High-temperature Selective Emitter for Thermophotovoltaic Energy Conversion
|
|
- Millicent Franklin
- 6 years ago
- Views:
Transcription
1 Physical Sciences Inc. VG High-temperature Selective Emitter for Thermophotovoltaic Energy Conversion David Woolf and Joel Hensley, Andover, MA Jeff Cederberg and Eric A. Shaner Sandia National Laboratories OSA Incubator on the Fundamental Limits of Optical Energy Conversion November 2014 Acknowledgement of Support and Disclaimer This material is based upon work supported by the Office of Naval Research under Contract Number_N P Any opinions, findings and conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the Office of Naval Research. 20 New England Business Center Andover, MA
2 Who we are A growing 41 year-old company of 180 talented scientists, engineers and administrative personnel PSI is headquartered in Andover, MA, with operations in Bedford, MA; Dayton, OH; Lanham, MD; Princeton, NJ and Pleasanton, CA PSI companies FY2014 revenues of >$40M Q-Peak manufactures lasers and optical devices Research Support Instruments supports space ops Faraday Technology develops industrial processes Multiple commercial spin-outs PSI is a 100% employee owned company VG Significant efforts in developing photonicsbased technologies and devices Sensors: RMLD, TLDAS, QCL systems AIRIS, LIDAR Thermophotovoltaics
3 Filter Thermophotovoltaics Overview VG Heat in Emitter Radiation PV Cell Electrical Power OUT Concentrated solar energy, combustion source Blackbody, greybody, modified emissive surface Dielectric filters, Plasma (TCO filters) Silicon Germanium, III-Vs 1980s Very high temperature emitters Rare earth oxides, SiC, etc 1990s Low bandgap materials Ge InGaAs, Sb-based materials 2000s Breakthrough in spectrally selective materials Plasmonics Metamaterials Now Can we make a selective emitter that: Survives T > 1300 K Survives repeated thermal cycling Operates in ambient atmosphere Has non-directional (Lambertian) emission Matches well with PV EQE
4 TPV Energy Conversion: Model Assume InGaAs 0.6 ev TPV cell, 1300K blackbody VG Black Body Power Spectrum P = 2hc2 1 λ 5 hc eλk BT 1 Black Body Photon Density Spectrum n Bb = 2c 1 λ 4 hc eλk BT 1 PV Cell Fill Factor Most power, photons are below band-gap useless if transmitted, increases TPV heating if absorbed Predicts h TPV = 8.25%, P out = 1.28 W/cm 2 Can see h TPV as P PV /P rad I SC I m FF = I mv m I SC V OC V m V OC
5 Model with Ideal Selective Emitter Only emits where EQE of TPV cell is near unity VG P rad = emitter spectrum x blackbody power spectrum P out = emitter spectrum x blackbody photon density (norm) x EQE h TPV = magenta area / cyan area Model predicts h TPV = 39.2% at 1300 K 475% increase in efficiency compared to black-body radiation Want actual emitter to approximate this ideal emitter
6 Selective Emitter Design VG Metamaterial emitter consists of a thin-film Pt cross above a Pt backplane Sapphire substrate, Al 2 O 3 spacer Al 2 O 3 and Pt: t Stable in atmosphere Matched CTE up to ~ 1500 K Al Pt h Used Lumerical FDTD to determine geometric parameters: p w Spacer (h 90 nm) Pt cross (t 45 nm) l h p 550 nm, w 275 nm, l 200 nm Fabricated via e-beam lithography + e-beam evaporation Woolf et al., APL105,
7 Fabrication procedure Fabricated Structures Sapphire Wafer E-beam evaporate Pt and Al 2 O 3 Spin lift-off resist and e-beam resist Write pattern Develop e-beam resist Undercut lift-off resist Deposit Pt Remove resists Optical image of Fabricated Structure Higher order absorption resonances give each array distinct color VG nm l 250 nm 400 nm p 600 nm 500 μm 250 nm w 300 nm Woolf et al., APL105,
8 Fabrication procedure Fabricated Structures Sapphire Wafer E-beam evaporate Pt and Al 2 O 3 Spin lift-off resist and e-beam resist SEM image of Fabricated Structure VG Write pattern Develop e-beam resist Undercut lift-off resist Deposit Pt SEM has resolution of ~ 20 nm Remove resists Woolf et al., APL105,
9 Thermal Testing at 1300 K SEM Images Heat sample in RTA in 1 atm of Argon, hold for 2 min VG Before Heating After Heating Pt/AlO thin films survive (no delamination) Metal pattern on surface deforms Due to interfacial stress Woolf et al., APL105,
10 Thermal Testing at 1300 K Optical Images Heat sample in RTA in 1 atm of Argon, hold for 2 min VG Before Heating After Heating Visible frequency color change indicates morphological pattern change Woolf et al., APL105,
11 Spectral Emission after Heating at 1300K VG Heat cycle at 1300 K 2 min cycle 10 min cycle Pre-heat cycle Spectral shift happens in first 2 minutes then remains static through additional heating cycles Could redesign emitter to optimize post-anneal geometry Lose some tuning parameters (cross to square shape) Absorption feature narrows (not good for matching TPV EQE) Woolf et al., APL105,
12 Use encapsulation to stabilize cross pattern Emitter Stabilization Deposit ~150 nm of Al 2 O 3 using Atomic Layer Deposition (ALD) on top of structure ALD chosen because it is more conformal than sputtering Encapsulating material same as dielectric spacer more thermally stable configuration for micro-structures Pre-thermal cycling Post-thermal cycling VG nm Woolf et al., APL105,
13 Emitter Encapsulation Optical Images VG Before heating After 2 min at 1000 C After min heating cycles After min heating cycles Woolf et al., APL105,
