M-DVRT Microminiature Displacement Sensor

Transcription

1 LORD PRODUCT DATASHEET M-DVRT Microminiature Displacement Sensor Ideal for critical linear displacement measurements, the Microminiature DVRT delivers high performance in a tiny package. Advanced materials and electronics have resulted in a rugged, fast, and sensitive instrument, capable of submersion in aqueous environments. The Microminiature DVRT features micron- to-sub-micron resolution, linear analog output, flat dynamic response to khz levels, and very low temperature coefficients. Its free-sliding cores are extremely lightweight and utilize flexible, elastic, bio-compatible alloys to provide resistance to kinking and permanent deformation. Features & Benefits High Performance micron resolution with large stroke/size ratio frictionless design for robust use over millions of cycles suitable for use in harsh fluids and environments Ease of Use world s smallest linear displacement sensor plug and play usability easily customized to suit specific requirements signal conditioning options for any application Applications Process Control for Production-Line Monitoring Miniature Position Control Elements Linear & Angular Motion Control Measuring Strain and Deflection in Materials and Structures Dimensional Gauging for Quality Control System Overview Sensor Design Core position is detected by measuring the coils differential reluctance using a sine wave excitation and synchronous demodulator. This differential detection method provides a very sensitive measure of core position while cancelling out temperature effects. The transducers coils and Teflon cables are sealed in vacuum-pumped epoxy, within the stainless-steel case. This provides outstanding environmental resistance. The DVRT has been successfully employed in harsh applications, including short term immersion in saline and pressurized oil. Units available for long term immersion, corrosive and high pressure environments can be custom built to meet such requirements. LORD MicroStrain s desktop consoles and in-line signal conditioners provide the Microminiature DVRT with plug and play housing, power, analog output, LCD display, RS-232 output and software. A range of modular positioning attachments and custom strokes are also available.

2 M-DVRT Microminiature Displacement Sensor Specifications Electrical Specifications Obtained using DEMOD-DVRT and DVRT with 800 Hz low pass filter at constant temperature Linear Stroke Lengths Accuracy Sensitivity Signal to noise Resolution Frequency response 3, 6 & 9 mm (standard version) 1.5 mm (high resolution version ± 1.5% using straight line ± 0.1% using polynomial DEMOD output/sensor range 2000 to 1 (with filter 3 db down at 800 Hz, standard); 600 to 1 (unfiltered) noise measured peak to peak 1.5 µm for 3 mm stroke 3.0 µm for 6 mm stroke 4.5 µm for 9 mm stroke 300 nm for high resolution version 800 Hz standard, 20 khz optional Temperature coefficient offset %/ C (typical) span 0.030%/ C (typical) Hysteresis Repeatability ±1 micron ± 1 micron Mechanical Specifications Overall body length Outside diameter Housing material Attachment method Leadouts Connector 11.3 mm for 3 mm stroke 18.7 mm for 6 mm stroke 26.8 mm for 9 mm stroke 11.3 mm for high resolution version 1.5 mm (standard version) 1.8 mm (high resolution) smooth 316 stainless steel; 4-40, 6-32 & series stainless steel imperial threaded body options M3x0.5-6g, M3.5x0.6-6g, & M4x0.7-6g 400 series stainless steel metric threaded body options threaded body Operating temperature -55 to 175 C 45 cm, multi stranded, shielded, stainless steel reinforced, Teflon insulated keyed 4-pin Lemo, polyolefin relief Core weight 3 mm: 0.06 g, 6 mm: 0.07 g, 9 mm: 0.07 g, 1.5 mm: 0.06 g Core material diameter super elastic NiTi alloy, thread optional Cable diameter Copyright 2013 LORD MicroStrain MicroStrain, S-DVRT, SG-DVRT, M-DVRT MG-DVRT, NC-DVRT, DEMOD-DC and DEMOD-DVRT are trademarks of LORD MicroStrain, Specifications are subject to change without notice. Version rev. 001 ZSE Electronic Mess-Systeme & Sensortechnik GmbH In den Freßäckern 28 D Bietigheim-Bissingen Telefon: Fax: info@zse.de -

3 LORD PRODUCT DATASHEET MG- DVRT Microminiature Gauging Displacement Sensor Designed specifically for tight spaces, the Microminiature Gauging DVRT delivers high performance in a tiny package. A sapphire bearing and ruby ball guide the spring-loaded tip, providing an exceptionally smooth static and dynamic response. The Microminiature Gauging DVRT features micron-to-sub-micron resolution, linear analog output, flat dynamic response to khz levels, and very low temperature coefficients. Extremely lightweight, captive cores are tiny yet rugged. Superelastic, corrosion-resistant alloys provide resistance to kinking and permanent deformation, and allow complete submersion of the instrument Features & Benefits High Performance micron resolution with large stroke/size ratio gauging pin enables measurement on moving parts frictionless design for robust use over millions of cycles suitable for use in harsh fluids and environments Ease of Use world s smallest linear displacement sensor plug and play usability easily customized to suit specific requirements signal conditioning options for any application Applications Process Control for Production-Line Monitoring Miniature Position Control Elements Linear & Angular Motion Control Measuring Strain and Deflection in Materials and Structures Dimensional Gauging for Quality Control System Overview Sensor Design Core position is detected by measuring the coils differential reluctance using a sine wave excitation and synchronous demodulator. This differential detection method provides a very sensitive measure of core position while cancelling out temperature effects. The transducers coils and Teflon cables are sealed in vacuum-pumped epoxy, within the stainless-steel case. This provides outstanding environmental resistance. The DVRT has been successfully employed in harsh applications, including short term immersion in saline and pressurized oil. Units available for long term immersion, corrosive and high pressure environments can be custom built to meet such requirements. LORD MicroStrain s desktop consoles and in-line signal conditioners provide the Microminiature Gauging DVRT with plug and play housing, power, analog output, LCD display, RS-232 output and software. A range of modular positioning attachments and custom strokes are also available.

