User Manual. Manual - Beam Stabilisation System Compact

Transcription

1 Laser Beam Stabilisation System Compact User Manual page 1 of 35

2 Contents 1. General System components Specification Positioning accuracy Optical components Steering mirror mounts PKS PSH P4S Mirror mounts and adapters for other mirror sizes Detectors Standard 4-quadrant detector Wide intensity detector - 4-quadrant diode with wide intensity range quadrant diodes for UV and IR PSD detectors Vacuum adaptions Optical filters Installation and operation Brief step-by-step instruction Introduction Set-up of optical components Inputs and outputs Intensity adjustment Adjustment of sensitivity with 4-QDs Adjustment of sensitivity with PSDs How to replace the optical filters in the detector housing Direction coding detector outputs Optimisation of laser beam position on detectors Adjustment and read-out of the proportional element (P factor) Operation and safety features Power level and position display Low power switch-off Switch-on activity delay Controller status signal (interlock) Bandwidth limitation switch Option: Sample&hold circuit ( ADDA ) Technical specification Modes of operation Configuration and start of operation Performance Option: Adaptation for low repetition rates Option: External activation Interfaces, additional inputs and outputs (Options) Direct drive of Piezo actuators ( Drive Actuator )...28 page 2 of 35

3 10.2. Voltage offset inputs to move the target position on PSDs ( Adjust-in ) Intensity outputs at controller Range outputs for monitoring applied Piezo voltages USB interface and software Drawings Mirror mount PKS Mirror mount PSH Mirror mount P4S Detector housing Cables Cables included in standard delivery Additional cables Troubleshooting No signals on display No signals on detector The laser beam is not correctly positioned The steering mirrors make exceptional noise Laser position is not stable Safety Check list for laser data Laser data Set-up data Mirrors Contact...35 Subject to change without prior notice page 3 of 35

4 1. General The Compact laser beam stabilisation compensates for vibrations, shocks, thermal drift, or other undesired fluctuations of the laser beam direction. The system should be applied whenever laser fluctuations or movements of optical components occur but a high precision and stability of the beam direction is required. The desired position of the laser beam is defined by a 4-quadrant-diode (4-QD) or a PSD. For that purpose a small portion of laser power transmitted through a high-reflective deflection mirror is sufficient. Figure 1: Principle of laser beam stabilisation The closed-loop controller continuously determines the deviation of the laser beam from the desired position and drives the fast actuators in that way that the steering mirrors stabilise the laser beam in the desired position. The system is available in two different models. The 2-axes system comprises one detector and one steering mirror and controls the laser beam in two axes. Thus, the laser beam is fixed in one position but the beam direction can change. The 4-axes system combines two detectors and two steering mirrors in order to detect the laser beam at two distant positions. Thereby both, position and direction are fixed. 2. System components The laser beam stabilisation utilizes optoelectronic components (steering mirrors, detectors) as well as electronic modules. We offer different types of actuators and detectors. For more details please check the specification in section 3 and the photos in section 4. Figures 2, 3, and 4 (from left to right): Steering mirror with Piezo drive (version P4S30), detector with position and intensity display (horizontal orientation), detector (vertical orientation) page 4 of 35

5 The system electronics (controller, amplifiers, power supplies) is fully integrated into a single compact housing. It is powered by a standard 12 V wall power supply. Figure 5: Keyboard and connectors on top panel Figure 6: Power input and output connectors on left side Figure 7: Input connectors, P factor adjustment and switches on right side 3. Specification Optical parameters Wavelength Repetition rate Mirror diameter Mirror thickness 320 to 1,100 nm, UV and IR detectors are also available any rate or cw For repetition rates < 100 Hz we integrate an adaptation for low repetition rates. For single pulses and operations with laser offtimes we offer an additional sample & hold circuit, see also note 1 < 6 mm (1/e²), see also note 2 45 mm for PKS, 39.5 mm for PSH, 40 mm for P4S30 (Please ask for adapters if you need other heights.) 1" (standard), 1.5'', 2'' and other mirror diameters possible 1/4" or 1/8" (recommended) Controller housing dimensions wxhxd 166 x 106 x 56 mm3 Laser beam diameter Height of laser beam page 5 of 35

6 Control features Power level display Position display Variable intensity gain Low power switch-off Switch on activity delay LED bar with 10 elements on the backside of the detector LED cross on the backside of the detector Continuous, adjustable with potentiometer (1:6) Power level falls below 10% of saturation power 300 ms Connectors at controller unit Actuator Detector Controller status signal (interlock) x, y position output Power supply LEMO 0S series LEMO 0B series LEMO 00 series LEMO 00 series 12 V / DC pin-and-socket connector Notes: (1) A description of the sample & hold circuit is given in section 7 of this user manual. The adaption for low repetition rates is mentioned in section 8. (2) In case the beam diameter is larger than 6-8 mm, a lens in front of the detector can be used. For larger beam diameters adapters for 1.5'', 2'' or other sizes are available (see also section 4.1.4) Positioning accuracy The positioning accuracy depends on several parameters: Optical distance between steering mirror and detector: The accuracy is higher for larger distances. Therefore a large distance should be chosen. The first steering mirror should be placed close to the fluctuation source. Beam diameter: Having the same absolute change of laser beam position, a smaller diameter leads to stronger power differences on the quadrants of a 4-QD and therefore a steeper control signal. That is why laser beams with smaller diameter can be positioned with higher accuracy. Intensity: The resolution of the detectors further depends on the intensity hitting the sensitive area. This can be varied by an appropriate choice of optical filters and optimised electronically (see also section 5.5). Repetition rate and pulse duration: The controller bandwidth can be optimised for different laser parameters. Higher bandwidths lead to a faster reaction and therefore higher accuracy in case of fast fluctuations. The position signals of the detectors can be read out with the position outputs on the front panel of the controller. Position outputs x, y Description Signal Connectors 4 outputs: beam position (stage 1) and (stage 2) Analog, - 5 V + 5 V LEMO 00 series In figure 8 the typical resolutions of the 4-quadrant detectors are displayed. The example shows that a resolution of better than 100 nm on the detectors can be achieved with an appropriate choice of parameters. The angular resolution can be determined from these data with respect to the respective arm lengths. By the use of the material Invar with a very low coefficient of thermal expansion the detectors are stabilised against temperature variations. The actuators are controlled with an analog signal so that the positioning is not restricted to separate steps. The positioning accuracy of the Piezo elements are specified as < 2nrad (PKS) and 4 nrad (PSH). page 6 of 35