14 Encapsulated Emitter Thermal testing at 1300 K VG Minimal spectral effect due to heating Slight shift in spectrum in first heating cycle Densification of Al 2 O 3 Remains constant through 2, 5, 5 minute thermal cycles Heat cycle at 1300 K min cycles 2 min cycle Pre-heat cycle Encapsulation layer broadens resonance What is the expected TPV power and efficiency using this emitter? Woolf et al., APL105,
15 Selective Emitter Predicted Performance VG Selective emitter boosts TPV conversion efficiency to 22% at 1300 K from 8.5% with no selective emitter 1.2 W/cm 2 out 27% at 1500 K 3 W/cm 2 out With cold side filter, efficiency can be improved to ~40% Woolf et al., APL105,
16 Selective Emitter Predicted Performance VG Selective emitter boosts TPV conversion efficiency to 22% at 1300 K from 8.5% with no selective emitter 1.2 W/cm 2 out 27% at 1500 K 3 W/cm 2 out With cold side filter, efficiency can be improved to ~40% Minimal benefit from using more exotic TPV materials due to worsening dark current, EQE Woolf et al., APL105,
17 Large-area Emitter Fabrication E-beam lithography is not scalable Nano-imprint, interference lithography Not mature Stepper projection lithography Commercially viable VG Fabrication steps using deep UV stepper photolithography Mask Prepared Substrate Spin on Antireflection + Photoresist UV expose Resolution limit ~ 200nm compared to ~20nm resolution for e-beam used in P1 base Lift Off Deposit Metal Develop Need to verify that performance still okay with 10x resolution
18 Large-area Fabrication via Stepper Lithography Preliminary demonstration of large-area fabrication using conventional lithography methods Puck geometry can produce spectra equivalent to cross geometry spectra 330nm VG Pt Al nm
19 Conclusions and Outlook Fabricated a heterogeneous metasurface capable of surviving repeated temperature cycling to 1300 K VG Measured metasurface reflectivity, used to estimate thermal-toelectrical energy conversion efficiency Demonstrated large scale fabrication using conventional lithography Suitable for TPV or Solar TPV applications TPV is rapidly maturing due to innovations in high-temperature emitters Applications in remote energy generation and combined heat and power
20 Physical Sciences Inc. VG Thank you. Questions? 20 New England Business Center Andover, MA
21 Physical Sciences Inc. VG Backup Slides 20 New England Business Center Andover, MA
22 What We Do Applied research and development for all major agencies of the U.S. government ~ 60% FY 10 revenue Technology transition and product development for government and industrial customers ~ 15% FY 10 revenue Pre-production manufacturing process development ~ 5% FY 10 revenue Components, systems, and instrumentation for industry and government sales ~20% FY 10 revenue Technology and product licensing to strategic partners and spin-outs for high-volume commercial markets ~ 2% FY 10 revenue from royalties VG
23 TPV Converter Cell Model Concept VG Reflected power TPV cell >BG Generated power P out Heat Source Radiated power from combustion P rad Reradiated power <BG Below bandgap absorption Electrical Losses Selective Emitter Goal of TPV model is to calculate: Electrical output power: P out TPV efficiency: η TPV = P out P rad TPV spectral efficiency: η spec = N abs N rad Reradiated power Not included in model: Temperature rise of TPV (assume perfect heatsinking) Above bandgap thermalization Below bandgap absorption Electrical losses
24 Experimental Results - Fabrication Fabrication process SEM Image Sapphire Wafer E-beam evaporate Pt and Al 2 O 3 Spin lift-off resist and e-beam photoresist Write pattern Develop e-beam photoresist Undercut lift-off resist Deposit Pt Remove resists using acetone
25 Motivation Need a higher energy-density source for remote energy generation Energy Density (MJ/kg) VG Combined heat and power (CHP) potential. 10% total efficiency TPV beats battery by factor
26 VG
27 VG
28 VG
29 VG
30 VG
31 Experiments vs Theory Measurements taken using FTIR Unity absorption on resonance FWHM ~ 1um Tunable Matches simulations
32 Team PSI Dr. David Woolf Dr. Joel Hensley Acknowledgements Funding ONR N P-1190 VG Sandia Dr. Eric Shaner Dr. Jeff Cederberg Albert Grine Don Bethke
Supplementary Figure 1 Reflective and refractive behaviors of light with normal
Supplementary Figures Supplementary Figure 1 Reflective and refractive behaviors of light with normal incidence in a three layer system. E 1 and E r are the complex amplitudes of the incident wave and
More informationMajor Fabrication Steps in MOS Process Flow
Major Fabrication Steps in MOS Process Flow UV light Mask oxygen Silicon dioxide photoresist exposed photoresist oxide Silicon substrate Oxidation (Field oxide) Photoresist Coating Mask-Wafer Alignment
More informationSolar Cell Parameters and Equivalent Circuit
9 Solar Cell Parameters and Equivalent Circuit 9.1 External solar cell parameters The main parameters that are used to characterise the performance of solar cells are the peak power P max, the short-circuit
More informationREPORT DOCUMENTATION PAGE
REPORT DOCUMENTATION PAGE Form Approved OMB No. 0704-0188 Public reporting burden for this collection of information is estimated to average 1 hour per response, including the time for reviewing instructions,
More informationSupplementary information for Stretchable photonic crystal cavity with
Supplementary information for Stretchable photonic crystal cavity with wide frequency tunability Chun L. Yu, 1,, Hyunwoo Kim, 1, Nathalie de Leon, 1,2 Ian W. Frank, 3 Jacob T. Robinson, 1,! Murray McCutcheon,
More informationGeneration of a Line Focus for Material Processing from an Array of High Power Diode Laser Bars R. Baettig, N. Lichtenstein, R. Brunner, J.