4 MG- DVRT Microminiature Gauging Displacement Sensor Specifications Electrical Specifications Obtained using DEMOD-DVRT and DVRT with 800 Hz low pass filter at constant temperature Linear Stroke Lengths Accuracy Sensitivity Signal to noise Resolution Frequency response Temperature coefficient Hysteresis Repeatability 3, 6 & 9 mm (standard version) 1.5 mm (high resolution version) ± 1.0% using straight line ± 0.1% using polynomial DEMOD output/sensor range 2000 to 1 (with filter 3 db down at 800 Hz, standard); 600 to 1 (unfiltered) noise measured peak to peak 1.5 µm for 3 mm stroke 3.0 µm for 6 mm stroke 4.5 µm for 9 mm stroke 300 nm for high resolution version 800 Hz standard, 20 khz optional offset %/ C (typical) span 0.030%/ C (typical) ± 1 micron ± 1 micron Mechanical Specifications Overall body length Outside diameter Spring stiffness Bearing materials Standard core tips Housing material Attachment method Leadouts Connector 24 mm for 3 mm stroke 40 mm for 6 mm stroke 50 mm for 9 mm stroke 24 mm for high res version 1.8 mm (smooth body) Operating temperature -55 to 175 C Core material Cable diameter Newtons/mm (1 lb/inch) sapphire on stainless steel 1.5 mm sapphire ball, 1.5 mm sapphire cup 316 stainless steel, smooth body; 8-32, 400 series stainless steel imperial threaded body; M4x0.7-6g, 400 series steel metric threaded body clamping collar or threaded body 45 cm multistranded, shielded, stainless steel reinforced, Teflon insulated keyed Lemo 4-pin, polyolefin relief superelastic NiTi alloy Copyright 2013 LORD MicroStrain MicroStrain, S-DVRT, SG-DVRT, M-DVRT MG-DVRT, NC-DVRT, DEMOD-DC and DEMOD-DVRT are trademarks of LORD MicroStrain, Specifications are subject to change without notice. Version rev. 001 ZSE Electronic Mess-Systeme & Sensortechnik GmbH In den Freßäckern 28 D Bietigheim-Bissingen Telefon: Fax: info@zse.de -

5 LORD PRODUCT DATASHEET S- DVRT Subminiature Displacement Sensor Ideal for linear control and precision measurement applications, the Subminiature DVRT provides fast response and rugged packaging. The Subminiature DVRT features micron resolution, linear analog output, flat dynamic response to khz levels, and very low temperature coefficients. Its free sliding transducer core is lightweight, strong, and corrosion resistant. Cores are precision ground to insure a close sliding fit within the open bore of the stainlesssteel lined DVRT body. This precision allows the DVRT to achieve extremely high repeatability. The sensing head is capable of total submersion in aqueous environments. Features & Benefits High Performance sub-micron resolution with large stroke/size ratio frictionless design for robust use over millions of cycles suitable for use in harsh fluids and environments high dynamic range for difficult measurements Ease of Use plug and play usability easily customized to suit specific requirements signal conditioning options for any application Applications Process Control for Production-Line Monitoring Miniature Position Control Elements Linear & Angular Motion Control Measuring Strain and Deflection in Materials and Structures Dimensional Gauging for Quality Control System Overview Sensor Design Core position is detected by measuring the coils differential reluctance using a sine wave excitation and synchronous demodulator. This differential detection method provides a very sensitive measure of core position while cancelling out temperature effects. The transducers coils and Teflon cables are sealed in vacuum-pumped epoxy, within the stainless-steel case. This provides outstanding environmental resistance. The DVRT has been successfully employed in harsh applications, including short term immersion in saline and pressurized oil. Units available for long term immersion, corrosive and high pressure environments can be custom built to meet such requirements. LORD MicroStrain s desktop consoles and in-line signal conditioners provide the Subminiature DVRT with plug and play housing, power, analog output, LCD display, RS-232 output and software. A range of modular positioning attachments and custom strokes are also available.

6 S- DVRT Subminiature Displacement Sensor Specifications Electrical Specifications Obtained using DEMOD-DVRT and DVRT with 800 Hz low pass filter at constant temperature Linear Stroke Lengths Accuracy Sensitivity Signal to noise Resolution Frequency response 4, 8, 24, 38 mm (standard resolution) 6 mm (high resolution) 500 µm or less (nano resolution) ± 1.0 % using straight line ± 0.1 % using polynomial DEMOD output / sensor range 4200 to 1 (with filter 3 db down at 800 Hz, standard resolution), 466 to 1 (unfiltered) 1.0 µm for 4 mm stroke 2.0 µm for 8 mm stroke 6.0 µm for 24 mm stroke 9.5 µm for 38 mm stroke 0.6 µm for high resolution version 125 nm for nano resolution version (up to 10 nm resolution is possible with customized sensor range and electronics) 800 Hz standard, 20 KHz optional Temperature coefficient offset 0.002% / C (typical) span 0.030% / C (typical) Hysteresis Repeatability ± 1 micron ± 1 micron Mechanical Specifications Overall body length Outside diameter Housing material Attachment method Leadouts Connector Operating temperature 18.5 mm for 4 mm stroke 34.5 mm for 8 mm stroke 81 mm for 24 mm stroke 110 mm for 38 mm stroke 34.5 mm for high res version 34.5 mm for nano version 4.76 mm (3/16 inch) 300 stainless steel, smooth; 5/16-24 UNF threaded 400 stainless steel (optional); M8x1.25-6g threaded 400 stainless steel (optional) optional: magnetic mounting block, threaded body, clamping collar 45 cm multistrand, shielded, stainless steel reinforced teflon insulated cable keyed 4 pin Lemo, polyolefin relief -55 to 175 C Core weight 500 µm: 0.04 g, 4 mm: 0.04 g, 6 mm: 0.04 g, 24 mm: 1.62 g, 38 mm: 1.67 g Core material Cable diameter stainless steel Contact us for information on custom designs suitable for immersion, corrosive and high pressure environments. Copyright 2013 LORD MicroStrain MicroStrain, S-DVRT, SG-DVRT, M-DVRT MG-DVRT, NC-DVRT, DEMOD-DC and DEMOD-DVRT are trademarks of LORD MicroStrain, Specifications are subject to change without notice. Version rev. 001 ZSE Electronic Mess-Systeme & Sensortechnik GmbH In den Freßäckern 28 D Bietigheim-Bissingen Telefon: Fax: info@zse.de -

