinate up to ten axes of motion Coordinate motion using

More information

MINISLIDE MSQscale measuring system. Distance measuring system integrated into the MINISLIDE MSQ micro frictionless table

MINISLIDE MSQscale measuring system. Distance measuring system integrated into the MINISLIDE MSQ micro frictionless table MINISLIDE MSQscale measuring system Distance measuring system integrated into the MINISLIDE MSQ micro frictionless table Product catalog 2017 Latest version of the catalogs You can always find the latest

More information

New Long Stroke Vibration Shaker Design using Linear Motor Technology

New Long Stroke Vibration Shaker Design using Linear Motor Technology New Long Stroke Vibration Shaker Design using Linear Motor Technology The Modal Shop, Inc. A PCB Group Company Patrick Timmons Calibration Systems Engineer Mark Schiefer Senior Scientist Long Stroke Shaker

More information

Fast Tip/Tilt Platform

Fast Tip/Tilt Platform Fast Tip/Tilt Platform Short Settling Time and High Dynamic Linearity S-331 Tip/tilt angle up to 5 mrad, optical deflection angle up to 10 mrad (0.57 ) Parallel-kinematic design for identically high performance

More information

M-605 Linear Positioning Stages

M-605 Linear Positioning Stages MP 45E User Manual M-605 Linear Positioning Stages Release: 1.1.0 Date: 2005-01-05 This document describes the following product(s): M-605.1DD Translation Stage, 25 mm, 0.1µm Linear Scale, ActiveDrive

More information

of harmonic cancellation algorithms The internal model principle enable precision motion control Dynamic control

of harmonic cancellation algorithms The internal model principle enable precision motion control Dynamic control Dynamic control Harmonic cancellation algorithms enable precision motion control The internal model principle is a 30-years-young idea that serves as the basis for a myriad of modern motion control approaches.

More information

Mercury TM 1200 PCB-Mount Analog Encoders

Mercury TM 1200 PCB-Mount Analog Encoders Mercury TM 1200 PCB-Mount Analog Encoders For Customer Interpolation- Resolution to 0.078μm Reflective Linear and Rotary Encoders Sensor the size of a Dime Resolution Determined by Customer Electronics

More information

CATALOG Welcome to the world of SmarAct.

CATALOG Welcome to the world of SmarAct. CATALOG 2017 Welcome to the world of SmarAct www.smaract.com TABLE OF CONTENTS INTRODUCTION... 3 LINEAR POSITIONERS...20 ROTARY POSITIONERS...54 GONIOMETERS...72 MICRO-GRIPPERS...82 OPTO-MECHANICS...92

More information

RESOLUTE FS absolute optical encoder with Siemens DRIVE-CLiQ serial communications

RESOLUTE FS absolute optical encoder with Siemens DRIVE-CLiQ serial communications L-9517-9701-01-C RESOLUTE FS absolute optical encoder with Siemens DRIVE-CLiQ serial communications True absolute non-contact optical encoder system: no batteries required ISO 13849: 2015 Pld IEC 61508:

More information

The Air Bearing Throughput Edge By Kevin McCarthy, Chief Technology Officer

The Air Bearing Throughput Edge By Kevin McCarthy, Chief Technology Officer 159 Swanson Rd. Boxborough, MA 01719 Phone +1.508.475.3400 dovermotion.com The Air Bearing Throughput Edge By Kevin McCarthy, Chief Technology Officer In addition to the numerous advantages described in

More information

QUANTiC series encoder system

QUANTiC series encoder system L-9517-9778-03-A QUANTiC series encoder system The QUANTiC encoder series provides robust incremental position measurement for linear and rotary systems with excellent metrology and wide installation tolerances.