Generation of a Line Focus for Material Processing from an Array of High Power Diode Laser Bars R. Baettig, N. Lichtenstein, R. Brunner, J. Müller, B. Valk, M. Kreijci, S. Weiss Overview This slidepack
More informationSupplementary Figure 1: Optical Properties of V-shaped Gold Nanoantennas a) Illustration of the possible plasmonic modes.
Supplementary Figure 1: Optical Properties of V-shaped Gold Nanoantennas a) Illustration of the possible plasmonic modes. S- symmetric, AS antisymmetric. b) Calculated linear scattering spectra of individual
More informationMURI Meta Materials Team Meeting
MURI Meta Materials Team Meeting Gang Chen Group Massachusetts Institute of Technology, May 10, 2002 DoD MURI on MetaMaterials Current Activities Reconfigurable Micro-bubble Array Devices Switchable Photonic
More informationNano-structured superconducting single-photon detector
Nano-structured superconducting single-photon detector G. Gol'tsman *a, A. Korneev a,v. Izbenko a, K. Smirnov a, P. Kouminov a, B. Voronov a, A. Verevkin b, J. Zhang b, A. Pearlman b, W. Slysz b, and R.
More informationHermetic Packaging Solutions using Borosilicate Glass Thin Films. Lithoglas Hermetic Packaging Solutions using Borosilicate Glass Thin Films
Hermetic Packaging Solutions using Borosilicate Glass Thin Films 1 Company Profile Company founded in 2006 ISO 9001:2008 qualified since 2011 Headquarters and Production in Dresden, Germany Production
More informationPerformance and Loss Analyses of High-Efficiency CBD-ZnS/Cu(In 1-x Ga x )Se 2 Thin-Film Solar Cells
Performance and Loss Analyses of High-Efficiency CBD-ZnS/Cu(In 1-x Ga x )Se 2 Thin-Film Solar Cells Alexei Pudov 1, James Sites 1, Tokio Nakada 2 1 Department of Physics, Colorado State University, Fort
More informationBARR ASSOCIATES, INC.
BARR ASSOCIATES, INC. ULTRA-NARROW BANDPASS FILTERS Overview: Barr offers bandpass filters with bandwidth at Full Width Half Maximum (FWHM) selectable from Wideband to Ultra-Narrowband, manufactured to
More informationSupporting Information
Electronic Supplementary Material (ESI) for Materials Horizons. This journal is The Royal Society of Chemistry 2017 Supporting Information Nanofocusing of circularly polarized Bessel-type plasmon polaritons
More informationAngela Piegari ENEA, Optical Coatings Laboratory, Roma, Italy
Optical Filters for Space Instrumentation Angela Piegari ENEA, Optical Coatings Laboratory, Roma, Italy Trieste, 18 February 2015 Optical Filters Optical Filters are commonly used in Space instruments
More informationPHYSICAL ELECTRONICS(ECE3540) APPLICATIONS OF PHYSICAL ELECTRONICS PART I
PHYSICAL ELECTRONICS(ECE3540) APPLICATIONS OF PHYSICAL ELECTRONICS PART I Tennessee Technological University Monday, October 28, 2013 1 Introduction In the following slides, we will discuss the summary
More informationNanostencil Lithography and Nanoelectronic Applications
Microsystems Laboratory Nanostencil Lithography and Nanoelectronic Applications Oscar Vazquez, Marc van den Boogaart, Dr. Lianne Doeswijk, Prof. Juergen Brugger, LMIS1 Dr. Chan Woo Park, Visiting Professor
More informationNanoscale Systems for Opto-Electronics
Nanoscale Systems for Opto-Electronics 675 PL intensity [arb. units] 700 Wavelength [nm] 650 625 600 5µm 1.80 1.85 1.90 1.95 Energy [ev] 2.00 2.05 1 Nanoscale Systems for Opto-Electronics Lecture 5 Interaction
More informationPhotonic Crystal Slot Waveguide Spectrometer for Detection of Methane
Photonic Crystal Slot Waveguide Spectrometer for Detection of Methane Swapnajit Chakravarty 1, Wei-Cheng Lai 2, Xiaolong (Alan) Wang 1, Che-Yun Lin 2, Ray T. Chen 1,2 1 Omega Optics, 10306 Sausalito Drive,
More informationMonolithically integrated InGaAs nanowires on 3D. structured silicon-on-insulator as a new platform for. full optical links
Monolithically integrated InGaAs nanowires on 3D structured silicon-on-insulator as a new platform for full optical links Hyunseok Kim 1, Alan C. Farrell 1, Pradeep Senanayake 1, Wook-Jae Lee 1,* & Diana.