7 LORD PRODUCT DATASHEET SG- DVRT Subminiature Gauging Displacement Sensor Designed specifically for tight spaces, the Subminiature Gauging DVRT delivers high performance in a small package. A ruby bearing and hardened stainless steel ball guide the spring-loaded tip, providing an exceptionally smooth static and dynamic response and resistance to side load. The Subminiature Gauging DVRT feature sub-micron resolution, linear analog output, flat dynamic response to khz levels, and very low temperature coefficients. Extremely lightweight, captive cores are small and rugged. Manufactured using corrosion-resistant alloys, Subminiature Gauging DVRT are suitable for short term submersion in harsh media such as brake fluid and hot saline. Features & Benefits High Performance micron resolution with large stroke/size ratio gauging pin enables measurement on moving parts frictionless design for robust use over millions of cycles suitable for use in harsh fluids and environments Ease of Use plug and play usability easily customized to suit specific requirements signal conditioning options for any application Applications Process Control for Production-Line Monitoring Miniature Position Control Elements Linear & Angular Motion Control Measuring Strain and Deflection in Materials and Structures Dimensional Gauging for Quality Control System Overview Sensor Design Core position is detected by measuring the coils differential reluctance using a sine wave excitation and synchronous demodulator. This differential detection method provides a very sensitive measure of core position while cancelling out temperature effects. The transducers coils and Teflon cables are sealed in vacuum-pumped epoxy, within the stainless-steel case. This provides outstanding environmental resistance. The DVRT has been successfully employed in harsh applications, including short term immersion in saline and pressurized oil. Units available for long term immersion, corrosive and high pressure environments can be custom built to meet such requirements. LORD MicroStrain s desktop consoles and in-line signal conditioners provide the Subminiature Gauging DVRT with plug and play housing, power, analog output, LCD display, RS-232 output and software. A range of modular positioning attachments and custom strokes are also available.

8 SG- DVRT Subminiature Gauging Displacement Sensor Specifications Electrical Specifications Obtained using DEMOD-DVRT and DVRT with 800 Hz low pass filter at constant temperature Linear Stroke Length Accuracy Sensitivity Signal to noise Resolution Frequency response Temperature coefficient Hysteresis Repeatability 4, 8, 24, 38 mm (standard resolution) 6 mm (high resolution) 500 µm or less (nano resolution) ± 1.0 % using straight line ± 0.1 % using polynomial DEMOD output/sensor range 4200 to 1 (with filter 3 db down at 800 Hz, standard resolution), 466 to 1 (unfiltered) 1.0 µm for 4 mm stroke 2.0 µm for 8 mm stroke 6.0 µm for 24 mm stroke 9.5 µm for 38 mm stroke 0.6 µm for high resolution version 125 nm for nano resolution version (up to 10 nm resolution is possible with customized sensor range and electronics) 800 Hz standard, 20 KHz optional offset 0.002% / C (typical span 0.030% / C (typical) ± 1 micron ± 1 micron Mechanical Specifications Overall body length Outside diameter Spring stiffness Bearing material Standard core tip Housing material Attachment method Leadouts Connector Operating temperature Core material 30.5 mm for 4 mm stroke 50.5 mm for 8 mm stroke 127 mm for 24 mm stroke 183 mm for 38 mm stroke 50.5 mm for high res version 50.5 mm for nano version 6.0 mm (smooth body)8.0 mm for 38 mm stroke 0.2 N/mm (1 lb/in) sapphire and stainless steel 4.76 mm stainless steel ball 400 stainless steel smooth body; 400 stainless steel 3/8-24 UNF thread (38 mm stroke has 7/16-20 UNF thread); 400 stainless steel M10x1.5-6g metric thread (38mm stroke has M11x1.5-6g metric thread) threaded body 45 cm multistrand, shielded, stainless steel reinforced teflon insulated cable keyed 4 pin Lemo, polyolefin relief -55 to 175 C Cable diameter stainless steel Contact us for information on custom designs suitable for immersion, corrosive and high pressure environments. Copyright 2013 LORD MicroStrain MicroStrain, S-DVRT, SG-DVRT, M-DVRT MG-DVRT, NC-DVRT, DEMOD-DC and DEMOD-DVRT are trademarks of LORD MicroStrain, Specifications are subject to change without notice. Version rev. 001 ZSE Electronic Mess-Systeme & Sensortechnik GmbH In den Freßäckern 28 D Bietigheim-Bissingen Telefon: Fax: info@zse.de -