7 Figure 8: Resolution of a 4-quadrant diode irradiated by a red He-Ne laser with different beam diameters and laser intensities 4. Optical components 4.1. Steering mirror mounts PKS The mirror mount PKS has a tilting range of ± 0.5 mrad which is smaller than the range of the PSH and P4S30 mounts (see sections 4.1.2, 4.1.3). In comparison, it offers a wider free space behind the mirror. The mount can be adjusted manually for coarse adjustment. Figure 9 shows a photo of this mount. Figure 9: Steering mirror mount PKS with 1'' mirror. The blue arrows point to the x and y labels Specification Tilting range Coarse adjustment (manually) Piezo stacks Resonant frequency PKS 1 mrad (± 0.5 mrad) mechanical, 2 mrad optical ± 2 2 Piezo stacks integrated ~ 700 Hz (1'' mirror) page 7 of 35

8 PSH The mirror mount PSH has a wider tilting range of ± 1 mrad. It can also be adjusted manually for preadjustment to the zero-position. The mirror mount is optimized for low torque by means of reinforced springs and a balancing weight. The standard mount is used with 1'' mirrors. But it can be equipped with adapters for bigger mirror sizes (see section 4.1.4). Figure 10: Steering mirror mount PSH with 1'' mirror Specification Tilting range Coarse adjustment (manually) Piezo stacks Resonant frequency Figure 11: Steering mirror mount PSH with adapter for 1.5'' mirror PSH 2 mrad (± 1 mrad) mechanical, 4 mrad optical ± 5 2 Piezo stacks integrated ~ 840 Hz (1'' mirror) Notes: The movable top plate of the Piezo elements is sensitive to mechanical forces. Please avoid the impact of strong forces or torsional moments on this plate. The Piezo stacks are directly attached to this plate. If you intend to remove the 1.5'' or 2'' adapter you should be especially careful. We can provide a specific instruction and a tool for this purpose P4S30 The mirror actuator P4S30 is especially recommended for larger mirrors (> 1''). Compared to the PKS and PSH mounts with 2 integrated Piezo stacks, it has 4 Piezo stacks resulting in a higher stiffness and higher resonant frequencies. Thus, the P4S30 can work with higher stabilisation bandwidths. The P4S30 has a comfortable tilting range of ± 2 mrad mechanically, which means ± 4 mrad optically. page 8 of 35

9 Figure 12: P4S30 with 1.5'' adapter on adjustable mount Specification Tilting range Coarse adjustment (manually) Piezo stacks High resonant frequencies High stabilisation bandwidths Figure 13: P4S30 with 4'' adapter on stiff mount P4S30 4 mrad (± 2mrad) mechanical, 8 mrad optical ± Piezo stacks integrated > 1,200 Hz (with 1'' mirror) ~ 300 Hz (with 2'' mirror) > 400 Hz (with 1'' mirror) > 100 Hz (with 2'' mirror) Mirror mounts and adapters for other mirror sizes Our standard mirror mounts have holders for 1'' mirrors. The PKS mirror mount is also available for 0.5'' mirrors. Anyway, our beam stabilisation system can also drive mirrors with larger dimensions. For such mirrors the system is equipped with specific Piezo-driven actuators and mounts, where the design is optimi sed with respect to control speed and tilting range. For 1.5'', 2'' and 3'' mirrors, the PSH and P4S30 steering mirror mounts can be equipped with appropriate adapters. Especially for mirrors with diameters of 2'' or 3'' we recommend the P4S30 mount. It works with four mutually clamped Piezo stacks and therefore yields a higher dynamic. Note: In case of larger mirror masses, the bandwidths can be lower than the bandwidths with standard components Detectors Standard 4-quadrant detector Figure 14 shows the front side with the detection area of the standard 4-quadrant diode. Figure 15 shows the rear side of the detector with the LED cross and bar and the connectors. page 9 of 35

10 Figure 14: Standard detector (4-quadrant diode with sensitive area of 10x10 mm2) Figure 15: Rear side of the standard detector Specification Detector type Wavelength range Bandwidth Sensitivity range Detection area Si 4-quadrant diode 320 1,100 nm Up to 100 khz ~ 10 µw nm, cw (using the intensity potentiometer) 10 x 10 mm² Dimensions Housing (w x h x d) Optical filter 40 x 49 x 23.9 mm x 11.9 mm2 Further functions Power indication Position display LED bar with 10 elements on the backside LED cross on the backside Connectors x, y, intensity outputs Power supply MCX 12 V / DC connector Wide intensity detector - 4-quadrant diode with wide intensity range In some applications the laser intensity is varied or modulated over wide ranges. The performance of the wide intensity detector is fully independent of the intensity. The signal amplification automatically adapts to the changing intensity. The intensity can vary by a factor of >1,000 without the need of exchanging the optical filters. External signals or user interactions are not required. The signal-to-noise ratio is not significantly changed over the entire intensity range, so that the stabilisation system reaches the maximum resolution. The function of the power level display is unchanged compared to the standard 4-quadrant. I.e. it can still be used to support the selection of the optical filters. In contrast, the potentiometer as described in section 5.5 is omitted. page 10 of 35