More informationEnergy beam processing and the drive for ultra precision manufacturing
Energy beam processing and the drive for ultra precision manufacturing An Exploration of Future Manufacturing Technologies in Response to the Increasing Demands and Complexity of Next Generation Smart
More informationRecent Development and Study of Silicon Solid State Photomultiplier (MRS Avalanche Photodetector)
Recent Development and Study of Silicon Solid State Photomultiplier (MRS Avalanche Photodetector) Valeri Saveliev University of Obninsk, Russia Vienna Conference on Instrumentation Vienna, 20 February
More informationSub 300 nm Wavelength III-Nitride Tunnel-Injected Ultraviolet LEDs
Sub 300 nm Wavelength III-Nitride Tunnel-Injected Ultraviolet LEDs Yuewei Zhang, Sriram Krishnamoorthy, Fatih Akyol, Sadia Monika Siddharth Rajan ECE, The Ohio State University Andrew Allerman, Michael
More informationSUPPLEMENTARY INFORMATION
Room-temperature continuous-wave electrically injected InGaN-based laser directly grown on Si Authors: Yi Sun 1,2, Kun Zhou 1, Qian Sun 1 *, Jianping Liu 1, Meixin Feng 1, Zengcheng Li 1, Yu Zhou 1, Liqun
More informationFINDINGS. REU Student: Philip Garcia Graduate Student Mentor: Anabil Chaudhuri Faculty Mentor: Steven R. J. Brueck. Figure 1
FINDINGS REU Student: Philip Garcia Graduate Student Mentor: Anabil Chaudhuri Faculty Mentor: Steven R. J. Brueck A. Results At the Center for High Tech Materials at the University of New Mexico, my work
More informationPhotonics and Optical Communication
Photonics and Optical Communication (Course Number 300352) Spring 2007 Dr. Dietmar Knipp Assistant Professor of Electrical Engineering http://www.faculty.iu-bremen.de/dknipp/ 1 Photonics and Optical Communication
More informationWaveguide Bragg Gratings and Resonators LUMERICAL SOLUTIONS INC
Waveguide Bragg Gratings and Resonators JUNE 2016 1 Outline Introduction Waveguide Bragg gratings Background Simulation challenges and solutions Photolithography simulation Initial design with FDTD Band
More informationPhotolithography I ( Part 1 )
1 Photolithography I ( Part 1 ) Chapter 13 : Semiconductor Manufacturing Technology by M. Quirk & J. Serda Bjørn-Ove Fimland, Department of Electronics and Telecommunication, Norwegian University of Science
More informationGaN-based Schottky diodes for EUV/VUV/UV photodetection
1 GaN-based Schottky diodes for EUV/VUV/UV photodetection F. Shadi Shahedipour-Sandvik College of Nanoscale Science and Engineering University at Albany - SUNY, Albany NY 12203 cnse.albany.edu sshahedipour@uamail.albany.edu
More informationPHGN/CHEN/MLGN 435/535: Interdisciplinary Silicon Processing Laboratory. Simple Si solar Cell!
Where were we? Simple Si solar Cell! Two Levels of Masks - photoresist, alignment Etch and oxidation to isolate thermal oxide, deposited oxide, wet etching, dry etching, isolation schemes Doping - diffusion/ion
More informationLuminous Equivalent of Radiation
Intensity vs λ Luminous Equivalent of Radiation When the spectral power (p(λ) for GaP-ZnO diode has a peak at 0.69µm) is combined with the eye-sensitivity curve a peak response at 0.65µm is obtained with
More informationIntroduction to Optoelectronic Devices
Introduction to Optoelectronic Devices Dr. Jing Bai Assistant Professor Department of Electrical and Computer Engineering University of Minnesota Duluth October 30th, 2012 1 Outline What is the optoelectronics?
More informationResponsivity improvements for a vanadium oxide microbolometer using subwavelength resonant absorbers
Responsivity improvements for a vanadium oxide microbolometer using subwavelength resonant absorbers Evan M. Smith, a,b,* Janardan Nath, a James Ginn, b Robert E. Peale, a David Shelton b a Department
More informationDiscovering Electrical & Computer Engineering. Carmen S. Menoni Professor Week 3 armain.
Discovering Electrical & Computer Engineering Carmen S. Menoni Professor Week 3 http://www.engr.colostate.edu/ece103/semin armain.html TOP TECH 2012 SPECIAL REPORT IEEE SPECTRUM PAGE 28, JANUARY 2012 P.E.
More informationTunable wideband infrared detector array for global space awareness
Tunable wideband infrared detector array for global space awareness Jonathan R. Andrews 1, Sergio R. Restaino 1, Scott W. Teare 2, Sanjay Krishna 3, Mike Lenz 3, J.S. Brown 3, S.J. Lee 3, Christopher C.
