Measurements with the LeCroy SPARQ and Cascade Microtech Probes Using WinCal XE Calibrations

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1 Measurements with the LeCroy SPARQ and Cascade Microtech Probes Using WinCal XE Calibrations LeCroy Corporation and Cascade Microtech APPLICATION NOTE Introduction Measurements on two printed circuit boards (PCB) were taken using probing solutions from Cascade Microtech and network analysis solutions from LeCroy. The goal was to determine the quality of measurements taken on a LeCroy SPARQ 44E Signal Integrity Network Analyzer, and to determine the compatibility with Cascade Microtech probes. Two model ACP4-D-GSSG-4 Cascade Microtech probes were used. The probe s part number can be understood as follows: ACP specifies an air coplanar probe, 4 means 4 GHz (using 2.92 mm connectors), D means differential Figure 1 LeCroy SPARQ with Cascade Microtech probe station (dual) tips, GSSG means that the tips are arranged in a ground-signal-signal-ground geometry, and 4 means that the tips have 4 micron pitch. The testing was performed using two boards. The first board was the standard demo board utilized with the SPARQ. This board comes with two adjacent differential coupled traces with 2.92 mm edge connectors and two differential loss measurement traces. The differential loss measurement traces were utilized for this exercise. The second board was a test board manufactured by Connected Community Networks, Inc. (CCN). CCN is a test lab run by Dr. Don DeGroot, formerly of NIST, who performs test services and works closely with LeCroy. In order to de-embed the probes, we used two distinctly different methods. The first method utilized a second-tier calibration of the SPARQ. The second method utilized the SPARQ application s time domain gating feature. 1

2 The second-tier calibrations were performed by first measuring Cascade Microtech impedance standard substrates (ISSs). These substrates contain calibration standards with models provided by Cascade Microtech. Two substrates were utilized: the A, which contains shorts, opens, and loads for GS and SG probes between 25 and 125 µm, and the GP Thru, which provides thru standards for GSSG probes for pitches between 3 and 95 µm. The models for the standards are shown later in this document. After taking calibrated measurements of these standards, error terms were generated for use in the SPARQ application in two manners. First, models were generated for the calibration standards, and the standards measurements and models were converted into an error model using the SPARQ s internal SOLT calibration algorithms. Second, the measurements were read into WinCal XE, a sophisticated piece of software developed and sold by Cascade Microtech, and various calibration algorithms were applied. All of the available four-port calibrations were utilized, including SOLT, SOLR, hybrid SOLT-SOLR and LRRM-SOLR. The results of the measurements utilizing all of the WinCal XE algorithms, the SPARQ internal SOLT algorithm (specifically comparing to the WinCal XE generated error terms), and the internal time-gating features of the SPARQ were compared; all of these measurements performed favorably. The remainder of this document describes the process utilized and documents our results. Probing System and Measurement Arrangement Figure 1 shows the arrangement of the SPARQ in the probing station. The cables that connect to the SPARQ are provided with the instrument. In this arrangement, it is advantageous to use right-angle connectors with the probes. (Only one set was needed, but in retrospect, applying the right-angle connectors to both probes would have been easier.) The SPARQ is located off to the left and slightly above the platen. The probe station employs a vacuum table, which holds the board down and in position. Two positioners are used that are magnetically attached to the platen and that offer x, y, and z adjustment along with planarity adjustment of the probes. Planarity Adjustment Before any measurements were taken, each probe was adjusted for planarity. Planarity adjustment was performed with a contact substrate which is an alumina substrate with a gold top layer. While examining the probe under the microscope, the probe is landed on substrate and a small amount of over-travel is dialed-in. Then, the probe is lifted off the substrate and the substrate is examined under the microscope. Ideally, four identical black lines are seen on the substrate, each corresponding to one of the four GSSG probe tips. If darker lines are drawn on one side of the probe with corresponding dimmer lines on the other, the planarity is adjusted and the exercise is repeated until the lines are symmetric. Interestingly, the dark lines are not caused by the probes scraping gold of the substrate. Instead, the gold is burnished at the probe touchdown point and the shinier gold reflects the light away from the microscope causing it to look dark. 2

3 Board Measurements The four-port measurements of the boards were performed first using the SPARQ. The SPARQ software includes an interesting feature that saves all of the TDR and TDT traces acquired during a measurement to a single file. These traces can be played back later and any manner of correction or readjustment of various features of the measurement can be changed, and S-parameters recalculated. This is a degree of flexibility is not found in any other type of instrument. The four-port measurements were performed on: 1. The CCN 4.9 inch differential trace (seen in Figure 2) 2. The CCN 3 inch differential trace 3. The CCN 1 mil trace (utilized for rough calibration of the time gating feature in SPARQ) 4. The LeCroy SPARQ demo board 4 inch trace (seen in Figure 1) Figure 2 CCN Board Measurement using a Cascade Microtech ACP-Dual probe SPARQ Setup As mentioned in the last section, the SPARQ has the unique capability for recording all of the TDR/T traces acquired during a measurement for playback at a later time. Therefore, the measurements taken of the board traces were really taken with the intention of storing the measurement traces after acquisition, and then to perform the various calibration algorithms after playback. Toward that goal, measurement characteristics were setup that made sense for examination of the measurements without the probes de-embedded. Figure 3 shows the setup utilized. Of key interest are the DUT length mode, which is set to <2 inches, and the Normal mode sequence control, which specifies that all TDR acquisitions are taken with 1 software averages for both measurement and calibrations. The SPARQ averages 25 waveforms in hardware, a total of 25 total averages per acquisition were taken for each trace, which, as shown, takes about 5 minutes per measurement. Each measurement is performed by first internally calibrating the SPARQ, which occurs automatically. The SPARQ is configured to de-embed automatically all cables used in the measurement, which sets the reference plane at the cable ends (i.e. the point where the probes are connected to the unit). The SPARQ is configured to generate results to 4 GHz, even though the final measurement is not valid to this frequency. This can be changed later when the calibrations on the stored TDR traces are performed. 3