11 Advantages: dynamic range / intensity range: 3 decades less noise compared to standard 4-QDs Specification Bandwidth Signal scaling Sensitivity range Reproducibility over the complete intensity range < 10 khz 5 mv / µm (typical for 1 mm beam diameter) ~ 5 µw 5 mw (@ 520 nm, cw) 10 mv (with 1 mm beam diameter ~ ± 1 µm) All other specifications are the same as for the standard 4-quadrant detector. Note: Due to the wide intensity range it is possible to detect even lowest laser powers. Therefore, depending on the selection of the optical filters, the detection signal can be affected by ambient light quadrant diodes for UV and IR For lasers with UV and IR wavelengths we offer 4-quadrant-diodes with different sensitive areas and the following specs: Specification UV 4-QD 3x3 Wavelength range Sensitive area 190-1,000 nm 3 x 3 mm2 IR 4-QD InGaAs 900-1,700 nm Ø = 3 mm IR 4-QD Germanium 800-2,000 nm Ø = 5 mm Pyroelectric 4-QD 0.1-3,000 µm 9 x 9 mm2 Figure 16 shows a photo of the sensor side of the UV 4-quadrant diode 3x3. Figure 16: UV 4-quadrant diode with sensitive area of 3x3 mm2 Note: The pyroelectric detectors are also suitable for CO 2 lasers at 10.6 µm. Such lasers are often operated with powers in the range of several kw and large and heavy-weight mirrors. That is why the integration of the stabilisation system can require additional measures for mounting the actuators and leaking a portion of the laser power to the detectors. page 11 of 35

12 PSD detectors As an alternative to our 4-quadrant diodes we offer PSDs (position sensitive device s) for visible and UV wavelengths with the following specs: Specification Wavelength range Sensitive area Sensitivity range VIS PSD 320-1,100 nm 9 x 9 mm2 variable UV PSD 200-1,100 nm 10 x 10 mm2 variable In contrast to the 4-quadrant diodes the PSDs have a continuous measurement area. This leads to two possible advantages: 1) The sensitive area is not divided by a gap. Therefore, the PSD can be used in case of very small beam diameters or focused beams. 2) Whereas with the 4-quadrant diodes the target point is usually defined by their centre, in case of the PSDs any other point on the sensitive area can be chosen as a target point. Applications If you use the PSDs instead of 4-quadrant diodes, the position detection is not limited to the centre as it is with 4-quadrant diodes. By adding a voltage to the signal of the PSD the target position where the laser beam shall hit the PSD can be moved. Still, the beam stabilisation will provide full stabilisation of the beam position, but the position itself can be manipulated. The external signal can be applied to the system via the Adjust in functionality described in section This feature can be used for different applications, e.g.: Place the PSDs before the laser is finally adjusted. Then adjust the laser and read out the target position. Feed back the voltage for the new target position. The system will then stabilise the laser beam onto this position. Place the PSDs before the laser is finally adjusted. Then move the position on the detectors until you have the optimal laser adjustment. Move the laser beam to different points (or along a pattern) by moving the beam position on the PSDs. You can vary the laser beam direction with highest resolution and it is still stabilised. Notes: The UV PSDs do not have the position and intensity displays at the housing as the standard 4quadrant diodes have. If we equip the beam stabilisation with PSDs but no further measures, we use the electronic centre (defined by a voltage of 0V for x and y position) as the target position. The position vs. voltage characteristics of a PSD is usually not linear. Therefore, a calibration should be performed if the target shall be moved on a desired path. The UV PSD can not be used for pulsed lasers with repetition rates below 1 khz. Please consider the additional input and output options of sections 10.2 and 10.3 which can further improve the functionality of stabilisation systems with PSDs Vacuum adaptions Both, the detectors and the actuators can be adapted for use in vacuum. In case of the actuators, this is possible for vacuum pressures down to mbar. But this is an extreme value. In case you intend to place some components in vacuum please let us know the conditions so that we can discuss and offer the required measures with you. Some measures (choice of materials and cables, sealing) are mainly focussed to avoid degassing and depend on the pressure. Other measures are important to protect the page 12 of 35

13 components themselves. Note: The controller itself should not be placed in vacuum. The vacuum compatible detector does not have the LED displays on the backside. Therefore additional intensity outputs are integrated in the controller box. To relocate the signal processing from the detector to the controller also additional electronics are inserted in the controller box. Figure 17: Vacuum compatible detector Figure 18: Vacuum compatible PSH actuator High vacuum compatible steering mirror P4S20 Figure 19: Vacuum compatible P4S20 with 2'' adapter Figure 20: Vacuum compatible P4S20 with 3'' adapter The P4S30 mount is also available in a high vacuum compatible version which is called P4S20. It is equipped with specific cables, glues and stainless steel components. The specification is listed in the table in section The figures 19 and 20 show the mount with different mirror adapters. page 13 of 35

