Agilent 4287A RF LCR Meter 1 MHz - 3 GHz. Technical Overview

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1 Agilent 4287A RF LCR Meter 1 MHz - 3 GHz Technical Overview

2 High-Speed RF LCR Meter Anticipating Next Generation Test Needs The Agilent 4287A is a high performance RF LCR meter best fit to production line testing of devices such as SMD inductors and EMI filters, where impedance testing at high frequencies is required. Signal-level monitor function Monitors the test signal voltage or current applied to the device under test. Rdc (DC resistance) measurement function For contact check 8.4 inch color LCD display Selectable measurement parameters (4 parameters can be displayed simultaneously) Navigation keys and rotary knob Support front panel operation without the mouse Small test head with 1m test cable Extension to an automated component handler without introducing additional error 3.5 mm (female) test port LAN interface For remote test control and fast data transfer External VGA output Display measurement results on a larger VGA monitor Opto-isolated handler interface Easy integration with an automatic component handler Highest throughput in automatic component test handshaking External keyboard and mouse interface Easy to use by simplifying measurement setup and programming GPIB interface Controlled by external PC. (cannot control external devices) 2

3 The 4287A greatly increases manufacturing testing efficiency with fast measurement speeds (9 msec/point) and a statistical analysis function, among the other powerful functions, such as the built-in comparator function. In addition, the 4287A improves upon the measurement accuracy and impedance measurement range of previous RF LCR meters. These improvements are realized by advanced techniques in analogcircuit design. The 4287A achieves better measurement repeatability and stability, even at the low test-signal levels required for SMD inductor testing. User-friendly interface An object-oriented user interface that is navigable using the mouse, panel keys or keyboard simplifies complicated measurement setup procedures. Setups, including test frequency, signal level (also when using list-sweep), and limits for the multi-function comparator, can be performed and verified easily by editing the setup-tables. The setup editor has eight page tables and can store eight different setups. After the setup tables have been established, the active measurement setup can be chosen simply by selecting the corresponding number (1 through 8). Key specifications Setup display select menu Figure 1. List sweep setup display 8 page setup tables Setup editor Changes can be made easily with the mouse or navigation keys Test frequency Impedance parameters 1 MHz - 3 GHz with 100 khz resolution. With list-sweep, up to 32 points per sweep is available. Z, θz (rad), θz (deg), Y, θy (rad), θy (deg), X, G, B, Ls, Lp, Cs, Cp, Rs, Rp, Q, D Display resolutions 5 digits Test signal level V (open condition): 4.47 mvrms mvrms (447 mvrms when >1 GHz) I (short condition): marms - 10 marms (8.94 marms when >1 GHz) Basic accuracy ± 1.0% Measurement range Measurement time Measurement terminal Calibration and compensation Rdc measurement function Data storage devices Interface 200 mω to 3 kω (@1 MHz, accuracy 10%) 9 msec per point (max. speed) 3.5 mm (female) Open/short/load/low-loss capacitor calibration, fixture electrical length compensation, open/short compensation For contact check (on/off selectable) About 18 Gbyte internal hard disk and 1.44 Mbyte floppy disk GPIB, LAN (10base-T/100base-TX automatically switched), and Opto-isolated handler interface 3

4 Improving Throughput and Quality In Production Line Testing Accurate impedance measurement using the RF I-V measurement method The 4287A uses the RF I-V measurement method for measuring impedance by measuring the current flowing through a device under test (DUT) and the voltage applied across the DUT. These measurements of current and voltage can be made over the entire measurement frequency range (to 3 GHz). RF I-V enables accurate measurement over a wide impedance range. The impedance measurement range is much wider than that of network analyzers. For a very small inductance, on the order of a few nh, this is a big advantage. Figure 2. Accurate multiple frequency impedance measurements Stable measurements at low signal levels with high speed SMD inductors require testing with test currents on the order of 100 micro-amps. It is difficult to maintain high test-throughput with previous RF LCR meters, since many sequential measurements are required when averaging to reduce measurement variation. Measurement stability at low-test signal levels is improved with the 4287A making highly repeatable measurements possible. The 4287A can increase test throughput due to the decrease of the averaging factor. Contact check using the Rdc measurement function Contact failure between a DUT and the measurement plane of an automatic component handler is a factor for bin sorting error in production line testing. Contact check using the built-in DC resistance measurement function improves the accuracy and efficiency of bin sorting. Existing Product 4287A Ls [nh] Figure 3. Stability comparison at low signal level Q DUT: 10 nh (Q = 10.6) Conditions: 100 MHz, 200 µa, AVG = 1 3 Sigma when 100 times measurements 4