More information

The New ID11 Nanoscope end-station A Nano-Tomography Scanner

The New ID11 Nanoscope end-station A Nano-Tomography Scanner The New ID11 Nanoscope end-station A Nano-Tomography Scanner A focus on the sample positioning stages I. ID11 Beamline II. III. IV. Design architecture A rotation stage with nanometer-level performance

More information

ALxxxx Linear Servomotors

ALxxxx Linear Servomotors ALxxxx Linear Servomotors Primary section: Coil unit Secondary section: Magnet plate (sealed) 848 AL20xx Iron core motor, magnetic path width 80 mm AL24xx Iron core motor, magnetic path width 50 mm AL28xx

More information

RESOLUTE ETR (Extended Temperature Range) absolute encoder

RESOLUTE ETR (Extended Temperature Range) absolute encoder L-9517-9420-02-H RESOLUTE ETR (Extended Temperature Range) absolute encoder True absolute non-contact optical encoder system: no batteries required Operates down to -40 C (-40 F) and up to +80 C (+176

More information

PRECISION AND DYNAMICS WITH PIEZO MOTOR STAGES Q-MOTION PIEZOWALK CONSTANT VELOCITY PRECISION REPEATABILITY SUBNANOMETER

PRECISION AND DYNAMICS WITH PIEZO MOTOR STAGES Q-MOTION PIEZOWALK CONSTANT VELOCITY PRECISION REPEATABILITY SUBNANOMETER CUSTOM DESIGNS CONSTANT VELOCITY PRECISION AND DYNAMICS WITH PIEZO MOTOR STAGES MOTION CONTROL PIEZOMIKES COST EFFECTIVE REPEATABILITY SUBNANOMETER PARALLEL KINEMATICS COMPACT VACUUM PRECISION RELIABLE

More information

Size 23 Single Stack Size 23 Double Stack. 30-in (760 mm) 225 lbs (1,000 N) lbs-ft (30.5 Nm) lbs-ft (26.25 Nm) lbs-ft (30.

Size 23 Single Stack Size 23 Double Stack. 30-in (760 mm) 225 lbs (1,000 N) lbs-ft (30.5 Nm) lbs-ft (26.25 Nm) lbs-ft (30. HAYD: 203 756 7441 BGS Motorized Linear Rails: BGS08 Recirculating Ball Slide BGS08 Linear Rail with Hybrid 57000 Series Size 23 Single and Double Stacks This BGS heavy-duty linear rail combines many technologies

More information

absolute optical encoder for Panasonic serial communications

absolute optical encoder for Panasonic serial communications L-9517-9460-05-B absolute optical encoder for Panasonic serial communications True absolute non-contact optical encoder system: no batteries required Wide set-up tolerances for quick and easy installation

More information

QUANTiC series encoder system

QUANTiC series encoder system L-9517-9778-02-C QUANTiC series encoder system The QUANTiC encoder series provides robust incremental position measurement with excellent metrology and wide installation tolerances that reduce or eliminate

More information

RESOLUTE absolute optical encoder with Siemens DRIVE-CLiQ serial communications

RESOLUTE absolute optical encoder with Siemens DRIVE-CLiQ serial communications L-9517-9524-04-D RESOLUTE absolute optical encoder with Siemens DRIVE-CLiQ serial communications True absolute non-contact optical encoder system: no batteries required Wide set-up tolerances for quick

More information

V2018 SPINSTAND AND NEW SERVO-8 SYSTEM

V2018 SPINSTAND AND NEW SERVO-8 SYSTEM 34 http://www.guzik.com/products/head-and-media-disk-drive-test/spinstands/ V2018 SPINSTAND AND NEW SERVO-8 SYSTEM Designed for Automated High-TPI HGA Volume Testing Up to 1300 ktpi Estimated Capability

More information

ADR-A Series Direct Drive Rotary Motor

ADR-A Series Direct Drive Rotary Motor ADR-A Series Direct Drive Rotary Motor Direct drive, brushless motor fully integrated with encoder and bearing Low cogging torque Low speed and high speed windings Precise homing through index pulse ADR110

More information

MODEL S15 Incremental Optical Rotary Encoder

MODEL S15 Incremental Optical Rotary Encoder MODEL S15 Incremental Optical Rotary Encoder Up to 200 KHz frequency response all channels Small compact size: 1.51 diameter 1.00 dia. Bolt circle mount Resolutions up to 12,500 cycles / revolution ( 50,000