14 4.4. Optical filters We usually offer to integrate a pair of optical filters in front of each sensor. The filters have a size of 11.9 x 11.9 mm2 and fit into the provided slot in the detector housing. Usually, the filter with the higher optical density is the one which is deeper in the slot. 5. Installation and operation 5.1. Brief step-by-step instruction The following steps shall assist you during the first startup of the beam stabilisation. The following sections will then explain the single steps more comprehensively. 1) Robust set-up of optical components (steering mirrors and detectors): The centres of the detectors define the beam position. The detectors can be placed directly behind mirrors. Alternatively, a small portion of the beam can be deflected to the detectors by means of a beam splitter. 2) Cable connection: First mirror with output Actuator 1, second mirror with Actuator 2. First detector with input Det-1, second detector with input Det-2. 3) Switch on power supply (switch on the left side of the housing): Thereupon the four green Range LEDs will shine at the controller box. 4) Adjustment of intensity on detectors (by means of the potentiometer and if necessary exchange of optical filters): In the best case 9 LEDs should be shining. 5) Pre-adjustment (with non-activated control stages): Adjustment of the laser beam onto the detectors. After this step no red LEDs of the position display (LED cross) should shine. 6) Direction coding: Activation of control stage 1. If red LEDs are shining on the controller box the switch position for x and y direction should be changed (see section 5.6). 7) Direction coding according to step 6, now for stage 2. 8) Fine-tuning for control stage 1: Deactivate both control stages (Active LEDs do not shine). Then follow the description in section 5.7 until the x and y position outputs are close to 0 V. 9) Fine-tuning for control stage 2: Activate stage 1 (stage 2 is still deactivated). Then proceed according to section ) For the stabilised operation of 4 axes activate both stages Introduction The system operation can be described best with reference to figures 5 to 7. The top panel in figure 5 shows the keyboard and the position signal outputs for two pairs of detectors and actuators ( stage 1 and stage 2 ). Each stage can be switched on and off independently by pressing the Start/Stop button. If the stage is started the small LED in the top right corner of the button is shining. The Range display shows whether or not the steering mirrors are within the available capture range. The Active LED is shining whenever the control stage is active. This is the case whenever the Start/Stop button has been pressed and the laser power on the detectors has the right level. The Position outputs on the top panel can be used to read out the current position of the laser beam on each detector (x and y). page 14 of 35

15 Notes: Whenever the Start/Stop button is pressed (and the Active LED is on) the actuators start to move from the zero position and then respond to the controller input. If a Range LED is shining red, this does not automatically mean that the beam is not stable. But it indicates that no further tilt of the respective steering mirror is possible although it might be necessary. If the power on the detectors is too low the actuators are driven to the zero position (and the Active LED is off). This is due to the low power switch off that was implemented for safety reasons (see section 6.2). Figures 6 and 7 show both sides of the controller box with all input and output connectors, the P factor adjustment and the switches for the Directions and the Bandwidth selection. The cables for the actuators are connected on the left side. The cables coming from the detectors are connected on the right side. The description of the adjustment and read-out of the P factor is given in section 5.8. The Directions switches enable a coding of the x and y directions of each controller stage. They are connected with Det1 and Det-2, respectively. The performance is further described in section 5.6. The function of the bandwidth limitation switch is explained in section 6.5. The Status signal output can be used as an interlock or to drive a shutter (see section 6.4). Note: The Piezo elements have large electrical capacity. That is why the cables should not be disconnected as long as the Piezo elements are charged. I.e. you should always switch off the power of the stabilisation system on the left side of the panel and then wait for a few seconds before you disconnect the actuator cables Set-up of optical components The optical components (steering mirrors and detectors) can be configured in variable arrangements for different applications. The detectors can be placed behind high-reflection mirrors. They are very sensitive and can work with the leakage behind the mirrors. This has the advantage, that no additional components are required in the beam path. Alternatively, it is possible to use the reflection of a glass plate or beam splitter in the beam path. The latter can be necessary for lasers with larger beam sizes where the actuator would constrain the transmission. In any case, the centres of the detectors are positioned in that way, that they define the desired laser beam direction. The target position on the PSD detectors can be different from their centre. For further information please refer to section The first actuator should be placed close to the laser or the last source of interference. The last detector should be placed close to the target. Note: Take care for a robust mechanical mounting of the optical components. If possible the delivered components should be directly tightened to an optical table without further positioning equipment (like height adjustment). If there are oscillating components with resonance frequencies within the control bandwidth in the set-up, such resonances can provoke oscillations of the system at that frequency. The following figures show a selection of possible arrangements. These examples are demonstrated with the 4-axes system with two detectors. However, they can be applied in similar configurations for the 2-axes system with only one actuator and one detector. Figure 21 shows a typical 4-axes set-up of the system where the laser beam hits the optical components in the following sequence: steering mirror, combination of steering mirror and detector, mirror with detector. page 15 of 35

16 Figure 22 shows a similar set-up where additional lenses are placed in front of the detectors. Further, a beam splitter is integrated in the beam path. This set-up might be better for lasers with large beam diameters. In figure 23 a lens is placed in front of detector 2 in order to improve the angular resolution. In this case, the distance between lens and detector should be the focal length of the lens. The focal length itself should be chosen in that way depending on the beam diameter that the focal spot is not too small. In case of 4-QDs the beam should still have a diameter on the sensor area of > 50 µm, so that it hits all quadrants of the diode. (The gap between the quadrants of our standard 4-QD is 30 µm.) Figure 24 shows a variation of 23 where both detectors are placed behind the same mirror. In order to measure both, the beam position and the direction at the same point, a lens is placed in front of one of the detectors. Figure 26 finally shows a different arrangement where the 4-axes system is used as two 2-axes systems, i.e. the two stages of the controller are used to separately stabilise two independent beam lines. Note: In some cases in set-ups where the distance between the actuators 1 and 2 is rather small a positioning error can occur. This is the case if detector 1 is not placed sufficiently close behind actuator 2. A lens in front of detector 1 can eliminate this positioning error. The lens and the distances should be chosen in a way that the front surface of the mirror is imaged on the detector. The distances and the focal length f of the lens can be calculated with the lens equation 1/f = 1/b + 1/g. While g is the distance between the mirror's surface and the lens, b is the distance between the lens and the detector surface. Figure 21: Typical sequence of components for the 4-axes stabilisation: Detector 1 stabilises the beam position on actuator 2. Detector 2 then defines the beam position at a separate point and hence the direction. Figure 22: Set-up as in 21, with an additional beam splitter and a lens in front of detector 1 and an additional lens in front of detector 2 (Often used for lasers with larger beam diameters) page 16 of 35

