IN SITU BIASING & HEATING SOLUTIONS FOR TEM PLATFORMS

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1 IN SITU BIASING & HEATING SOLUTIONS FOR TEM PLATFORMS Solutions for In Situ Microscopy THE LIGHTNING SERIES LIGHTNING FEATURES Observe the real-time dynamics of materials under electrical and heating stimuli. Extreme Stability. Sub Ångstrom Resolution. Four-Point-Probe Measurements. Double Tilt.

2 IN SITU TEM WORKFLOW TURN YOUR TEM INTO A NANO-LAB PREPARING THE SAMPLES Samples of all sizes from nanowires to lamellas - are prepared directly onto the Nano-Chip using traditional preparation techniques. The Nano-Chip as a functionalized sample carrier has metal electrodes for applying the biasing stimuli and a metal spiral sandwiched between silicon nitride for applying the heating stimuli to the sample. LOADING THE NANO-CHIP After lifting the 4 or 8 biasing/heating needles at the tip of the holder, the Nano-Chip is easily loaded into the sample holder. The needles are lowered onto the metallic contact pads to enable the accurate and reliable biasing/heating experiments. SETTING THE PARAMETERS Once the holder is connected to the biasing power supply and heating control box, the voltage/current can be set and temperature profile programmed for total control during the in situ experiment. RUNNING IN SITU EXPERIMENT Observing the real-time sample dynamics under a controlled electrical and thermal environment at sub-angstrom resolutions enables researchers to understanding the structure-property relationship and identify new characteristics in a wide range of materials. 2 Lightning Series - In Situ Biasing & Heating Solutions for TEM platforms

3 Solutions for In Situ Microscopy In Situ Biasing & Heating Understanding a materials electrical properties and thermal characteristics requires an in-depth knowledge of its structure-property relationship. Observing the dynamic events in a real-world environment is needed to better determine how to improve, manipulate or miniaturize materials within the microelectronics field. The Lightning Series uses the latest in MEMS based technology Nano-Chips - to scale down the experiment to dramatically improve stability and resolution. Enabling biasing and/or heating, researchers can characterize their materials in complete control of each parameter to allow reproducible results. The unique design of Nano-Chips provides the most reliable and precise results during experiments and maintains the full performance of the TEM. I-V Measurement & Characterization Measuring current voltage (I-V) curves while observing the dynamic events in situ, enables researchers to determine the fundamental performance of a large variety of semiconductor materials. I V characterization of materials at elevated temperatures allows researchers to obtain new information about the relationship between the structure and electrical properties, additionally to its temperature dependence. For example, electrical properties of individual nanowires and the direct correlation to structure will open new application space in nanoelectrics, solar cells and phase change memory technology. Structure Response to Electric Field External electric field induces changes in the domain morphology of ferroelectric materials via polarization switching process. Therefore, direct observation of the structural changes during electrical poling will greatly facilitate the understanding of structure-property relationship of these materials. The Lightning Series enables researchers to understand the microstructural origins for electric field induced phenomena in ferroelectric materials, while at an elevated temperature environment. Failure Analysis Real-time monitoring of the dynamic events of semiconductor materials during electrical biasing at elevated temperature is important for determining the cause of failure and what corrective actions can be taken to improve its properties, and related performance. The Lightning Series allows for imaging the moment of morphology change and failure. I-V MEASUREMENTS ON LAMELLAS I-V MEASUREMENTS ON NANOWIRES ELECTRIC FIELD STUDIES 3

4 Real-Time Dynamics The Lightning Series for in situ basing & heating TEM provides you the power to obtain real-time information about your specimen under a controllable electrical and thermal environment. Investigate the next generation materials with the Lightning Series in order to obtain an indepth knowledge of the structure-property relationship. Key Features of the Lightning Series In situ biasing & heating Capture the real-time dynamics Maintain full TEM performance Control the electrical and thermal environment of your specimen. Analyze the real-time structural evolution of your specimen. Maintain sub-angstrom resolution and obtain quantitative data. Characterize your specimen Fast response time Understand your material Measure the electrical properties of your material and investigate its temperature dependence. Using Nano-Chip technology researchers can obtain instant and controllable response. Discover the relationship between the microstructure, electrical and thermal properties. Complete 'Plug & Play' Package 1. Nano-Chips 2. Lightning holder 3. Holder stand 4. Heating control unit Source measurement unit (Keithley) 6. Laptop with Digiheater software 7 7. Interconnect box Lightning Series - In Situ Biasing & Heating Solutions for TEM platforms