5 Accurate automated testing by advanced calibration It is very important to eliminate complicated error elements caused from the use of test fixtures and cables that extend the test head of the 4287A. This is especially true for measurements that use an automated component handler. Accurate measurements, which correlate well with results obtained from manual testing, can be achieved at the measurement plane of a test fixture by performing open/short/load calibration with a working load standard. Figure 4. Calibration standard data setup display Different calibration reference values can independently be set at each list sweep frequency In other words, open/short/load calibration, at the measurement plane is dependent solely on the value assigned to the working standard by manual testing of that component. Since different calibration standard reference values can independently be set at each list sweep frequency, multifrequency measurements can be made accurately with this reliable calibration function Multi-function comparator The 4287A is equipped with a multi-function comparator to meet a wide variety of testing needs. The comparator setup display is formatted as a table. Each row represents a bin number, and each column represents the sorting conditions for each bin. When all sorting conditions set for a bin are satisfied, the judgement result is sorted to the bin. There are thirteen bins, with four limit values for each bin. Conditions such as frequency and measurement parameters can be set independently in each column, enabling the 4287A to meet various sorting needs, including different parameters at different measurement frequencies. START Meets conditions #1 to #4 of BIN1? Meets conditions #1 to #4 of BIN2? Meets conditions #1 to #4 of BIN13? Sorts to OUT_OF_BINS Figure 5. Bin-sort sequence NO NO NO YES YES YES Sorts to BIN1 Sorts to BIN2 Sorts to BIN13 Figure 6. Comparator setup display 5

6 Statistical functions The 4287A is equipped with functions to statistically analyze data. These functions improve the efficiency of the data acquisition required in quality control. The statistical analysis function calculates the following statistical parameters for as many as measurement points. Original measurement results for the statistical analysis function can be obtained via LAN interface. Examples of normal data (non-failure) Cumulative normal samples, mean, maximum, minimum, standard deviation, and 3 σ/mean Examples of failure analysis Cumulative failure samples, cumulative Rdc failures, cumulative overload samples Total number of normal/failure data Data storage The 4287A built-in data storage includes a 3.5 inch floppy disk drive as well as a hard disk drive. These powerful storage devices permit save and recall of measurement setup parameters (instrument state) and measurement data. In addition, measurement setup parameters and data can be transferred between the 4287A and an external computer via the GPIB or LAN interface. PC Interfacing with an automated component handler The measurement plane can be extended from the front panel of the instrument to the measurement stage with the 1 m test cable and the small size test head. Note that the measurement accuracy is specified at the test head. It is possible to extend the test cable an additional meter with a 1 m extension cable. In addition, connection to an external computer or an automated component handler can be accomplished via the GPIB interface and the opto-isolated handler interface. The LAN interface enables network communication, and greatly empowers massive data transfer to a remote computer. LAN GPIB Handler Handler I/F 3.5 mm 4287A 1 m cable ( 2 m max. (Option 4287A-020)) Small test head Figure 7. Handler system example with the 4287A 6

7 Research and Development of Next Generation Devices and Improving Reliable Quality Control The accurate impedance measurement capability of the 4287A with the various kinds of test accessories offers you total measurement solutions for the areas of research and development, as well as quality control. Accurate impedance evaluation up to 3 GHz Characterization of components at operating frequencies in excess of 2 GHz is becoming common due to the development and evaluation of RF SMD inductors used in wireless communication equipment. The 4287A employs the RF I-V measurement method of measuring impedance by measuring the current flowing through a device under test (DUT) and the voltage applied across the DUT. The 4287A enables accurate measurement over an impedance range much wider than that of network analyzers (reflection coefficient method). Total measurement solution When electronic components are evaluated, the test accessories should be suitable for their shape and size for accurate impedance measurements. Agilent offers various kinds of 7-mm test fixtures, which are compatible with the 4287A. You can select the appropriate one for your device's size, shape, and application. The 16196A, B, C and D SMD test fixtures, developed with a coaxial structure, make RF impedance measurements to 3 GHz possible. The 16196A, B, C and D correspond to the chip sizes, 1608 (mm)/0603 (inch), 1005 (mm)/ 0402 (inch), 0603 (mm)/0201 (inch), and 0402 (mm)/01005 (inch)* respectively. The repeatable DUT positioning capability and reliable contacts enable stable measurement results, and reduce the possibility of operator induced error. Evaluation of SMD inductors to 3 GHz, which has been difficult to implement so far, can easily be performed with good repeatability by using the 4287A with the 16196A/B/C/D test fixtures. When the 16200B is used with the 4287A, a 7 mm test fixture, and an external dc bias source, dc bias current can be applied to devices such as the EMI filter (up to 1 GHz). Cap Upper electrode DUT Insulator Outer connector Lower electrode 7 mm connector Figure 8. Cross-sectional drawing of 16196A/B/C *EIAJ/EIA chip size code Figure 9. Total measurement solution example (with 16196A) 7