9 LORD PRODUCT DATASHEET NC- DVRT Non-Contact Displacement Sensor Ideal for difficult sensing applications, the Non-Contact DVRT is designed to measure the displacement and proximity of a metal target without physical contact. The measurement is unaffected by interposed nonmetallic, nonconductive materials, such as polymers and biomaterials. The stainless shell of the device houses two coils; one for sensing and the other for temperature compensation. The coils and Teflon cable are mounted on a stable PEEK substrate. This assembly is potted into the stainless housing using highgrade, vacuum-pumped epoxy and includes integral strain relief. This packaging allows the sensor to be used in applications requiring long-term immersion in water and saline solutions. Features & Benefits High Performance sub-micron resolution with large stroke/size ratio high dynamic range for difficult measurements Ease of Use non-contact position measurement plug and play usability easily customized to suit specific requirements signal conditioning options for any application Applications Process Control for Production-Line Monitoring Miniature Position Control Elements Linear & Angular Motion Control Measuring Strain and Deflection in Materials and Structures Dimensional Gauging for Quality Control System Overview Sensor Design Two coils within the Non-Contact DVRT housing form its sensing and compensation elements. When the face of the transducer is brought into close proximity to a ferrous or highly conductive target material, the reluctance of the sense coil is changed, while the compensation coil acts as a reference. The coils are driven by a high-frequency sine wave excitation and their differential reluctance is measured using a synchronous demodulator. Differencing the two coils outputs provides a sensitive measure of the position signal, while cancelling out variations caused by temperature. Ferrous targets change the sense coils reluctance by altering the magnetic circuit s permeability; conductive targets (such as aluminum operate by the interaction of eddy currents induced in the target s skin with the field around the sense coil. LORD MicroStrain s desktop consoles and in-line signal conditioners provide the Non-Contact DVRT with plug and play housing, power, analog output, LCD display, RS-232 output and software. Custom ranges are available on request.

10 NC- DVRT Non-Contact Displacement Sensor Specifications Electrical Specifications (Obtained using DEMOD-DVRT and DVRT with 800 Hz low pass filter at constant temperature) Measurement range NC-DVRT-1.0 NC-DVRT mm 2.5 mm Mechanical Specifications Size NC-DVRT -1.0 NC-DVRT -2.5 diameter x length (thread) 4.83 mm x 19.0 mm (10-32 UNF-2A ) mm x 19.0 mm (½-20 UNF 2A) Accuracy Sensitivity Signal to noise Resolution Frequency response Temperature coefficient Hysteresis Repeatability ±0.2 to ±1% with polynomial calibration DEMOD output/sensor range standard to 1with filter 3dB down at 800 Hz dependent upon displacement area 800 Hz standard, 20 KHz optional offset %/ C (typical) span 0.016%/ C (typical) dependent on target material ±2 microns (typical) ±2 µm (typical) at constant temperature Housing material Attachment method Leadouts Connector Operating temperature 300 series stainless steel threaded stainless nuts 45 cm, shielded, teflon insulated, stainless wire reinforced, multistrand conductors keyed 4-pin Lemo, polyolefin relief -55 to 175 C Cable diameter to Contact us for information on custom designs suitable for immersion, corrosive and high pressure environments. Copyright 2013 LORD MicroStrain MicroStrain, S-DVRT, SG-DVRT, M-DVRT MG-DVRT, NC-DVRT, DEMOD-DC and DEMOD-DVRT are trademarks of LORD MicroStrain, Specifications are subject to change without notice. Version rev. 001 ZSE Electronic Mess-Systeme & Sensortechnik GmbH In den Freßäckern 28 D Bietigheim-Bissingen Telefon: Fax: info@zse.de -

11 LORD PRODUCT DATASHEET DEMOD-DC Miniature In-Line Signal Conditioner The DEMOD-DC in-line signal conditioner makes DVRT sensors as easy to use as a potentiometer. With integral signal conditioning electronics, the user connects power, ground and analog out, and the DEMOD-DC outputs a buffered, high-frequency response voltage proportional to linear position. During the manufacturing process the analog output voltage is digitally trimmed, ensuring that every DVRT s offset and gain values match one another. The DEMOD-DC provides internal power regulation and reverse polarity protection, and will operate with a wide range of input voltages. Features & Benefits Ease of Implementation out-of-the-box use with all standard LORD MicroStrain DVRT sensors miniature body for embedded and space restricted applications identical performance between units for quick scaling High Performance high dynamic range for difficult measurements ready for use with LORD MicroStrain wireless sensor network Applications Invivo Strain, Micromotion and deformation in Bone & Tissue Process Control for Production-Line Monitoring Miniature Position Control Elements Linear & Angular Motion Control Measuring Strain and Deflection in Materials and Structures Dimensional Gauging for Quality Control System Overview Operating from a DC power supply, the DEMOD-DC Miniature In-line Signal Conditioner filters incoming transients from the power supply, and supplies a sine wave excitation to the DVRT. This excitation is used to measure minute impedance changes of the sensing elements. Precision demodulator components provide rectification and differential amplification. Digital trimming ensures conformity from sensor to sensor. The analog output is filtered and buffered to provide clean, high level signals. The DEMOD-DC is recommended for use with all standard LORD MicroStrain DVRT where a lower cost and smaller size signal conditioner is required. If the sensor is expected to be exposed to thermal gradients across its sensing coils (its body), the temperature compensated DEMOD-DVRT -TC is recommended. Additionally, if the LORD MicroStrain DVRT has been customized and built with one coil, the DEMOD-DVRT -TC is again recommended. Typically, a DEMOD-DC is ordered with a specific LORD MicroStrain DVRT and sold as a pair. The pair is calibrated together at the factory and delivered with a common calibration certificate. This paired calibration ensures accurate performance in the user s hands. The certificate provides several output calculations including Linear Fit, Multi- Segment Fit and Polynomial Fit.