17 Figure 23: Set-up as in 21, but a lens is used to discriminate the angle by means of detector 2. This can be of advantage in case of restricted space with small distances between the optical components. Detector 2 must be placed in the focal plane of the lens. Figure 24: This set-up shows a variation of figure 23. Both detectors are placed behind the same mirror in order to measure both, the beam position and the direction at the same point. A lens is placed in front of one of the detectors which discriminates for the angle. Figure 25: Set-up of a 4-axes system used as two 2-axes systems. With this set-up the position of two independent lasers can be stabilised with one controller Inputs and outputs The first steering mirror (figure 2) is connected to the Actuator 1 output. The second steering mirror is connected to Actuator 2. The connection of the detectors to the controller unit is made by a LEMO cable with a length of 4 m and an adapter cable that splits the LEMO cable into four separate cables. These cables are connected to the detectors according to the following rules: The x and y lines have to be connected in accordance to the orientation of the detector housing. If the detector is oriented in vertical orientation as shown in figure 4, the x line has to be connected to the x output and the y line to the y output. If the detector is turned by 90 to a horizontal orientation as shown in figure 3, the x line has to be connected to the y output and the y line to the x output. At the other end, the LEMO cables of the detectors are connected to the respective detector inputs at the controller module. page 17 of 35

18 Notes: The PKS steering mirror mounts can be mounted in two orthogonal orientations. In the standard factory installation they are mounted and labelled in that way that the x axis drives the horizontal tilt and the y axis drives the vertical tilt. If you change the orientation please take care that always the horizontal tilt must be connected to the x input and the vertical tilt must be connected to the y input of the controller box. In case of the 2-axes system you can either use the first or the second stage for stabilisation Intensity adjustment Adjustment of sensitivity with 4-QDs To make sure that the detectors operate in the linear range, the power level can be adjusted by tuning the potentiometer for intensity variation (see figure 26). For that purpose, switch on the system (Power on) and inactivate the closed-loop control (Stop button switched off, green Active-LED and LED on button off). Then adjust the laser beam onto the detectors in that way that at least 3 but not more than 9 elements of the power level display are shining. The amplification increases by counter-clockwise rotation. If you do not find an appropriate adjustment you have to exchange the optical filters in front of the 4QDs (see section 5.5.3). If the required filters are not available please contact the manufacturer or distributor. Notes: In a standard delivery we integrate two optical filters in front of the sensor area. These are filters with a high and a low density for coarse and fine adjustment, respectively. Usually the filter which is the first to be reached is the low density one. Please be aware that the sensor area is quite sensitive. If you want to clean it you should do this carefully with a dry cloth. Figure 26: 4-quadrant-diode. The arrow points to the potentiometer for intensity variation (Please use a screwdriver) Adjustment of sensitivity with PSDs page 18 of 35

19 The only difference to the adjustment of 4-QDs is that the PSDs have small push-buttons instead of the potentiometer. The adjustment can be carried out with the delivered metal pin by means of soft pushing. There is a small push-button for each direction behind the bores in the housing (see the arrows in figure 27). With the upper push-button you can increase the gain step by step, with the lower push-button you can decrease it. There are 64 steps between the highest and the lowest gain. This corresponds to a change of the sensitivity by a factor of 20. Figure 27: PSD detector. The arrows point to the push-buttons of the digital potentiometers for the gain adjustment (which can be carried out with the delivered metal pin) If you do not find a fitting adjustment, you can exchange the optical filters in front of the PSD sensors How to replace the optical filters in the detector housing In some cases it can be necessary to exchange the optical filters. The filters are fixed to the housing with two plastic screws. To replace the filters carefully open the plastic screws. You can use forceps to hold the screws during the fixation Direction coding detector outputs For any deviation of the laser beam position on a detector the respective steering mirror is tilted in that way that it adjusts the laser beam back to the desired position. Each control stage makes use of a steering mirror and a detector as described in sections 5.2 and 5.3. The components that are working together are identically coloured in figures The direction in which the steering mirror must be tilted depends on the arrangement of detector and steering mirror. It can be changed during the pre-adjustment process described in section 5.7 in the following way: There are four switches on the right side of the controller module (see figure 7). These switches stand for the x and y directions of the control stages Stage 1 and Stage 2. To turn them into the correct position just switch on the respective stage. If the laser beam is then deflected into an extreme x (horizontal) and/or y (vertical) position instead of the centre of the detector, you have to toggle the belonging switch Optimisation of laser beam position on detectors page 19 of 35