More informationTunable Color Filters Based on Metal-Insulator-Metal Resonators
Chapter 6 Tunable Color Filters Based on Metal-Insulator-Metal Resonators 6.1 Introduction In this chapter, we discuss the culmination of Chapters 3, 4, and 5. We report a method for filtering white light
More informationLaser-Produced Sn-plasma for Highvolume Manufacturing EUV Lithography
Panel discussion Laser-Produced Sn-plasma for Highvolume Manufacturing EUV Lithography Akira Endo * Extreme Ultraviolet Lithography System Development Association Gigaphoton Inc * 2008 EUVL Workshop 11
More informationSUPPLEMENTARY INFORMATION
SUPPLEMENTARY INFORMATION doi: 1.138/nphoton.211.25 Efficient Photovoltage Multiplication in Carbon Nanotubes Leijing Yang 1,2,3+, Sheng Wang 1,2+, Qingsheng Zeng, 1,2, Zhiyong Zhang 1,2, Tian Pei 1,2,
More informationINCREASED CELL EFFICIENCY IN InGaAs THIN FILM SOLAR CELLS WITH DIELECTRIC AND METAL BACK REFLECTORS
INCREASED CELL EFFICIENCY IN InGaAs THIN FILM SOLAR CELLS WITH DIELECTRIC AND METAL BACK REFLECTORS Koray Aydin, Marina S. Leite and Harry A. Atwater Thomas J. Watson Laboratories of Applied Physics, California
More informationContact optical nanolithography using nanoscale C-shaped apertures
Contact optical nanolithography using nanoscale C-shaped s Liang Wang, Eric X. Jin, Sreemanth M. Uppuluri, and Xianfan Xu School of Mechanical Engineering, Purdue University, West Lafayette, Indiana 47907
More informationSemiconductor Optical Communication Components and Devices Lecture 18: Introduction to Diode Lasers - I
Semiconductor Optical Communication Components and Devices Lecture 18: Introduction to Diode Lasers - I Prof. Utpal Das Professor, Department of lectrical ngineering, Laser Technology Program, Indian Institute
More informationLITE /LAB /SCAN /INLINE:
Metis Metis LITE /LAB /SCAN/ INLINE Metis LITE /LAB /SCAN /INLINE: Spectral Offline and Inline Measuring System, using Integrating Sphere, for coatings on foils/web and on large size glasses To ensure
More informationNd:YSO resonator array Transmission spectrum (a. u.) Supplementary Figure 1. An array of nano-beam resonators fabricated in Nd:YSO.
a Nd:YSO resonator array µm Transmission spectrum (a. u.) b 4 F3/2-4I9/2 25 2 5 5 875 88 λ(nm) 885 Supplementary Figure. An array of nano-beam resonators fabricated in Nd:YSO. (a) Scanning electron microscope
More informationLithography. 3 rd. lecture: introduction. Prof. Yosi Shacham-Diamand. Fall 2004
Lithography 3 rd lecture: introduction Prof. Yosi Shacham-Diamand Fall 2004 1 List of content Fundamental principles Characteristics parameters Exposure systems 2 Fundamental principles Aerial Image Exposure
More informationSILICON NANOWIRE HYBRID PHOTOVOLTAICS
SILICON NANOWIRE HYBRID PHOTOVOLTAICS Erik C. Garnett, Craig Peters, Mark Brongersma, Yi Cui and Mike McGehee Stanford Univeristy, Department of Materials Science, Stanford, CA, USA ABSTRACT Silicon nanowire
More informationCHAPTER 7. Components of Optical Instruments
CHAPTER 7 Components of Optical Instruments From: Principles of Instrumental Analysis, 6 th Edition, Holler, Skoog and Crouch. CMY 383 Dr Tim Laurens NB Optical in this case refers not only to the visible
More informationLecture 18: Photodetectors
Lecture 18: Photodetectors Contents 1 Introduction 1 2 Photodetector principle 2 3 Photoconductor 4 4 Photodiodes 6 4.1 Heterojunction photodiode.................... 8 4.2 Metal-semiconductor photodiode................
More informationIn their earliest form, bandpass filters
Bandpass Filters Past and Present Bandpass filters are passive optical devices that control the flow of light. They can be used either to isolate certain wavelengths or colors, or to control the wavelengths
More informationHigh Spectral Resolution Plasmonic Color Filters with Subwavelength Dimensions Supplemental Information
High Spectral Resolution Plasmonic Color Filters with Subwavelength Dimensions Supplemental Information Dagny Fleischman 1, Katherine T. Fountaine 2, Colton R. Bukowsky 1, Giulia Tagliabue 1, Luke A. Sweatlock
More informationInfrared frequency selective surfaces: design, fabrication and measurement
Infrared frequency selective surfaces: design, fabrication and measurement Brian Monacelli* a, Jonothan B. Pryor b, Ben A. Munk b, Dale Kotter c, and Glenn D. Boreman a a School of Optics / CREOL & FPCE,
More informationPrecision Cold Ablation Material Processing using High-Power Picosecond Lasers
Annual meeting Burgdorf Precision Cold Ablation Material Processing using High-Power Picosecond Lasers Dr. Kurt Weingarten kw@time-bandwidth.com 26 November 2009 Background of Time-Bandwidth Products First
More informationEfficiency of an Ideal Solar Cell (Henry, C. H. J. Appl. Phys. 51, 4494) No absorption radiative recombination loss Thermalization loss Efficiencies of multi-band-gap Solar Cell (Henry, C. H. J. Appl.
