ART50/100 Series. Mechanical-Bearing, Worm-Driven Rotary Stage. Low profile and small footprint. Ultra-fine resolution

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1 / Series Rotary Stages /100 Series Mechanical-Bearing, Worm-Driven Rotary Stage Low profile and small footprint Ultra-fine resolution Integral brushless servomotor or microstepping motor Optional aperture versions Manual adjust knob with graduated tabletop Available with vacuum preparation The and rotary stages offer superior positioning performance in very compact, low profile units. They are companion stages to the ATS50 series linear positioning stages and are ideal for space-critical applications such as optical trains and vacuum operation that require automated motion. Construction Features The and are fabricated from a special aluminum alloy. This material offers significant weight savings in multi-axis arrangements and other weight critical applications, while providing high structural stiffness and long-term stability. Each stage incorporates high quality pre-loaded angular contact bearings that provide excellent runout, wobble, and loading characteristics. The drive mechanism is a precision anti-backlash worm with reduction gearing. To protect the stage a slip clutch is included that will prevent damage in the event that excessive torque is applied to the table. The and with integral microstepping motor include an accurate home reference. A graduated knob on the rear of the microstepping motor is ideal for convenient manual positioning and includes a referencedial as well as a graduated tabletop. The optional integral brushless servomotor has a 500-line square-wave rotary encoder. Options and Accessories Both stages are available with optional vacuum preparation to 10-6 torr. The has an option for a large throughhole aperture. The Z5S and Z5R right angle brackets are available for applications requiring the tabletop to be mounted in a vertical orientation. All stages are available with both metric (standard) and English bolt hole and mounting patterns. Aerotech manufactures a wide range of sophisticated, yet easy-to-use, motion controllers capable of driving the /

2 /100 Series SPECIFICATIONS /100 Series Travel Drive System Type Bus Voltage Continuous Current, Stall Microstepping Servomotor Feedback (Servomotor Only) 1) A ccuracy A p k Microstepping ) A r ms Microstepping ) A p k Servomotor) A r ms Servomotor) 360 Continuous Precision Worm Gear Integral Stepping or Brushless Servomotor 40 VDC Up to 48 VDC ( 1.2 A ( 0.85 A ( 0.5 A ( 0.35 A (.06 1) R epeatability (Unidirectional) Axial Error Motion Radial Error Motion Tilt Error Motion Resolution ( 2.6 arc se c Microstepping Servomotor Home Precision Repeatability Moment Axial Radial Rated Speed Mass Finish Note: 1. Measured at 50 mm above tabletop. Noncontact Rotary Encoder (500-line) arc sec 3.0 µ m 3.0 µ m 10.0 µ m 12 µ m ±242.5 µrad (±50 arc sec) 8.7 µrad (1.8 arc 4000 steps per rev motor resolution 17.5 µrad (3.6 arc 2000 steps per rev motor resolution) 17.5 µrad (3.6 arc sec) 2 N-m 5 kg 10 kg 2.3 kg 5.0 kg 5 rpm 0.7 kg 1.4 kg Clear Anodize; Black Anodize Cover Rotary Stages / Series Axial and Radial Cantilevered Capability () Axial and Radial Cantilevered Capability () 388

3 /100 Series DIMENSIONS / Series Rotary Stages 389

4 /100 Series DIMENSIONS Z5S Bracket 28.4 [1.12] 4.8 [0.19] M4 x 0.7 Thd or #8-32 Thd (4) Holes 26.9 [1.06] 50.8 [2.00] Ø6.6 [Ø0.28] (2) Holes 25.0 [1.00] 12.5 [0.50] 12.9 [0.50] 25.0 [1.00] M6 x 1.0 Thd [1/4-20 Thd ] 16 Holes Ø4.5 [Ø0.19] 4 Mounting Holes 12.5 [0.50] Typ 87.5 [3.50] 11.2 [0.44] [4.50] Rotary Stages / Series 12.9 [0.50] 25.0 [1.00] 17.5 [0.69] 4.8 [0.19] Typ 53.8 [2.12] Dimensions - Millimeters [Inches] Basic Model Recommended Finish For Series Weight kg [lb] ATS50-25 & ATS50-50 (Linear) & Z5S Clear Anodize 0.22 [0.5] (Rotary) Stages Z5R Bracket 17.5 [0.69] 25.0 [1.00] 52.3 [2.06] 25.8 [1.00] 50.0 [2.00] [4.00] 75.0 [3.00] Ø6.6 Ø11.0 C'Bore x 6.6 Dp [Ø0.28] Ø[0.41] [0.26] Dp M6 x 1.0 Thd or 1/4-20 Thd (4) Holes 11.2 [0.44] 75.0 [3.00] [5.25] 62.2 [2.45] 45.0 [1.77] 82.6 [3.25] 13.3 [0.52] 4.8 [0.19] 30.2 [1.19] Ø [2.00] [Ø1.12] M4 x 0.7 Thd or #8-32 Thd Dimensions - Millimeters [Inches] (4) Holes Bracket Weight = 0.54 kg [1.2 lb] Finish = Clear Anodize Basic Model - Z5R Bracket For Rotary Stages 390

5 /100 Series ORDERING INFORMATION / Series Rotary Stages Ordering Example / VAC3 -M -1 Series S 100S Stage Construction Options /VAC3 /VAC6 Mounting and Grid Pattern -M -U -MA (/S only) -UA (/S only) and Series Rotary Stages 50 mm (2 in) diameter rotary stage with stepping motor and degree accurate home marker 100 mm (4 in) diameter rotary stage with stepping motor and degree accurate home marker S 50 mm (2 in) diameter rotary stage with brushless servomotor S 100 mm (4 in) diameter rotary stage with brushless servomotor -2-5 Stage Construction Options /VAC3 Vacuum preparation of stage to 10-3 torr /VAC6 Vacuum preparation of stage to 10-6 torr Mounting and Grid Pattern -M Tabletop with metric-dimension mounting pattern and holes -U Tabletop with English-dimension mounting pattern and holes -MA Tabletop with aperture and metric-dimension mounting pattern and holes (/S only) -UA Tabletop with aperture and English-dimension mounting pattern and holes (/S only) -2 Stepping motor with 0.9 m (3 ft) integral cable and home marker (wired unipolar F0.85) Requires motor-to-controller cable -5 Brushless servomotor with 0.9 m (3 ft) integral cable, connector, and line encoder; requires cable Accessories (to be ordered as separate line item) ALIGNMENT-NPA Non-precision assembly AG5 Adapter plate for Z5S Right angle L-bracket for Z5R Right angle L-bracket for 391

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