4 Figure 3 SPARQ setup for 3 in. CCN Board Measurement Figure 4 Port Configuration for differential trace measurements Raw Board Measurements All of the previously listed board traces were probed, and the TDR/T traces from the measurements were saved. One SPARQ feature that was heavily employed prior to measuring the S-parameters was the live TDR mode. This feature was indispensible for confirming that the probe was making good contact, and saved a large amount of time. An example probe touchdown on the boards is shown in Figure 5. The results for the CCN 3 inch trace is shown in Figure 6. Five sets of measurements are shown. In the upper left quadrant the differential insertion loss (lime green) and the common-mode insertion loss (olive green) are shown. The upper right quadrant shows the differential return loss (pink) and the common-mode return loss (blue). 4

5 Figure 5 Probe Touchdown on CCN board (left) and LeCroy demo board (right) Figure 6 CCN 3 inch trace raw measurements The lower left quadrant shows the differential impedance trace (blue) and the common-mode impedance (red). Cursors are placed on the impedance measurements which show a differential impedance of about 15 Ohms and a common-mode impedance of 45 Ohms. The lower right quadrant shows the impedance trace looking into differential port 2. The right side of the screen shows the Smith chart with the differential match (yellow) and the differential insertion loss (green). Of particular interest are the effects of the probe. These are most obvious when viewed from the impedance profile perspective. Figure 7 shows only traces of the differential and common-mode impedance profiles looking into port 1. Figure 8 shows only the differential and common-mode impedance looking into port 2. Here we find that at mixed-mode port 1, the probe is about 255 ps long (including a portion of the tip to board interface) and at mixed-mode port 2 the probe is about 165 ps long (also including a portion of the tip to board interface). 5

6 Figure 7 Differential (blue) and Common-Mode (red) impedance for CCN 3 inch line looking into port 1 Figure 8 Differential (blue) and Common-Mode (red) impedance for CCN 3 inch line looking into port 2 6

7 Calibration Measurements In order to perform a second-tier calibration, multiple measurements were taken utilizing two impedance standard substrates (ISSs) from Cascade Microtech. Figure 9 shows the probes in the alignment setup on the ISS for the A substrate for short, open and load for GS and SG probes. Figure 9 Cascade probes probing ISS for calibration Before performing the calibration measurements, the probes are aligned using alignment marks on the ISS. The key is to arrange the two sets of probes so the tips contact the ISS at a small tick mark offset from the lines and that as the probes our brought down further, the over-travel slides the tips up to the edge of the line. After alignment, the probes were lifted and the open measurement was performed. The open standard was a measurement with the probes in the air out of contact with the substrate. Then, each GS pair (single-ended ports 1 and 3) and each SG pair (single-ended ports 2 and 4) were utilized to measure loads and shorts. Then, a straight thru measurement was performed, followed by a loopback thru measurement, followed by two diagonal thru measurements. 7

8 Alignment Load Measurement Short Measurement Dual Straight Thru Measurement Dual Loopback Thru Measurement Diagonal Thru Measurement Figure 1 Probe calibration measurement arrangements Pictures of the probe alignment for these measurements are shown in Figure 1. The calibration measurements are taken with the same settings as shown previously for the board measurements, except for the following: 8

9 1. No causality, passivity, or reciprocity enforcements were utilized the calibration is expected to correct for any such violations. If desired, these enforcements can be applied to final calibrated measurements. In general, it is not appropriate to apply enforcements of causality, passivity, or reciprocity for calibration standards measurements. 2. Since the probe and the standards are very short, the impulse response limiting is set to 1 ns. Applying this feature causes the SPARQ software to restrict the impulse response (i.e. time domain response) of any S-parameter to operate over this short range. This generates smoother measurement results for calibration. 3. All measurements were performed single-ended. This is because the SPARQ second-tier calibration is always performed on single-ended data prior to any mixed-mode conversion. These settings are shown in Figure 11. The left-side of the figure shows the extended view of the setup dialog, with the unchecked settings for the enforcements, and with the impulse response limiting set to 1 ns. On the right-side of the figure, the SPARQ port configuration is shown. The configuration shown is an example arrangement for a four-port single-ended measurement, but with only the S-parameters for port 3 saved. This was done strictly for convenience; while we could have taken all measurements as single-port measurements, all standards measurements were taken as four-port measurements and the desired result was extracted from the four-port measurement using configurations as shown in Figure 11. Using this approach allows for cross-talk verification. To clarify, for example, for the open standard measurement, a four-port measurement was performed with the probe out of contact with the substrate and each one port measurement was generated by configuring the SPARQ port configuration for the desired measurement result. In this manner, one four-port measurement is taken for each standard measurement, and the desired results are extracted from this measurement using the port configuration shown. Figure 11 SPARQ single-ended standard measurement (1 port from port 3 of four-port measurement) 9

