C Sensor Systems. THz System Technology and. Prof. Dr.-Ing. Helmut F. Schlaak

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1 THz System Technology and C Sensor Systems Prof. Dr.-Ing. Helmut F. Schlaak Fachgebiet Mikrotechnik und Elektromechanische Systeme Fachbereich Elektrotechnik und Informationstechnik Technische Universität Darmstadt

2 Motivation Realisation of a modular integrated lab-on-chip Realisation of a complex imaging sensor system Establishment of compatible interfaces Multiscale simulations LOEWE-Schwerpunkt "Sensors towards Terahertz" Helmut F. Schlaak 2

Wave Detector Electrical l Signal Laser Sample Preparation Signal Processing THz Sensors THz

3 Lab-on-Chip Combination of single components to an integrated sensor system Miniaturization demands the connection of the components within smallest space Optical Beat Signal Wave Source Sensor Fluid Wave Detector Electrical l Signal Laser Sample Preparation Signal Processing THz Sensors THz Technology THz System Technology LOEWE-Schwerpunkt "Sensors towards Terahertz" Helmut F. Schlaak 3

C1 System Integration of Detector Arrays for Surface Analysis

defects and disturbances at surfaces and interfaces with THz

arrays for compact Photograph imaging systems suitcase High

heterogeneous materials image (one plane) Large samples need

of detector arrays for surface analysis and nondestructive

reconstruction Good identification and classification

4 C1 System Integration of Detector Arrays for Surface Analysis and 3D Imaging Problem: Electronic detection ti of hidden defects and disturbances at surfaces and interfaces with THz signals Detection at room temperature Integration of detector arrays for compact Photograph imaging systems suitcase High sensitivity and dynamics necessary for samples with heterogeneous materials image (one plane) Large samples need rotatable synthetic or large detector arrays Goal: Development of detector arrays for surface analysis and nondestructive material testing with High resolution Possibility for 3D-image reconstruction Good identification and classification characteristics LOEWE-Schwerpunkt "Sensors towards Terahertz" Helmut F. Schlaak 4

5 C1 System Integration of Detector Arrays for Surface Analysis and 3D Imaging Phased array antennas Electronic beam steering with liquid crystal phase shifters ( B4) For imaging systems only one detector per antenna group necessary Sub Group Source Data Processing Unit Detector Antenna Phase Shifter Object under Test LOEWE-Schwerpunkt "Sensors towards Terahertz" Helmut F. Schlaak 5

6 C1 System Integration of Detector Arrays for Surface Analysis and 3D Imaging Phase controlled antenna group with Schottky detectors t and electronic beam steering Beam steering Fully electronic Hybrid with electronically steerable subgroups Mounting technology Planar Waveguide technology Goal Optimization of the sensitivity Higher degree of Integration Broadband Vivaldi antenna element with integrated LC Phaseshifter B3 Low-noise sensitive Schottky detectors B4 Tunable THz liquid crystal components C4 THz antennas for arrays LOEWE-Schwerpunkt "Sensors towards Terahertz" Helmut F. Schlaak 6

under Test Detector Detector Array Antenna Antenna

an image of the environment One sensor per pixel 11.04.

7 C1 System Integration of Detector Arrays for Surface Analysis and 3D Imaging Detector Array Source Object under Test Detector Detector Array Antenna Antenna array with integrated detectors for the aquisition of an image of the environment One sensor per pixel LOEWE-Schwerpunkt "Sensors towards Terahertz" Helmut F. Schlaak 7

8 C1 System Integration of Detector Arrays for Surface Analysis and 3D Imaging Highly integrated t CMOS detector t arrays for frequencies > 1 THz Development of integrated antennas for frequencies > 1 THz ( C4) Schottky detector arrays Antenna CMOS Technology Detector for room- Amplifier Development of large focal plane arrays Integration of the evaluation electronics Constant impedance of the detector independent of the frequency 1 THz Focal-Plane-Array in Array of single elements without focussing lens Integration with approved ACST film diode process Cooperation Partners: temperature applications LOEWE-Schwerpunkt "Sensors towards Terahertz" Helmut F. Schlaak 8

9 C2 THz Sensor System Technology Optical Beat Signal Source Sensor Fluid Wave Wave Detector Electrical Signal Laser Sample Preparation Signal Processing THz Sensors THz Technology THz System Technology Goal Integration of different THz components in a complete system LOEWE-Schwerpunkt "Sensors towards Terahertz" Helmut F. Schlaak 9

C2 THz Sensor System Technology Quelle Sensor Detektor Optical Bead

Processing THz Sensors THz Technology THz System Technology

Design of optical waveguides and planar couplers as interconnections

10 C2 THz Sensor System Technology Quelle Sensor Detektor Optical Bead Signal Wave Fluid Wave Electrical Signal Sample Preparation Signal Processing THz Sensors THz Technology THz System Technology Integration of VCSEL (B2) Integration of photoconductive mixers (B1) Design of optical waveguides and planar couplers as interconnections LOEWE-Schwerpunkt "Sensors towards Terahertz" Helmut F. Schlaak 10