8 Advanced Features For Precise and Versatile Analysis Powerful calibration and compensation functions For manual measurements, a low-loss capacitor as a phase calibration standard, in addition to open/short/load calibration, improves the accuracy of Q measurements as shown. In addition to calibration, electrical length compensation for a fixture with open/short compensation fully correct measurement error caused by use of a test fixture. These functions realize high absolute measurement accuracy at the measurement plane, which in turn empowers accurate measurement of working standards. QAccuracy ( Qx / Q x) [%] M 10M 100M 1G 3G Frequency [Hz] Figure 10. Q 7-mm port (typical) Qx=300 Qx=100 Calibration wizard function The 4287A offers you the sophisticated calibration/ compensation method, calibration wizard function. The calibration wizard function eliminates errors of troublesome calibration/ compensation procedures, and it allows you to easily make the 4287A ready to measure accurately. Figure 11. Calibration wizard (fixture connection after calibration) Figure 12. Calibration wizard (open compensation) Frequency characteristics by using list sweep function In the area of research and development, the frequency characteristics of the device can be required for their circuit demands. The 4287A s list sweep functions enable impedance measurements at a maximum of 256 multiple frequency points (= 32 points max./table x 8 table max.). By using an external PC, spreadsheet software, and LAN interface, the frequency characteristics can be plotted in a graph as shown below. Figure 13. Frequency characteristics plot using spreadsheet software 8

9 Ordering Information 4287A RF LCR meter Furnished accessories: Test head with 1 m test cable N (m) - SMA (f) Adapter Wrench for 3.5/SMA connector CD-ROM (Operation manual, Programming manual and Sample Program) Power cord Note: A keyboard and a mouse are required for initial setup of 4287A. Options 4287A-004 Add working standard set A-020 Add test fixture extension cable set (1 m) 4287A B calibration kit A-710 Test fixture stand 4287A mm to 7 mm coaxial adapter 4287A-810 Add keyboard 4287A-820 Add mouse 4287A-1A7 ISO compliant calibration Paper manual options 4287A-ABJ 4287A-ABA 4287A-0BW Cabinet options 4287A-1CM 4287A-1CN 4287A-1CP Japan-Japanese localization U.S.-English localization Add service manual Rack flange kit Front handle kit Handle/rack mount kit Note: 1. This is used to calibrate the 4287A at the handler DUT contacts. It consists of shorting bars, and 51.0 Ω chip resistors. (SMD size: 1.0 x 0.5 mm, 1.6 x 0.8 mm, 2.0 x 1.2 mm, 3.2 x 1.6 mm) 2. The 16195B is used to calibrate the 4287A at the 7 mm calibration plane by using the 3.5-mm to 7-mm adapter. It consists of open, short, load, and low-loss capacitor standards. 9

10 Accessories 16196A/B/C/D SMD test fixture - Frequency range: DC to 3 GHz - Connector: 7-mm - Operating temperature range: 55 C to +85 C - Accommodate SMD sizes: A: 1608 (mm)/0603 (inch) B: 1005 (mm)/0402 (inch) C: 0603 (mm)/0201 (inch) D: 0402 (mm)/01005 (inch) 16197A SMD test fixture - Frequency range: DC to 3 GHz - Connector: 7-mm - Operating temperature range: 55 C to +85 C - Accommodate SMD sizes: 3216 (mm)/1210 (inch) 3216 (mm)/1206 (inch) 2012 (mm)/0805 (inch) 1608 (mm)/0603 (inch) 1005 (mm)/0402 (inch) 16194A High temperature component fixture - Operating frequency: DC to 2 GHz - Operating temperature range: 55 C to +200 C - Accommodated SMD size: See Figure 19. Figure A Figure A/B/C D has a different cap shape A SMD test fixture - Operating frequency: DC to 2 GHz - Accommodated SMD size: See Figure 19. Figure A 16200B External DC bias adapter - Operating frequency: 1 MHz to 1 GHz - External DC bias: 5 A max, 40 V (at the BNC connector from the external dc bias source) - Operating temperature range: 0 C to +55 C Figure B Figure A/16192A 16192A L = mm L 16197A L = mm L L = mm L H 16194A L = < 15 mm L = < 4.5 mm L = mm L W Figure 19. Accommodated SMD size 10