10 Second-Tier SOLT Calibration SPARQ has the capability of applying user calibrations as a second-tier calibration. A second-tier calibration refers to a calibration applied on top of another calibration. Because the standard measurements performed utilized measurements that were calibrated to the cable ends, error-terms calculated based on the calibrated standard measurements (in conjunction with the calibration standard models) serve to mostly de-embed the probes, while also correcting any minor errors in the SPARQ cable and fixture de-embedding. Figure 12 SPARQ calibration dialog showing User Second-tier Calibration capability Figure 12 shows the SPARQ calibration dialog which includes settings for various calibration controls and policies. On the lower right of the dialog, a second-tier calibration capability is provided. Second-tier calibrations are performed in the factory as part of the SPARQ construction and calibration and a factory second-tier calibration box is shown checked. The user can apply yet another calibration by selecting a.l12t file format and applying the calibration by checking the User calibration checkbox. The.L12T file is a LeCroy format, and includes error-terms used internally by the SPARQ software. The SPARQ has the capability of converting several types of error-term formats into the LeCroy format for subsequent application to the measurement. The two error-term formats that are interesting for the purposes of this paper the SOLT conversion and the WinCal XES1P conversion which will be described later. When the Convert button is pressed, another dialog opens requesting information on how to perform the conversion. Here, four ports are selected with 8 points to 4 GHz. In general, a SPARQ prefers these values, although it will always automatically resample data if provided in alternate forms. There is no implication here that the calibration is truly valid to this frequency, but using this configuration provides the most flexibility. In the figure, the conversion type is set to SOLT and an output file selected for the result. The key here is the output file directory, where it is expected to find various information required by SPARQ to generate the error-terms. SOLT Second-Tier Calibration Directory Information The directory where the output.l12t file is to be placed contains the following information before and after the calibration conversion: 1

11 Before Conversion: Standards o Load.s1p definition of the load standard o Open.s1p definition of the open standard o Short.s1p definition of the short standard o Thru12.s2p, Thru34.s2p definition of the loopback thru standard o Thru13.s2p, Thru24.s2p definition of the straight thru standard o Thru14.s2p, Thru23.s2p definition of the diagonal thru standard Standards Measurements o LM1.s1p, LM2.s1p, LM3.s1p, LM4.s1p load standard measurements o SM1.s1p, SM2.s1p, SM3.s1p, SM4.s1p short standard measurements o OM1.s1p, OM2.s1p, OM3.s1p, om4.s1p open standard measurements o TM13.s2p, TM24.s2p dual straight thru standard measurements o TM12.s2p, TM34.s2p dual loopback thru standard measurements o TM14.s2p, TM23.s2p diagonal thru standard measurements ConvertSettings.vbs Additional instructions for the conversion After Conversion: ConversionLog.txt log file showing information on how the conversion proceeded SecondTier_1.s8p, SecondTier_2.s8p, SecondTier_3.s8p, SecondTier_4.s8p error-terms in s- parameter file format for easy viewing SecondTierCalibration.L12T second-tier calibration file which can be imported in SPARQ Standard Definitions The standard definitions were taken from the ISS and probe data sheets provided by Cascade Microtech, or directly out of WinCal XE. Specifically: Load assumed perfect 5 Ohms Open assumed as -7 ff capacitor with no offset length Short assumed as 28.8 ph inductor with no offset length Straight Thru assumed as 5.7 ps 5 Ohm line with skin-effect loss term Loopback Thru assumed as 5.2 ps 5 Ohm line with skin-effect loss term Diagonal Thru assumed as 8.1 ps 5 Ohm line with skin-effect loss term The loss term is provided as: Reference Delay 27 ps Reference Loss -.55 db Reference Frequency 4 GHz 11

12 Such that it follows the following equation: ( ) ( ) [ 1 ] equation for loss for thru elements The models used for the standards definition is provided in Figure 14. These are generated for each standard and stored in the second-tier calibration directory for conversion. Convert Settings When the second-tier calibration is utilized primarily for the purpose of de-embedding, especially for deembedding small things, it is helpful to apply some response length limiting to the data for sake of smoothing. These settings are shown in Figure 13 where 5 ns were utilized. Conversion set app = CreateObject("LeCroy.SparqApp.1") app.sparq.convertsecondtiercalibration.causalityimpulseresponselimitingenabled = True app.sparq.convertsecondtiercalibration.causalitymaximpulselength = 5e-9 Figure 13 ConvertSettings.vbs file used for SOLT conversion Once the conversion settings are entered and it is ensured that all of the standard measurement and definition files exist in the directory specified for the.l12t file generation, pressing the convert or the convert or apply button begins the conversion process. The conversion log file shown in Figure 15 shows how the conversion proceeds. There are many informational messages shown in the log file if a fatal error is detected, it would have been logged as such and the final.l12t file would not have been created. The conversion is to the so-called 12-term error model which consists of the following types of errorterms: Ed m - directivity at port m when port m driven Es m - source match at port m when port m driven Er m - reverse transmission at port m when port m driven Ex nm - crosstalk at port n due to port m driven (generally not used) El nm - load match at port n when port m driven Et nm - forward transmission at port n when port m driven The 12-term model when applied to four ports means that the calibration generates 36 terms. 12