12 DEMOD-DC Miniature In-Line Signal Conditioner Specifications Sensor Types Excitation Demodulation Output inductive (DVRT ) regulated sinewave, 150 khz standard other frequencies available on request asynchronous, DC output 0 to 5 V typical, digitally trimmed Gain factory adjustable from 10 to 10,000 Low pass filter Supply voltage Supply current Warm-up time 2 Pole, 3 db 800 Hz standard factory adjustable 10 Hz 20 khz to + 16 volts DC 22 ma typical (15 ma when modified for use with LORD MicroStrain V-Link or DVRT-Link wireless nodes) 30 seconds recommended Operating temperature -40 to +85 C Enclosure size Connections Connector Weight 65.7 mm x 19.9 mm x 8.3 mm power, ground, analog output micro-d (MIL-C-83513/5) mating connector included g Copyright 2013 MicroStrain MicroStrain, S-DVRT, SG-DVRT, M-DVRT MG-DVRT, NC-DVRT, DEMOD-DC and DEMOD-DVRT are trademarks of MicroStrain, Specifications are subject to change without notice. Version rev. 001 ZSE Electronic Mess-Systeme & Sensortechnik GmbH In den Freßäckern 28 D Bietigheim-Bissingen Telefon: Fax: info@zse.de -

13 LORD DATASHEET DEMOD-DVRT -2 Displacement Sensor Signal Conditioner Product Highlights Accurate, repeatable signal processing for LORD MicroStrain DVRTs Modular form-factor for stand-alone single sensor use or use in a four-channel backplane with optional DIN-rail mount Filtered and buffered output provides clean, high-level signals to coaxial connections DEMOD-DVRT -2 - stackable signal conditioner designed for high-performance analog acquisition from LORD MicroStrain DVRT sensors. LORD MicroStrain Differential Variable Reluctance Transducer (DVRT ) systems enable precise micro-position measurement for a wide variety of applications. From slow, slight movements over time to high frequency vibration, the DVRT system provides accurate, repeatable measurement. Each system consists of a sensor, cable, and signal conditioning module that are calibrated as one unit to ensure accuracy is maintained through the entire sensing solution. They are calibrated using a linear fit, multi-segment fit, and a polynomial fit, so interpretation of the measurements can be scaled to best suit the application requirements. A wide selection of inductive contact, non-contact, slide, and spring-actuated sensors are available in various stroke lengths. All have a very high linear stroke to body length ratio and fit in spaces where traditional LVDT's are too large. The sensors are robust and capable of operating in extreme heat and corrosive environments over millions of cycles without degradation in performance. LORD MicroStrain offers three versions of signal conditioners including a stackable module for multi-sensor applications; a compact, lower-cost, module; and a temperature-compensated module for sensors with temperature gradients. Available data outputs include analog voltage, serial, and wireless data transmission. Features and Benefits High Performance Precision synchronous demodulation Paired and calibrated with each DVRT sensor for high accuracy outputs Line voltage transient filtering and constant current excitation source to the sensor bridge Easy to Use Factory-adjustable output filtering and calibration-model options to match application needs Rapid warm-up time Analog backplane available for connection optimization Cost Effective Complete solution with no integration to other systems required Volume discounts Applications Linear and angular position measurements Strain, deflection, and deformation measurements Motion and position control Dimensional gauging World's Smallest Displacement Transducers!

14 DEMOD-DVRT -2 Displacement Sensor Signal Conditioner Signal Conditioner Specifications Sensor Input channels Demodulation Sensor excitation Analog output voltage Output gain Analog low pass filter Power source Power consumption Power indicator General Single channel, inductive DVRT Sensor Input channel Synchronous, DC output Alternating constant current, 156 khz typical Analog Output 0 to 10 V dc (standard), 0 to 5 V dc (optional) Adjustable from 14 to 10,000 (factory set during calibration) Two-pole, active Butterworth, Hz (standard), factory adjustable 10 Hz to 20 khz Operating Parameters 12 V dc nominal ± 1 V dc (Universal voltage wall AC/DC converter provided) 30 ma Green power on indicator Operating temperature -20 C to +60 C Device warm-up time Dimensions Weight Enclosure material Environmental rating Mounting Connectors Sensor cable Compatible sensors Analog backplane Regulatory compliance 5 minutes recommended Physical Specifications 70 mm x 95 mm x 20 mm 113 grams Black anodized aluminum Indoor use Desktop with rubber feet (standard), analog backplane (optional) Integration Center-positive DC barrel socket (power supply); 4 pin receptacle (sensor input); HDBNC (analog output); backplane connector 4-pin receptacle to 4-pin mini, calibrated with sensor and signal conditioner LORD MicroStrain DVRT sensors Four channel bus (see backplane specifications) CE, ROHS Analog Backplane Specifications Input channels Power source Dimensions Mounting Connectors General Four channels, DEMOD-DVRT -2 modules Operating Parameters 9 to 32 V dc Physical Specifications 70 mm x 95 mm x 105 mm Desktop with rubber feet (standard), DIN rail mount (optional) Integration Center-positive DC barrel socket (power supply); backplane module connectors; screw terminal (analog outputs) DEMOD-DVRT -2 - Signal conditioner block diagram and physical dimensions Analog Backplane - Mounting bus for up to four DEMOD-DVRT -2 signal conditioners to optimize power distribution and connectivity Copyright 2015 LORD Corporation Document Revision A. Subject to change without notice. ZSE Electronic Mess-Systeme & Sensortechnik GmbH In den Freßäckern 28 D Bietigheim-Bissingen Telefon: Fax: info@zse.de -