More informationLecture 7. Lithography and Pattern Transfer. Reading: Chapter 7
Lecture 7 Lithography and Pattern Transfer Reading: Chapter 7 Used for Pattern transfer into oxides, metals, semiconductors. 3 types of Photoresists (PR): Lithography and Photoresists 1.) Positive: PR
More informationLow Thermal Resistance Flip-Chip Bonding of 850nm 2-D VCSEL Arrays Capable of 10 Gbit/s/ch Operation
Low Thermal Resistance Flip-Chip Bonding of 85nm -D VCSEL Arrays Capable of 1 Gbit/s/ch Operation Hendrik Roscher In 3, our well established technology of flip-chip mounted -D 85 nm backside-emitting VCSEL
More informationOptical Bus for Intra and Inter-chip Optical Interconnects
Optical Bus for Intra and Inter-chip Optical Interconnects Xiaolong Wang Omega Optics Inc., Austin, TX Ray T. Chen University of Texas at Austin, Austin, TX Outline Perspective of Optical Backplane Bus
More informationSession 2: Silicon and Carbon Photonics (11:00 11:30, Huxley LT311)
Session 2: Silicon and Carbon Photonics (11:00 11:30, Huxley LT311) (invited) Formation and control of silicon nanocrystals by ion-beams for photonic applications M Halsall The University of Manchester,
More informationNanofluidic Diodes based on Nanotube Heterojunctions
Supporting Information Nanofluidic Diodes based on Nanotube Heterojunctions Ruoxue Yan, Wenjie Liang, Rong Fan, Peidong Yang 1 Department of Chemistry, University of California, Berkeley, CA 94720, USA
More informationCHAPTER 2 POLARIZATION SPLITTER- ROTATOR BASED ON A DOUBLE- ETCHED DIRECTIONAL COUPLER
CHAPTER 2 POLARIZATION SPLITTER- ROTATOR BASED ON A DOUBLE- ETCHED DIRECTIONAL COUPLER As we discussed in chapter 1, silicon photonics has received much attention in the last decade. The main reason is
More informationPROJECT. DOCUMENT IDENTIFICATION D2.2 - Report on low cost filter deposition process DISSEMINATION STATUS PUBLIC DUE DATE 30/09/2011 ISSUE 2 PAGES 16
GRANT AGREEMENT NO. ACRONYM TITLE CALL FUNDING SCHEME 248898 PROJECT 2WIDE_SENSE WIDE spectral band & WIDE dynamics multifunctional imaging SENSor ENABLING SAFER CAR TRANSPORTATION FP7-ICT-2009.6.1 STREP
More informationWelcome to. A facility within the Nanometer Structure Consortium (nmc) at Lund University. nanolab. lund
lund nanolab Welcome to A facility within the Nanometer Structure Consortium (nmc) at Lund University »It s a dream come true. This is the lab I always dreamt of. I didn t know it would ever exist.«ivan
More informationTitle detector with operating temperature.
Title Radiation measurements by a detector with operating temperature cryogen Kanno, Ikuo; Yoshihara, Fumiki; Nou Author(s) Osamu; Murase, Yasuhiro; Nakamura, Masaki Citation REVIEW OF SCIENTIFIC INSTRUMENTS
More informationSuper-resolution imaging through a planar silver layer
Super-resolution imaging through a planar silver layer David O. S. Melville and Richard J. Blaikie MacDiarmid Institute for Advanced Materials and Nanotechnology, Department of Electrical and Computer
More informationUltraviolet Visible Infrared Instrumentation
Ultraviolet Visible Infrared Instrumentation Focus our attention on measurements in the UV-vis region of the EM spectrum Good instrumentation available Very widely used techniques Longstanding and proven
More informationNIR SPECTROSCOPY Instruments
What is needed to construct a NIR instrument? NIR SPECTROSCOPY Instruments Umeå 2006-04-10 Bo Karlberg light source dispersive unit (monochromator) detector (Fibres) (bsorbance/reflectance-standard) The
More informationCHIRPED FIBER BRAGG GRATING (CFBG) BY ETCHING TECHNIQUE FOR SIMULTANEOUS TEMPERATURE AND REFRACTIVE INDEX SENSING
CHIRPED FIBER BRAGG GRATING (CFBG) BY ETCHING TECHNIQUE FOR SIMULTANEOUS TEMPERATURE AND REFRACTIVE INDEX SENSING Siti Aisyah bt. Ibrahim and Chong Wu Yi Photonics Research Center Department of Physics,
More informationLight management in photovoltaics using nanotechnology
Light management in photovoltaics using nanotechnology Albert Polman Center for Nanophotonics FOM-Institute AMOLF Amsterdam, The Netherlands Solar irradiance on earth assuming 30% PV, 175 W/m 2 Solar
More informationSupplementary Note 1: Structural control of BCs. The availability of PS spheres in various
Supplementary Note 1: Structural control of BCs. The availability of PS spheres in various sizes (from < 100 nm to > 10 µm) allows us to design synthetic BCs with a broad range of structural geometries.