13 Short Magnitude Short Phase Open Magnitude Load Magnitude is zero Open Phase Load Phase is zero Loopback Thru Magnitude Loopback Thru Phase Straight Thru Magnitude Straight Thru Phase Diagonal Thru Magnitude Figure 14 ISS Standard Models Diagonal Thru Phase 13

14 : <2nd Tier Cal> : Second Tier Calibration Conversion Started: 4 ports, 8 points, 4.e+1 end frequency : <2nd Tier Cal> : File Path Specified: C:\Cascade\SoltSecondTier : <2nd Tier Cal> : Second Tier Calibration is SOLT : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\SM1.s1p was found and read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\OM1.s1p was found and read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\LM1.s1p was found and read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\SM2.s1p was found and read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\OM2.s1p was found and read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\LM2.s1p was found and read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\SM3.s1p was found and read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\OM3.s1p was found and read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\LM3.s1p was found and read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\SM4.s1p was found and read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\OM4.s1p was found and read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\LM4.s1p was found and read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\TM12.s2p was found and read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\TM13.s2p was found and read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\TM14.s2p was found and read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\TM23.s2p was found and read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\TM24.s2p was found and read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\TM34.s2p was found and read : <2nd Tier Cal> : cable files not used : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\Short1.s1p not read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\Short2.s1p not read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\Short3.s1p not read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\Short4.s1p not read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\Short.s1p was found and read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\Open1.s1p not read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\Open2.s1p not read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\Open3.s1p not read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\Open4.s1p not read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\Open.s1p was found and read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\Load1.s1p not read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\Load2.s1p not read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\Load3.s1p not read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\Load4.s1p not read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\Load.s1p was found and read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\Thru12.s2p was found and read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\Thru21.s2p not read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\Thru13.s2p was found and read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\Thru31.s2p not read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\Thru14.s2p was found and read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\Thru41.s2p not read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\Thru23.s2p was found and read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\Thru32.s2p not read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\Thru24.s2p was found and read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\Thru42.s2p not read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\Thru34.s2p was found and read : <2nd Tier Cal> : file: C:\Cascade\SoltSecondTier\Thru43.s2p not read : <2nd Tier Cal> : Second Tier Calibration LeCroy 12-term file: C:\Cascade\SoltSecondTier\SecondTierCalibration.L12T written Figure 15 ConversionLog.txt file output 14

15 SecondTier_x.s8p files After the conversion, four files were created which contain the same error-terms as in the.l12t file, but in an easily readable form readable by any s-parameter viewing tool. These files are for viewing the error terms only and are not used by the system. The format for these files is such that they have the error-terms in an 8 port device model at the appropriate locations. The eight port device has four ports on the left numbered one through four, which correspond to the measurement ports. The other four ports on the right numbered five through eight correspond to the DUT ports. There is one device per left port driven so that the file SecondTier_1.s8p corresponds to the port 1 driving condition, SecondTier_2.s8p corresponds to the port 2 driving condition and so on. If we refer to the s-parameters of the file SecondTier_m.s8p as parameter formats: E m, then we have the following s- Ed1 Et1 Ex12 Et12 Ex21 Et21 Ed2 Er2 Ex31 Et31 Ex32 Et32 Ex41 Et41 Ex Et E1 E 1 Es1 2 El12 El21 1 Es2 El31 El32 El 41 El E 3 Ex13 Et13 Ex23 Et23 Ed3 Er3 Ex Et El13 El23 1 Es3 El [ 2 ] Error-term s-parameter file format 43 E Ex14 Et14 Ex24 Et24 Ex34 Et34 Ed4 Er4 El14 El24 El34 1 Es

16 Error Term Ed 1 Es 1 Er 1 Ex 21 El 21 Et 21 Ex 31 El 31 Et 31 Ex 41 El 41 Et 41 Term Error Term E Ex E El E Et E Ed E Es E Er E Ex E El E Et E Ex E El E Et Term Error Term E Ex E El E Et E Ex E El E Et E Ed E Es E Er E Ex E El E Et Term Error Term E Ex E El E Et E Ex E El E Et E Ex E El E Et E Ed E Es E Er Term E 4 14 E E E E E E E E E E Table 1 Error term locations in second-tier calibration s-parameter files E WinCal XE WinCal XE is a very sophisticated tool provided by Cascade Microtech that performs many advanced functions including advanced calibration algorithms, direct network analyzer control, probe positioned control, error analysis and more. In this application note WinCal XE was used only for the calibration of the SPARQ. Although WinCal XE has many features and looks quite daunting, it is in fact very easy to set up and the error terms exported from WinCal XE are readily usable in the SPARQ. When WinCal XE is executed, we have the screen as shown in Figure 16. We will utilize the System and Calibrate dialog choices. We will start with the System Setup, which configures the probes and probe orientation along with the calibration substrate selections. Then we will enter calibration measurement data in the Calibration dialogs and calculate and export error-terms. 16

17 Figure 16 WinCal XE main dialog WinCal XE System Setup The system setup involves choosing the network analyzer, probes, probe orientation, calibration substrates and probe positioner. When System is selected from the dialog in Figure 16, a multi-tab dialog is shown. The first tab shows the VNA selection: Virtual VNA is selected as shown in Figure 17. Then select the Station tab and select Manual Station as shown in Figure 18. Figure 17 Figure 18 Then, the Probes tab is selected and the probe is selected as: ACP base probe, GSSG signal configuration, wide pitch probe with pitch of 4 um. The probes are selected as dual tip probes and their port and orientations are selected as shown in Figure