15 LORD PRODUCT DATASHEET DEMOD- DVRT Signal Conditioner Designed for ease of use and general versatility, this printed circuit card provides complete conditioning for any of LORD MicroStrain s DVRT sensors. Each card contains all the requisite components to facilitate plug-and-play use, including active, jumper selectable low pass filters, input supply line filters with reverse input protection, and output line buffers. The DEMOD-DVRT sine wave excitation and synchronous demodulator provide excellent noise rejection and elimination of thermally induced potentials. Features & Benefits High Performance temperature compensated signal conditioning precision synchronous demodulation rapid warm-up time Ease of Use plug-and-play with LORD MicroStrain motherboards compatible with all LORD MicroStrain DVRT sensors adjustable trimmers to set resolution range Applications Used with LORD MicroStrain DVRT sensors for: Invivo Strain, Micromotion and deformation in Bone & Tissue Process Control for Production-Line Monitoring Miniature Position Control Elements Linear & Angular Motion Control Measuring Strain and Deflection in Materials and Structures Dimensional Gauging for Quality Control System Overview Operating from a DC power supply, the DEMOD-DVRT Signal Conditioner filters incoming transients from the line voltage, and supplies a pure sine wave excitation to the transducer s bridge. This excitation is used to measure minute impedance changes of the sensing elements. A differential amplifier raises AC input voltages in order to provide optimum demodulator performance. The output is filtered and buffered to provide clean, high level signals over coaxial cable. The DEMOD-DVRT is recommended for use with all standard LORD MicroStrain DVRT where the temperature is expected to uniformly change across the sensor itself. If the sensor is expected to be exposed to thermal gradients across its sensing coils (its body), the temperature compensated DEMOD-DVRT -TC is recommended. Typically, a DEMOD-DVRT is ordered with a specific LORD MicroStrain DVRT and sold as a pair. The pair is calibrated together at the factory and delivered with a common calibration certificate to ensure accurate performance in the user s hands. The certificate provides several output calculations including Linear Fit, Multi-Segment Fit and Polynomial Fit. LORD MicroStrain s Motherboard products are designed to house 1 to 8 DEMOD-DVRT. The Motherboards have a desktop console form factor and provide a plug-and-play chassis. The Motherboard variously provides power, grounding, multiplexing, analog-to-digital conversion, configuration, analog output, RS-232 output and LCD display.

16 DEMOD- DVRT Signal Conditioner Specifications Sensor types Excitation Demodulation Output inductive (DVRT ) regulated sinewave, 70 KHz typical synchronous, DC output ± 4.5 volts typical Gain factory adjustable 10-10,000 Low pass filter Supply voltage Supply current Warm-up time Operating temperature PC board Size Connectors Trimmers 2 pole, active Butterworth, 3 db 1 KHz standard; factory adjustable 10 Hz-8 Khz motherboard supplies power (typical), ± 6.5 volts min, ± 16 volts max (when used without motherboard) 30 milliamps per rail 15 minutes recommended -40 to +85 C 120mm x 48mm x 20mm (thick) 10 pin,.1" pitch header (power, ground); LEMO 4 pin receptacle (bridge points); BNC (analog output) offset (std.) Copyright 2013 LORD Corporation MicroStrain, S-DVRT, SG-DVRT, M-DVRT MG-DVRT, NC-DVRT, DEMOD-DC and DEMOD-DVRT are trademarks of LORD corporation. Specifications are subject to change without notice. Version rev. 001 ZSE Electronic Mess-Systeme & Sensortechnik GmbH In den Freßäckern 28 D Bietigheim-Bissingen Telefon: Fax: info@zse.de -

17 LORD PRODUCT DATASHEET DEMOD- DVRT -TC Temperature Compensated Signal Conditioner Designed for ease of use and general versatility, this printed circuit card provides complete temperature compensated conditioning for any sensors. The DEMOD-DVRT -TC utilizes both alternating current and direct current excitation of the sensor s inductive bridge to accurately measure position in the face of temperature gradients. Each card contains the requisite components to facilitate plug-and-play use, including active, jumper selectable low pass filters, input supply line filters with reverse input protection, and output line buffers. The DEMOD-DVRT -TC sine wave excitation and synchronous demodulator provide excellent noise rejection and elimination of thermally induced potentials. Features & Benefits High Performance temperature compensated signal conditioning precision synchronous demodulation rapid warm-up time Ease of Use plug-and-play with LORD MicroStrain motherboards compatible with all LORD MicroStrain DVRT sensors adjustable trimmers to set resolution range Applications Used with LORD MicroStrain DVRT sensors for: Invivo Strain, Micromotion and deformation in Bone & Tissue Process Control for Production-Line Monitoring Miniature Position Control Elements Linear & Angular Motion Control Measuring Strain and Deflection in Materials and Structures Dimensional Gauging for Quality Control System Overview Many oscillator/demodulator type signal conditioners for use with half bridge LVDT, LORD MicroStrain DVRT and noncontacting variable reluctance/eddy current sensors have relied on the use of two coils arranged in a differential manner to amplify position and to cancel temperature effects. However, this method of compensation is only effective when both coils experience the same temperatures simultaneously. In practice, thermal gradients commonly occur across sensing coils, resulting in a difference in the sensing coil s resistance as compared to the reference coil. The DEMOD-DVRT -TC Temperature Compensated Signal Conditioner overcomes this limitation by injecting both AC and DC excitation into the coils, and demodulating the AC component of the bridge signal separately from the DC component. The differential signal produced by the bridge in response to the DC excitation is amplified and subtracted from the demodulated (and amplified) AC response. The resulting output is free from temperature gradient errors. Linear plunger type and noncontacting inductive sensors are now available in very small diameters (<1 mm), and single coil sensors possess nearly 1:1 body length-to-stroke ratios, without sacrificing thermal stability. LORD MicroStrain Motherboard products are designed to house the DEMOD-DVRT -TC. The Motherboards have a desktop console form factor and provide a plug-and-play chassis. The Motherboard variously provides power, grounding, multiplexing, analog-to-digital conversion, configuration, analog output, RS-232 output and LCD display. Motherboards can support 1 to 8 DEMOD-DVRT -TC, have a small footprint, and operate within a wide temperature range.