5 Solutions for In Situ Microscopy Nano-Chip Technology The Lightning Nano-Chip is a functional consumable sample carrier that scales down the stimuli environment to the sample size required for biasing/heating. This provides researchers with ability to control the environment with extreme precision around the specimen with fast response and reduced specimen drift. Eight electrical contacts (Lightning D9+) provide an unrivalled solution for scientists, enabling reliable electrical characterization of a wide range of materials at temperatures up to 800 C. Key Features of the Lightning Nano-Chips Optimal stability High resolution Reliable output Unique design for stable, chemically inert and controllable environment. Achieve sub-angstrom resolution under induced stimuli. Four point probe ensures high accuracy. High sensitivity Fast response time Long life-time Detect current in a pa range for maximum control. Metal materials allow instant and controllable response. > 90 hours at elevated temperatures with simultaneous biasing. Lightning Nano-Chip Specifications Control Method 4 or 8 electrical contacts Dedicated Heating Max. Temperature 1300 C Heating & Biasing Max. Temperature 800 C Electric Field DC Measurements AC Measurements Minimum Detectable Current Resolution E-Field experiments I-V measurements on nanowires I-V measurements on FIB lamellas 100 kv/cm 100 V Hz pa range 0.6 Å * Specifications may vary due to experimental parameters. 5

6 Application Fields Ferroelectric Materials Research Studying of Mechanical Fatigue I-V Characterisation of Nanomaterials Low-dimensional Materials Research Resistance Switching Process of the ReRAM Materials Failure Analysis Application Examples 1. In situ TEM Characterization of Electrical Properties of Semiconductor Nanowires In current example, by means of in situ TEM authors monitored a breakdown process of InAs nanowires induced by increased current. It was proposed that breakdown mechanism is based on electromigration of In leading nanowire breakage near the cathode side. Zhang, C., et al. (2015). "In situ electrical characterization of tapered InAs nanowires in a transmission electron microscope with ohmic contacts." Nanotechnology 26(15): In Situ Material Transport during Electromigration The reversible electromigration in Pd Pt nanobridges was investigated by in situ TEM. During electromigration, voids formation occurred at the cathode side with increasing the voltage. Changing the current direction caused the voids to refill and even hillocks to grow on the former cathode side. Kozlova, T., et al. (2013). "In situ TEM and STEM studies of reversible electromigration in thin palladium platinum bridges." Nanotechnology 24(50): Lightning Series - In Situ Biasing & Heating Solutions for TEM platforms

7 Solutions for In Situ Microscopy Performance Specifications FEI COMPATIBLE JEOL COMPATIBLE Stimuli Heating or Biasing Heating or Biasing Heating and Biasing Electrical contacts Four Four Eight Alpha tilt ± 25 Beta tilt ± 25 HRP: ± 20 URP: ± 15 HRP: ± 15 URP: ± 15 HRP: ± 20 URP: ± 8 HRP: ± 15 URP: ± 15 Compatibility (PP) ST, XT, T, BioT UHP, HRP, HTP, CRP, HCP Tilt control From microscope From additional beta control unit High Resolution TEM (HR) STEM + EELS/EDX Environmental TEM Tomography EFTEM * Specifications are dependent on microscope and sample quality, listed as maximum possibility. 7

8 Visit our website For more information, visit Request a quote your details to Quote@DENSsolutions.com Main Office DENSsolutions Informaticalaan ZD Delft The Netherlands info@denssolutions.com Distributors Austria LOT-QuantumDesign GmbH lotqd_de@denssolutions.com Argentina Canada Angstrom Scientific, Inc. angstromscientific@denssolutions.com Chile China North KYKY Technology Co., Ltd kyky@denssolutions.com China South DENS ALTA Technologies Ltd. DENSalta@DENSsolutions.com Colombia Ecuador France LOT-QuantumDesign lotqd_fr@denssolutions.com Germany LOT-QuantumDesign GmbH lotqd_de@denssolutions.com Israel Eisenberg Bros. Ltd eisenbergbros@denssolutions.com Japan TSL Solutions tsljapan@denssolutions.com Mexico Nordic countries BoRAS boras@denssolutions.com Peru Russia & CIS Systems for microscopy and analysis cma@denssolutions.com South-Korea NAMOTEC namotec@denssolutions.com Switzerland LOT-QuantumDesign GmbH lotqd_de@denssolutions.com Taiwan DENS ALTA Technologies Ltd. DENSalta@DENSsolutions.com United Kingdom and Ireland LOT-QuantumDesign UK lotqd_uk@denssolutions.com United States of America Angstrom Scientific, Inc. angstromscientific@denssolutions.com Other countries DENSsolutions info@denssolutions.com Australia AXT Pty Ltd info@axt.com.au Copyright 2015 DENSsolutions B.V. All rights reserved. Unless otherwise indicated, all materials on these pages are copyrighted by DENSsolutions B.V. All rights reserved. No part of these pages, either text or image may be used for any purpose other than personal use. Therefore, reproduction, modification, storage in a retrieval system or retransmission, in any form or by any means, electronic, mechanical or otherwise, for reasons other than personal use, is strictly prohibited without prior written permission.

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