18 Figure 19 Figure 2 One thing to notice in Figure 19 is the port numbering relative to the probe numbering. When specifying the west probe, VNA port 1 and 2 are specified as a GSSG probe and port 1 is specified with dual probe signal 1 and port 2 is specified with dual probe signal 2. For the east probe, VNA port 3 is specified with dual probe signal 2 and port 4 is specified with dual probe signal 1. The diagram shown by WinCal XE helps in this orientation. It is advantageous to match this orientation to the SPARQ port orientation, although both WinCal XE and the SPARQ can be operated with port renumbering employed. The port numbering chosen here means that the default WinCal XE numbering is utilized which helps to avoid confusion. This default port numbering is shown in Figure 2. 18

19 Figure 21 Figure 21 shows the substrate selections. The A substrate is selected, which contains shorts, opens, and loads for GS and SG probes for between 25 and 125 um and the GP Thru which provides thru standards for GSSG probes for pitches between 3 and 95 um. A picture of the A substrate is shown in Figure 22; the substrate is shown in Figure 23. Note that generally the serial number of the substrate should be entered. This is because some of the elements in the substrate may not be calibrated and the serial number is required to provide a map showing the valid calibration standard locations. In our case, we knew the valid locations and opted to skip this step. The specification of these substrates is mostly used by automatic positioners to locate the standards. It also enables WinCal XE to know the model for the standards as outlined previously. 19

20 Figure 22 Figure 23 WinCal XE Calibration Setup To begin the calibration setup, we select Calibration from the WinCal XE main dialog, shown in Figure 16. A menu as shown in Figure 24 is displayed. To begin, we select the 4-port SOLT (4-6 Thru) from the calibration method selection. This is best for the first choice because it requires all of the measurements. We will only need to load these measurements one time. Select the Second-tier calibration box since this will be a second-tier calibration applied to the SPARQ. This is important because unless this box is checked, WinCal XE will require switch-terms for the SPARQ which are irrelevant for a second-tier calibration. When the 4-port SOLT (4-6 Thru) calibration method is selected, WinCal XE defaults to using the loopback thru and straight thru, avoiding the diagonal thrus. Selecting Setup and then Calibration Setup in the pull-down menu exposes the dialog as shown in Figure 25 where you can see all of the standards measurements listed for each port. Expanding the thrus shows a checklist of thru connections. Here, the unchecked Thru (1-4) and Thru (2-3) are selected so that the diagonal thrus are now required. 2

21 Figure 24 Figure 25 Note that in Figure 25, when the Thru (2-3) is selected, the substrate where the thru is taken from along with the model of the thru is shown in a window on the right. This model can be verified against the standards models previously discussed. Returning to the dialog in Figure 24, the next step is to load each of the standards measurements. Using the same files with the naming conventions as provided in the section entitled SOLT Second-Tier Calibration Directory Information, The files are loaded in turn by selecting each measurement, right clicking, and selecting Load Measurement From File as shown in Figure 26. Once each measurement is selected, WinCal XE loads the measurement, and the View button is ungrayed you can then view each of the files loaded for verification. The ports 2,3 (Thru 2-3) measurement is shown in Figure 27. The need for reloading the data can be prevented when the calibration method is changed by saving all of the data. The data is saved by selecting Calibration, then Data from the pull-down, then Save All, as shown in Figure 28. The data can be saved anywhere the user needs to remember where it is saved so that it can be loaded again later. Make sure the Second Tier Calibration box is set prior to loading and saving the data, otherwise the saved data may not be readable and the data will need to be loaded again! 21

22 Figure 27 Figure 26 Figure 28 Figure 29 22

23 Calibration Data Generation After all of the measurements are loaded and the data saved, select Calibration then Error Terms from the pull-down menu and select Compute. When WinCal XE has finished, select Calibration then Error Terms from the pull-down menu and select Save. Save these files to a directory where you will want the LeCroy 12-term error-term calibration file to be generated. Here we can cycle through the calibrations and generate WinCal XE error-terms data for any calibration method possible. Here we repeat the calibrations for the following types of calibrations (selected in the Calibration Methods selection area of the Calibration dialog): 4-Port SOLT (4-6 Thru) 4-Port SOLR (4-6 Thru) 4-Port Hybrid SOLT-SOLR (4 Thru) 4-Port Hybrid LRRM-SOLR (4 Thru) These selections are shown in Figure 3. To summarize the procedure for generating the WinCal XE calibrations, do the following once the measurement data has been loaded once and saved: 1. Select the Calibration Method when a new calibration method is selected, the measurement data will be cleared. Ensure that the second-tier calibration box is checked. 2. Select Calibration, then Data from the pull-down, then Load All and then select the folder where the measurement data was stored. You will see the measurements available because the View buttons will be ungrayed. 3. Select Calibration, then Error Terms from the pull-down, then compute the error terms are computed. 4. Select Calibration, then Error Terms from the pull-down, then Save - select the folder where the LeCroy error-terms calibration file will be placed. 23