20 i. Coarse adjustment (Obtaining linear range of steering mirrors): Activate the controller module (Start button switched on, green Active-LED and LED on button shining) and adjust the laser beam onto the detectors by means of manually tilting the steering mirrors until the four Range signals on the Piezo amplifiers are shining green. Now the steering mirrors are operating in their linear range. ii. Fine-adjustment (Obtaining zero position and full range of Piezo drives): Inactivate the controller module (Piezo drives are in zero position, green Active-LEDs are dark) and adjust the laser beam by means of manually tilting the steering mirrors in that way, that it hits the centres of the detectors. This can be done by reading out the x and y position outputs of the controller module or by observing the position display on the backside of the detector module. The position outputs deliver a signal that is directly proportional to the deviation from the desired position. You can easily display these signals on an oscilloscope. The better the correlation of desired position and zero position, the smaller the position shift after activating the closed-loop control. After these adjustments the system should show no fluctuations of laser beam position after the last mirror with detector when the controller is activated Adjustment and read-out of the proportional element (P factor) Usually the factory settings of the proportional and integral elements of the control loop lead to a very stable performance of the beam stabilisation system with desired bandwidths. That is why no user interactions are required to adjust the control loop. However, in specific cases the user might wish to adjust the control loop for his application. Such cases can e.g. be set-ups with rather long arm lengths. Since the control loop is mainly influenced by the proportional element, the system offers a direct access to the P factors of both control stages by means of potentiometers. The potentiometers are located at the side panel of the controller box (figure 7). They are labelled with P1 and P2. The adjustment can be done separately for each stage. An increase of the P factor usually leads to an increase of the overall bandwidth. In order to optimize the performance, we recommend to start with a small P factor and operate the system in this stable configuration. Then you can increase the P factor by simply turning the potentiometer in clockwise direction, until the system reaches its stabilisation limits and starts to oscillate. The potentiometers should then be turned back to a level, where an operation without oscillations is guaranteed. Notes: The optimal P factors of stage 1 and 2 can differ. If the distances of the optical components, the beam diameter, the laser intensity, or other laser data change, the P factor of the overall system might also change. The system is also equipped with an interface in the form of analog inputs for a remote setting of the P factors. The remote adjustment connectors are integrated into the controller box in addition to the potentiometers. They are labelled with P1-sig and P2-sig (figure 7). Whenever a voltage signal is applied to the remote adjustment, the potentiometers are ineffective. The input voltages can be set between 0 and 5 V. The interface can also be used to read out the current voltages as set by the potentiometers. Specification Input/output voltage range Connector Cable set 0 +5 V LEMO 00 series LEMO 00 BNC for each stage, length 2 m Note: The remote adjustment has to be driven with a low impedance voltage source (<= 1 kohm), whereas the read-out drives only high impedance terminations (>= 1 Mohm). page 20 of 35

21 6. Operation and safety features 6.1. Power level and position display The total power on each connected detector is displayed by means of a LED bar on the backside of the detector module. Furthermore, a LED cross on the detector module displays the current laser beam position. If the laser beam hits the centre of the detector only the green LED of the position display will shine. In other cases also yellow and red LEDs will shine according to the examples in figure 28. a) c) b) d) Figure 28: Examples for laser beams hitting the detector (orange spots) and the corresponding position display. The left pictures are shown in a view from the rear side of the housing to the sensor area. If only green and yellow LEDs are shining the sensor electronics is in the linear range where a direct correlation between measured signal and position exists. If a red LED is shining too, the correlation is no more possible due to the principle of 4-QDs. In case of the PSDs, if a red LED is shining, the beam probably hits an edge of the sensor area. Please check if the full diameter of the beam hits the sensor area Low power switch-off If the total power falls below 10% of the saturation power (and only one LED of the power level display is on) the controller module automatically drives the mirrors into zero position. This leads to the advantage that the closed-loop control can start from the zero position even if the laser was switched off or blocked Switch-on activity delay The integrated switch-on activity delay starts the controller module not before a short time has passed and the steering mirrors have reached the zero position. The Active-LED will not shine during this delay Controller status signal (interlock) If the system is completely switched off (power-off), the PKS and PSH Piezo actuators tilt the steering mirror into an extreme position. This is about 0.5 mrad (PKS mount), 1.0 mrad (PSH mount) from the zero position. (The P4S30 does not show this behaviour due to its design with 4 Piezo stacks.) However, the system is equipped with a TTL output that can be used to block or electronically switch off the laser in order to avoid damage by the misaligned beam. The level is HIGH whenever the controller module is active and the steering mirrors are in the correct range or in zero position. It is LOW if the module is page 21 of 35

22 active and one of the actuators is out of range. (If the controller is not active, the level is always HIGH.) Status signal Description Signal Connector 1 output for both stages TTL, low if Piezo is out of range LEMO Bandwidth limitation switch The controller bandwidth directly influences the quality of the stabili sation. The system can be operated with two different controller bandwidths. The default setting is the high bandwidth. However, especially in case of unstable mechanical set-ups or if a mutual interference of the control stages occurs it can be of advantage to choose the low bandwidth. Therefore a bandwidth limitation switch is integrated in the controller module (Bandwidth, see figure 7, H = high, L = low bandwidth). The bandwidth can be chosen independently for both stages. Note: The system uses the intensity centre of the transversal laser beam profile. It does not reduce fluctuations of the laser beam profile itself. 7. Option: Sample&hold circuit ( ADDA ) Function: Fix the laser beam during laser off times In some applications with the laser beam stabilisation the laser beam might be switched on and off during the operation. In laser off times there is no intensity on the detectors and hence no control signal for the closed-loop controller. In such situations, the Compact beam stabilisation without additional measures will drive the Piezo-driven steering mirrors into a defined position, the so-called zero position. Once the laser is switched on again the stabilisation will start its operation from this position. The zero position should have been used for the first adjustment of the optical set-up. That is why this is usually a good starting point for the stabilisation. However, in cases of large drifts of the laser beam in the overall set-up, the zero position can at least in the long term strongly deviate from the required steering position. Switching on the laser after a time interval without laser beam and resuming of the stabilisation can therefore lead to an undesired initial spike of the beam position. With the additional sample & hold circuit in the Compact beam stabilisation system the positions of the steering mirrors can be fixed for an arbitrarily long time interval without control signal or laser intensity on the detectors. In that way it is possible to start the control-loop after switching on the laser not from the zero position but from that latest stabilised position. The additional sample & hold (S&H) circuit is of special advantage for the following applications: In all systems where the laser must be switched on and off several times during the laser process, e.g. in material processing machines. Even if the system has drifted away from its basic adjustment, the beam position will start from the last stabilised position after resuming of the control loop. In this way an oscillation of the beam from the zero position to the desired position is eliminated and a potential faulty processing of the work piece is prohibited. In systems with a very large distance between the steering mirrors and the detectors. These setups bear the risk that a drift changes the adjustment in that way, that the laser beam will no page 22 of 35