11 Ordering Information Accessories A 2 Parallel electrode SMD test fixture Option 16196A-710 Add magnifying lens and tweezers Option 16196A-ABA U.S. - English localization Option 16196A-ABJ Japan - Japanese localization 16196B 2 Option 16196B-710 Option 16196B-ABA Option 16196B-ABJ Parallel electrode SMD test fixture Add magnifying lens and tweezers U.S. - English localization Japan - Japanese localization 16196C 2 Parallel electrode SMD test fixture Option 16196C-710 Add magnifying lens and tweezers Option 16196C-ABA U.S. - English localization Option 16196C-ABJ Japan - Japanese localization 16196D 2 Parallel electrode SMD test fixture Option 16196D-710 Add magnifying lens and tweezers Option 16196D-ABA U.S. - English localization Option 16196D-ABJ Japan - Japanese localization 16196U Option 16196U-010 Option 16196U-020 Option 16196U-100 Option 16196U-110 Option 16196U-200 Option 16196U-210 Option 16196U-300 Option 16196U-310 Option 16196U-400 Option 16196U-410 Maintenance kits for 16196X Upper electrode set for 16196A/B/C (5 ea) Upper electrode set for 16196D (5 ea) 1608 (mm) short plate set (5 ea) 1608 (mm) lower electrode set (5 ea) 1005 (mm) short plate set (5 ea) 1005 (mm) lower electrode set (5 ea) 0603 (mm) short plate set (5 ea) 0603 (mm) lower electrode set (5 ea) 0402(mm) short plate set (5 ea) 0402(mm) lower electrode set (5 ea) 16197A 2 Option 16197A-001 Bottom electrode SMD test fixture Add 0201 (inch)/0603 (mm) device guide set Option 16197A-ABA U.S. - English localization Option 16197A-ABJ Japan - Japanese localization 16192A 3 Option 16192A-010 Parallel electrode SMD test fixture EIA/EIAJ industry sized short bar Set Option 16192A-701 Short bars set (1 x 1 x 2.4, 1.6 x 2.4 x 2, 3.2 x 2.4 x 2.4, 4.5 x 2.4 x 2.4) mm Option 16192A A 3 Option 16194A-010 Add magnifying lens and tweezers High temperature component fixture EIA/EIAJ industry sized short bar set Option 16194A-701 Short bars set (1 x 1 x 2.4, 1.6 x 2.4 x 2, 3.2 x 2.4 x 2.4, 4.5 x 2.4 x 2.4) mm 16200B 16190B 4 External DC bias adapter Performance test kit, 7-mm Note: 1. Manual is not furnished as standard. 2. Must specify one of language options (ABA or ABJ) for operation manual for shipment with product. For 16196A/B/C/D, magnifying lens and tweezers are not furnished as standard. 3. Short bar set is not furnished as standard. Magnifying lens and tweezers are not furnished as standard. 4. This kit includes an open, a short, a 50 Ω terminations, and an air line for the performance test to verify the impedance accuracy. 11

12 Web Resource Agilent Updates Get the latest information on the products and applications you select. Agilent Direct Quickly choose and use your test equipment solutions with confidence. Remove all doubt Our repair and calibration services will get your equipment back to you, performing like new, when promised. You will get full value out of your Agilent equipment throughout its lifetime. Your equipment will be serviced by Agilent-trained technicians using the latest factory calibration procedures, automated repair diagnostics and genuine parts. You will always have the utmost confidence in your measurements. Agilent offers a wide range of additional expert test and measurement services for your equipment, including initial start-up assistance onsite education and training, as well as design, system integration, and project management. For more information on repair and calibration services, go to For more information on Agilent Technologies products, applications or services, please contact your local Agilent office. The complete list is available at: Americas Canada (877) Latin America United States (800) Asia Pacific Australia China Hong Kong India Japan 0120 (421) 345 Korea Malaysia Singapore Taiwan Thailand Europe & Middle East Austria Belgium 32 (0) Denmark Finland 358 (0) France * *0.125 /minute Germany ** **0.14 /minute Ireland Israel /544 Italy Netherlands 31 (0) Spain 34 (91) Sweden Switzerland United Kingdom 44 (0) Other European Countries: Revised: March 27, 2008 Product specifications and descriptions in this document subject to change without notice. Agilent Technologies, Inc. 2000, 2003, 2004, 2005, 2008 Printed in USA, April 10, E

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