24 Figure 3 Converting WinCal XE Error-Terms in SPARQ Figure 31 shows the SPARQ Calibration dialog configured for WinCal XES1P conversion. The floating dialog in the middle appears when the Convert button is pressed. Here, four ports are selected with 8 points to 4 GHz. As previously described, in general, the SPARQ software prefers these number of points and end frequency (although it will always automatically resample data if provided in alternate forms). There is no implication here that the calibration is truly valid to this frequency, but using this configuration provides the most flexibility. Here, the conversion type is set to WinCal XES1P and an output file is selected for the result. The key here is the output file directory, where it is expected to find various information required by SPARQ to generate the error-terms. Figure 31 SPARQ Second-Tier Calibration Conversion Dialog with WinCal XE Selection 24

25 WinCal XE Second-Tier Calibration Directory Information The directory where the output.l12t file is to be placed contains the following information before and after the calibration conversion: Before Conversion: WinCal XE Error-terms Files: 36 files output from WinCal XE containing the error-terms (previously described) with a file naming convention as follows: Error Term # of Files File Name Ed 4 ErrorTerm_mm_EDir.s1p m Es 4 ErrorTerm_mm_ESrm.s1p m Er 4 ErrorTerm_mm_ERft.s1p m Ex 12 ErrorTerm_nm_EXtlk.s1p nm El 12 ErrorTerm_nm_ELdm.s1p nm Et 12 ErrorTerm_nm_ETrt.s1p nm ConvertSettings.vbs Additional instructions for the conversion After Conversion: ConversionLog.txt log file showing information on how the conversion proceeded SecondTier_1.s8p, SecondTier_2.s8p, SecondTier_3.s8p, SecondTier_4.s8p error-terms in s- parameter file format for easy viewing (as previously described). SecondTierCalibration.L12T second-tier calibration file which can be imported in SPARQ Note that the conversion directory and its input data is independent of the type of WinCal XE calibration being performed. In other words, regardless of the calibration method used in generating the errorterms, the data in the directory is created by WinCal XE and required by SPARQ. Figure 32 shows a sample log file created for a WinCal XE calibration. Here, you can see that the SPARQ basically reads in the error-terms in the single-port.s1p files and outputs a single.l12t file containing the calibration. Time-domain Gating The SPARQ has a unique feature for taking the probe out of the measurements that is a mixture of timedomain gating and de-embedding. The dialog for this feature, along with the settings used for all of the time-domain gated measurements, is shown in Figure

26 : <2nd Tier Cal> : Second Tier Calibration Conversion Started: 4 ports, 8 points, 4.e+1 end frequency : <2nd Tier Cal> : File Path Specified: C:\WinCal XE 4-port SOLR (4-6 Thru) : <2nd Tier Cal> : Second Tier Calibration is WinCal XES1P : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_11_EDir.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_11_ERft.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_11_ESrm.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_12_EXtlk.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_12_ETrt.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_12_ELdm.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_13_EXtlk.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_13_ETrt.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_13_ELdm.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_14_EXtlk.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_14_ETrt.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_14_ELdm.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_21_EXtlk.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_21_ETrt.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_21_ELdm.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_22_EDir.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_22_ERft.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_22_ESrm.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_23_EXtlk.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_23_ETrt.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_23_ELdm.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_24_EXtlk.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_24_ETrt.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_24_ELdm.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_31_EXtlk.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_31_ETrt.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_31_ELdm.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_32_EXtlk.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_32_ETrt.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_32_ELdm.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_33_EDir.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_33_ERft.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_33_ESrm.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_34_EXtlk.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_34_ETrt.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_34_ELdm.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_41_EXtlk.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_41_ETrt.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_41_ELdm.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_42_EXtlk.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_42_ETrt.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_42_ELdm.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_43_EXtlk.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_43_ETrt.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_43_ELdm.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_44_EDir.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_44_ERft.s1p was found and read : <2nd Tier Cal> : file: C:\WinCal XE 4-port SOLR (4-6 Thru)\ErrorTerm_44_ESrm.s1p was found and read : <2nd Tier Cal> : Second Tier Calibration files read : <2nd Tier Cal> : Second Tier Calibration LeCroy 12-term file: C:\WinCal XE 4-port SOLR (4-6 Thru)\SecondTierCalibration.L12T written Figure 32 ConversionLog.txt file output Figure 33 Time-domain Gating Dialog with Cascade Probes Settings 26

27 The time gating parameters were taken by placing a cursor at the location of the impedance discontinuity known to be the probe tip. For the probe with no right-angle connectors, this was determined to be 165 ps (Cascade Microtech specifies 17 ps) and for the probes with the right angle connectors, this was determined to be 255 ps. We use 1 mdb per GHz per ns of electrical length which mostly makes the straight-thru measurements nearly lossless. Impedance peeling is utilized to properly characterize the probe return-loss and the return-loss effects on the thru response. Measurement Results The following four sections show screens of the measurement results of four different DUTs using each of seven different calibration methods. The four DUTs are: LeCroy Demo Board CCN 3 inch trace CCN 4.9 inch trace Calibration Substrate (ISS) Straight Thru Standard The calibration methods used are: None Raw Measurement WinCal XE SOLR WinCal XE SOLT WinCal XE Hybrid SOLT-SOLR WinCal XE Hybrid LRRM-SOLR A description of the setup for each measurement includes: All measurements are full mixed-mode s-parameters. Measurements are 21 points from DC to 3 GHz. All frequency domain measurements are shown to 2 GHz horizontally (centered at 1 GHz at 2 GHz per division) and over 4 db vertically (centered at -15 db at 5 db per division). All time-domain measurements are shown over 5 ns (centered at 2.5 ns at 5 ps per division). All impedance plots are shown over 2.5 ns electrical length horizontally (centered at 1.25 ns at 25 ps per division) and 2 Ohms vertically (centered at 1 Ohms at 25 Ohms per division). No passivity, reciprocity or causality enforcement with impulse response limiting of 5 ns 27

