High Power CO 2 Laser, EUVA

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1 High Power CO 2 Laser, EUVA Akira Endo Extreme Ultraviolet Lithography System Development Association EUVA, Japan EUV Source Workshop 6 May, 2007 Baltimore, MD, USA Ver. 1.0 Acknowledgments This work was supported by the New Energy and Industrial Technology Development Organization -NEDO- Japan. 1 EUV Source Workshop, 6, May 2007

2 Outline Introduction - High Power CO 2 Laser development concept Topics -CO 2 Laser system development result -CO 2 laser amplification with Single-line and Multi-line - Estimated extracted power with RF-excited CO 2 laser Summary 2 EUV Source Workshop, 6, May 2007

3 High Power CO 2 Laser development concept CO 2 Laser for LPP EUVL High Power High rep. rate (100 khz) Short pulse duration (10 ns) High beam quality > 10kW Master Oscillator Short pulse duration Rep. rate 100kHz High beam quality RF-excited CO 2 laser 3 EUV Source Workshop, 6, May 2007

4 High Power CO 2 Laser MOPA System < Now > 7kW Performances Laser Power: Pulse Width: Repetition Rate: Laser System Main-Amplifier [Fast Axial Gas Flow RF-Excited CO 2 laser(cw 15kW)] 7 kw 22 ns 100 khz Oscillator [Wave Guide Q-switched CO 2 laser] Repetition rate:100khz Pulse width: 22ns Pre-Amplifier [Fast Axial Gas Flow RF-Excited CO 2 laser(cw 5kW)] Oscillator 4 EUV Source Workshop, 6, May 2007

5 Configuration of Discharge Tubes of Amplifiers Gain area Second floor of the tubes is not shown 5 EUV Source Workshop, 6, May 2007

6 CO 2 Laser MOPA System Average Output Power Amplification Characteristic of Main - Amp Now 8000 Output Power [W] Rep. rate: 100 khz Duty: on 10ms, off 90ms Operation : Continuous (no time limit) Input Power [W] ( to Main-AMP ) 6 EUV Source Workshop, 6, May 2007

7 Vibrational-Rotational CO 2 -N 2 Laser Energy Level Diagram Vibrational - Rotational CO 2 -N 2 Laser Energy Level Diagram CO 2 Molecular Molecule N 2 Molecule Molecular CO 2 molecular vibrational mode Symmetric stretch mode (ν 1 ) Bending mode (ν 2 ) Asymmetric stretch mode (ν 3 ) 0.3[eV] Rotation Level J=19 Rotation Level Relaxation Time Rotation Level J=20 Vibration level Relaxation of CO 2 Vibration level Relaxation of N 2 Excitation 0.0 理論効率 : 7 EUV Source Workshop, 6, May 2007

8 CO 2 Laser Gain Bandwidth Rotational Gain Bandwidth < Pressure Broadening > ν=7.58(φ CO Φ N Φ He ) P(300/T) 1/2 ν = 424 [MHz] Estimate pulse duration from the Fourier transform limit of a Gaussian pulse ν t = 0.44 Δt~ 1 ns R.L.Abrams, Appl. Phys. Lett. 25, pp.609, 1974 Typical Gas Parameter -CO 2 :N 2 :He=1:1:8 - Pressure: 100 [torr] - Temperature: 450 [K] Φ: partial ratio P: Pressure [torr] T: Temperature [K] Short pulse Amplification is limited of 1ns 8 EUV Source Workshop, 6, May 2007

9 Relaxation time ( RF-excited CO 2 laser ) Oscillator Parameter Pulse to Pulse interval: 10μs s (100kHz) Pulse duration: 10 ns Vibrational relaxation time τ v = 0.5 μs Pressure: 100 [torr] Rotational relaxation time τ r = [ 7.58( φco φ 2 N2 τ r = 2.3 ns φ R.L.Abrams, Appl. Phys. Lett. 25, pp.609, 1974 He ) P Typical Gas Parameter -CO 2 :N 2 :He=1:1:8 - Pressure: 100 [torr] - Temperature: 450 [K] ] T Gain of short pulse amplification is decreased than CW amplification 1 Φ: partial ratio P: Pressure [torr] T: Temperature [K] 9 EUV Source Workshop, 6, May 2007

10 Estimated amplification with RF-excited CO 2 laser Frantz - Nodvik Equation E out = E s Ein ln[( 1+ exp( g )[exp( ) 1]] 0 L E Experimental result of Extracted Power with Single-Line Oscillator and 15 kw amplifier module at 100 khz s E in : input fluence [J/cm2] E out : output fluence [J/cm2] g 0 : gain [%/cm] E s : saturation fluence [J/cm2] l: gain length [cm] Extracted Power [W] Input Power [W] - - is the extracted power of amplification result. Extracted power estimation is over 5 kw. Extracted efficiency is over 5.5% from pumping power 10 EUV Source Workshop, 6, May 2007

11 Estimated amplification with RF-excited CO 2 laser Numerical Calculation Result of Amplification with Multi-Line Oscillator This work was preformed by Research Institute for Laser Physics, St. Petersburg, Russia [V.E. Sherstobitov] -X- is the amplification ratio between the (P16-P22) spectrum and the P20 line Estimated extracted power of 15 kw amplifier module in case of input i power with 3 kw Multi-line : > 6.5 kw (5 kw 1.3) Single-line line : > 5 kw Extracted efficiency from pumping power is estimated Multi-line : > 7.2 % Single-line line : > 5.5 % 11 EUV Source Workshop, 6, May 2007

12 Multi 10 kw Short Pulse CO 2 laser MOPA system AMP1 RF-excited CO2 laser Pumping : 50 kw 20 kw (200mJ at 100kHz) Multi-line Oscillator Rep. rate :100kHz pulse width :20 ns (FWHM) AMP2 RF-excited CO2 laser Pumping power : 120 kw AMP3 RF-excited CO2 laser Pumping power : 120 kw One beam, 20 kw is reasonable estimate!! Power Limitation Damage of Optics Short pulse damage threshold lower than CW threshold Filling Factor Laser beam diffraction Saturation Re-absorption from lower laser level (?) 12 EUV Source Workshop, 6, May 2007

13 Summary High Power CO 2 laser MOPA system has been achieved with: 7 kw output power at 100 khz, 22 ns(fwhm) duty: 10% (on 10msec, off 90msec) Estimated amplification with RF-excited CO 2 laser Extracted power of short pulse amplification is decreased compared to the case of CW amplification Estimation of extracted efficiency from pumping power is over 5.5% For Numerical Calculation Result, Multi-line amplification is 1.3 higher than Single-line One beam, 20kW is a reasonable estimate!! Only 3 times increase compared to present performance!! 13 EUV Source Workshop, 6, May 2007

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