18 DEMOD- DVRT -TC Temperature Compensated Signal Conditioner Specifications Compensates for a temperature gradient across the sensor Sensor types Excitation Demodulation Output inductive (DVRT ) regulated sinewave, 70 KHz typical synchronous, DC output ± 4.5 volts typical Gain factory adjustable 10-10,000 Low pass filter Supply voltage Supply current Warm-up time Operating temperature PC board size Connectors Trimmers 2 pole, active Butterworth, 3 db 1 KHz standard; factory adjustable 10 Hz-8 Khz motherboard supplies power (typical), ± 6.5 volts min, ± 16 volts max (when used without motherboard) 30 milliamps per rail 15 minutes recommended -40 to 85 C 120mm x 48mm x 20mm (thick) 10 pin,.1" pitch header (power, ground); LEMO 4 pin receptacle (bridge points); BNC (analog output) offset (std.) Copyright 2013 LORD Corporation MicroStrain, S-DVRT, SG-DVRT, M-DVRT MG-DVRT, NC-DVRT, DEMOD-DC and DEMOD-DVRT are trademarks of LORD corporation. Specifications are subject to change without notice. Version rev. 001 ZSE Electronic Mess-Systeme & Sensortechnik GmbH In den Freßäckern 28 D Bietigheim-Bissingen Telefon: Fax: info@zse.de -

19 LORD PRODUCT DATASHEET Motherboards Multichannel Signal Conditioner Enclosures LORD MicroStrain multichannel signal conditioner enclosures AKA Motherboards are designed to house our DEMOD- DVRT or DEMOD-DVRT -TC signal conditioner cards. The Motherboards have a desktop console form factor and provide a plug and play chassis for the cards. The Motherboards variously provide power, grounding, multiplexing, analog-to-digital conversion, configuration, analog output, RS-232 output and LCD display. Motherboards can support 1 to 8 signal conditioner cards, have a small footprint, and operate within a wide temperature range. Features & Benefits plug and play chassis for LORD MicroStrain DEMOD- DVRT and DEMOD-DVRT -TC signal conditioning cards compatible with all DVRT sensors small desktop footprint programmable LCD display available RS-232 interface and software available short warm up time operating temperature is -40 C to +85 C universal power supply including medical grade Applications Used with LORD MicroStrain DVRT sensors for: miniature control elements for automotive and robotic systems process control for production-line monitoring dimensional gauging for quality control applications measuring strain and deflection in materials science and civil structures linear/angular positioning of optical components miniature force, torque, acceleration sensors measuring strain, micromotion and deformation in bone and tissue System Overview Motherboards come in five different models: The MB-STD-4 houses 1 to 4 DEMOD-DVRT or DEMOD- DVRT -TC, and includes EMI/RFI chassis shielding, power supply and analog output. The MB-STD-8 houses 1 to 8 DEMOD-DVRT or DEMOD- DVRT -TC, and includes EMI/RFI chassis shielding, power supply and analog output. The MB-SMT-4 houses 1 to 4 DEMOD-DVRT or DEMOD- DVRT -TC, and includes multiplexer, 14 bit A/D converter, microprocessor, serial communication chip, power supply, EMI/RFI chassis shielding, analog output, RS-232 output, software and manual. The MB-SMT-8 houses 1 to 8 DEMOD-DVRT or DEMOD- DVRT -TC, and includes multiplexer, 14 bit A/D converter, microprocessor, serial communication chip, power supply, EMI/RFI chassis shielding, analog output, RS-232 output, software and manual. The MB-SMT-D houses 1 or 2 DEMOD-DVRT or DEMOD- DVRT -TC, and includes multiplexer, 14 bit A/D converter, microprocessor, serial communication chip, power supply, EMI/RFI chassis shielding, analog output, RS-232 output, programmable LCD display, software and manual.

20 Motherboards Multichannel Signal Conditioner Enclosures Specifications MB- STD-4 MB- STD-8 MB- SMT-4 MB- SMT-8 Number of DEMOD cards Supports all DVRT x x x x x 110 VAC power supply x x x x x 220 VAC power supply x x x x x 110 VAC medical grade power supply x x x x x Power indicator LED x x x x x Analog output x x x x x LCD display RS-232 output (digital) x x x RS-232 interface cable x x x Software XP/Vista/Win7 x x x Software devlopment kit x x x Dimensions 8 x 6-1/4 x 2-1/2 x x x x Dimensions 8 x 6-1/4 x 3-1/4 Operating temperature -40 C to +85 C x x x x x x MB-SMT- D x Copyright 2013 LORD MicroStrain MicroStrain, S-DVRT, SG-DVRT, M-DVRT MG-DVRT, NC-DVRT, DEMOD-DC and DEMOD-DVRT are trademarks of LORD MicroStrain, Specifications are subject to change without notice. Version rev. 001 ZSE Electronic Mess-Systeme & Sensortechnik GmbH In den Freßäckern 28 D Bietigheim-Bissingen Telefon: Fax: info@zse.de -