28 LeCroy Demo Board Trace Measurements Figure 34 - LeCroy Demo Board No Calibration for Probe De-embedding Figure 35 - LeCroy Demo Board WinCal XE SOLR Calibration 28

29 LeCroy Demo Board Trace Measurements, continued Figure 36 LeCroy Demo Board WinCal XE SOLT Calibration Figure 37 - LeCroy Demo Board Calibration 29

30 LeCroy Demo Board Trace Measurements, continued Figure 38 - LeCroy Demo Board WinCal XE Hybrid SOLT-SOLR Calibration Figure 39 - LeCroy Demo Board WinCal XE Hybrid LRRM-SOLR Calibration 3

31 LeCroy Demo Board Trace Measurements, continued Figure 4 LeCroy Demo Board Time-Domain Gating 31

32 CCN Three Inch Trace Measurements Figure 41 - CCN 3 Inch Trace No Calibration for Probe De-embedding Figure 42 - CCN 3 Inch Trace WinCal XE SOLR Calibration 32

33 CCN Three Inch Trace Measurements, continued Figure 43 CCN 3 Inch Trace WinCal XE SOLT Calibration Figure 44 CCN 3 Inch Trace Calibration 33

34 CCN Three Inch Trace Measurements, continued Figure 45 - CCN 3 Inch Trace WinCal XE Hybrid SOLT-SOLR Calibration Figure 46 - CCN 3 Inch Trace WinCal XE Hybrid LRRM-SOLR Calibration 34

35 CCN Three Inch Trace Measurements, continued Figure 47 CCN 3 Inch Trace Time-Domain Gating 35

36 CCN 4.9 Inch Trace Figure 48 - CCN 4.9 Inch Trace No Calibration for Probe De-embedding Figure 49 - CCN 4.9 Inch Trace WinCal XE SOLR Calibration 36

37 CCN 4.9 Inch Trace, continued Figure 5 CCN 4.9 Inch Trace WinCal XE SOLT Calibration Figure 51 CCN 4.9 Inch Trace Calibration 37

38 CCN 4.9 Inch Trace, continued Figure 52 - CCN 4.9 Inch Trace WinCal XE Hybrid SOLT-SOLR Calibration Figure 53 - CCN 4.9 Inch Trace WinCal XE Hybrid LRRM-SOLR Calibration 38

39 CCN 4.9 Inch Trace, continued Figure 54 CCN 4.9 Inch Trace Time-Domain Gating 39

40 CCN 1 Mil Thru Figure 55 - CCN 1 Mil Thru No Calibration for Probe De-embedding Figure 56 - CCN 1 Mil Thru WinCal XE SOLR Calibration 4

41 CCN 1 Mil Thru, continued Figure 57 CCN 1 Mil Thru WinCal XE SOLT Calibration Figure 58 CCN 1 Mil Thru Calibration 41

42 CCN 1 Mil Thru, continued Figure 59 - CCN 1 Mil Thru WinCal XE Hybrid SOLT-SOLR Calibration Figure 6 - CCN 1 Mil Thru WinCal XE Hybrid LRRM-SOLR Calibration 42

43 CCN 1 Mil Thru, continued Figure 61 CCN 1 Mil Thru Time-Domain Gating 43

44 Cascade ISS Straight Thru Standard Figure 62 - Cascade ISS Straight Thru Standard No Calibration for Probe De-embedding Figure 63 - Cascade ISS Straight Thru Standard WinCal XE SOLR Calibration 44

45 Cascade ISS Straight Thru Standard, continued Figure 64 Cascade ISS Straight Thru Standard WinCal XE SOLT Calibration Figure 65 Cascade ISS Straight Thru Standard Calibration 45

46 Cascade ISS Straight Thru Standard, continued Figure 66 - Cascade ISS Straight Thru Standard WinCal XE Hybrid SOLT-SOLR Calibration Figure 67 - Cascade ISS Straight Thru Standard WinCal XE Hybrid LRRM-SOLR Calibration 46

47 Cascade ISS Straight Thru Standard, continued Figure 68 Cascade ISS Straight Thru Standard Time-Domain Gating Measurement Result Comparisons The following four sections show comparisons of four different DUTs using each of six different calibration methods. The four DUTs are: LeCroy Demo Board CCN 3 inch trace CCN 4.9 inch trace Calibration Substrate (ISS) Straight Thru Standard The Calibrations used are: WinCal XE SOLR WinCal XE SOLT WinCal XE Hybrid SOLT-SOLR WinCal XE Hybrid LRRM-SOLR Each section begins with the name of the DUT followed by various parameters measured from the DUT. The differential and common-mode impedance was measured off the impedance trace with no deembedding employed and are estimates. The differential and common-mode delay values are employed 47