More information

P E R F O R M A N C E D E P E N D A B I L I T Y A V A I L A B I L I T Y

P E R F O R M A N C E D E P E N D A B I L I T Y A V A I L A B I L I T Y PeakVelocity in Octave Bandwidth (db wrt 1m 2 /s 2 ) 0-25 -50-75 -100-125 -150-175 -200-225 -250 The Earthquake Spectrum Local events ~10 km Several seconds to 30 Hz Regional ~100 km 30 seconds to 10 Hz

More information

Advanced Motion Control Optimizes Laser Micro-Drilling

Advanced Motion Control Optimizes Laser Micro-Drilling Advanced Motion Control Optimizes Laser Micro-Drilling The following discussion will focus on how to implement advanced motion control technology to improve the performance of laser micro-drilling machines.

More information

An Introduction To Plug-and- Play Motion Subsystems

An Introduction To Plug-and- Play Motion Subsystems An Introduction To Plug-and- Play Motion Subsystems Embedding mechanical motion subsystems into machines improves performance and reduces cost. If you build machines, you probably work with actuators and

More information

ChipEncoder Series. MicroE Encoders. Nano. SMT Encoders for High Performance, High Volume Designs PRODUCT DATA SHEET. Accelerate Your Innovation.

ChipEncoder Series. MicroE Encoders. Nano. SMT Encoders for High Performance, High Volume Designs PRODUCT DATA SHEET. Accelerate Your Innovation. MicroE Encoders PRODUCT DATA SHEET Nano ChipEncoder Series SMT Encoders for High Performance, High Volume Designs ChipEncoder models feature built-in interpolation and mount directly on your printed circuit

More information

Catalogue Extract Micro Cylinder with 24 VDC Servo Motor. Encoder type Motor type Lead Stroke Compatible Controllers Cable Length

Catalogue Extract Micro Cylinder with 24 VDC Servo Motor. Encoder type Motor type Lead Stroke Compatible Controllers Cable Length RCA RoboCylinder RCA-SAAC Model Description RCA SAAC I 5 Series Encoder Motor Stroke Compatible Controllers Cable Length Option *See page 3 for details on the model descriptions. I: Incremental speci ation

More information

LEAD SCREW LINEAR ACTUATORS Profile Rail Linear Actuators

LEAD SCREW LINEAR ACTUATORS Profile Rail Linear Actuators LEAD SCREW LINEAR ACTUATORS Profile Rail Linear Actuators ITAR Helix Linear Technologies, Inc., Beachwood, Ohio COMPANY CULTURE Helix is a global supplier to the Medical Device, Life Science, Security,

More information

SERVO INDEXING AT MECHANICAL INDEXER PRICES

SERVO INDEXING AT MECHANICAL INDEXER PRICES SERVO INDEXING AT MECHANICAL INDEXER PRICES 1 Servo indexing at mechanical indexer prices The EZ INDEXER servo indexers are high precision indexing machines designed to be low cost without sacrificing

More information

FemtoFAB. Femtosecond laser micromachining system. tel fax Konstitucijos ave. 23C LT Vilnius, Lithuania

FemtoFAB. Femtosecond laser micromachining system. tel fax Konstitucijos ave. 23C LT Vilnius, Lithuania FemtoFAB Femtosecond laser micromachining system Konstitucijos ave. 23C LT-08105 Vilnius, Lithuania tel. +370 5 272 57 38 fax +370 5 272 37 04 info@wophotonics.com www.wophotonics.com INTRODUCTION FemtoFAB

More information

_active vibration isolation desktop unit halcyonics_i4 series

_active vibration isolation desktop unit halcyonics_i4 series _active vibration isolation desktop unit Active Vibration Isolation Desktop Unit ABSTRACT The halcyonics_i4 is a stateof-the-art active benchtop vibration isolation system from Accurion. Aside from its

More information

RTLA50 absolute linear encoder scale system for EVOLUTE

RTLA50 absolute linear encoder scale system for EVOLUTE L-917-9628-02-B RTLA0 absolute linear encoder scale system for EVOLUTE The range of RTLA0 absolute linear encoder scales from Renishaw give ±10 µm/m accuracy in the form of a rugged and easy-to-handle