11 C2 THz Sensor System Technology Quelle Detektor Optical bead Signal Fluid Wave Wave Electrical Signal Micropump Signal Processing THz Sensors THz Technology THz System Technology Integration of THz waveguides Integration of sensors (A1- A5) by adopted reaction chambers Integration of microfluidic channels and pumps for the sample preparation LOEWE-Schwerpunkt "Sensors towards Terahertz" Helmut F. Schlaak 11

12 C2 THz Sensor System Technology Methods Microfabrication in a cleanroom environment PDMS-molding High aspect ratio UV-lithography Electroplating Fluidic structures made of silicone Rectangular waveguides Optical structures t out of polymers LOEWE-Schwerpunkt "Sensors towards Terahertz" Helmut F. Schlaak 12

C3 Efficient Numerical Simulation with Individually Tailored Algorithms Goal of the work package Simulation of the distribution of electromagnetic

13 C3 Efficient Numerical Simulation with Individually Tailored Algorithms Goal of the work package Simulation of the distribution of electromagnetic fields in materials with integrated microstructures (e.g. metamaterials, graphene structures) Consideration of geometrical structures that are small in comparison to the complete component Incident wave Coating (BCB) 6 m Substrate t (Si) 1000 m Transmitted wave Metamaterial Split Ring (Gold) 26 m x 26 m Example: planar metamaterial used as a sensor in the THz frequency regime LOEWE-Schwerpunkt "Sensors towards Terahertz" Helmut F. Schlaak 13

14 C3 Efficient Numerical Simulation with Individually Tailored Algorithms Homogenization approach Description of the available metamaterial with the help of a spatial homogenization by means of a frequency dependent material unit cell including sample material averaging Periodic Material Structure Sample Frequency Dependent Material LOEWE-Schwerpunkt "Sensors towards Terahertz" Helmut F. Schlaak 14

C3 Efficient Numerical Simulation with Individually Tailored Algorithms Surrogate

allows to simulate even large electrical components With the help of suitable modeling

Homogenized material with frequency dependent properties Example: planar metamaterial used

15 C3 Efficient Numerical Simulation with Individually Tailored Algorithms Surrogate arrangement used for an efficient i description Utilization of a homogenized material allows to simulate even large electrical components With the help of suitable modeling less degrees of freedom are required (optimization) Incident wave Transmitted wave Homogenized material with frequency dependent properties Example: planar metamaterial used as a sensor in the THz frequency regime LOEWE-Schwerpunkt "Sensors towards Terahertz" Helmut F. Schlaak 15

16 C4 THz Antennas for Arrays Aim Usage of antenna elements in THz antenna group Prototypes of electrical steerable antennas in the THz regime Improved methods for the antenna characterization in the THz regime Preliminary Work Single Antennas Characterization LC Reflectarrays 10mm Characterization of reflectarray antennas THz antennas with integrated Schottky detector (on the left) und photoconductive mixer (on the right) W-Band nearfield reflector characterization 77 GHz steerable reflectarray based on liquid crystals LOEWE-Schwerpunkt "Sensors towards Terahertz" Helmut F. Schlaak 16

C4 THz Antennas for Arrays Single Antenna Array Concept Choosing a single antenna in respect of

phaseshifting structures and THz Schottky diodes ( B4) Design Simulation Measurement Technology

( B5) Decoupling of the single elements in antenna groups Measurements of antenna groups in near- and

17 C4 THz Antennas for Arrays Single Antenna Array Concept Choosing a single antenna in respect of Antenna structure Radiation characteristics Polarization characteristics Integration with THz phaseshifting structures and THz Schottky diodes ( B4) Design Simulation Measurement Technology Ability of technical realization Small dimensions due to small wavelength Microfabrication techniques ( B5) Decoupling of the single elements in antenna groups Measurements of antenna groups in near- and far field Simulation and optimization tools( C3) LOEWE-Schwerpunkt "Sensors towards Terahertz" Helmut F. Schlaak 17

18 Summary Demonstrators t Modular Lab-on-Chip Industrial demonstrator Supporting the design process with new simulation methods A Sensors and Sensor Concepts B THz Technology C THz System Technology and Sensor Systems Integration of THz components and sensors to systems LOEWE-Schwerpunkt "Sensors towards Terahertz" Helmut F. Schlaak 18

TERAPOD. Terahertz based Ultra High Bandwidth Wireless Access Networks

TERAPOD. Terahertz based Ultra High Bandwidth Wireless Access Networks TERAPOD Terahertz based Ultra High Bandwidth Wireless Access Networks To investigate and demonstrate the feasibility of ultra high bandwidth wireless access networks operating in the Terahertz (THz) band.