Foundries, MMICs, systems. Rüdiger Follmann

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1 Foundries, MMICs, systems Rüdiger Follmann

2 Content MMIC foundries Designs and trends Examples 2 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

3 MMIC foundries Foundries IMST is a UMS certified design house Memberships MOSIS 3 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

4 GaAs in principal 3,4 and 6 inch production Target markets: High power and linearity, low noise, broad band Specials available (e.g. E/D mode or HBT and phemt on same wafer) Frequencies up to 100 GHz Radiation hard 4 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

5 GaAs foundries OMMIC, France 5 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

6 GaAs foundries UMS, France (+ USA) 6 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

7 WIN, Taiwan WIN, Taiwan 7 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

8 GaN 4 inch to 6 inch wafers Several foundries (TriQuint, UMS, Cree, Sandia and others) Very high power possible Defense market, radar, telecommunication Single transistor devices available, very first MMICs launched (IMS 2008, Cree) Reliability problems Frequencies up to 20 GHz and higher (100 GHz) 8 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

9 State-of-the-art HRL examples Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

10 Si(Ge) 8 inch production Combination of CMOS logic, ECL and BiCMOS Frequencies up to 100 GHz Complete transceiver chips possible (e.g. 60 GHz) Well known foundries e.g. IBM (8HP) Si LDMOS for high power 10 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

11 SiGe IBM roadmap 11 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

12 Trade-offs Noise figure 12 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

13 Trade-offs 1/f noise 13 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

14 Trade-offs Costs 14 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

15 Trade-offs Power and linearity 15 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

16 GaN devices Non-linear model and measurement E A D B C A = 33.4 dbm B = 32.9 dbm C = 32.4 dbm D = 31.9 dbm E = 31.4 dbm E = 33.2 dbm (measured maximum) 16 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

17 GaN devices Model verification Output Power (dbm) fundamental second harmonic third harmonic TOPAS TOPAS TOPAS Input Power (dbm) 17 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

18 GaN mmwave power 18 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

19 GaN mmwave PA 19 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

20 GaN mmwave PA 20 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

21 Integrated coplanar 24 GHz sensor World s 1 st 24 GHz coplanar sensor designed at IMST Rosemount 24 GHz level sensor 21 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

22 Integrated GaAs circuits 24 GHz sensor Simulated using Pout [dbm] th meas 5th TOPAS 5th Curtice Input power [dbm] Frequency times 5 multiplier 22 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

23 GaAs circuits 10 GHz LNA Simulated using 3 NF [db] 2,6 2,2 Sim. Meas. 1,8 1, f [GHz] Low noise amplifier 23 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

24 Core Chip Design : 2NLNA4PS2 Specifications: Ku-band core chip including the 2-stage LNA and the 4-bit phase shifter Technology: OMMIC - ED02AH LNA bias supply: V G1,2 = -0.2 V, V D1,2 = 2.0 V, I D1 = 28.2 ma, I D2 = 29.0 ma PS control voltages: V C = 0 V / -2 V f = GHz S db (all states) S db (all states) S 21 = db (all states) RMS amplitude error = 0.4 db RMS phase error = 2.6 A = mm 2 = 4.45 mm 2 including half dicing street including DC pads (#8) for the PS control (not necessary if using the DC control circuit) excluding DC control circuit (serial to parallel converter + buffers) 24 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

25 Core Chip Design : 2NLNA4PS2 Layout: 25 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

26 Momentum simulation Higher integration possible 26 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

27 Size reduction 27 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

28 Including logic 28 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

29 System example synthesizer Large size (LO) Heavy Single frequency small and integrated chip Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

30 Phase noise L( Simplified Leeson equation S f m ) = FkTG 8Q P 1 G L 21 = = 1 f f Q Q r m L 0 2 G: Gain of active part F: Noise figure of active part Q L : Loaded Q of resonator f r : Resonance frequency f m : Offset frequency from carrier P: Output power of active part S 21 : Transmission coefficient of resonator at resonance 30 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

31 VCO requirement High quality factor of the resonator Large voltage swing (high output power) High breakdown voltage for active part transistor technology Use a transistor with low 1/f noise 31 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

32 VCO Colpitts Phase noise: MHz offset (20 GHz) 32 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

33 PLLs Close to the carrier phase noise is determined by the reference crystal Inside PLL loop the phase noise of a synthesizer is determined by the PLL (phase detector). VCO noise is attenuated. Output PLL loop the phase noise of a synthesizer is determined by the VCO phase noise 33 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

34 Integer-N PLL with reference divider 34 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

35 How to generate arbitrary frequencies? Build a programmable 1/N-divider 35 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

36 Continous division (example x=8) Divide S times by x+1 and P-S times by x N=(x+1)*S+x*(P-S)=8*P+S, P>S... P=6,S=0..6: N=8*6+0..8*6+7=48..54, 55 not possible P=7,S=0..7: N=8*7+0..8*7+7= P=8,S=0..7: N=8*8+0..8*8+7= Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

37 Simplified fractional-n PLL example Ratio: 10.1: Divide 9 times by 10 and one time by 11 (next page) 37 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

38 Accumulator This division schema generates large spurs. 38 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

39 Sigma Delta Modulator (SDM) Modulator input: Only fractional part x f SDM generates series of integer numbers n i n i M, 2 µ values are available for M x f = n i = lim N 1 N N i= 1 n Time average value at SDM output i Example: 2, -4, -2, 3, 0, 3 1, -3, 2, 1,... for x f = Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

40 Synthesizer architecture (1) 40 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

41 Synthesizer architecture (2) 41 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

42 Synthesizer architecture (3) 42 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

43 SiGe Design World best 1-chip synthesizer 250 MHz-24 GHz PLL Integrated GHz or 8 12 GHz VCO Fractional-N 43 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

44 Measurement results 44 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

45 Synthesizer application test board PC interface Many test ports 45 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

46 Packages BGA simulation Equivalent circuits S-parameter files Magnetic field 46 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

47 World smallest phase shifter (ka) Size 960 x 360 µm 2, Core 620 x 210 µm 2 V D = 3 V, V C (B0-B4) = 0 V / 3 V (active / not active) 47 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

48 Phase diagram 48 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

49 Any questions? 49 Foundries and MMICs Feb-09 IMST GmbH - All rights reserved

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