48 to unfold the phase. In other words, for a given measured phase ( f ), a delay value Td is arrived at such that the following function [ 3 ] mostly flattens out the phase: ( ( ( )) ) [ 3 ] Phase Flattening Function Then, the value of Td which does this is assumed to be the delay value. Since most of the lines have extremely different common-mode impedances, the loss at 2 GHz is measured by first converting the s-parameters to the common-mode impedance and then reading the loss from the plot. For time-domain gating, an adjustment was required of 4.5 ps. This is because the values for the gate was chosen a few picoseconds beyond the probe this helps with removing tip effects. This tip effect removal led to better measurements of the actual line, but distorted somewhat the comparison as a true traditional calibration method. LeCroy Demo Board Differential Delay 52 ps Common-mode Delay 595 ps Differential Impedance 15 Ohms Common-mode Impedance 45 Ohms Time-domain Gating Adjustment 4.5 ps Differential 2 GHz 6 db Common-mode 2 GHz (in common-mode reference impedance) 6 db 48

49 magnitude (db) phase (deg) magnitude (db) phase (deg) frequency (GHz) WinCal SOLT WinCal SOLR WinCal Hybrid SOLT -SOLR WinCal Hybrid LRRM-SOLR frequency (GHz) WinCal SOLT WinCal SOLR WinCal Hybrid SOLT -SOLR WinCal Hybrid LRRM-SOLR. Figure 69 LeCroy Demo Board SD2D1 Magnitude Figure 7 LeCroy Demo Board SD2D1 Phase frequency (GHz) WinCal SOLT WinCal SOLR WinCal Hybrid SOLT -SOLR WinCal Hybrid LRRM-SOLR frequency (GHz) WinCal SOLT WinCal SOLR WinCal Hybrid SOLT -SOLR WinCal Hybrid LRRM-SOLR. Figure 71 LeCroy Demo Board SC2C1 Magnitude Figure 72 LeCroy Demo Board SC2C1 Phase 49

50 magnitude (db) magnitude (db) frequency (GHz) WinCal SOLT WinCal SOLR WinCal Hybrid SOLT -SOLR WinCal Hybrid LRRM-SOLR frequency (GHz) WinCal SOLT WinCal SOLR WinCal Hybrid SOLT -SOLR WinCal Hybrid LRRM-SOLR. Figure 73 LeCroy Demo Board SD1D1 Magnitude Figure 74 LeCroy Demo Board SC1C1 Magnitude CCN 3 Inch Trace Differential Delay 418 ps Common-mode Delay 475 ps Differential Impedance 15 Ohms Common-mode Impedance 45 Ohms Time-domain Gating Adjustment 4.5 ps Differential 2 GHz 6 db Common-mode 2 GHz (in common-mode reference impedance) 6.5 db 5

51 magnitude (db) phase (deg) magnitude (db) phase (deg) frequency (GHz) WinCal SOLT WinCal SOLR WinCal Hybrid SOLT -SOLR WinCal Hybrid LRRM-SOLR frequency (GHz) WinCal SOLT WinCal SOLR WinCal Hybrid SOLT -SOLR WinCal Hybrid LRRM-SOLR. Figure 75 CCN 3 Inch Trace SD2D1 Magnitude Figure 76 CCN 3 Inch Trace SD2D1 Phase frequency (GHz) WinCal SOLT WinCal SOLR WinCal Hybrid SOLT -SOLR WinCal Hybrid LRRM-SOLR frequency (GHz) WinCal SOLT WinCal SOLR WinCal Hybrid SOLT -SOLR WinCal Hybrid LRRM-SOLR. Figure 77 CCN 3 Inch Trace SC2C1 Magnitude Figure 78 CCN 3 Inch Trace SC2C1 Phase 51

52 magnitude (db) magnitude (db) frequency (GHz) WinCal SOLT WinCal SOLR WinCal Hybrid SOLT -SOLR WinCal Hybrid LRRM-SOLR frequency (GHz) WinCal SOLT WinCal SOLR WinCal Hybrid SOLT -SOLR WinCal Hybrid LRRM-SOLR. Figure 79 CCN 3 Inch Trace SD1D1 Magnitude Figure 8 CCN 3 Inch Trace SC1C1 Magnitude CCN 4.9 Inch Trace Differential Delay 675 ps Common-mode Delay 77 ps Differential Impedance 16 Ohms Common-mode Impedance 46 Ohms Time-domain Gating Adjustment 4.5 ps Differential 2 GHz 6 db Common-mode 2 GHz (in common-mode reference impedance) 1 db 52

53 magnitude (db) phase (deg) magnitude (db) phase (deg) frequency (GHz) WinCal SOLT WinCal SOLR WinCal Hybrid SOLT -SOLR WinCal Hybrid LRRM-SOLR frequency (GHz) WinCal SOLT WinCal SOLR WinCal Hybrid SOLT -SOLR WinCal Hybrid LRRM-SOLR. Figure 81 CCN 4.9 Inch Trace SD2D1 Magnitude Figure 82 CCN 4.9 Inch Trace SD2D1 Phase frequency (GHz) WinCal SOLT WinCal SOLR WinCal Hybrid SOLT -SOLR WinCal Hybrid LRRM-SOLR frequency (GHz) WinCal SOLT WinCal SOLR WinCal Hybrid SOLT -SOLR WinCal Hybrid LRRM-SOLR. Figure 83 CCN 4.9 Inch Trace SC2C1 Magnitude Figure 84 CCN 4.9 Inch Trace SC2C1 Phase 53

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