23 longer hit the detector in uncontrolled intervals. Thus, it can happen, that the beam stabilisation can not catch the beam on the detectors after a resuming of the stabilisation when the laser was switched off for some time. In systems with very low repetition rates or lasers with irregular intervals of laser pulses (or pulse packages). If the S&H circuit of the beam stabilisation is triggered for each laser pulse, the beam position will get closer to the desired position with each pulse. The name ADDA is derived from the functional aspect that the actuators' drive signals are first AD converted and digitally stored before they are subsequently DA converted again and fed to the amplifiers of the mirror actuators Technical specification Sample & Hold circuit Storage principle Sampling rate Freezing interval Requirement for automatic triggering Digital storage of position data 25 khz Unlimited Minimal laser on time: > 100 ms Trigger Signal levels TTL, high for laser on, low for laser off Connector 2x LEMO 00, separate connectors for stage 1 and stage 2 Minimal length of trigger signal high tmin 10 µs 7.2. Modes of operation Automatic control of sample & hold elements The beam stabilisation with additional S&H circuit includes an automatic recognition of laser on and off states. This is done by sampling the intensity on the position detectors. The automatic operation controls the S&H elements in order to store the signals in laser on times and fix the position of the steering mirrors during intervals with no intensity. For this automatic control the laser on intervals or the respective duration of pulse packages must be longer than 100 ms. There is no need for the user to provide any trigger signals for this mode of operation. External triggering of the sample & hold elements For single laser pulses or lasers with very low repetition rates, modulated cw lasers or pulse trains < 100 ms the automatic control can not release the stored beam position in due time. In such cases it is necessary to control the S&H elements by means of external triggering. The requirements for the trigger signals are described in section Configuration and start of operation Cabling In the operation mode of automatic control there is no need for additional cabling. page 23 of 35

24 If the external triggering is used, the trigger signals have to be fed into the controller box via the respective LEMO connectors marked with Trig (see figure 29). The left connector controls the S&H function for stage 1 / steering mirror 1. The right connector controls it for stage 2 / steering mirror 2. Figure 29: Left panel of controller box with trigger inputs External triggering The external triggering enables an accurate timely assignment when the system shall store the position of the steering mirrors and when the position shall be fixed. This assignment is especially important in case of single laser pulses. For an optimal function of the S&H circuit there are time restrictions for the trigger signal which should be met. Figure 30 illustrates the respective tolerances of the trigger signal. Duration of trigger signal: tmin 10 µs Start time of trigger in relation to start of laser on interval: -10 µs τ1 50 µs End time of trigger signal after end of laser on interval: τ2 1 ms Figure 30: Timing of trigger signal The electronic requirements for the trigger signals are: TTL levels Level high when there is laser intensity on the detectors, level low when there is no intensity page 24 of 35

25 Start of operation Whenever the stabilisation is de-activated (i.e. the Start/Stop button is in off-state) the stored position of the steering mirrors is reset. In this state the steering mirrors are in their zero position. In this way it is guaranteed that the system can be adjusted as described in this user manual. Notes: Please note that the last position of the steering mirrors is lost whenever the stabilisation system is de-activated. As soon as the system is started again it starts from the zero position of the steering mirrors. In case of large distances between steering mirrors and detectors there is a risk that the beam will not hit the detector without a prior re-adjustment Performance The performance of the additional S&H circuit shall be explained in the following sections with the help of some examples. In figure 31 a sequence of pulse trains with a repetition rate of 1 khz and a duration of about 300 ms was applied. The pulse trains are displayed with green colour. The violet curve shows the position signal of the laser on the detector. During the first pulse train the stabilisation was de-activated. You can see that the pulse does not hit the detector in the centre. During the second pulse train the stabilisation was started. You can see an initial spike of the position (enlarged view is shown in figure 32) and then a stable position signal which is also stable during the third and fourth pulse train. Without the S&H circuit the spiking of the steering mirror would occur again and again in the second and all following pulse trains. Figure 31: Activation of control-loop Figure 32: Enlarged view of figure 31 At the time the beam stabilisation is started the steering mirrors are in their zero position. Since this position usually differs from the desired position the system recognises a strong control amplitude immediately after its activation. This leads to the described spike. In normal use cases where the laser provides a continuous control signal this is not a problem since the controller always gets a signal. However, in case of the applications mentioned in section 7 there are time intervals without a control signal. In these cases the additional S&H circuit becomes effective: After time intervals without laser intensity the stabilised operation is re-activated for the next pulse train without a larger spike. This will be demonstrated in the following sections Automatic control and Operation with external trigger. Without the S&H circuit it would have started from the upper position and would have produced a spike. Only for the first pulse train the S&H circuit has no influence since at this time there are no valid position data for the desired position in the S&H elements. After that the control signals for the steering page 25 of 35