More informationThe effect of the diameters of the nanowires on the reflection spectrum
The effect of the diameters of the nanowires on the reflection spectrum Bekmurat Dalelkhan Lund University Course: FFF042 Physics of low-dimensional structures and quantum devices 1. Introduction Vertical
More informationMicro- and Nano-Technology... for Optics
Micro- and Nano-Technology...... for Optics 3.2 Lithography U.D. Zeitner Fraunhofer Institut für Angewandte Optik und Feinmechanik Jena Printing on Stones Map of Munich Stone Print Contact Printing light
More informationECSE 6300 IC Fabrication Laboratory Lecture 3 Photolithography. Lecture Outline
ECSE 6300 IC Fabrication Laboratory Lecture 3 Photolithography Prof. James J. Q. Lu Bldg. CII, Rooms 6229 Rensselaer Polytechnic Institute Troy, NY 12180 Tel. (518)276 2909 e mails: luj@rpi.edu http://www.ecse.rpi.edu/courses/s18/ecse
More informationResearch Article Passive Infrared Sensing Using Plasmonic Resonant Dust Particles
Hindawi Publishing Corporation International Journal of Optics Volume 22, Article ID 65563, 8 pages doi:.55/22/65563 Research Article Passive Infrared Sensing Using Plasmonic Resonant Dust Particles Mark
More informationWaveguiding in PMMA photonic crystals
ROMANIAN JOURNAL OF INFORMATION SCIENCE AND TECHNOLOGY Volume 12, Number 3, 2009, 308 316 Waveguiding in PMMA photonic crystals Daniela DRAGOMAN 1, Adrian DINESCU 2, Raluca MÜLLER2, Cristian KUSKO 2, Alex.
More informationA Laser-Based Thin-Film Growth Monitor
TECHNOLOGY by Charles Taylor, Darryl Barlett, Eric Chason, and Jerry Floro A Laser-Based Thin-Film Growth Monitor The Multi-beam Optical Sensor (MOS) was developed jointly by k-space Associates (Ann Arbor,
More informationInstruction manual and data sheet ipca h
1/15 instruction manual ipca-21-05-1000-800-h Instruction manual and data sheet ipca-21-05-1000-800-h Broad area interdigital photoconductive THz antenna with microlens array and hyperhemispherical silicon
More informationPart 5-1: Lithography
Part 5-1: Lithography Yao-Joe Yang 1 Pattern Transfer (Patterning) Types of lithography systems: Optical X-ray electron beam writer (non-traditional, no masks) Two-dimensional pattern transfer: limited
More informationNarrow line diode laser stacks for DPAL pumping
Narrow line diode laser stacks for DPAL pumping Tobias Koenning David Irwin, Dean Stapleton, Rajiv Pandey, Tina Guiney, Steve Patterson DILAS Diode Laser Inc. Joerg Neukum Outline Company overview Standard
More informationSUPPLEMENTARY INFORMATION
Optically reconfigurable metasurfaces and photonic devices based on phase change materials S1: Schematic diagram of the experimental setup. A Ti-Sapphire femtosecond laser (Coherent Chameleon Vision S)
More informationCMOS Digital Integrated Circuits Lec 2 Fabrication of MOSFETs
CMOS Digital Integrated Circuits Lec 2 Fabrication of MOSFETs 1 CMOS Digital Integrated Circuits 3 rd Edition Categories of Materials Materials can be categorized into three main groups regarding their
More information3-5μm F-P Tunable Filter Array based on MEMS technology
Journal of Physics: Conference Series 3-5μm F-P Tunable Filter Array based on MEMS technology To cite this article: Wei Xu et al 2011 J. Phys.: Conf. Ser. 276 012052 View the article online for updates
More informationSolar Thermophotovoltaic Converters: Efficiency Potentialities
Presented at 6 th Conference on Thermophotovoltaic Generation of Electricity, Freiburg, June 2004 Solar Thermophotovoltaic Converters: Efficiency Potentialities V.M.Andreev, V.P.Khvostikov, O.A.Khvostikova,
More informationEE-527: MicroFabrication
EE-57: MicroFabrication Exposure and Imaging Photons white light Hg arc lamp filtered Hg arc lamp excimer laser x-rays from synchrotron Electrons Ions Exposure Sources focused electron beam direct write
More informationLight waves. VCE Physics.com. Light waves - 2
Light waves What is light? The electromagnetic spectrum Waves Wave equations Light as electromagnetic radiation Polarisation Colour Colour addition Colour subtraction Interference & structural colour Light
More informationPrintable Organic Solar Cells Challenges and Opportunities in Technology Transfer from Lab to Market
Power Plastic R Printable Organic Solar Cells Challenges and Opportunities in Technology Transfer from Lab to Market Alan J. Heeger Chief Scientist and Co-Founder 116 John Street, Lowell, MA 01852 Plastic
More informationHorizontal single and multiple slot waveguides: optical transmission at λ = 1550 nm
Horizontal single and multiple slot waveguides: optical transmission at λ = 1550 nm Rong Sun 1 *, Po Dong 2 *, Ning-ning Feng 1, Ching-yin Hong 1, Jurgen Michel 1, Michal Lipson 2, Lionel Kimerling 1 1Department
More informationOptical Requirements
Optical Requirements Transmission vs. Film Thickness A pellicle needs a good light transmission and long term transmission stability. Transmission depends on the film thickness, film material and any anti-reflective
More informationLight, Color, Spectra 05/30/2006. Lecture 17 1
What do we see? Light Our eyes can t t detect intrinsic light from objects (mostly infrared), unless they get red hot The light we see is from the sun or from artificial light When we see objects, we see
More information14.2 Photodiodes 411
14.2 Photodiodes 411 Maximum reverse voltage is specified for Ge and Si photodiodes and photoconductive cells. Exceeding this voltage can cause the breakdown and severe deterioration of the sensor s performance.