21 LORD DATASHEET DVRT-Link -LXRS Wireless Displacement Node Product Highlights Designed for a wide range of inductive displacement sensors including all LORD MicroStrain DVRT 's Wireless technology and a rechargeable battery make the DVRT-Link -LXRS ideal for remote, long-term monitoring of micro-miniature displacement measurements. User-programmable sample rates up to 4096 Hz Simultaneously transmit real-time data and log to memory. DVRT-Link -LXRS - specialized node designed for high performance data acquisition from inductive displacement sensors including all of the LORD MicroStrain DVRT sensors Features and Benefits High Performance Node-to-node synchronization up to ±32 microseconds Scalable, long range wireless sensor networks up to 2 km Lossless data throughput under most operating conditions LORD MicroStrain LXRS Wireless Sensor Networks enable simultaneous, high-speed sensing and data aggregation from scalable sensor networks. Our wireless sensing systems are ideal for sensor monitoring, data acquisition, performance analysis, and sensing response applications. The gateways are the heart of the LORD MicroStrain wireless sensing system. They coordinate and maintain wireless transmissions across a network of distributed wireless sensor nodes. The LORD MicroStrain LXRS wireless communication protocol between LXRS nodes and gateways enable highspeed sampling, ±32 microseconds node- to- node synchronization, transmission range up to 2 kilometers, and lossless data throughput under most operating conditions. Users can easily program nodes for data logging, continuous, and periodic burst sampling with the Node Commander software. The web- based SensorCloud interface optimizes data aggregation, analysis, presentation, and alerts for gigabytes of sensor data from remote networks. Ease of Use Low power consumption allows extended use. Remotely configure nodes, acquire and view sensor data with Node Commander. Optional web-based SensorCloud interface optimizes data storage, viewing, and analysis. Easy integration via comprehensive SDK Cost Effective Out-of-the box wireless sensing solution reduces development and deployment time. Volume discounts Applications Structural load and stress monitoring Production process monitoring Quality control Linear and angular positioning of optical components Robotics and machine control Wireless Simplicity, Hardwired Reliability

22 DVRT-Link -LXRS Wireless Displacement Node Specifications Sensor input channels Integrated sensors Data storage capacity Sensor excitation Low-pass filter Resolution Signal-to-noise ratio General Inductive displacement sensor,1 channel Internal temperature, 1 channel 2 M bytes (up to 1,000,000 data points, data type dependent) Displacement Sensor Input Regulated sine wave, 150 khz standard (other frequency options available) 250 Hz standard (factory configurable 10 Hz 20 khz) 12 bit 1,000 to 1 typical (factory calibrated with DVRT sensor) Integrated Temperature Channel Measurement Range -40 C to 85 C Accuracy Sampling modes Sampling rates Sample rate stability Network capacity Synchronization between nodes Radio frequency (RF) transceiver carrier RF range ± 2 C (at 25 C) typical Sampling Synchronized, low duty cycle, datalogging Continuous sampling: 1 sample/hour to 512 Hz Periodic burst sampling: 32 Hz to 4096 Hz Datalogging: 32 Hz to 4096 Hz ±3 ppm Up to 2000 nodes per RF channel (and per gateway) depending on the number of active channels and sampling settings. Refer to the system bandwidth calculator: ± 32 μsec Operating Parameters RF communication protocol IEEE Power source Power consumption Operating temperature Maximum acceleration limit Dimensions Weight Enclosure material Compatible gateways Compatible sensors Connectors Sensor warm-up time Software Software development kit (SDK) Regulatory compliance to GHz direct sequence spread spectrum over 14 channels, license-free worldwide, radiated power programmable from 0 dbm (1 mw) to 16 dbm (39 mw); low power option available for use outside the U.S.A.- limited to 10 dbm (10 mw) 70 m to 2 km line of sight with RF power setting Internal: 3.7 V dc, 250 mah rechargeable Lithium polymer battery. External: 3.2 V dc to 9.0 V dc See power profile : LXRS-Power-Profile.pdf -20 C to + 60 C (extended temperature range available with custom battery and enclosure, -40 C to + 85 C electronics only) 500 g standard (high g option available) Physical Specifications 61 mm x 61 mm x 27 mm 58 grams ABS plastic Integration All WSDA base stations and gateways All LORD MicroStrain DVRT sensors. Other inductive displacement transducers possible (contact LORD MicroStrain Technical Support) LORD MicroStrain DVRT sensor connector 30 seconds recommended SensorCloud, Node Commander, WSDA Data Downloader, Live Connect, Windows XP/Vista/7 compatible Data communications protocol available with EEPROM maps and sample code (OS and computing platform independent) FCC (U.S.), IC (Canada), ROHS Copyright 2015 LORD Corporation 3DM, 3DM-DH, 3DM-DH3, 3DM-GX1, 3DM-GX2, 3DM-GX3, 3DM-GX4-15, 3DM-GX4-25, 3DM-GX4-45, 3DM-GX4, 3DM-RQ1, AIFP, Ask Us How, Bolt-Link, DEMOD-DC, DVRT, DVRT-Link, EH-Link, EmbedSense, ENV-Link, FAS-A, G- Link, G-Link2, HS-Link, IEPE-Link, Inertia-Link, Little Sensors, Big Ideas., Live Connect, LXRS, MathEngine, MicroStrain, MVEH, MXRS, Node Commander, PVEH, RHT-Link, RTD-Link, SensorCloud, SG-Link, Shock-Link, Strain Wizard, TC- Link, Torque-Link, V-Link, Watt-Link, Wireless Simplicity, Hardwired Reliability, and WSDA are trademarks of LORD Corporation. Document Revision B. Subject to change without notice. LORD Corporation MicroStrain Sensing Systems 459 Hurricane Lane, Suite 102 Williston, VT USA ph: fax: sensing_sales@lord.com sensing_support@lord.com