26 mirrors are stored continuously and for arbitrarily long time intervals where there is no intensity (or no trigger low signal). This is true as long as the stabilisation system is switched on and activated. Automatic control The operation mode of automatic control is especially suited for long switching periods of the laser light or long trains of single laser pulses. In figures 33 and 34 an example with pulse trains of a laser with a repetition rate of 1 khz is illustrated. Again, the green curve shows the laser signal and the violet curve shows the position signals. In figure 33 the laser is running without stabilisation. In figure 34 it is running with the automatic control. In the latter case the position of the steering mirrors is freezed during the laser off times whereby it is refreshed by each signal on the detectors. Figure 33: Pulse trains without stabilisation Figure 34: Pulse trains with automatic control During the operation, the laser intensity should not be modulated by means of a laser shutter or another blocking component. Due to their functional principle the detectors would determine a wrong position for the short times of a partly blocked beam. Therefore the position signal would be distorted. Notes: The laser intensity should not be modulated by means of covering the laser beam. This can lead to wrong signals for the position of the steering mirrors. For technical reasons, in the operation mode with automatic control the timing for the position freeze and the re-start of the stabilisation is slightly delayed to the on and off times of the laser intensity. This can lead to slight deviations of the stored positions. Operation with external triggering In case a trigger signal for the laser on and off times is available, we recommend to choose the operation mode with external triggering. The improved timely correlation with the laser intensity usually leads to a better performance. Figure 35 shows the example, now with external triggering. In addition to the curves described above you can see now the trigger signal as a blue curve. page 26 of 35

27 Figure 35: Pulse train stabilised with external trigger As shown in this example, in case of pulse trains there is an advantage not to trigger on each single pulse but on the start and the end of the pulse train. This is recommended for pulse repetition rates of about 300 Hz and higher. Operation with single laser pulses and external trigger The use of an external trigger signal also enables the stabilisation of single or irregularly occurring laser pulses or lasers with very low repetition rates. The performance in such cases is illustrated with an example in figure 2. Here, the position signal of a laser pulsed at 10 Hz is shown as a violet curve. The green curve shows the trigger signal for single laser pulses. At the beginning, the laser beam is at an arbitrary position. The beam stabilisation was started at the time of the fourth laser pulse (counted from the left). In the following course you can see very well that the beam gets closer to the desired position with each pulse until it finally stays in the desired position in a stable manner. Figure 36: Single laser pulses (10 Hz) In this example only four additional pulses are required to reach the stable position. Depending on the set-up of the optical system, the pulse duration and the duration of the external trigger signal the number of required pulses can be different. Note: The time interval for the stabilisation is very short in case of short trigger intervals. Since the page 27 of 35

28 Active LED on the front panel of the beam stabilisation system is directly connected to this time interval, it can happen that you will not recognise the shining of the LED due to the short time. 8. Option: Adaptation for low repetition rates For lasers with low repetition rates (e.g Hz) the detector electronics can be modified in order to maintain a position signal in the time gaps between two laser pulses. Notes: Due to the low repetition rate the controller is then also optimised to low bandwidths. For lasers with even lower repetition rates we recommend our ADDA module (section 7). 9. Option: External activation The external activation enables the change of the operation state of the beam stabilisation system with an external signal. There are three operation states. The specification of the control signal is as follows: Signal (Level: 5V TTL) H (high) L (low) Z (high impedance or not connected) Voltage range Controller status V V Start Stop Manual mode according to selection on front panel Reaction of Active LED on off on/off The external activation can be independently applied for stage 1 and stage 2 of the stabilisation system. For this purpose, two LEMO connector plugs (series 00) are embedded on the left panel of the controller box. The inputs are marked as Ext and are next to the respective detector inputs. 10. Interfaces, additional inputs and outputs (Options) Beside the inputs for the detectors and the outputs to the actuators the basic configuration of the Compact beam stabilisation provides the following outputs: Status signal (see section 6.4) Position signals x and y of each detector (analog voltage signal -5 to +5 V) Adjustment and read-out of the proportional element (P factor) (see section 5.8) Other signal outputs or inputs can be provided as options. Note: In some cases the arrangement of the connectors on the side panels have to be changed Direct drive of Piezo actuators ( Drive Actuator ) As an option for the direct drive of the Piezo actuators (i.e. without feedback from the detectors) we can implement additional input channels to the controller. It is then possible to drive the actuators with an external voltage signal. This option makes use of the integrated 4-channel high-voltage amplifier of the system. page 28 of 35

29 Specification Inputs Outputs / to Piezo actuators Output impedance Integrated 140 V voltage converter 4 signal inputs (LEMO 00) on side panel, - 5 V + 5 V 4 voltage outputs on side panel, LEMO 0S series, 9 V to 120 V 110 Ohm@1 khz, designed for high capacitive load The input signal will be converted to a high-voltage signal which is fed to the Piezos. Notes: The specification of the voltage range for the PKS / PSH Piezo actuators is - 20 V to V. For the P4S30 it is - 45 V to V. We have specified the voltages for the valid range of the green Range LEDs on the controller box to values of 9 V to 120 V (max. range V). There is a non-linearity in both, the characteristics of the Piezos and the amplifiers. Therefore the signal will not be fully proportional to the input signal. If you need a precise and absolute position of the steering mirrors (without the control-loop which usually gives the position feedback) you should carry out a calibration of the angles versus voltages. It is also possible that the x and y axes of the same Piezo actuator vary strongly Voltage offset inputs to move the target position on PSDs ( Adjust-in ) As described in section the measurement principle of PSDs allows to move the target position on the detector by means of a voltage offset. For this purpose we can implement additional inputs for the x and y axes of both stages, 1 and 2. These inputs can be used to change the still stabilised beam position by an external source. The input voltage range of these inputs is -5 V +5 V. Figure 3 shows the modified side panel of the controller box with additional Adjust-in inputs for the voltage offset. Figure 37: Right panel with additional Adjust-in inputs for x and y position of two PSDs Specification Description Signal Connector Cable set 2 inputs LEMO 3-pin, one for each actuator (x, y) Analog, - 5 V + 5 V LEMO 0S LEMO 3-pin 2x BNC for each stage, length 2 m Note: The position vs. voltage characteristics of a PSD is usually not linear. Therefore, a calibration should be performed if the target shall be moved on a desired path Intensity outputs at controller page 29 of 35