More informationSPP waveguide sensors
SPP waveguide sensors 1. Optical sensor - Properties - Surface plasmon resonance sensor - Long-range surface plasmon-polariton sensor 2. LR-SPP waveguide - SPP properties in a waveguide - Asymmetric double-electrode
More informationSupporting Information. High-Resolution Organic Light Emitting Diodes Patterned via Contact Printing
Supporting Information High-Resolution Organic Light Emitting Diodes Patterned via Contact Printing Jinhai Li, Lisong Xu, Ching W. Tang and Alexander A. Shestopalov* Department of Chemical Engineering,
More informationHigh Power RF MEMS Switch Technology
High Power RF MEMS Switch Technology Invited Talk at 2005 SBMO/IEEE MTT-S International Conference on Microwave and Optoelectronics Conference Dr Jia-Sheng Hong Heriot-Watt University Edinburgh U.K. 1
More informationDesign of Sub-Wavelength Color Filters Design and Simulation with the RSoft Tools Synopsys, Inc. 1
Design of Sub-Wavelength Color Filters Design and Simulation with the RSoft Tools 2018 Synopsys, Inc. 1 Outline Introduction Plasmonic color filters Dielectric color filters Related Topics Conclusion 2018
More informationDesign and Fabrication of an Efficient Extreme Ultraviolet Beam Splitter
EUV Beam Splitter 1 Design and Fabrication of an Efficient Extreme Ultraviolet Beam Splitter First Semester Report Full Report By: Andrew Wiley Maram Alfaraj Prepared to partially fulfill the requirements
More informationPerformance Comparison of Top and Bottom Contact Gallium Arsenide (GaAs) Solar Cell
Performance Comparison of Top and Bottom Contact Gallium Arsenide (GaAs) Solar Cell by Naresh C Das ARL-TR-7054 September 2014 Approved for public release; distribution unlimited. NOTICES Disclaimers The
More informationHigh Speed pin Photodetector with Ultra-Wide Spectral Responses
High Speed pin Photodetector with Ultra-Wide Spectral Responses C. Tam, C-J Chiang, M. Cao, M. Chen, M. Wong, A. Vazquez, J. Poon, K. Aihara, A. Chen, J. Frei, C. D. Johns, Ibrahim Kimukin, Achyut K. Dutta
More informationHigh Performance Thin Film Optical Coatings Technical Reference Document 09/13. Coatings Capabilities. Heat Control - Hot Mirror Filters
Heat Control - Hot Mirror Filters A hot mirror is in essence a thin film coating applied to substrates in an effort to reflect infra-red radiation either as a means to harness the reflected wavelengths
More informationDesign and fabrication of indium phosphide air-bridge waveguides with MEMS functionality
Design and fabrication of indium phosphide air-bridge waveguides with MEMS functionality Wing H. Ng* a, Nina Podoliak b, Peter Horak b, Jiang Wu a, Huiyun Liu a, William J. Stewart b, and Anthony J. Kenyon
More informationMICRO AND NANOPROCESSING TECHNOLOGIES
MICRO AND NANOPROCESSING TECHNOLOGIES LECTURE 4 Optical lithography Concepts and processes Lithography systems Fundamental limitations and other issues Photoresists Photolithography process Process parameter
More informationSandia National Laboratories MS 1153, PO 5800, Albuquerque, NM Phone: , Fax: ,
Semiconductor e-h Plasma Lasers* Fred J Zutavern, lbert G. Baca, Weng W. Chow, Michael J. Hafich, Harold P. Hjalmarson, Guillermo M. Loubriel, lan Mar, Martin W. O Malley, G. llen Vawter Sandia National
More informationSupporting Information. Air-stable surface charge transfer doping of MoS 2 by benzyl viologen
Supporting Information Air-stable surface charge transfer doping of MoS 2 by benzyl viologen Daisuke Kiriya,,ǁ, Mahmut Tosun,,ǁ, Peida Zhao,,ǁ, Jeong Seuk Kang, and Ali Javey,,ǁ,* Electrical Engineering
More informationIntroduction Fundamentals of laser Types of lasers Semiconductor lasers
ECE 5368 Introduction Fundamentals of laser Types of lasers Semiconductor lasers Introduction Fundamentals of laser Types of lasers Semiconductor lasers How many types of lasers? Many many depending on
More informationMAGNETO-DIELECTRIC COMPOSITES WITH FREQUENCY SELECTIVE SURFACE LAYERS
MAGNETO-DIELECTRIC COMPOSITES WITH FREQUENCY SELECTIVE SURFACE LAYERS M. Hawley 1, S. Farhat 1, B. Shanker 2, L. Kempel 2 1 Dept. of Chemical Engineering and Materials Science, Michigan State University;
More information