More information

R30D RVDTs DC-Operated Rotary Variable Differential Transformers

R30D RVDTs DC-Operated Rotary Variable Differential Transformers R30D RVDTs DC-Operated Rotary Variable Differential Transformers RVDTs incorporate a proprietary noncontact design that dramatically improves long term reliability when compared to other traditional rotary

More information

RESOLUTE UHV absolute optical encoder

RESOLUTE UHV absolute optical encoder L-9517-9530-01-L RESOLUTE UHV absolute optical encoder Clean RGA Low outgassing rate Bake-out temperature of 120 C True absolute non-contact optical encoder system: no batteries required Wide set-up tolerances

More information

Sapphire FP. Fiber Pigtailed Lasers from Deep Blue to Orange FEATURES

Sapphire FP. Fiber Pigtailed Lasers from Deep Blue to Orange FEATURES Sapphire FP Fiber Pigtailed Lasers from Deep Blue to Orange Sapphire FP is a series of true fiber-pigtailed lasers based on Coherent s unique OPSL (Optically Pumped Semiconductor Laser) technology. OPSL

More information

High accurate metrology on large surface areas with low reflectivity

High accurate metrology on large surface areas with low reflectivity THE 11 th INTERNATIONAL SYMPOSIUM OF MEASUREMENT TECHNOLOGY AND INTELLIGENT INSTRUMENTS July 1 st -5 th 2013 / 1 High accurate metrology on large surface areas with low reflectivity Bastian L. Lindl 1,*

More information

H-824 Hexapod Microrobots

H-824 Hexapod Microrobots Technical Note BRo, Contents H-824 Hexapod Microrobots Introduction... 1 Precision-Class 6-Axis Positioning System... 1 Model Overview... 1 Recommended Controller (to be ordered separately)... 1 Other

More information

Optical Kit Encoder Page 1 of 5. Description. Features

Optical Kit Encoder Page 1 of 5. Description. Features Description Page 1 of 5 The E5 Series rotary encoder has a molded polycarbonate enclosure with either a 5-pin or 10-pin latching connector. This optical incremental encoder is designed to easily mount

More information

Resolution, Accuracy and Repeatability

Resolution, Accuracy and Repeatability Engineering Reference Resolution, Accuracy, and Repeatability Resolution, Accuracy and Repeatability Accuracy For a specific point of interest in threedimensional space, accuracy is the difference between

More information

Ndrive Series. Digital Servo Amplifiers. Wide output power range from 10 A peak to 150 A peak at 320 VDC. 2- or 3-phase AC line input or DC input

Ndrive Series. Digital Servo Amplifiers. Wide output power range from 10 A peak to 150 A peak at 320 VDC. 2- or 3-phase AC line input or DC input Series Amplifiers/Drives Series Digital Servo Amplifiers Wide output power range from A peak to 150 A peak at 320 VDC 2- or 3-phase AC line input or DC input CE approval PWM and linear power stages HP

More information

Contents: Movement & Positioning News M&P 23, 1997, Text Only Version

Contents: Movement & Positioning News M&P 23, 1997, Text Only Version Contents: Sub-Nanometer Measurements Revolutionary 6-Axis Manipulator Hexapod Robot Improved Digital Piezo Controller Modular PZT Flexure Stages PZT Multilayer Benders for Fiberoptic Switching Windows

More information

Ultrasonic Fine Wirebonder

Ultrasonic Fine Wirebonder Ultrasonic Fine Wirebonder F & K Model 2017 F & K DELVOTEC the Fine Wirebonder specialist delivers the perfect solution for any bonding challenge in the automotive, opto-electronics, hybrid technology,

More information

Ultrasonic Fine Wirebonder

Ultrasonic Fine Wirebonder Ultrasonic Fine Wirebonder F & K Model 2017 F & K DELVOTEC the Fine Wirebonder specialist delivers the perfect solution for any bonding challenge in the automotive, opto-electronics, hybrid technology,

More information